JPH04266938A - Part for vehicle - Google Patents
Part for vehicleInfo
- Publication number
- JPH04266938A JPH04266938A JP3049082A JP4908291A JPH04266938A JP H04266938 A JPH04266938 A JP H04266938A JP 3049082 A JP3049082 A JP 3049082A JP 4908291 A JP4908291 A JP 4908291A JP H04266938 A JPH04266938 A JP H04266938A
- Authority
- JP
- Japan
- Prior art keywords
- plastic molded
- molded article
- plastic
- film
- chemically adsorbed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920003023 plastic Polymers 0.000 claims abstract description 44
- 239000004033 plastic Substances 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 abstract description 8
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 5
- 239000001301 oxygen Substances 0.000 abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 abstract description 5
- 238000009832 plasma treatment Methods 0.000 abstract description 4
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 3
- JNEGECSXOURYNI-UHFFFAOYSA-N trichloro(1,1,2,2,3,3,4,4,5,5,6,6,7,7,10,10,10-heptadecafluorodecyl)silane Chemical compound FC(F)(F)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)[Si](Cl)(Cl)Cl JNEGECSXOURYNI-UHFFFAOYSA-N 0.000 abstract description 3
- 125000003709 fluoroalkyl group Chemical group 0.000 abstract 2
- 239000010408 film Substances 0.000 description 34
- 239000004094 surface-active agent Substances 0.000 description 10
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 9
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 239000005046 Chlorosilane Substances 0.000 description 7
- -1 polybutylene terephthalate Polymers 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- FRCHKSNAZZFGCA-UHFFFAOYSA-N 1,1-dichloro-1-fluoroethane Chemical compound CC(F)(Cl)Cl FRCHKSNAZZFGCA-UHFFFAOYSA-N 0.000 description 5
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 5
- 230000001012 protector Effects 0.000 description 5
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 5
- 150000002430 hydrocarbons Chemical group 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 229930182556 Polyacetal Natural products 0.000 description 3
- 230000003373 anti-fouling effect Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000113 methacrylic resin Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229920001230 polyarylate Polymers 0.000 description 3
- 229920006324 polyoxymethylene Polymers 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000003125 aqueous solvent Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- MHDVGSVTJDSBDK-UHFFFAOYSA-N dibenzyl ether Chemical compound C=1C=CC=CC=1COCC1=CC=CC=C1 MHDVGSVTJDSBDK-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920003192 poly(bis maleimide) Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920006380 polyphenylene oxide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 229920006337 unsaturated polyester resin Polymers 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 description 1
- COAUHYBSXMIJDK-UHFFFAOYSA-N 3,3-dichloro-1,1,1,2,2-pentafluoropropane Chemical compound FC(F)(F)C(F)(F)C(Cl)Cl COAUHYBSXMIJDK-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 1
- 229910003822 SiHCl3 Inorganic materials 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- QHIWVLPBUQWDMQ-UHFFFAOYSA-N butyl prop-2-enoate;methyl 2-methylprop-2-enoate;prop-2-enoic acid Chemical compound OC(=O)C=C.COC(=O)C(C)=C.CCCCOC(=O)C=C QHIWVLPBUQWDMQ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical class Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 229940093499 ethyl acetate Drugs 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002828 fuel tank Substances 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 1
- 229940011051 isopropyl acetate Drugs 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011356 non-aqueous organic solvent Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は乗り物用部品に用いられ
るプラスチック成形品の表面改質に関する。とくに防汚
性に優れたプラスチック製乗り物用部品に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to surface modification of plastic molded articles used for vehicle parts. In particular, it relates to plastic vehicle parts with excellent stain resistance.
