JPH0426525U - - Google Patents
Info
- Publication number
- JPH0426525U JPH0426525U JP1990068398U JP6839890U JPH0426525U JP H0426525 U JPH0426525 U JP H0426525U JP 1990068398 U JP1990068398 U JP 1990068398U JP 6839890 U JP6839890 U JP 6839890U JP H0426525 U JPH0426525 U JP H0426525U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- stage
- heating section
- semiconductor wafer
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068398U JPH0426525U (enExample) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068398U JPH0426525U (enExample) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426525U true JPH0426525U (enExample) | 1992-03-03 |
Family
ID=31602806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990068398U Pending JPH0426525U (enExample) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426525U (enExample) |
-
1990
- 1990-06-27 JP JP1990068398U patent/JPH0426525U/ja active Pending