JPH0425704Y2 - - Google Patents
Info
- Publication number
- JPH0425704Y2 JPH0425704Y2 JP1988170207U JP17020788U JPH0425704Y2 JP H0425704 Y2 JPH0425704 Y2 JP H0425704Y2 JP 1988170207 U JP1988170207 U JP 1988170207U JP 17020788 U JP17020788 U JP 17020788U JP H0425704 Y2 JPH0425704 Y2 JP H0425704Y2
- Authority
- JP
- Japan
- Prior art keywords
- cup
- chemical liquid
- tank
- chemical
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 24
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 4
- 230000010349 pulsation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988170207U JPH0425704Y2 (nl) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988170207U JPH0425704Y2 (nl) | 1988-12-30 | 1988-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0290843U JPH0290843U (nl) | 1990-07-18 |
JPH0425704Y2 true JPH0425704Y2 (nl) | 1992-06-19 |
Family
ID=31460952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988170207U Expired JPH0425704Y2 (nl) | 1988-12-30 | 1988-12-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0425704Y2 (nl) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63168026A (ja) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | 現像方法 |
-
1988
- 1988-12-30 JP JP1988170207U patent/JPH0425704Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63168026A (ja) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | 現像方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0290843U (nl) | 1990-07-18 |
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