【0002】0002
【従来の技術】従来、乗り物用部品には成形性、機械特
性のすぐれたABS樹脂、塩化ビニル樹脂、メラミン樹
脂、スチレン樹脂、アクリル樹脂、AS樹脂、ナイロン
(ポリアミド)樹脂、飽和ポリエステル樹脂、不飽和ポ
リエステル樹脂、ポリアセタール樹脂、ポリカーボネー
ト樹脂、ポリアリレート樹脂などのプラスチック成形品
等が用いられている。一例を挙げると、プラスチック成
形品の中で、ABS樹脂は乗り物部品のランプカバー、
インストルメントパネル、オートバイのプロテクターに
、セルロースプラスチックは自動車のマーク、ハンドル
に、FRP(繊維強化樹脂)は外板バンパー、エンジン
カバーに、フェノール樹脂はブレーキに、ポリアセター
ルはワイパーギヤ、ガスバルブ、キャブレター部品に、
ポリアミドはラジエータファンに、ポリアリレートは方
向指示レンズ、計器板レンズ、リレーハウジングに、ポ
リブチレンテレフタレートはリヤエンド、フロントフェ
ンダに、ポリアミノビスマレイミドはエンジン部品、ギ
ヤボックス、ホイール、サスペンジョンドライブシステ
ムに、メタクリル樹脂はランプカバーレンズ、計器板と
カバー、センターマークに、ポリプロピレンはバンパー
に、ポリフェニレンオキシドはラジエーターグリル、ホ
イールキャップに、ポリウレタンはバンパー、フェンダ
ー、インストルメントパネル、ファンに、不飽和ポリエ
ステル樹脂はボディ、燃料タンク、ヒーターハウジング
、計器板などに利用されている。[Prior Art] Conventionally, vehicle parts have been manufactured using ABS resins, vinyl chloride resins, melamine resins, styrene resins, acrylic resins, AS resins, nylon (polyamide) resins, saturated polyester resins, and non-plastic resins that have excellent moldability and mechanical properties. Plastic molded products such as saturated polyester resin, polyacetal resin, polycarbonate resin, and polyarylate resin are used. For example, among plastic molded products, ABS resin is used in lamp covers for vehicle parts,
For instrument panels and motorcycle protectors, cellulose plastic for car marks and handles, FRP (fiber reinforced resin) for outer bumpers and engine covers, phenolic resin for brakes, and polyacetal for wiper gears, gas valves, and carburetor parts. ,
Polyamide is used in radiator fans, polyarylate is used in directional lenses, instrument panel lenses, and relay housings, polybutylene terephthalate is used in rear ends and front fenders, polyamino bismaleimide is used in engine parts, gearboxes, wheels, and suspension drive systems, and methacrylic resin is used in radiator fans. is used for lamp cover lenses, instrument panels and covers, and center markings; polypropylene is used for bumpers; polyphenylene oxide is used for radiator grilles and hubcaps; polyurethane is used for bumpers, fenders, instrument panels, and fans; unsaturated polyester resin is used for bodies, and fuel. Used for tanks, heater housings, instrument panels, etc.
【0003】0003
【発明が解決しようとする課題】しかしながら上記のプ
ラスチック成形品は、たとえばポリテトラフロロエチレ
ンなどのフッ素樹脂に比べて防汚性が劣るという課題が
ある。また、フッ素樹脂は、防汚性には優れるものの、
機械特性があまり高くなく、かつ高価であるという課題
がある。[Problems to be Solved by the Invention] However, the above-mentioned plastic molded products have a problem in that they have inferior stain resistance compared to, for example, fluororesins such as polytetrafluoroethylene. In addition, although fluororesin has excellent stain resistance,
There are problems in that the mechanical properties are not very high and it is expensive.
【0004】本発明は、従来の欠点に鑑みなされたもの
で、防汚性に優れ、かつプラスチック基材の機械的強度
などの特性をそのまま生きかすことができ、しかも安価
なプラスチック成形品を用いた乗り物用部品を提供する
ことを目的とする。The present invention was developed in view of the conventional drawbacks, and it is possible to use inexpensive plastic molded products that have excellent antifouling properties and can take advantage of the mechanical strength and other properties of plastic base materials. The purpose of the company is to provide vehicle parts that are of high quality.
【0005】[0005]
【課題を解決するための手段】前記目的を達成するため
、本発明の乗り物用部品は、プラスチック製乗り物用部
品であって、プラスチック成形品基材表面にシロキサン
結合を介してフッ化アルキル基を含有する化学吸着膜が
設けられたプラスチック成形品を用いたことを特徴とす
る。[Means for Solving the Problems] In order to achieve the above object, the vehicle part of the present invention is a plastic vehicle part in which a fluorinated alkyl group is added to the surface of a base material of a plastic molded product through a siloxane bond. It is characterized by using a plastic molded article provided with a chemically adsorbed film containing the same.
【0006】前記構成においては、化学吸着膜は単分子
膜であることが好ましい。[0006] In the above structure, it is preferable that the chemisorption film is a monomolecular film.
