JPH0426527U - - Google Patents
Info
- Publication number
- JPH0426527U JPH0426527U JP6735390U JP6735390U JPH0426527U JP H0426527 U JPH0426527 U JP H0426527U JP 6735390 U JP6735390 U JP 6735390U JP 6735390 U JP6735390 U JP 6735390U JP H0426527 U JPH0426527 U JP H0426527U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- carrier gas
- bubbler tank
- liquid material
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011344 liquid material Substances 0.000 claims description 11
- 238000002309 gasification Methods 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 8
- 230000002159 abnormal effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990067353U JP2567988Y2 (ja) | 1990-06-26 | 1990-06-26 | 液体材料ガス化供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990067353U JP2567988Y2 (ja) | 1990-06-26 | 1990-06-26 | 液体材料ガス化供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426527U true JPH0426527U (cg-RX-API-DMAC7.html) | 1992-03-03 |
| JP2567988Y2 JP2567988Y2 (ja) | 1998-04-08 |
Family
ID=31600852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990067353U Expired - Lifetime JP2567988Y2 (ja) | 1990-06-26 | 1990-06-26 | 液体材料ガス化供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2567988Y2 (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3973432B2 (ja) * | 2002-01-29 | 2007-09-12 | 日本曹達株式会社 | 物質投入管理方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
| JPS63182816A (ja) * | 1987-01-26 | 1988-07-28 | Sumitomo Electric Ind Ltd | 気相成長法による半導体製造装置 |
-
1990
- 1990-06-26 JP JP1990067353U patent/JP2567988Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
| JPS63182816A (ja) * | 1987-01-26 | 1988-07-28 | Sumitomo Electric Ind Ltd | 気相成長法による半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2567988Y2 (ja) | 1998-04-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |