JPH04259246A - Cooling mechanism for integrated circuit - Google Patents

Cooling mechanism for integrated circuit

Info

Publication number
JPH04259246A
JPH04259246A JP3041114A JP4111491A JPH04259246A JP H04259246 A JPH04259246 A JP H04259246A JP 3041114 A JP3041114 A JP 3041114A JP 4111491 A JP4111491 A JP 4111491A JP H04259246 A JPH04259246 A JP H04259246A
Authority
JP
Japan
Prior art keywords
integrated circuit
fins
plate
block
heat sink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3041114A
Other languages
Japanese (ja)
Inventor
Tomokazu Kaneko
智一 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3041114A priority Critical patent/JPH04259246A/en
Publication of JPH04259246A publication Critical patent/JPH04259246A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To improve cooling performance by providing a passage for circulating refrigerant for cooling an integrated circuit, a heat sink plate provided in close contact with the circuit, and a fin provided on the plate to be secured in the passage. CONSTITUTION:A heat sink plate 9 is mounted on an integrated circuit 1 through highly thermal conductive compound 8. A plurality of fins are provided on the plate 9, and the fins are secured with solder 11 in a state inserted into slits 10 of a block 7. The slits 10 are so formed as to pass through a passage 6 for circulating refrigerant 5 in the block 7, and the block 7 is secured to a frame 4 similarly to a ceramic board 2. Accordingly, the fins of the plate 9 are secured in the passage 6 through the slits 10. Heat generated from an integrated circuit 4 is transferred to the plate 9 via the component 8, and transferred from the fins of the plate 9 to the refrigerant 5 in the passage 6 of the block 7.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【技術分野】本発明は集積回路の冷却機構に関し、特に
集積回路自体の冷却構造に関する。
TECHNICAL FIELD The present invention relates to a cooling mechanism for an integrated circuit, and more particularly to a cooling structure for the integrated circuit itself.

【0002】0002

【従来技術】従来、この種の冷却構造としては、図2に
示すように、集積回路1からの放熱が熱伝導性コンパウ
ンド8によって熱伝導ブロック12に伝えられ、熱伝導
ブロック12からコールドプレート13へと伝達される
ことによって、コールドプレート13の流路6を循環す
る冷媒5によって冷却される構造となっていた。
2. Description of the Related Art Conventionally, in this type of cooling structure, as shown in FIG. The structure is such that the refrigerant 5 is cooled by the refrigerant 5 circulating through the flow path 6 of the cold plate 13.

【0003】このような従来の冷却構造では、集積回路
1から流路6内の冷媒5までの間に、たとえば熱伝導ブ
ロック12とコールドプレート13との間のように金属
同士の接触面が複数箇所あるため、集積回路1からの放
熱の伝導性が悪くなるという欠点がある。また、集積回
路1と冷媒5との間に距離があるので、冷却性能が上が
らないという欠点がある。
[0003] In such a conventional cooling structure, there are a plurality of metal contact surfaces between the integrated circuit 1 and the coolant 5 in the flow path 6, such as between the heat conduction block 12 and the cold plate 13. Since there are some locations, there is a drawback that the conductivity of heat radiation from the integrated circuit 1 is poor. Furthermore, since there is a distance between the integrated circuit 1 and the coolant 5, there is a drawback that the cooling performance cannot be improved.

【0004】0004

【発明の目的】本発明は上記のような従来のものの欠点
を除去すべくなされたもので、冷却性能を向上させるこ
とができる集積回路の冷却機構の提供を目的とする。
OBJECTS OF THE INVENTION The present invention has been made to eliminate the above-mentioned drawbacks of the conventional devices, and an object of the present invention is to provide a cooling mechanism for integrated circuits that can improve cooling performance.

【0005】[0005]

【発明の構成】本発明による集積回路の冷却機構は、基
板上に搭載された集積回路の冷却機構であって、前記集
積回路を冷却するための冷媒を循環させる流路と、前記
集積回路に密着して設けられた放熱板と、前記流路内に
固定されるように前記放熱板上に設けられたフィンとを
有することを特徴とする。
A cooling mechanism for an integrated circuit according to the present invention is a cooling mechanism for an integrated circuit mounted on a substrate, and includes a flow path for circulating a coolant for cooling the integrated circuit, and a cooling mechanism for cooling the integrated circuit. It is characterized by having a heat sink provided in close contact with each other, and fins provided on the heat sink so as to be fixed within the flow path.