【0007】[0007]
【作用】前記本発明の構成によれば、プラスチック成形
品基材表面にシロキサン結合を介してフッ化アルキル基
を含有する化学吸着膜が設けられているので、防汚性に
優れ、かつプラスチック基材の機械的強度などの特性を
そのまま生きかすことができ、しかも安価なプラスチッ
ク成形品を用いた乗り物用部品とすることができる。す
なわち、前記化学吸着膜の表層にはフッ化アルキル基が
存在するから、防汚性に優れたものとなる。また、前記
化学吸着膜の基部は、シロキサン結合を介して化学結合
して形成されているので、耐久性に優れた膜とすること
ができ、表面を繰り返し洗浄しても前記化学吸着膜はプ
ラスチック表面から容易には剥離しない。さらに、本発
明の化学吸着膜は、ナノメーター乃至オングストローム
単位の極薄い膜であるので、プラスチック基材の機械的
強度などの特性を損ねることがない。[Function] According to the structure of the present invention, since the chemically adsorbed film containing fluorinated alkyl groups is provided on the surface of the plastic molded product base material through siloxane bonds, it has excellent stain resistance and the plastic base material It is possible to take advantage of the mechanical strength and other properties of the material, and it is also possible to make vehicle parts using inexpensive plastic molded products. That is, since the fluorinated alkyl group is present in the surface layer of the chemisorption membrane, it has excellent antifouling properties. In addition, since the base of the chemisorption film is formed by chemical bonding through siloxane bonds, the film can be made with excellent durability, and even if the surface is repeatedly washed, the chemisorption film will remain plastic. Does not peel off easily from the surface. Furthermore, since the chemisorption film of the present invention is an extremely thin film on the order of nanometers or angstroms, it does not impair properties such as mechanical strength of the plastic substrate.
【0008】また、化学吸着膜は単分子膜であるという
本発明の好ましい構成によれば、均一な厚さの薄い膜と
することができるので、透明性に優れ、基材の美観を損
ねることがない。[0008] Furthermore, according to the preferred configuration of the present invention in which the chemisorption film is a monomolecular film, it is possible to form a thin film with a uniform thickness, which has excellent transparency and does not impair the aesthetic appearance of the base material. There is no.
【0009】[0009]
【実施例】本発明の乗り物用部品は図1に示すように、
プラスチック1の表面にシロキサン結合2を介して、フ
ッ化アルキル基を含有する単分子膜3が形成されたプラ
スチック成形品を用いる。[Example] The vehicle parts of the present invention are as shown in FIG.
A plastic molded article is used in which a monomolecular film 3 containing a fluorinated alkyl group is formed on the surface of a plastic 1 via siloxane bonds 2.
【0010】本発明の自動車部品用いるプラスチック成
形品表面に設けられる化学吸着膜はフッ化アルキル基を
有するクロロシラン系界面活性剤を用いて形成すること
が好ましい。[0010] The chemical adsorption film provided on the surface of the plastic molded product used in the automobile parts of the present invention is preferably formed using a chlorosilane surfactant having a fluorinated alkyl group.
【0011】フッ化アルキル基を有するクロロシラン系
界面活性剤としては、例えばCF3 (CF2 )7
(CF2 )2 SiCl3 ,CF3 CH2 O(
CH2 )15SiCl3 ,CF3 (CH2 )2
Si(CH3 )2 (CH2)15SiCl3 ,
F(CF2 )4 (CH2 )2 Si(CH3 )
2 (CH2 )9 SiCl3 ,F(CF2 )8
(CH2 )2 Si(CH3 )2 (CH2 )
9 SiCl3 ,CF3 COO(CH2 )15S
iCl3 ,CF3 (CF2 )5 (CH2 )2
SiCl3 などのようなトリクロロシラン系界面活
性剤をはじめ、例えばCF3 (CF2 )7 (CH
2 )2 SiCln (CH3 )3−n ,CF3
(CF2 )7 (CH2 )2 SiCln (C
2 H5 )3−n ,CF3 CH2O(CH2 )
15SiCln (CH3 )3−n ,CF3 CH
2O(CH2 )15SiCln (C2 H5 )3
−n ,CF3 (CH2 )2 Si(CH3 )2
(CH2 )15SiCln (CH3 )3−n
,F(CF2 )4 (CH2 )2 Si(CH3
)2 (CH2 )9 SiCln (C2 H5 )
3−n ,F(CF2 )8 (CH2 )2 Si(
CH3 )2 (CH2 )9 SiCln (CH3
)3−n ,CF3 COO(CH2 )15SiC
ln (CH3 )3−n ,CF3 (CF2 )5
(CH2 )2 SiCln (CH3 )3−n
(但し式中のnは何れも1又は2)等のような低級アル
キル基置換のモノクロロシラン系あるいはジクロロシラ
ン系界面活性剤が挙げられる。これらの中でも特にトリ
クロロシラン系界面活性剤の親水性基と結合したクロロ
シリル結合以外のクロロシリル結合が、隣合うクロロシ
ラン基とシロキサン結合で分子間結合を形成するため、
より強固な化学吸着膜となることから好ましい。また、
CF3 (CF2 )n CH2 CH2 SiCl3
(但し式中のnは整数であり、3〜25程度が最も扱
いやすい)が、溶剤溶解性、化学吸着性と溌水・防汚性
等の機能性との釣合が取れているため好ましい。さらに
また、フッ化アルキル鎖部分にエチレン基やアセチレン
基を組み込んでおけば、化学吸着膜形成後5メガラド程
度の電子線照射で架橋できるのでさらに化学吸着膜自体
の硬度を向上させることも可能である。Examples of the chlorosilane surfactant having a fluorinated alkyl group include CF3 (CF2)7
(CF2)2SiCl3,CF3CH2O(
CH2)15SiCl3,CF3(CH2)2
Si(CH3)2(CH2)15SiCl3,
F(CF2)4(CH2)2Si(CH3)
2 (CH2)9 SiCl3,F(CF2)8
(CH2)2 Si(CH3)2 (CH2)
