JPH0426526U - - Google Patents

Info

Publication number
JPH0426526U
JPH0426526U JP6674490U JP6674490U JPH0426526U JP H0426526 U JPH0426526 U JP H0426526U JP 6674490 U JP6674490 U JP 6674490U JP 6674490 U JP6674490 U JP 6674490U JP H0426526 U JPH0426526 U JP H0426526U
Authority
JP
Japan
Prior art keywords
processing chamber
passage space
rotating
wafer
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6674490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0537470Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6674490U priority Critical patent/JPH0537470Y2/ja
Publication of JPH0426526U publication Critical patent/JPH0426526U/ja
Application granted granted Critical
Publication of JPH0537470Y2 publication Critical patent/JPH0537470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6674490U 1990-06-26 1990-06-26 Expired - Lifetime JPH0537470Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6674490U JPH0537470Y2 (enrdf_load_stackoverflow) 1990-06-26 1990-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6674490U JPH0537470Y2 (enrdf_load_stackoverflow) 1990-06-26 1990-06-26

Publications (2)

Publication Number Publication Date
JPH0426526U true JPH0426526U (enrdf_load_stackoverflow) 1992-03-03
JPH0537470Y2 JPH0537470Y2 (enrdf_load_stackoverflow) 1993-09-22

Family

ID=31599712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6674490U Expired - Lifetime JPH0537470Y2 (enrdf_load_stackoverflow) 1990-06-26 1990-06-26

Country Status (1)

Country Link
JP (1) JPH0537470Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0537470Y2 (enrdf_load_stackoverflow) 1993-09-22

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