【0006】[0006]

【実施例】次に、本発明の一実施例について図面を参照
して説明する。
[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.

【0007】図1は本発明の一実施例の縦断面図である
。図において、集積回路1は外部接続のためのピン3を
有し、枠4に固定されたセラミック基板2上に搭載され
、半田でセラミック基板2に接続されている。また、集
積回路1上には高熱伝導性のコンパウンド8を介して放
熱板9が取付けられている。放熱板9には複数のフィン
が設けられており、これらのフィンはブロック7のスリ
ット10に差込まれた状態で半田11によって固定され
ている。このスリット10はブロック7において冷媒5
が循環する流路6に貫通するように形成されており、ま
たブロック7はセラミック基板2と同様に枠4に固定さ
れている。よって、放熱板9のフィンはスリット10を
介して流路6内に固定されることになる。
FIG. 1 is a longitudinal sectional view of one embodiment of the present invention. In the figure, an integrated circuit 1 has pins 3 for external connections, is mounted on a ceramic substrate 2 fixed to a frame 4, and is connected to the ceramic substrate 2 with solder. Further, a heat sink 9 is attached to the integrated circuit 1 via a highly thermally conductive compound 8. The heat dissipation plate 9 is provided with a plurality of fins, and these fins are inserted into the slits 10 of the block 7 and fixed with solder 11. This slit 10 is connected to the refrigerant 5 in the block 7.
The block 7 is formed so as to pass through the flow path 6 in which it circulates, and the block 7 is fixed to the frame 4 similarly to the ceramic substrate 2. Therefore, the fins of the heat sink 9 are fixed in the flow path 6 through the slits 10.

【0008】集積回路4で発生した熱はコンパウンド8
を介して放熱板9に伝達され、放熱板9のフィンからブ
ロック7の流路6内の冷媒5に伝達される。したがって
、ブロック7の流路6内の冷媒5を循環させることによ
って、冷媒5で放熱板9のフィンが冷却され、放熱板9
を介して集積回路1が冷却される。
The heat generated in the integrated circuit 4 is transferred to the compound 8
The coolant is transmitted to the heat sink 9 through the fins of the heat sink 9, and is transmitted from the fins of the heat sink 9 to the refrigerant 5 in the flow path 6 of the block 7. Therefore, by circulating the coolant 5 in the flow path 6 of the block 7, the fins of the heat sink 9 are cooled by the coolant 5, and the heat sink 9 is cooled by the coolant 5.
The integrated circuit 1 is cooled through.

【0009】このように、集積回路1を冷却するための
放熱板9のフィンを、冷媒5が循環する流路6内に固定
するようにすることによって、集積回路1にコンパウン
ド8を介して密着した放熱板9が冷媒5によって直接冷
却されるとともに、集積回路1と冷媒5との距離が近く
なるので、従来の冷却構造に比べて冷却能力を向上させ
ることができる。
In this manner, by fixing the fins of the heat dissipation plate 9 for cooling the integrated circuit 1 within the flow path 6 through which the coolant 5 circulates, the fins of the heat dissipation plate 9 for cooling the integrated circuit 1 are fixed to the integrated circuit 1 through the compound 8. The heat sink 9 is directly cooled by the coolant 5, and the distance between the integrated circuit 1 and the coolant 5 is shortened, so that the cooling capacity can be improved compared to the conventional cooling structure.

【0010】また、放熱板9のフィンとブロック7とを
半田11などで接続し、ブロック7のスリット10の幅
に余裕を持たせることによって、集積回路1の高さや傾
きなどに合わせて放熱板9を取付けることができるので
、集積回路1と放熱板9との間に常に一定の間隙を保つ
ことができる。よって、集積回路1の交換時にブロック
7を交換することなく、放熱板9の傾きや高さを変える
ことができる。
[0010] Furthermore, by connecting the fins of the heat sink 9 and the block 7 with solder 11 or the like, and providing a margin for the width of the slit 10 of the block 7, the heat sink can be adjusted to suit the height and inclination of the integrated circuit 1. 9 can be attached, a constant gap can always be maintained between the integrated circuit 1 and the heat sink 9. Therefore, the inclination and height of the heat sink 9 can be changed without replacing the block 7 when replacing the integrated circuit 1.