9 SiCl3, CF3 COO(CH2)15S
iCl3, CF3 (CF2)5 (CH2)2
Including trichlorosilane surfactants such as SiCl3, for example, CF3 (CF2)7 (CH
2)2SiCln(CH3)3-n,CF3
(CF2)7 (CH2)2 SiCln (C
2H5)3-n, CF3CH2O(CH2)
15SiCln (CH3)3-n, CF3CH
2O(CH2)15SiCln(C2H5)3
-n, CF3 (CH2)2 Si(CH3)2
(CH2)15SiCln (CH3)3-n
,F(CF2)4(CH2)2Si(CH3
)2 (CH2)9 SiCln (C2 H5)
3-n,F(CF2)8(CH2)2Si(
CH3 )2 (CH2 )9 SiCln (CH3
)3-n,CF3COO(CH2)15SiC
ln (CH3)3-n, CF3 (CF2)5
(CH2)2SiCln (CH3)3-n
Examples include lower alkyl group-substituted monochlorosilane or dichlorosilane surfactants such as (where n in the formula is either 1 or 2). Among these, in particular, chlorosilyl bonds other than the chlorosilyl bond bonded to the hydrophilic group of the trichlorosilane surfactant form intermolecular bonds with adjacent chlorosilane groups and siloxane bonds.
This is preferable because it results in a stronger chemisorption film. Also,
CF3 (CF2)n CH2 CH2 SiCl3
(However, n in the formula is an integer, and 3 to 25 is easiest to handle) is preferable because it has a good balance between solvent solubility, chemical adsorption, and functionality such as water repellency and stain resistance. . Furthermore, if an ethylene group or acetylene group is incorporated into the fluorinated alkyl chain portion, the hardness of the chemisorption film itself can be further improved since it can be crosslinked by electron beam irradiation of about 5 megarads after formation of the chemisorption film. be.
【0012】本発明に使用できるクロロシラン系界面活
性剤は、上述に例示したように直鎖状だけではなく、フ
ッ化アルキル基又は炭化水素基が分岐した形状でも、又
は末端の珪素にフッ化アルキル基もしくは炭化水素基が
置換した形状(即ちR、R1 、R2 、R3 をフッ
化アルキル基又は炭化水素基として一般式R2 SiC
l2 、R3 SiCl、R1 R2 SiCl2 も
しくはR1 R2 R3 SiCl等)であってもよい
が、吸着密度を高めるためには一般には直鎖状が好まし
い。さらに、例えば、SiCl4 、SiHCl3 、
SiH2 Cl2 、Cl−(SiCl2 O)n −
SiCl3 (但し式中nは自然数)、SiClm (
CH3 )4−m 、SiClm (C2 H5 )4
−m (但し式中mは1〜3の整数)、HSiCll
(CH3 )3−l 、HSiCll (C2 H5
)3−l (但し式中lは1又は2)等のようなクロロ
シリル結合を複数個含む物質を化学吸着させた後水と反
応すると、表面のクロロシリル結合が親水性のシラノー
ル結合に変わり、プラスチック成形品表面が親水性とな
る。なお、このクロロシリル基を複数個含む物質の中で
も、テトラクロロシラン(SiCl4 )は反応性が高
く分子量も小さいためより高密度にシラノール結合を付
与できるため好ましい。
このようにして親水性化すると、高分子を含む基体の基
体の酸化処理よりも親水性をより高くすることができる
。この上に例えばフッ化アルキル基を含むクロロシラン
系界面活性剤を化学吸着でき、このようにして得た化学
吸着膜はより高密度化されるため、撥水性、防汚性等の
機能がより高められる。The chlorosilane surfactant that can be used in the present invention is not only linear as exemplified above, but also has a branched form with a fluorinated alkyl group or a hydrocarbon group, or has a fluorinated alkyl group on the terminal silicon. or a hydrocarbon group (i.e., R, R1, R2, R3 are fluorinated alkyl groups or hydrocarbon groups, and the general formula R2 SiC
12 , R3 SiCl, R1 R2 SiCl2 or R1 R2 R3 SiCl, etc.), but in order to increase the adsorption density, a linear shape is generally preferred. Furthermore, for example, SiCl4, SiHCl3,
SiH2Cl2, Cl-(SiCl2O)n-
SiCl3 (where n is a natural number in the formula), SiClm (
CH3)4-m, SiClm(C2H5)4
-m (where m is an integer from 1 to 3), HSiCll
(CH3)3-l, HSiCl(C2H5
)3-l (where l in the formula is 1 or 2) When a substance containing multiple chlorosilyl bonds is chemically adsorbed and then reacted with water, the chlorosilyl bonds on the surface change to hydrophilic silanol bonds, forming a plastic. The surface of the molded product becomes hydrophilic. Among these substances containing a plurality of chlorosilyl groups, tetrachlorosilane (SiCl4) is preferable because it has high reactivity and a small molecular weight, so that silanol bonds can be provided at a higher density. By making the substrate hydrophilic in this manner, the hydrophilicity can be made higher than when the substrate containing a polymer is oxidized. For example, a chlorosilane surfactant containing a fluorinated alkyl group can be chemically adsorbed onto this, and the chemically adsorbed film obtained in this way has a higher density, so it has higher functions such as water repellency and stain resistance. It will be done.
