JPH04262231A - Apparatus for measuring amount of leaking gas - Google Patents

Apparatus for measuring amount of leaking gas

Info

Publication number
JPH04262231A
JPH04262231A JP3006830A JP683091A JPH04262231A JP H04262231 A JPH04262231 A JP H04262231A JP 3006830 A JP3006830 A JP 3006830A JP 683091 A JP683091 A JP 683091A JP H04262231 A JPH04262231 A JP H04262231A
Authority
JP
Japan
Prior art keywords
gas
container
detected
atmospheric
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3006830A
Other languages
Japanese (ja)
Inventor
Takeo Yoshioka
武男 吉岡
Shoji Tanda
昭司 但田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3006830A priority Critical patent/JPH04262231A/en
Publication of JPH04262231A publication Critical patent/JPH04262231A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To shorten the time wherein a device is left alone and to improve the sensitivity in leakage detection by once acquiring the gas component to be detected in atmospheric gas, recovering he gas component into a container having the specified volume, and measuring the concentration of the gas component to be detected with a gas analyzer. CONSTITUTION:A suction pump 4 is operated. Atmospheric gas flows into a flowmeter 5 through a gas catching part 6, and the amount of the gas is measured. At this time, a heating and cooling pat 6f of the gas catching part 6 is made to be in a cooled state. The action of a barrier part 6g is added, and an adsorbing part 6e is excellently cooled. Therefore, the gas to be detected is adsorbed on activated carbon. Then, the heating and cooling part 6f is made to be heated state. An opening and closing valve 7 is closed, and an opening and closing valve 9 is opened. When a pump 4 is rotated in the reverse direction, the gas to be detected which is adsorbed on the activated carbon is desorbed and recovered into a container 8 together with the atmospheric gas. Since the container 8 has the constant volume, the concetration of the gas to be detected can be measured when the valve 9 is closed under the state wherein the atmospheric pressure is reached, the pump 4 is stopped and the atmospheric gas in the container 8 is analyzed with a gas analyzer.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】この発明は、密封電気機器等に封
入されるガスの漏れ状態を測定するガス漏れ量計測装置
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas leakage measuring device for measuring the leakage state of gas sealed in sealed electrical equipment or the like.

【0002】0002

【従来の技術】図3はこの種従来の紫外線電離形のSF
6 ガス漏れ量計測装置の主要部概略構成を示す図であ
る。 図において、1は吸入口、2はこの吸入口1より吸入さ
れる雰囲気ガス中のダストを除去するフイルタ、3は検
知部、4は吸入口1を介して検知部3へ雰囲気ガスを導
く吸引ポンプである。
[Prior Art] Figure 3 shows a conventional ultraviolet ionization type SF of this kind.
6 is a diagram showing a schematic configuration of the main parts of the gas leakage measuring device. In the figure, 1 is an inlet, 2 is a filter that removes dust in the atmospheric gas inhaled through the inlet 1, 3 is a detection unit, and 4 is a suction that guides the atmospheric gas to the detection unit 3 through the inlet 1. It's a pump.

【0003】上記のように構成された従来のSF6 ガ
ス漏れ量計測装置において、まず、吸引ポンプ4が作動
すると、シール部(図示せず)周辺の区画された微量の
SF6 ガスを含む雰囲気ガスは、検知部3に導かれイ
オン化される。この時、酸素イオンとSF6 イオンと
の移動度が違うため電極に流れる電流に位相差が生じる
ので、これを利用して雰囲気ガス中に含まれるSF6 
ガスの濃度が計測される。
In the conventional SF6 gas leak amount measuring device configured as described above, first, when the suction pump 4 is activated, the atmospheric gas containing a small amount of SF6 gas divided around the seal portion (not shown) is , and are guided to the detection section 3 and ionized. At this time, since the mobility of oxygen ions and SF6 ions is different, a phase difference occurs in the current flowing through the electrodes.
The concentration of gas is measured.

【0004】0004

【発明が解決しようとする課題】従来のガス漏れ量計測
装置は以上のように構成されているので、装置の一定検
出限界内で漏れ検出感度を上げるためには、放置時間(
ビニール等で囲まれた空間に漏れたSF6 ガスを貯め
ておくこと)を長くしなければならないという問題点が
あった。
[Problem to be Solved by the Invention] Since the conventional gas leakage measuring device is constructed as described above, in order to increase the leakage detection sensitivity within a certain detection limit of the device, it is necessary to
There was a problem in that the leaked SF6 gas had to be stored in a space surrounded by vinyl etc. for a long time.

