JPH04255805A - Sensor body type liquid injecting and discharging mechanism - Google Patents

Abstract

PURPOSE:To decrease the capacity of a sensor body type liquid injecting and discharging mechanism which injects or discharges refractive index matching liquid into and from a matrix optical switch and to secure the reliability for a long time. CONSTITUTION:Light to irradiate a reflection pattern 38 provided to the matrix optical switch 34 is guided to a light absorber 55 which constitutes part of a liquid tank 58 for the refractive index matching liquid and the light absorber is expanded to decrease the internal capacity of the liquid tank 58, thereby injecting refractive index matching liquid which becomes excessive into a liquid reservoir 39 through an extremely thin pipe 29.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to a sensor-integrated type that injects or discharges a refractive index matching liquid having a refractive index approximately equal to the refractive index of an optical waveguide core into a minute gap in a matrix optical switch used in an optical communication system. This relates to a liquid injection and discharge mechanism.

0002

2. Description of the Related Art FIG. 2 shows an example of a conventional matrix optical switch of this kind, for example, an "optical path switching device" (Japanese Patent Application No. 62-2
No. 04845). In the figure, reference numeral 1 denotes a matrix optical switch, which has a plurality of optical waveguides 2 and 3 that intersect with each other in a matrix, and a minute gap (hereinafter referred to as a difference groove) 4 is provided at each intersection of the optical waveguides to cross them. There is. Switching of the optical path in the matrix optical switch 1 is performed by injecting or removing a refractive index matching liquid (hereinafter referred to as liquid) having a refractive index approximately equal to the refractive index of the optical waveguide core into the difference point groove 4.

[0003] The difference point grooves 4 of the matrix optical switch 1 are formed so that their width is several tens of micrometers or less from the viewpoint of reducing transmission loss, and the interval (pitch) between each difference point groove 4 is about several hundred μm. They are arranged in high density. Therefore, the liquid injection/discharge mechanism for injecting or discharging liquid into the difference point groove 4 of such a matrix optical switch 1 has a function of detecting the target difference point groove 4 and a function to accurately inject a minute amount of liquid into the difference point groove 4. The ability to inject or drain is required. However, at present, there has been no example of realizing these two functions with a single mechanism or device.

FIG. 3 shows an example of a conventional sensor-integrated liquid injection/discharge mechanism devised by combining current technologies. Here, a dispenser for injecting solder or epoxy resin and a CCD camera for detecting the difference groove Indicates a combination of In the figure, 5 is a dispenser, 6 is a z-direction moving stage, 7 is an xy-direction moving stage, 8 is a CCD camera, and 8'
is the optical axis of the CCD camera 8, 9 is the CRT, 10 is the nozzle,
10' is the axis of the nozzle 10, 11 is the piping, 12 is the pump,
13 is a liquid.

To position the matrix optical switch 1 to the target difference groove 4, first, the CCD camera 8 is focused on the difference groove 4 by the z-direction moving stage 6, and then the CR
The xy transfer amount is calculated from the image information captured on T9, and using this calculation result, the matrix optical switch 1 is transferred by the xy direction moving stage 7, and the target difference point groove 4 is moved to the CC.
Position it directly below the optical axis 8' of the D camera 8. Note that the image information processing technology and the transfer technology of each stage are well known, and therefore will not be described in detail.

Next, in order to inject or discharge the liquid 13 into the target difference point groove 4, the stage 7 is moved in the x and y directions by an offset amount δ between the optical axis 8' of the CCD camera 8 and the axis 10' of the nozzle 10. After the shaft 10' is positioned at the center of the difference groove 4, the inside of the dispenser 5 is pressurized by the pump 12 via the piping 11, and the liquid 13 is injected into the difference groove 4 from the nozzle 10. When draining the liquid, as well as when injecting it, press C.
After detecting and positioning the target difference point groove 4 with the CD camera 8, move the xy direction moving stage 7 by the offset amount δ to position the shaft 10' at the center of the difference point groove 4, and then move the piping 11. Through the pump 12, the pressure inside the dispenser 5 is reduced, and the nozzle 10 discharges the liquid 13 from the difference groove 4.