【0013】本発明の乗り物用部品に用いられるプラス
チック成形品表面にシロキサン結合を介してフッ化アル
キル基を含有する化学吸着膜を形成する方法は、プラス
チック成形品表面を酸化処理して親水性にする工程と、
酸化処理した表面を非水系の有機溶媒に浸漬等により接
触させて、基材の表面にクロロシラン系界面活性剤を化
学吸着させ、シロキサン結合を介してフッ化アルキル基
を含有する化学吸着膜を形成する工程を含むことが好ま
しい。The method for forming a chemically adsorbed film containing a fluorinated alkyl group via siloxane bonds on the surface of a plastic molded product used in vehicle parts of the present invention involves oxidizing the surface of the plastic molded product to make it hydrophilic. The process of
The oxidized surface is brought into contact with a non-aqueous organic solvent by immersion, etc., and the chlorosilane surfactant is chemically adsorbed onto the surface of the base material, forming a chemically adsorbed film containing fluorinated alkyl groups via siloxane bonds. It is preferable to include a step of.
【0014】プラスチック成形品表面を酸化処理する方
法としては、例えば酸素プラズマ処理、コロナ処理、も
しくは濃硫酸と重クロム酸カリウムの混合溶液に浸漬す
る方法(クロム混酸液処理)等通常の手法が適用される
。[0014] As a method for oxidizing the surface of a plastic molded product, ordinary methods such as oxygen plasma treatment, corona treatment, or immersion in a mixed solution of concentrated sulfuric acid and potassium dichromate (chromium mixed acid solution treatment) can be applied. be done.
【0015】本発明の乗り物用部品に用いるプラスチッ
ク成形品表面に化学吸着膜を形成する時に用いる非水系
溶媒は、化学吸着膜を形成するプラスチック成形品を溶
解せず、かつクロロシラン系界面活性剤と反応する活性
水素を持たない有機溶媒であればよい。その例として例
えば1,1−ジクロロ,1−フルオロエタン、1,1−
ジクロロ,2、2、2−トリフルオロエタン、1,1−
ジクロロ,2,2,3,3,3−ペンタフルオロプロパ
ン、1,3−ジクロロ,1,1,2,2,3−ヘプタフ
ルオロプロパン等のフッ素系溶媒、例えばヘキサン、オ
クタン、ヘキサデカン、シクロヘキサン等の炭化水素系
溶媒、例えばジブチルエーテル、ジベンジルエーテル等
のエーテル系溶媒、例えば酢酸メチル、酢酸エチル、酢
酸イソプロピル、酢酸アミル等エステル系溶媒の何れか
が好ましい。[0015] The non-aqueous solvent used to form a chemically adsorbed film on the surface of a plastic molded product used in the vehicle parts of the present invention does not dissolve the plastic molded product forming the chemically adsorbed film and is compatible with the chlorosilane surfactant. Any organic solvent may be used as long as it does not have active hydrogen to react with. Examples include 1,1-dichloro,1-fluoroethane, 1,1-
dichloro, 2,2,2-trifluoroethane, 1,1-
Fluorine solvents such as dichloro, 2,2,3,3,3-pentafluoropropane, 1,3-dichloro, 1,1,2,2,3-heptafluoropropane, such as hexane, octane, hexadecane, cyclohexane, etc. Hydrocarbon solvents such as ether solvents such as dibutyl ether and dibenzyl ether, and ester solvents such as methyl acetate, ethyl acetate, isopropyl acetate and amyl acetate are preferred.