【0005】この発明は上記のような問題点を解消する
ためになされたもので、放置時間を短縮しても装置の一
定検出限界内での漏れ検出感度を上げることが可能なガ
ス漏れ量計測装置を提供することを目的とするものであ
る。
[0005] This invention was made to solve the above-mentioned problems, and it is a gas leakage measurement method that can increase the leakage detection sensitivity within a certain detection limit of the device even if the exposure time is shortened. The purpose is to provide a device.

【0006】[0006]

【課題を解決するための手段】この発明に係るガス漏れ
量計測装置は、被検ガス成分捕捉部で雰囲気ガス中の被
検ガス成分を捕捉し、所定の容積を有する容器にこの捕
捉された被検ガス成分を雰囲気ガスとともに回収し、ガ
ス分析計で容器内の被検ガス成分の濃度を計測するよう
にしたものである。
[Means for Solving the Problems] A gas leakage measuring device according to the present invention captures a test gas component in an atmospheric gas in a test gas component trapping section, and stores the captured gas component in a container having a predetermined volume. The test gas component is collected together with the atmospheric gas, and the concentration of the test gas component in the container is measured using a gas analyzer.

【0007】[0007]

【作用】この発明におけるガス漏れ量計測装置は、被検
ガス成分捕捉部で雰囲気ガス中の被検ガス成分を一旦捕
捉し、雰囲気ガスとともに容器に回収して、雰囲気ガス
中の被検ガス成分の濃度を上げてガス分析を行うことに
より、放置時間の短縮を図る。
[Operation] The gas leakage measuring device of the present invention temporarily captures the test gas component in the atmospheric gas in the test gas component capturing section, collects the test gas component in the atmospheric gas together with the atmospheric gas, and collects the test gas component in the atmospheric gas. By increasing the concentration of gas and performing gas analysis, we aim to shorten the storage time.

【0008】[0008]

【実施例】以下、この発明の実施例を図について説明す
る。図1はこの発明の一実施例におけるガス漏れ量計測
装置の概略構成を示す図である。図において、吸入口1
および吸引ポンプ4は図3における従来装置のものと同
様である。5は吸引ポンプ4により吸入口1を介して吸
引された雰囲気ガスを計量する流量計、6は吸入口1と
吸引ポンプ4との間に連結される被検ガス成分捕捉部で
図2に示すように構成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a gas leakage measuring device according to an embodiment of the present invention. In the figure, inlet 1
and the suction pump 4 are similar to those of the conventional device in FIG. 5 is a flow meter that measures the atmospheric gas sucked in through the suction port 1 by the suction pump 4, and 6 is a sample gas component capture unit connected between the suction port 1 and the suction pump 4, as shown in FIG. It is configured as follows.

【0009】すなわち、6aは筐体、6bは筐体6a内
に収納される容器で、吸入口1側と連結されるガス入口
6cおよび吸引ポンプ4側と連結されるガス出口6dが
両端に設けられている。6eは容器6b内に充填される
活性炭等でなる吸着部、6fは容器6bを取囲むように
形成され吸着部6eを加熱冷却するペルチエ素子等でな
る加熱、冷却部、6gは容器6bの内面から突出して形
成される障壁、7は吸入口1と被検ガス成分捕捉部6と
の間に連結される第1の開閉弁、8はこの第1の開閉弁
7と被検ガス成分捕捉部6との間から第2の開閉弁9を
介して分岐し連結される所定の容積を有した容器である
That is, 6a is a housing, 6b is a container housed in the housing 6a, and a gas inlet 6c connected to the suction port 1 side and a gas outlet 6d connected to the suction pump 4 side are provided at both ends. It is being 6e is an adsorption part made of activated carbon or the like filled in the container 6b, 6f is a heating/cooling part formed to surround the container 6b and is made of a Peltier element etc. that heats and cools the adsorption part 6e, and 6g is an inner surface of the container 6b. 7 is a first on-off valve connected between the inlet 1 and the sample gas component capture section 6; 8 is a barrier formed protruding from the first on-off valve 7 and the sample gas component capture section; It is a container having a predetermined volume that is branched and connected from between 6 and 6 via a second on-off valve 9.

