JPH0426532U - - Google Patents

Info

Publication number
JPH0426532U
JPH0426532U JP6824890U JP6824890U JPH0426532U JP H0426532 U JPH0426532 U JP H0426532U JP 6824890 U JP6824890 U JP 6824890U JP 6824890 U JP6824890 U JP 6824890U JP H0426532 U JPH0426532 U JP H0426532U
Authority
JP
Japan
Prior art keywords
link
board
arm
substrate
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6824890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0744016Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6824890U priority Critical patent/JPH0744016Y2/ja
Publication of JPH0426532U publication Critical patent/JPH0426532U/ja
Application granted granted Critical
Publication of JPH0744016Y2 publication Critical patent/JPH0744016Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6824890U 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置 Expired - Lifetime JPH0744016Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6824890U JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6824890U JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Publications (2)

Publication Number Publication Date
JPH0426532U true JPH0426532U (h) 1992-03-03
JPH0744016Y2 JPH0744016Y2 (ja) 1995-10-09

Family

ID=31602518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6824890U Expired - Lifetime JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Country Status (1)

Country Link
JP (1) JPH0744016Y2 (h)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置

Also Published As

Publication number Publication date
JPH0744016Y2 (ja) 1995-10-09

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term