【0016】また、本発明の自動車部品に用いられるプ
ラスチック成形品表面に形成される化学吸着膜は、単分
子化学吸着膜一層だけでも充分に機能が発揮される。単
分子化学吸着膜を一層だけ形成するには、クロロシラン
系界面活性剤又はクロロシリル基を複数個含む物質を化
学吸着した後、水分に接触させないで非水系の溶剤で洗
浄するだけでよく、特別な工程を要しなく簡便に行える
。また、化学吸着膜は単分子膜が累積していても良いこ
と勿論である。このように、化学吸着膜が単分子膜を形
成すると、付与された機能性を示す基が配向し、密度も
向上するためより高機能を発揮できる。Further, the chemically adsorbed film formed on the surface of the plastic molded product used in the automobile parts of the present invention can sufficiently function with just one layer of monomolecular chemically adsorbed film. To form only one layer of monomolecular chemisorption film, all that is required is to chemically adsorb a chlorosilane surfactant or a substance containing multiple chlorosilyl groups and then wash it with a non-aqueous solvent without contacting it with water. It can be easily performed without requiring any steps. Furthermore, it goes without saying that the chemically adsorbed film may be an accumulation of monomolecular films. In this way, when the chemically adsorbed film forms a monomolecular film, the groups exhibiting the imparted functionality are oriented, and the density is also improved, so that higher functionality can be exhibited.
【0017】次に具体的実施例を用いて本発明を説明す
る。Next, the present invention will be explained using specific examples.
【0018】実施例1
オ−トバイのプロテクター用ABS樹脂成形品を、UV
ドライ・ストリッパー中で10分間、酸素プラズマ処理
して(酸素流量:1l/min)表面を酸化処理した後
、ヘプタデカフルオロデシルトリクロロシランの10−
2mol/lシクロヘキサン溶液に室温、窒素雰囲気下
で60分間浸漬し、引き続いて未反応のヘプタデカフル
オロデシルトリクロロシランをシクロヘキサンで洗浄し
て、しかる後純水で洗浄し、フッ化アルキル基を含むシ
ロキサン結合を介した化学吸着単分子膜をABS樹脂成
形品表面に形成した。Example 1 An ABS resin molded product for a motorcycle protector was treated with UV light.
After oxidizing the surface by oxygen plasma treatment for 10 minutes in a dry stripper (oxygen flow rate: 1 l/min), the 10-
It was immersed in a 2 mol/l cyclohexane solution at room temperature under a nitrogen atmosphere for 60 minutes, and then unreacted heptadecafluorodecyltrichlorosilane was washed with cyclohexane, and then washed with pure water to remove the siloxane containing a fluorinated alkyl group. A chemically adsorbed monomolecular film was formed on the surface of an ABS resin molded product through bonding.
【0019】実施例2
実施例1のオ−トバイのプロテクター用ABS樹脂成形
品をランプカバーレンズ用メタクリル樹脂成形品に、シ
クロヘキサンを1,1−ジクロロ,1−フルオロエタン
に代えて実施例1と同様の実験をした。Example 2 The ABS resin molded product for a motorcycle protector in Example 1 was replaced with a methacrylic resin molded product for a lamp cover lens, and cyclohexane was replaced with 1,1-dichloro,1-fluoroethane. I did a similar experiment.
【0020】実施例3
実施例1のオ−トバイのプロテクター用ABS樹脂成形
品をバンパー用ウレタン成形品に代え、酸素プラズマ処
理した後、まず1wt%のテトラクロロシラン溶液(溶
媒:1,1−ジクロロ,1−フルオロエタン)に窒素雰
囲気下室温で60分間浸漬し、引き続いて未反応のテト
ラクロロシランを1,1−ジクロロ,1−フルオロエタ
ンで洗浄して、しかる後純水で洗浄し、乾燥した試料を
用いてシクロヘキサンを1,1−ジクロロ,1−フルオ
ロエタンに代えて、実施例1と同様の実験をした。Example 3 The ABS resin molded product for a motorcycle protector in Example 1 was replaced with a urethane molded product for a bumper, and after oxygen plasma treatment, a 1 wt % tetrachlorosilane solution (solvent: 1,1-dichloro , 1-fluoroethane) for 60 minutes at room temperature under a nitrogen atmosphere, and subsequently unreacted tetrachlorosilane was washed with 1,1-dichloro,1-fluoroethane, then with pure water, and dried. An experiment similar to Example 1 was conducted using a sample and replacing cyclohexane with 1,1-dichloro,1-fluoroethane.
