JPH0426204Y2 - - Google Patents
Info
- Publication number
- JPH0426204Y2 JPH0426204Y2 JP1987121970U JP12197087U JPH0426204Y2 JP H0426204 Y2 JPH0426204 Y2 JP H0426204Y2 JP 1987121970 U JP1987121970 U JP 1987121970U JP 12197087 U JP12197087 U JP 12197087U JP H0426204 Y2 JPH0426204 Y2 JP H0426204Y2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- guide roller
- retaining ring
- arm
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 26
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121970U JPH0426204Y2 (US07935154-20110503-C00006.png) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121970U JPH0426204Y2 (US07935154-20110503-C00006.png) | 1987-08-07 | 1987-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426147U JPS6426147U (US07935154-20110503-C00006.png) | 1989-02-14 |
| JPH0426204Y2 true JPH0426204Y2 (US07935154-20110503-C00006.png) | 1992-06-24 |
Family
ID=31369467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121970U Expired JPH0426204Y2 (US07935154-20110503-C00006.png) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426204Y2 (US07935154-20110503-C00006.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226131B2 (US07935154-20110503-C00006.png) * | 1980-02-27 | 1987-06-06 | Tokyo Shibaura Electric Co |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
| JPH0312019Y2 (US07935154-20110503-C00006.png) * | 1985-07-26 | 1991-03-22 |
-
1987
- 1987-08-07 JP JP1987121970U patent/JPH0426204Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226131B2 (US07935154-20110503-C00006.png) * | 1980-02-27 | 1987-06-06 | Tokyo Shibaura Electric Co |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6426147U (US07935154-20110503-C00006.png) | 1989-02-14 |