【0010】次に、上記のように構成されたこの発明の
一実施例におけるガス漏れ量計測装置の動作について説
明する。まず、吸引ポンプ4が作動すると、シール部(
図示せず)周辺の区画された微量の被検ガス成分(以下
SF6 ガス)を含む雰囲気ガスは、被検ガス成分捕捉
部6を経て流量計5へ流れその量が計測される。この時
、被検ガス成分捕捉部6の加熱、冷却部6fは冷却状態
にされており、障壁6gの作用も加わり吸着部6eは良
好に冷却されているのでSF6 ガスは活性炭に積極的
に吸着され捕捉される。
Next, the operation of the gas leakage measuring device according to an embodiment of the present invention constructed as described above will be explained. First, when the suction pump 4 is activated, the seal part (
Atmospheric gas containing a minute amount of the test gas component (hereinafter referred to as SF6 gas) divided around the surrounding area (not shown) flows through the test gas component capture section 6 to the flowmeter 5 and its amount is measured. At this time, the heating and cooling section 6f of the gas component capture section 6 to be detected is in a cooling state, and the adsorption section 6e is well cooled due to the action of the barrier 6g, so SF6 gas is actively adsorbed to the activated carbon. and captured.

【0011】次に加熱・冷却部6fを加熱状態とし、第
1の開閉弁7を閉、第2の開閉弁9を開にして吸引ポン
プ4を逆回転させると、活性炭に吸着されたSF6 ガ
スは脱離され、雰囲気ガスとともに容器8内に回収され
る。容器8は所定の一定容積であるため、大気圧に達し
た状態で第2の開閉弁9を閉にするとともに吸引ポンプ
4を停止し、容器8内のSF6 ガスを多量に含んだ雰
囲気ガスをガス分析計(図示せず)で分析してSF6 
ガスの量を計測する。
Next, when the heating/cooling section 6f is heated, the first on-off valve 7 is closed, the second on-off valve 9 is opened, and the suction pump 4 is rotated in the reverse direction, the SF6 gas adsorbed on the activated carbon is removed. is desorbed and collected into the container 8 together with the atmospheric gas. Since the container 8 has a predetermined constant volume, when the atmospheric pressure is reached, the second on-off valve 9 is closed and the suction pump 4 is stopped to drain the atmospheric gas containing a large amount of SF6 gas in the container 8. SF6 was analyzed using a gas analyzer (not shown).
Measure the amount of gas.

【0012】そして、SF6 ガスの漏れ量(l)は、
v=X×V0 、X0 =X×V0 /V1 として算
出される。式中、vはSF6 ガスの漏れ量(l)、V
1 は流量計5で計測された雰囲気ガスの量(l)、V
0 は容器8の容積(l)、Xはガス分析計で計測され
たSF6 ガスの濃度(PPM) 、X0 は雰囲気ガ
ス中のSF6 濃度(PPM) をそれぞれ示す。
[0012]The leakage amount (l) of SF6 gas is
It is calculated as v=X×V0, X0=X×V0/V1. In the formula, v is the SF6 gas leakage amount (l), V
1 is the amount of atmospheric gas (l) measured by the flowmeter 5, V
0 indicates the volume (l) of the container 8, X indicates the concentration of SF6 gas (PPM) measured by a gas analyzer, and X0 indicates the concentration of SF6 in the atmospheric gas (PPM).

【0013】尚、ガス分析計としては特殊な型式に限定
されるものではないが、分析計を可搬式とすれば装置と
して非常に小形化されるので、従来のガスクロマトグラ
フ等のように数十Kgと、計測対象に比較して非常に大
形のため適用範囲が限定されていたのに対して、持運び
が容易となり適用範囲が拡大される。又、上記実施例に
おいては、被検ガス成分としてSF6 ガスを例に説明
したが、これに限定されるものではなく他の被検ガス成
分にも適用されることは言うまでもない。この場合、被
検ガス成分の種類によって、被検ガス成分捕捉部6の吸
着部6eの吸着剤を適宜選択すれば、さらに効果は増大
する。
Although the gas analyzer is not limited to any particular model, if the analyzer is made portable, the device will be extremely small, so it can be used in several tens of units, unlike conventional gas chromatographs. Kg, which is very large compared to the object to be measured, which limited the range of application, but it is now easier to carry and the range of application has been expanded. Further, in the above embodiment, SF6 gas was used as an example of the gas component to be detected, but it goes without saying that the present invention is not limited to this and can be applied to other gas components to be detected. In this case, the effect can be further enhanced by appropriately selecting the adsorbent for the adsorption section 6e of the test gas component capturing section 6 depending on the type of test gas component.