【0021】実施例1〜3の成形品を実際の乗り物に組
み込んで1ケ月間屋外に放置した。比較例として、化学
吸着膜を形成していない成形品を使用した。1ケ月後、
両者の汚れぐあいを比べてみた。The molded products of Examples 1 to 3 were assembled into actual vehicles and left outdoors for one month. As a comparative example, a molded product on which no chemically adsorbed film was formed was used. One month later,
I compared the dirtiness of the two.
【0022】比較例では、土ぼこりが成形品の表面にこ
びりついており、しかも水をかけただけでは、汚れは落
ちなかった。それに対して、実施例では、ほとんど汚れ
ていなかった。また、少しの汚れていた部分も水をかけ
ただけで、もとの輝きを取り戻した。[0022] In the comparative example, dirt was stuck to the surface of the molded product, and the dirt could not be removed just by sprinkling water on it. On the other hand, in the example, there was almost no dirt. Also, just by sprinkling some water on the slightly dirty areas, they regained their original shine.
【0023】以上の結果から明らかなように、比較例の
乗り物用部品では、プラスチック成形品部分の撥水性・
防汚性が悪いので汚れがひどかったが、本発明の乗り物
用部品ではほとんど汚れがつかなかった。As is clear from the above results, in the vehicle parts of the comparative example, the water repellency and
The vehicle parts of the present invention were hardly stained due to poor stain resistance.
【0024】本発明は、一例として下記のような乗り物
部品に使用できる。
(1) ABS樹脂:ランプカバー、インストルメント
パネル、内装部品、オートバイのプロテクター(2)
セルロースプラスチック:自動車のマーク、ハンドル
(3) FRP(繊維強化樹脂):外板バンパー、エン
ジンカバー
(4) フェノール樹脂:ブレーキ
(5) ポリアセタール:ワイパーギヤ、ガスバルブ、
キャブレター部品
(6) ポリアミド:ラジエータファン(7) ポリア
リレート:方向指示レンズ、計器板レンズ、リレーハウ
ジング
(8) ポリブチレンテレフタレート:リヤエンド、フ
ロントフェンダ
(9) ポリアミノビスマレイミド:エンジン部品、ギ
ヤボックス、ホイール、サスペンジョンドライブシステ
ム(10)メタクリル樹脂はランプカバーレンズ、計器
板とカバー、センターマーク
(11)ポリプロピレンはバンパー
(12)ポリフェニレンオキシド:ラジエーターグリル
、ホイールキャップ
(13)ポリウレタン:バンパー、フェンダー、インス
トルメントパネル、ファン
(14)不飽和ポリエステル樹脂:ボディ、燃料タンク
、ヒーターハウジング、計器板
その他上記以外の各種の部品にも適用できる。The present invention can be used, by way of example, in the following vehicle parts. (1) ABS resin: lamp covers, instrument panels, interior parts, motorcycle protectors (2)
Cellulose plastic: Car marks, handles (3) FRP (fiber reinforced resin): Exterior bumpers, engine covers (4) Phenolic resin: Brakes (5) Polyacetal: Wiper gears, gas valves,
Carburetor parts (6) Polyamide: Radiator fan (7) Polyarylate: Direction indicator lens, instrument panel lens, relay housing (8) Polybutylene terephthalate: Rear end, front fender (9) Polyamino bismaleimide: Engine parts, gear box, wheels , suspension drive system (10) Methacrylic resin for lamp cover lenses, instrument panels and covers, center mark (11) Polypropylene for bumpers (12) Polyphenylene oxide: radiator grille, wheel caps (13) Polyurethane: bumpers, fenders, instrument panels , fan (14) Unsaturated polyester resin: Can be applied to bodies, fuel tanks, heater housings, instrument panels, and various other parts other than those listed above.
【0025】以上のように本発明の乗り物用は、プラス
チック成形品表面にシロキサン結合を介してフッ化アル
キル基を含有する化学吸着膜が設けられたものを用いる
ことにより、従来のものに比べて、防汚性が著しく優れ
ている。As described above, the plastic molded product for vehicles of the present invention has a chemically adsorbed film containing a fluorinated alkyl group via a siloxane bond on the surface of the plastic molded product. , has excellent stain resistance.
【0026】また、本発明の乗り物用部品は汎用樹脂を
用いるので、フッ素樹脂を用いるよりも安価にできる。
また、分子1層のコーティングが可能なので、透明性を
要求されるところにも用いることができる。このように
本発明は工業的価値の大なるものである。Furthermore, since the vehicle parts of the present invention use a general-purpose resin, they can be made cheaper than using a fluororesin. Furthermore, since it is possible to coat a single layer of molecules, it can also be used where transparency is required. As described above, the present invention has great industrial value.
