JPH04265277A - Device for calcination with atmosphere - Google Patents
Device for calcination with atmosphereInfo
- Publication number
- JPH04265277A JPH04265277A JP3049270A JP4927091A JPH04265277A JP H04265277 A JPH04265277 A JP H04265277A JP 3049270 A JP3049270 A JP 3049270A JP 4927091 A JP4927091 A JP 4927091A JP H04265277 A JPH04265277 A JP H04265277A
- Authority
- JP
- Japan
- Prior art keywords
- setter
- plzt
- fired
- powder
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001354 calcination Methods 0.000 title abstract 5
- 239000000843 powder Substances 0.000 claims abstract description 41
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 238000010304 firing Methods 0.000 claims description 41
- 238000006243 chemical reaction Methods 0.000 abstract description 10
- 230000003993 interaction Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 11
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000005498 polishing Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、電気光学効果を有する
透光性セラミックスウエハ(例えばPLZTウエハ)を
作成するために、所定の雰囲気のもとでPLZT板のよ
うな被焼成物を焼成する雰囲気焼成装置の改良に関する
ものである。[Industrial Application Field] The present invention involves firing an object to be fired, such as a PLZT plate, in a predetermined atmosphere in order to create a translucent ceramic wafer (for example, a PLZT wafer) having an electro-optical effect. This invention relates to an improvement of an atmosphere firing device.
【0002】0002
【従来の技術】チタン酸ジルコン酸鉛中の鉛の一部をラ
ンタンで置換した組成を有する透光性セラミックスであ
るPLZT(例えば(Pb0.91La0.09)(Z
r0.65Ti0.35)O3)には、メモリ効果、一
次電気光学効果、二次電気光学効果などの電気光学効果
を示す領域がある。この電気光学効果特性を利用して表
示装置、光変調器、光シャッタ−など種々のデバイスへ
の応用が期待されている。これらの種々のデバイスの開
発にともない、大面積で数百μm〜数mmの厚さを持っ
たPLZTウエハが必要になってきた。このような大面
積のPLZTウエハを作成するために、PLZT板のよ
うな被焼成物を焼成するのに適した装置として、従来、
図4に示すような雰囲気焼成装置が知られていた。[Prior Art] PLZT (for example, (Pb0.91La0.09)) (Z
r0.65Ti0.35)O3) has a region exhibiting electro-optic effects such as a memory effect, a first-order electro-optic effect, and a second-order electro-optic effect. Utilizing this electro-optic effect characteristic, it is expected to be applied to various devices such as display devices, optical modulators, and optical shutters. With the development of these various devices, a PLZT wafer with a large area and a thickness of several hundred μm to several mm has become necessary. In order to create such large-area PLZT wafers, conventional equipment has been used as a device suitable for firing objects to be fired such as PLZT plates.
An atmosphere firing apparatus as shown in FIG. 4 has been known.
【0003】すなわち、焼成炉10内に二重の耐熱容器
(例えばアルミナるつぼ(匣鉢ともいう))12、14
を入れ、内側の耐熱容器12内に雰囲気粉(例えばPb
O+ZrO2)16、16を入れる。そして、セッタ−
(下敷き)18上に被焼成物としてのPLZT板20を
載置したものを1組とし、その複数組18と20、…を
耐熱容器12内に入れる。このとき、各組のPLZT板
20、…の上面が後述する雰囲気ガスに接触するように
、所定長さの支持台22と22、…によって上下に隣接
するセッタ−18、…間を所定間隔に保持する。そして
、雰囲気ガス導入管24によって外部から二重の耐熱容
器12、14間に雰囲気ガスとしての酸素(O2)を導
入し、酸素雰囲気下で焼成するようにしていた。セッタ
−18はマグネシア(MgO)またはジルコニア(Zr
O2)を主成分とする基板で形成されている。That is, double heat-resistant containers (for example, alumina crucibles (also called saggers)) 12 and 14 are installed in the firing furnace 10.
into the inner heat-resistant container 12 with atmospheric powder (for example, Pb
Add O+ZrO2)16,16. And the setter
A plurality of sets 18, 20, . . . are placed in the heat-resistant container 12, with the PLZT plate 20 as the object to be fired placed on the underlay 18. At this time, vertically adjacent setters 18, . . . are spaced at a predetermined interval by support stands 22 and 22, . Hold. Then, oxygen (O2) as an atmospheric gas is introduced between the double heat-resistant containers 12 and 14 from the outside through the atmospheric gas introduction pipe 24, and baking is performed in an oxygen atmosphere. Setter 18 is made of magnesia (MgO) or zirconia (Zr).
