JPH0425857U - - Google Patents
Info
- Publication number
- JPH0425857U JPH0425857U JP11028690U JP11028690U JPH0425857U JP H0425857 U JPH0425857 U JP H0425857U JP 11028690 U JP11028690 U JP 11028690U JP 11028690 U JP11028690 U JP 11028690U JP H0425857 U JPH0425857 U JP H0425857U
- Authority
- JP
- Japan
- Prior art keywords
- power source
- external power
- rod
- filament
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11028690U JPH0425857U (cs) | 1989-12-01 | 1990-10-22 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010689 | 1989-12-01 | ||
| JP11028690U JPH0425857U (cs) | 1989-12-01 | 1990-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0425857U true JPH0425857U (cs) | 1992-03-02 |
Family
ID=31890333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11028690U Pending JPH0425857U (cs) | 1989-12-01 | 1990-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425857U (cs) |
-
1990
- 1990-10-22 JP JP11028690U patent/JPH0425857U/ja active Pending