【0011】[0011]

【発明の効果】以上説明したように本発明によれば、基
板上に搭載された集積回路を冷却するための冷媒を循環
させる流路内に、集積回路に密着した放熱板上のフィン
を固定するようにすることによって、冷却性能を向上さ
せることができるという効果がある。
[Effects of the Invention] As explained above, according to the present invention, the fins on the heat sink that are in close contact with the integrated circuit are fixed in the flow path that circulates the coolant for cooling the integrated circuit mounted on the substrate. By doing so, there is an effect that cooling performance can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例の縦断面図である。FIG. 1 is a longitudinal sectional view of an embodiment of the present invention.

【図2】従来例の縦断面図である。FIG. 2 is a vertical cross-sectional view of a conventional example.

【符号の説明】[Explanation of symbols]

1  集積回路 2  セラミック基板 6  流路 7  ブロック 8  コンパウンド 9  放熱板 10  スリット 11  半田 1 Integrated circuit 2 Ceramic substrate 6 Flow path 7 Block 8 Compound 9 Heat sink 10 slit 11 Solder

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  基板上に搭載された集積回路の冷却機
構であって、前記集積回路を冷却するための冷媒を循環
させる流路と、前記集積回路に密着して設けられた放熱
板と、前記流路内に固定されるように前記放熱板上に設
けられたフィンとを有することを特徴とする冷却機構。
1. A cooling mechanism for an integrated circuit mounted on a substrate, comprising: a flow path for circulating a coolant for cooling the integrated circuit; a heat sink provided in close contact with the integrated circuit; A cooling mechanism comprising: a fin provided on the heat sink so as to be fixed within the flow path.
JP3041114A 1991-02-13 1991-02-13 Cooling mechanism for integrated circuit Pending JPH04259246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3041114A JPH04259246A (en) 1991-02-13 1991-02-13 Cooling mechanism for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3041114A JPH04259246A (en) 1991-02-13 1991-02-13 Cooling mechanism for integrated circuit

Publications (1)

Publication Number Publication Date
JPH04259246A true JPH04259246A (en) 1992-09-14

Family

ID=12599441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3041114A Pending JPH04259246A (en) 1991-02-13 1991-02-13 Cooling mechanism for integrated circuit

Country Status (1)

Country Link
JP (1) JPH04259246A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6114761A (en) * 1998-01-20 2000-09-05 Lsi Logic Corporation Thermally-enhanced flip chip IC package with extruded heatspreader
WO2002093339A1 (en) * 2001-05-15 2002-11-21 Mok-Hyoung Lee Heat transfer apparatus using refrigerant and computer having the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6114761A (en) * 1998-01-20 2000-09-05 Lsi Logic Corporation Thermally-enhanced flip chip IC package with extruded heatspreader
WO2002093339A1 (en) * 2001-05-15 2002-11-21 Mok-Hyoung Lee Heat transfer apparatus using refrigerant and computer having the same

Similar Documents

Publication Publication Date Title
US7209354B2 (en) Ball grid array package with heat sink device
WO2011096218A1 (en) Heat radiation device and electronic equipment using the same
US20130206367A1 (en) Heat dissipating module
JP2005064384A (en) Lsi package with interface module and heat sink used for it
JP2928236B1 (en) Heat dissipating member for heating element
JPH042156A (en) Power semiconductor device
JP2002289750A (en) Multi-chip module and its radiation structure
JP4438526B2 (en) Power component cooling system
JP2000332171A (en) Heat dissipation structure of heat generating element and module having that structure
JP2006210611A (en) Heat sink equipped with radiation fin, and manufacturing method thereof
JP2913879B2 (en) Electronic component cooling structure
JPH04259246A (en) Cooling mechanism for integrated circuit
JP2624362B2 (en) Heat dissipation and shielding case for semiconductor elements
JP4469101B2 (en) Electronic circuit device having heat dissipation structure
JPS6142864B2 (en)
US20080011459A1 (en) Thermally conductive cover directly attached to heat producing component
JPH0727677Y2 (en) Refrigerant flow guide mechanism for heat sink
JPH0494562A (en) Cooling structure for integrated circuit
JPS59155158A (en) Cooling structure of semiconductor device
JPH03208398A (en) Semiconductor device
JPH06181395A (en) Heat dissipation printed-wiring board
JPH06188342A (en) Cooling device for semiconductor element
JPH065750A (en) Cooling mechanism for semiconductor element
JP2567980Y2 (en) Heat pipe studs and heat pipe stud integrated circuit components
JPH073187U (en) Circuit board device