It is formed from a substrate whose main component is O2).
【0004】0004
【発明が解決しようとする課題】しかしながら、図4に
示した従来の雰囲気焼成装置は、1200℃〜1300
℃、50時間位までの短時間の焼成ではそれ程問題にな
らなかったが、それ以上の長時間の焼成では焼成中にセ
ッタ−18とPLZT板20との接触面間で高温反応が
生じ、焼成物であるPLZTウエハに電気光学効果の欠
陥部ができ、この欠陥部がクロスニコルでの光漏れ(例
えばstarと呼ばれる光漏れ)の原因になるという問
題点があった。また、PLZT板20、…の上面が雰囲
気ガス(例えば酸素)に接し、下面がセッタ−18、…
に接触しているので、焼成中のPLZT板20、…の上
面と下面の温度差が大きくなり、焼成によって得られた
所定厚さ(例えば1mm)の焼成物(例えばPLZT焼
結体)30、…の上面に図5に示すような反りの深さF
の大きな(例えばF=300μm)反りが生じ、焼成後
の研磨で平坦にすることが困難になるという問題点があ
った。本発明は上述の点に鑑みなされたもので、長時間
の焼成でも高温反応が生ぜず、しかも焼成中に生じる反
りを小さくすることのできる雰囲気焼成装置を提供する
ことを目的とするものである。[Problems to be Solved by the Invention] However, the conventional atmosphere firing apparatus shown in FIG.
℃ for a short time of up to about 50 hours, this was not a problem, but when firing for a longer time than that, a high temperature reaction occurred between the contact surfaces of the setter 18 and the PLZT plate 20 during firing, and the firing There is a problem in that electro-optic effect defects are formed on the PLZT wafer, and these defects cause crossed Nicol light leakage (for example, star light leakage). Further, the upper surfaces of the PLZT plates 20, .
, the temperature difference between the upper and lower surfaces of the PLZT plate 20 during firing increases, and the fired product (for example, PLZT sintered body) 30 of a predetermined thickness (for example, 1 mm) obtained by firing, The depth of the warp F as shown in Figure 5 on the top surface of...
There was a problem in that large warpage (for example, F=300 μm) occurred, making it difficult to flatten it by polishing after firing. The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an atmosphere firing apparatus that does not cause high-temperature reactions even during long-time firing and can reduce warping that occurs during firing. .
【0005】[0005]
【課題を解決するための手段】本発明は、焼成炉内に耐
熱容器を設け、この耐熱容器内にセッタ−とこのセッタ
−上に載せる被焼成物とを入れ、前記耐熱容器内に雰囲
気ガスを導入して焼成を行うようにした雰囲気焼成装置
において、前記セッタ−の上面に前記被焼成物とほぼ同
一組成物で形成された粉体を押し固めて上面側を平坦に
形成した敷粉を形成し、この敷粉の上面に前記被焼成物
を載置してなることを特徴とするものである。[Means for Solving the Problems] The present invention provides a heat-resistant container in a firing furnace, a setter and an object to be fired to be placed on the setter, and an atmospheric gas inside the heat-resistant container. In an atmosphere firing apparatus which performs firing by introducing The method is characterized in that the object to be fired is placed on the top surface of this bed powder.
【0006】[0006]
【作用】被焼成物は敷粉を介してセッタ−上に載せられ
て耐熱容器内に入れられ、この耐熱容器内に雰囲気ガス
を導入して雰囲気焼成が行われる。この焼成中において
、被焼成物とセッタ−の間に形成された敷粉は、被焼成
物とほぼ同一組成物で形成され、被焼成物とセッタ−の
直接接触を遮断しているので、被焼成物とセッタ−の高
温反応を防止している。しかも、敷粉は粉体を押し固め
て上面側が平坦に形成されているので、被焼成物と敷粉
との高温反応をも防止している。また、被焼成物とセッ
タ−の間に形成された敷粉は、セッタ−側から被焼成物
へ伝わる熱を遮断して被焼成物の上面と下面の温度差を
小さくするとともに、被焼成物とセッタ−との摩擦を小
さくしているので、焼成中における被焼成物の反りを小
さくすることができる。[Operation] The object to be fired is placed on a setter through a bed of flour and placed in a heat-resistant container, and atmospheric gas is introduced into the heat-resistant container to perform atmospheric firing. During this firing, the bedding powder formed between the object to be fired and the setter is made of almost the same composition as the object to be fired, and blocks direct contact between the object to be fired and the setter. This prevents high-temperature reactions between the fired product and the setter. In addition, since the powder is compacted and has a flat upper surface, high-temperature reactions between the material to be fired and the powder are also prevented. In addition, the bed powder formed between the object to be fired and the setter blocks the heat transmitted from the setter side to the object to be fired, reducing the temperature difference between the top and bottom surfaces of the object to be fired, and also reduces the temperature difference between the top and bottom surfaces of the object. Since the friction between the setter and the setter is reduced, warpage of the object to be fired during firing can be reduced.