【0014】[0014]

【発明の効果】以上のように、この発明によれば雰囲気
ガス中の被検ガス成分を被検ガス成分捕捉部で一旦捕捉
し、この被検ガス成分を所定の容積を有する容器に雰囲
気ガスとともに回収して、ガス分析計で容器内の被検ガ
ス成分の濃度を計測するようにしたので、放置時間を短
縮しても装置の一定検出限界内での漏れ検出感度を上げ
ることが可能で、又、分析計を可搬式としたことにより
、適用範囲の拡大が可能なガス漏れ量計測装置を提供す
ることができるという実用上優れた効果を奏する。
As described above, according to the present invention, the test gas component in the atmospheric gas is once captured by the test gas component trapping section, and the test gas component is transferred to the container having a predetermined volume. Since the concentration of the gas component to be detected in the container is measured using a gas analyzer, it is possible to increase leak detection sensitivity within a certain detection limit of the device even if the exposure time is shortened. Furthermore, by making the analyzer portable, it is possible to provide a gas leakage measuring device that can be used in an expanded range of applications, which is an excellent practical effect.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】この発明の一実施例におけるガス漏れ量計測装
置の概略構成を示す図である。
FIG. 1 is a diagram showing a schematic configuration of a gas leakage measuring device in an embodiment of the present invention.

【図2】図1におけるガス漏れ量計測装置の主要部を構
成する被検ガス成分捕捉部の構成を示す断面図である。
FIG. 2 is a cross-sectional view showing the configuration of a gas component capturing section to be detected, which constitutes a main part of the gas leakage measuring device in FIG. 1;

【図3】従来のガス漏れ量計測装置の概略構成を示す図
である。
FIG. 3 is a diagram showing a schematic configuration of a conventional gas leak amount measuring device.

【符号の説明】[Explanation of symbols]

1  吸引ポンプ 5  流量計 6  被検ガス成分捕捉部 8  容器 1 Suction pump 5 Flow meter 6 Test gas component capture unit 8 Container

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  被測定ガス空間から雰囲気ガスを吸引
するポンプと、吸引された上記雰囲気ガス中の被検ガス
成分を加熱・冷却可能な吸着部で吸着することにより捕
捉する被検ガス成分捕捉部と、吸引された上記雰囲気ガ
スを計量する流量計と、上記被検ガス成分捕捉部で捕捉
された上記被検ガス成分を上記雰囲気ガスとともに回収
する所定の容積を有した容器と、この容器内の上記被検
ガス成分の濃度を計測するガス分析計とを備えたことを
特徴とするガス漏れ量計測装置。
1. A pump that sucks atmospheric gas from a gas space to be measured, and capture of a gas component to be detected by adsorbing the gas component in the sucked atmospheric gas with an adsorption unit that can be heated and cooled. a flowmeter for measuring the sucked atmospheric gas, a container having a predetermined volume for collecting the test gas component captured by the test gas component capture section together with the atmospheric gas, and the container. A gas leak amount measuring device comprising: a gas analyzer for measuring the concentration of the gas component to be detected;
【請求項2】  ガス分析計は可搬式であることを特徴
とする請求項1記載のガス漏れ量計測装置。
2. The gas leak amount measuring device according to claim 1, wherein the gas analyzer is portable.
JP3006830A 1991-01-24 1991-01-24 Apparatus for measuring amount of leaking gas Pending JPH04262231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3006830A JPH04262231A (en) 1991-01-24 1991-01-24 Apparatus for measuring amount of leaking gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3006830A JPH04262231A (en) 1991-01-24 1991-01-24 Apparatus for measuring amount of leaking gas

Publications (1)

Publication Number Publication Date
JPH04262231A true JPH04262231A (en) 1992-09-17

Family

ID=11649144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3006830A Pending JPH04262231A (en) 1991-01-24 1991-01-24 Apparatus for measuring amount of leaking gas

Country Status (1)

Country Link
JP (1) JPH04262231A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160253A (en) * 1992-11-26 1994-06-07 Nippon Telegr & Teleph Corp <Ntt> Gas sampling method and unit for mass spectrometric gas leak detector
JP2013515252A (en) * 2009-12-21 2013-05-02 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method and apparatus for measuring leakage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160253A (en) * 1992-11-26 1994-06-07 Nippon Telegr & Teleph Corp <Ntt> Gas sampling method and unit for mass spectrometric gas leak detector
JP2013515252A (en) * 2009-12-21 2013-05-02 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method and apparatus for measuring leakage

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