However, in the sensor-integrated liquid injection and discharge mechanism, the optical axis 8' of the CCD camera 8 that detects the target difference point groove 4 and the axis 10' of the nozzle 10 of the dispenser 5 that injects or discharges the liquid 13 are separated. Therefore, it is necessary to move the matrix optical switch 1 or the dispenser 5 by the offset amount δ after detecting the target difference point groove 4. In general, manufacturing errors and assembly errors are difficult to avoid in industrial products, and installation errors caused by these are CC
Since this occurs between the optical axis 8' of the D camera 8 and the axis 10' of the nozzle 10, a relative positional deviation occurs between the difference point groove 4 and the nozzle 10 due to these installation errors during the transfer. There was a problem. In addition, in the above device, since the liquid is injected or discharged into the target difference point groove 4 by pressurizing or depressurizing the dispenser 5 by the pump 12, it is difficult to accurately inject or discharge the liquid due to the delay in the operation of the pump 12. There was a problem.

FIG. 4 shows another example of a conventional sensor-integrated liquid injection/discharge mechanism aimed at solving the above-mentioned problems, and here shows one in which a microscope and a nozzle with a fine movement mechanism are combined. In the figure, the same components as in FIG. 3 are represented by the same symbols,
8 is a CCD camera, 8' is an optical axis of the CCD camera 8, 9 is a CRT, 11 is a pipe, 12 is a pump, 14 is a microscope, 1
5 is a sample stage in the x and y directions, 16 is an objective lens, 17 is a z direction moving mechanism, 18 is a three-dimensional fine movement stage for a nozzle, and 19 is a nozzle.

To position the matrix optical switch 1 to the target difference groove 4, first, the z-direction moving mechanism 17 focuses the objective lens 16 of the microscope 14 on the difference groove 4, and then the CCD camera 8 Based on the captured image on the CRT 9, the sample stage 15 is moved in the x and y directions to detect the target difference point groove 4. Next, the three-dimensional fine movement table 1 for the nozzle
8 to position the nozzle 19 at the focus of the objective lens 16 of the microscope 14. Thereafter, the pressure is increased by the pump 12, and the liquid is injected from the nozzle 19. To discharge the liquid, the objective lens 16 of the microscope 14 is focused on the target difference groove 4, and after detecting the target difference groove 4, the nozzle 19 is placed near the focus of the objective lens 16. This is done by positioning and reducing the pressure using the pump 12.

As described above, the sensor-integrated liquid injection/discharge mechanism has the advantage that the liquid injection state and discharge state can be monitored using the microscope 14.

However, the optical axis 8' of the CCD camera 8
Since it is difficult to install the nozzle 19 in such a way that it matches the inlet and outlet at the tip of the nozzle 19, the
A directional sample stage 15 and a nozzle three-dimensional fine movement table 18, which is a nozzle positioning mechanism, are separately provided, and these mechanisms are operated separately under the supervision of an objective lens 16 and a CCD camera 8 to form a difference point groove. 4, the nozzle 19 must be positioned, which poses a problem in that the operation is complicated and time consuming.

Furthermore, it is difficult to miniaturize the devices shown in FIGS. 3 and 4 described above, and the positioning operation is complicated and difficult to automate. There is a problem in that the target difference groove must be detected from the groove, and it is not possible to increase the speed and precision of positioning to the target difference groove and to increase the reliability of liquid injection or discharge. Furthermore, in these devices, liquid is injected into or discharged from the differential groove by pressurization or depressurization of the pump, so there is a problem in that it is difficult to accurately inject and discharge liquid due to the delay in pump operation.