【0007】[0007]
【実施例】図1は本発明の一実施例を示すもので、この
図において図4と同一部分は同一符号とする。図1にお
いて、10は焼成炉で、この焼成炉10内には、二重の
耐熱容器(例えばアルミナるつぼ(匣鉢ともいう))1
2、14が設けられている。前記二重の耐熱容器12、
14のうちの内側の耐熱容器12内には、雰囲気粉(例
えばPbO+ZrO2)16、16が入れられていると
ともに、所定長さの支持台22と22、…によって所定
間隔に保持されたセッタ−(下敷き)18、…が入れら
れている。前記セッタ−18は純度99.9%のマグネ
シア(MgO)によって形成されている。24は雰囲気
ガス導入管で、この雰囲気ガス導入管24は外部から前
記二重の耐熱容器12、14間に雰囲気ガスとしての酸
素(O2)を導入し、酸素雰囲気下の焼成を行うことが
できるようにしている。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the present invention, and in this figure, the same parts as those in FIG. 4 are given the same reference numerals. In FIG. 1, 10 is a firing furnace, and inside this firing furnace 10, there is a double heat-resistant container (for example, an alumina crucible (also called a sagger)) 1
2 and 14 are provided. the double heat-resistant container 12;
Inside the heat-resistant container 12 of the containers 14, atmospheric powder (for example, PbO + ZrO2) 16, 16 is placed, and setters ( Underlay) 18,... are included. The setter 18 is made of magnesia (MgO) with a purity of 99.9%. Reference numeral 24 denotes an atmospheric gas introduction pipe, and this atmospheric gas introduction pipe 24 introduces oxygen (O2) as an atmospheric gas between the double heat-resistant containers 12 and 14 from the outside, and can perform firing in an oxygen atmosphere. That's what I do.
【0008】前記セッタ−18、…の上面には、(Pb
0.91La0.09)(Zr0.65Ti0.35)
O3の組成を持つPLZT粉体32を、図2に示すよう
な方法によって押し固めて、上面側を平坦に形成した敷
粉34が形成されている。すなわち、まず図2の(a)
に示すように所定のメッシュ(例えば#60)の篩36
を用いて所定粒径以下のPLZT粉体32をセッタ−1
8の上面に敷き、ついで図2の(b)に示すようにパラ
フィン紙38を介した平板40を用いて所定の荷重(例
えば手で押すぐらいの荷重)を加えてPLZT粉体32
を押し固め、上面側を平坦に形成した敷粉34が形成さ
れる。前記敷粉34、…の上面には、被焼成物としての
PLZT板20、…が載置されている。前記PLZT板
20は例えば次ぎのようにして形成される。すなわち、
ボ−ルミルを用いて、(Pb0.91La0.09)(
Zr0.65Ti0.35)O3の組成を持つPLZT
粉体を、バインダ5〜10重量%、可塑剤2〜5重量%
、分散剤0.2重量%および溶剤60〜90重量%とと
もに所定時間混合してスラリ−を作り、このスラリ−を
濾過後脱泡しドクタ−ブレ−ドシ−ト成形機を用いてグ
リ−ンシ−トを作成し、このグリ−ンシ−トを適当な大
きさにカッティングし脱バインダ(例えば500℃、1
0時間の脱バインダ)をすることによって作成される。[0008] On the upper surface of the setter 18, (Pb
0.91La0.09) (Zr0.65Ti0.35)
A PLZT powder 32 having a composition of O3 is compacted by the method shown in FIG. 2 to form a bed powder 34 having a flat upper surface. That is, first, (a) in Figure 2
A sieve 36 of a predetermined mesh (e.g. #60) as shown in
PLZT powder 32 with a predetermined particle size or less is transferred to setter 1 using
Then, as shown in FIG. 2(b), a predetermined load (for example, a load of pushing by hand) is applied to the PLZT powder 32 using a flat plate 40 with paraffin paper 38 interposed therebetween.
