JPH0426534U - - Google Patents

Info

Publication number
JPH0426534U
JPH0426534U JP6787690U JP6787690U JPH0426534U JP H0426534 U JPH0426534 U JP H0426534U JP 6787690 U JP6787690 U JP 6787690U JP 6787690 U JP6787690 U JP 6787690U JP H0426534 U JPH0426534 U JP H0426534U
Authority
JP
Japan
Prior art keywords
argon
argon ion
wafer surface
wiring film
aluminum wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6787690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6787690U priority Critical patent/JPH0426534U/ja
Publication of JPH0426534U publication Critical patent/JPH0426534U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6787690U 1990-06-28 1990-06-28 Pending JPH0426534U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6787690U JPH0426534U (enrdf_load_stackoverflow) 1990-06-28 1990-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6787690U JPH0426534U (enrdf_load_stackoverflow) 1990-06-28 1990-06-28

Publications (1)

Publication Number Publication Date
JPH0426534U true JPH0426534U (enrdf_load_stackoverflow) 1992-03-03

Family

ID=31601843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6787690U Pending JPH0426534U (enrdf_load_stackoverflow) 1990-06-28 1990-06-28

Country Status (1)

Country Link
JP (1) JPH0426534U (enrdf_load_stackoverflow)

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