【0027】[0027]
【発明の効果】以上説明した通り、本発明によれば、プ
ラスチック成形品基材表面にシロキサン結合を介してフ
ッ化アルキル基を含有する化学吸着膜が設けられている
ので、防汚性に優れ、かつプラスチック基材の機械的強
度などの特性をそのまま生かすことができ、しかも安価
なプラスチック成形品を用いた乗り物用部品とすること
ができる。[Effects of the Invention] As explained above, according to the present invention, a chemically adsorbed film containing a fluorinated alkyl group is provided on the surface of a base material of a plastic molded product through a siloxane bond, so that it has excellent antifouling properties. In addition, the characteristics such as mechanical strength of the plastic base material can be utilized as they are, and moreover, it is possible to make a vehicle part using an inexpensive plastic molded product.
【0028】また、化学吸着膜は単分子膜であるという
本発明の好ましい構成によれば、均一な厚さの薄い膜と
することができるので、透明性に優れ、基材の美観を損
ねることがない。[0028] Furthermore, according to the preferred configuration of the present invention in which the chemisorption film is a monomolecular film, it is possible to form a thin film with a uniform thickness, which has excellent transparency and does not impair the aesthetic appearance of the base material. There is no.
【図1】 本発明の乗り物用部品に用いるプラスチッ
ク成形品の断面図である。FIG. 1 is a sectional view of a plastic molded product used in a vehicle component of the present invention.
1…プラスチック成形品 2…シロキサン結合 3…化学吸着膜 1...Plastic molded product 2...Siloxane bond 3...Chemisorption film
Claims (2)
、プラスチック成形品基材表面にシロキサン結合を介し
てフッ化アルキル基を含有する化学吸着膜が設けられた
プラスチック成形品を用いたことを特徴とする乗り物用
部品。[Claim 1] A plastic vehicle part, characterized in that a plastic molded article is provided with a chemisorption film containing a fluorinated alkyl group on the surface of a base material of the plastic molded article via a siloxane bond. vehicle parts.
に記載の乗り物用部品。[Claim 2]Claim 1, wherein the chemisorption film is a monomolecular film.
Vehicle parts listed in .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3049082A JPH0786147B2 (en) | 1991-02-20 | 1991-02-20 | Method for manufacturing plastic vehicle parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3049082A JPH0786147B2 (en) | 1991-02-20 | 1991-02-20 | Method for manufacturing plastic vehicle parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04266938A true JPH04266938A (en) | 1992-09-22 |
JPH0786147B2 JPH0786147B2 (en) | 1995-09-20 |
Family
ID=12821176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3049082A Expired - Fee Related JPH0786147B2 (en) | 1991-02-20 | 1991-02-20 | Method for manufacturing plastic vehicle parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0786147B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6893523B2 (en) | 1999-02-11 | 2005-05-17 | International Business Machines Corporation | Method for bonding heat sinks to overmold material |
WO2017010540A1 (en) * | 2015-07-14 | 2017-01-19 | 芝浦メカトロニクス株式会社 | Imprinting template manufacturing device and method |
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JPS6040254A (en) * | 1983-08-16 | 1985-03-02 | 旭硝子株式会社 | Water-repellent oil-repellent film |
JPH02248480A (en) * | 1989-03-22 | 1990-10-04 | Asahi Glass Co Ltd | Transparent substrate material with water-repellent and antistaining properties, and structure equipped therewith |
-
1991
- 1991-02-20 JP JP3049082A patent/JPH0786147B2/en not_active Expired - Fee Related
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JPS6040254A (en) * | 1983-08-16 | 1985-03-02 | 旭硝子株式会社 | Water-repellent oil-repellent film |
JPH02248480A (en) * | 1989-03-22 | 1990-10-04 | Asahi Glass Co Ltd | Transparent substrate material with water-repellent and antistaining properties, and structure equipped therewith |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6893523B2 (en) | 1999-02-11 | 2005-05-17 | International Business Machines Corporation | Method for bonding heat sinks to overmold material |
US7078802B2 (en) | 1999-02-11 | 2006-07-18 | International Business Machines Corporation | Method for bonding heat sinks to overmold material and resulting structure |
WO2017010540A1 (en) * | 2015-07-14 | 2017-01-19 | 芝浦メカトロニクス株式会社 | Imprinting template manufacturing device and method |
JP2017022308A (en) * | 2015-07-14 | 2017-01-26 | 芝浦メカトロニクス株式会社 | Template manufacturing device for imprint and template manufacturing method |
US10773425B2 (en) | 2015-07-14 | 2020-09-15 | Shibaura Mechatronics Corporation | Imprint template manufacturing apparatus and imprint template manufacturing method |
Also Published As
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JPH0786147B2 (en) | 1995-09-20 |
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