is compacted to form a bed powder 34 with a flat upper surface. PLZT plates 20, . . . as objects to be fired are placed on the upper surface of the bed powder 34, . The PLZT board 20 is formed, for example, as follows. That is,
Using a ball mill, (Pb0.91La0.09)(
PLZT with the composition Zr0.65Ti0.35)O3
Powder, binder 5-10% by weight, plasticizer 2-5% by weight
, 0.2% by weight of a dispersant, and 60 to 90% by weight of a solvent to form a slurry for a predetermined period of time, and this slurry is filtered, defoamed, and made into a grease using a doctor blade sheet molding machine. Prepare a green sheet, cut this green sheet to an appropriate size, and remove the binder (for example, at 500°C for 1 hour).
0 hours of debinding).
【0009】つぎに、前記実施例の作用について説明す
る。PLZT板20は敷粉34を介してセッタ−18上
に載せて内側の耐熱容器12内に入れられ、内側と外側
の耐熱容器12と14の間に、雰囲気ガス導入管24に
よって外部から雰囲気ガスとしての酸素(O2)を導入
し、焼成炉10を作動して所定時間(例えば50〜10
0時間)の間所定温度(例えば1200℃〜1300℃
)で加熱することによって酸素雰囲気中での焼成が行な
われる。この焼成中において、PLZT板20とセッタ
−18の間に形成された敷粉34は、PLZT板20と
同一組成物で形成され、PLZT板20とセッタ−18
の直接接触を遮断しているので、PLZT板20とセッ
タ−18の高温反応を防止している。しかも、敷粉34
はPLZT粉体32を押し固めて上面側が平坦に形成さ
れているので、PLZT板20と敷粉34との高温反応
をも防止している。すなわち、粉体のままだと、焼成中
にPLZT板20とPLZT粉体32の間で高温反応が
生じる可能性があるが、PLZT粉体32を押し固めて
上面側が平坦に形成された敷粉34となっているので、
反応しにくいからである。このため、電気光学効果の欠
陥部の原因となる空孔の少ない透光性PLZT焼結体(
焼成物)が得られた。Next, the operation of the above embodiment will be explained. The PLZT board 20 is placed on the setter 18 via the bedding powder 34 and placed in the inner heat-resistant container 12, and between the inner and outer heat-resistant containers 12 and 14, atmospheric gas is supplied from the outside through the atmospheric gas introduction pipe 24. The firing furnace 10 is operated for a predetermined period of time (for example, 50 to 10 hours).
0 hours) at a predetermined temperature (e.g. 1200°C to 1300°C).
) to perform firing in an oxygen atmosphere. During this firing, the bedding powder 34 formed between the PLZT board 20 and the setter 18 is made of the same composition as the PLZT board 20, and the PLZT board 20 and the setter 18 are
Since direct contact between the PLZT plate 20 and the setter 18 is blocked, a high temperature reaction between the PLZT plate 20 and the setter 18 is prevented. Moreover, bed powder 34
Since the PLZT powder 32 is compacted and the upper surface side is flat, high-temperature reaction between the PLZT board 20 and the bedding powder 34 is also prevented. In other words, if the powder remains, a high-temperature reaction may occur between the PLZT plate 20 and the PLZT powder 32 during firing, but if the PLZT powder 32 is compacted and the upper surface side is flat, Since it is 34,
This is because it is difficult to react. Therefore, a translucent PLZT sintered body (
A baked product) was obtained.
【0010】また、PLZT板20とセッタ−18の間
にある敷粉34は、セッタ−18側からPLZT板20
へ伝わる熱を遮断してPLZT板20の上面と下面の温
度差を小さくするとともに、PLZT板20とセッタ−
18との摩擦を小さくしているので、焼成中におけるP
LZT板20の反りを小さくすることができる。すなわ
ち、敷粉34を設けたこと以外の条件を図4に示す従来
例と同様にした場合、焼成によって得られた所定厚さ(
例えば1mm)のPLZT焼結体(焼成物)50の上面
の反りの深さFは、図3に示すように、従来例(図5に
示すF=300μm)の半分以下(F=130μm)で
あった。このため、焼成後の研磨で平坦にすることが容
易になる。一般に、反りの深さFが150μm以下であ
れば、焼成後の研磨で平坦にすることが容易であるとい
われている。前記実施例では、セッタ−の上面に形成し
た敷粉は、被焼成物と同一組成物で形成するようにした
が、本発明はこれに限るものでなく、被焼成物とほぼ同
一組成物で形成された粉体を押し固めて上面側を平坦に
形成したものであればよい。Furthermore, the bedding powder 34 between the PLZT board 20 and the setter 18 is transferred from the setter 18 side to the PLZT board 20.
