JPH0425859U - - Google Patents
Info
- Publication number
- JPH0425859U JPH0425859U JP6458090U JP6458090U JPH0425859U JP H0425859 U JPH0425859 U JP H0425859U JP 6458090 U JP6458090 U JP 6458090U JP 6458090 U JP6458090 U JP 6458090U JP H0425859 U JPH0425859 U JP H0425859U
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- thin film
- optical information
- film forming
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 9
- 239000013307 optical fiber Substances 0.000 claims description 8
- 238000005070 sampling Methods 0.000 claims description 3
- 238000012806 monitoring device Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 7
- 238000001514 detection method Methods 0.000 claims 3
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6458090U JPH0425859U (fr) | 1990-06-19 | 1990-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6458090U JPH0425859U (fr) | 1990-06-19 | 1990-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0425859U true JPH0425859U (fr) | 1992-03-02 |
Family
ID=31595653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6458090U Pending JPH0425859U (fr) | 1990-06-19 | 1990-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425859U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022545500A (ja) * | 2019-08-30 | 2022-10-27 | アプライド マテリアルズ インコーポレイテッド | 電子ビームｐｖｄ終点検出および閉ループ処理制御システム |
-
1990
- 1990-06-19 JP JP6458090U patent/JPH0425859U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022545500A (ja) * | 2019-08-30 | 2022-10-27 | アプライド マテリアルズ インコーポレイテッド | 電子ビームｐｖｄ終点検出および閉ループ処理制御システム |
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