This reduces the temperature difference between the top and bottom surfaces of the PLZT board 20 by blocking the heat transmitted to the setter.
Since the friction with 18 is reduced, P during firing is reduced.
Warpage of the LZT board 20 can be reduced. That is, when the conditions are the same as those of the conventional example shown in FIG. 4 except for providing the bed powder 34, the predetermined thickness (
As shown in FIG. 3, the depth F of the warp on the top surface of the PLZT sintered body (for example, 1 mm) is less than half (F=130 μm) of the conventional example (F=300 μm shown in FIG. 5). there were. Therefore, it becomes easy to flatten the surface by polishing after firing. Generally, it is said that if the depth F of the warp is 150 μm or less, it is easy to flatten it by polishing after firing. In the above embodiment, the padding powder formed on the top surface of the setter was made of the same composition as the object to be fired, but the present invention is not limited to this, and it may be made of almost the same composition as the object to be fired. Any material may be used as long as the formed powder is compacted and the upper surface side is made flat.
【0011】[0011]
【発明の効果】本発明による雰囲気焼成装置は、上記の
ように構成したので、つぎのような効果を有する。
(イ)セッタ−の上面に被焼成物とほぼ同一組成物で形
成された敷粉を形成し、この敷粉の上面に被焼成物を載
置して被焼成物とセッタ−の直接接触を遮断するように
したので、焼成時間が長くなっても、被焼成物とセッタ
−の高温反応を防止することができる。しかも、敷粉は
粉体を押し固めて上面側を平坦に形成しているので、焼
成時間が長くなっても、被焼成物と敷粉との高温反応を
防止することができる。したがって、焼成物に電気光学
特性の欠陥部が生じるのを防止することができる。
(ロ)被焼成物とセッタ−の間に形成された敷粉が、焼
成中にセッタ−側から被焼成物へ伝わる熱を遮断して被
焼成物の上面と下面の温度差を小さくするとともに、被
焼成物とセッタ−との摩擦を小さくしているので、焼成
中に生じる被焼成物の反りを小さくすることができる。
したがって、焼成物の研磨を容易にすることができる。[Effects of the Invention] Since the atmosphere firing apparatus according to the present invention is constructed as described above, it has the following effects. (b) Form a padding made of almost the same composition as the material to be fired on the top surface of the setter, and place the material to be fired on top of this foundation powder to ensure direct contact between the material to be fired and the setter. Since it is shut off, a high temperature reaction between the object to be fired and the setter can be prevented even if the firing time becomes long. Furthermore, since the powder is compacted to form a flat upper surface, high-temperature reactions between the object to be fired and the powder can be prevented even if the baking time is long. Therefore, it is possible to prevent defects in electro-optic properties from occurring in the fired product. (b) The bed powder formed between the object to be fired and the setter blocks the heat transmitted from the setter side to the object to be fired during firing, reducing the temperature difference between the top and bottom surfaces of the object to be fired. Since the friction between the object to be fired and the setter is reduced, it is possible to reduce the warpage of the object to be fired during firing. Therefore, polishing of the fired product can be facilitated.
【図1】本発明による雰囲気焼成装置の一実施例を示す
構成図である。FIG. 1 is a configuration diagram showing an embodiment of an atmosphere firing apparatus according to the present invention.
【図2】図1の敷粉を形成する方法を示す説明図である
。FIG. 2 is an explanatory diagram showing a method of forming the bedding powder of FIG. 1;
【図3】図1の装置で焼成した焼成物の反りの深さを説
明する説明図である。3 is an explanatory diagram illustrating the depth of warpage of a fired product fired with the apparatus of FIG. 1. FIG.
【図4】従来例の装置の構成図である。FIG. 4 is a configuration diagram of a conventional device.
【図5】図4の装置で焼成した焼成物の反りの深さを説
明する説明図である。5 is an explanatory diagram illustrating the depth of warpage of a fired product fired with the apparatus of FIG. 4. FIG.
10…焼成炉
12、14…耐熱容器(アルミナるつぼ)16…雰囲気
粉(PbO+ZrO2)
18…セッタ−
20…PLZT板(被焼成物)
24…雰囲気ガス導入管
30、50…PLZT焼結体(焼成物)32…PLZT
粉体
34…敷粉
O2…酸素(雰囲気ガス)10... Firing furnace 12, 14... Heat resistant container (alumina crucible) 16... Atmosphere powder (PbO+ZrO2) 18... Setter 20... PLZT plate (object to be fired) 24... Atmosphere gas introduction pipe 30, 50... PLZT sintered body (sintered) Item) 32...PLZT
Powder 34...Bed powder O2...Oxygen (atmosphere gas)
Claims (1)
容器内にセッタ−とこのセッタ−上に載せる被焼成物と
を入れ、前記耐熱容器内に雰囲気ガスを導入して焼成を
行うようにした雰囲気焼成装置において、前記セッタ−
の上面に前記被焼成物とほぼ同一組成物で形成された粉
体を押し固めて上面側を平坦に形成した敷粉を形成し、
この敷粉の上面に前記被焼成物を載置してなることを特
徴とする雰囲気焼成装置。Claim 1: A heat-resistant container is provided in a firing furnace, a setter and an object to be fired to be placed on the setter are placed in the heat-resistant container, and atmospheric gas is introduced into the heat-resistant container to perform firing. In the atmosphere firing apparatus, the setter
Pressing powder made of substantially the same composition as the object to be fired on the upper surface to form a flattened powder with a flat upper surface side;
An atmosphere firing apparatus characterized in that the object to be fired is placed on the upper surface of the bed powder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3049270A JPH04265277A (en) | 1991-02-20 | 1991-02-20 | Device for calcination with atmosphere |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3049270A JPH04265277A (en) | 1991-02-20 | 1991-02-20 | Device for calcination with atmosphere |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04265277A true JPH04265277A (en) | 1992-09-21 |
Family
ID=12826151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3049270A Pending JPH04265277A (en) | 1991-02-20 | 1991-02-20 | Device for calcination with atmosphere |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04265277A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010083738A (en) * | 2008-10-02 | 2010-04-15 | Hitachi Metals Ltd | Method for producing aluminum titanate-based ceramic honeycomb structure |
-
1991
- 1991-02-20 JP JP3049270A patent/JPH04265277A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010083738A (en) * | 2008-10-02 | 2010-04-15 | Hitachi Metals Ltd | Method for producing aluminum titanate-based ceramic honeycomb structure |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Sinhamahapatra et al. | Dynamic thermal study to rationalise the role of titania in reaction sintering of magnesia-alumina system | |
JPS63224937A (en) | Double layer structure heat-resistant plate | |
JPH04265277A (en) | Device for calcination with atmosphere | |
US20170152188A1 (en) | Refractory product, use of zirconium dioxide, zirconium dioxide, method for manufacturing a refractory product and a refractory product manufactured therewith | |
JPH04331774A (en) | Atmospheric firing apparatus | |
US3196193A (en) | Firing of lime and dolomite shapes | |
US3899575A (en) | Process of baking or graphitizing carbon moldings | |
Kim et al. | Microstructure and dielectric characteristics of tungsten bronze structured SBN70 ceramics: effect of Nb2O5 content | |
JPH03295866A (en) | Method of removing binder from plzt | |
JPH059076A (en) | Production of aluminum nitride substrate | |
TW593204B (en) | A method of producing lithium aluminosilicate ceramics | |
JPH046165A (en) | Calcining method | |
JPH046164A (en) | Method for calcining plzt | |
JP2014172763A (en) | Setter for firing | |
JPH04169787A (en) | Atmosphere baking apparatus | |
WO2022158072A1 (en) | Plate-shaped firing jig | |
JPH02243570A (en) | Production of aluminum nitride base plate | |
JPH03177363A (en) | Method for burning semiconductor ceramics | |
JPS63123873A (en) | Method of burning ceramic | |
JPH0234558A (en) | Method for calcining plzt | |
JPH022824B2 (en) | ||
CN108503379A (en) | The fireproof frame formula and preparation method of loading of kiln in a kind of sanitary ceramics kiln | |
JPH0297468A (en) | Production of thin ceramic sheet and calcination tool utilized for method thereof | |
Fulrath | BASIC CERAMIC PROCESSING TECHNIQUES | |
JPS62275061A (en) | Method of sintering lead oxide |