FIG. 5 shows still another example of a conventional sensor-integrated liquid injection/discharge mechanism aimed at solving the above-mentioned problems. A reflection pattern indicating the position of the difference groove provided nearby is imaged on a CCD, the target difference groove is detected and positioned from the image signal by the CCD, and the liquid is injected and discharged through the fine tube at the same position. Show what you have done. In the figure, the same components as in FIG.
is a semiconductor laser, 21 is a collimator lens, 22 is a beam shaping prism, 23 is a total reflection prism, 24 is a polarizing beam splitter, 25 is a λ/4 plate, 26 is a transparent glass plate, 27 is a lens holder, 28 is an objective lens, 29 is a fine tube, 30 is an imaging lens, 31 is a CCD, 32 is a transparent pipe, and 33 is a liquid tank.

FIG. 6 shows an example of a matrix optical switch with a reflective pattern compatible with the sensor-integrated liquid injection/discharge mechanism. In the figure, reference numeral 34 denotes a matrix optical switch, in which a plurality of optical waveguides 35 and 36 intersect with each other in a matrix, and at each intersection point grooves 3 extending across the optical waveguides 35 and 36 cross each other.
7, and is also provided with a reflective pattern 38 (alphabets "A", "B", "C", and "D" in the drawing) continuous with the difference point groove 37 and indicating the address of the difference point groove on the bottom surface thereof. A liquid reservoir 39 is provided.

In the sensor-integrated liquid injection and discharge mechanism shown in FIG. 5, in order to simplify the configuration and make it more economical by easing positioning, and to improve the reliability of liquid injection and discharge, a sensor is provided near the difference point groove. The liquid is injected into or discharged from the point groove through this liquid reservoir.

First, positioning to the liquid reservoir in the sensor-integrated liquid injection/discharge mechanism will be explained.

The light emitted from the semiconductor laser 20 passes through a collimator lens 21 and a beam shaping prism 22, and is converted into a linearly polarized parallel beam 40 shaped into a circular shape.
The optical path is bent by 90 degrees by the total reflection prism 23 and enters the polarizing beam splitter 24 . The linearly polarized parallel beam 40 incident on the polarizing beam splitter 24 is totally reflected by the polarizing beam splitter 24, and is further converted from the linearly polarized parallel beam 40 into a circularly polarized beam 41 by the λ/4 plate 25. After that, the circularly polarized beam 41 is transmitted to the transparent glass plate 2.
6 and is focused by an objective lens 28 held by a lens holder 27, and illuminates a reflection pattern 38 provided in a liquid reservoir 39 of a matrix optical switch 34. This circularly polarized beam 41 has a beam spot 42 as shown in FIG.
The diameter of the reflection pattern 38 is set to be slightly larger than that of the reflection pattern 38.

After passing through the λ/4 plate 25 and the polarizing beam splitter 24, the circularly polarized reflected beam 43 reflected from the reflection pattern 38 is transformed into a linearly polarized reflected beam having a phase difference of 90 degrees from the previously forward linearly polarized parallel beam 40. 44 and is transmitted through the polarizing beam splitter 24. The linearly polarized reflected beam 44 that has passed through the polarized beam splitter 24 is imaged onto the CCD 31 by the imaging lens 30.
As shown in FIG. 7, a pattern 45 corresponding to the reflection pattern 38 is formed as an enlarged image on D31. Said CCD3
The address position of the corresponding difference point groove 37 is detected from the image information of the pattern 45 (letter "A" in the illustrated example) imaged on the pattern 1, and the center of gravity of the pattern 45 is calculated. The transfer amount necessary for the position to match the center position of the CCD 31 is calculated, and the sensor-integrated liquid injection/discharge mechanism is moved to position the liquid in the target liquid reservoir 39 based on the calculation result.

Next, the injection and discharge of liquid into the target difference point groove will be explained.

In order to inject the liquid into the target difference groove 37, after positioning it in the liquid reservoir 39 which is continuous with the difference groove 37, the liquid tank 3
The liquid 13 in 3 is pumped through the transparent pipe 32 and the fine pipe 29 using the pump 12.
and injects the liquid 13 into the liquid reservoir 39. Liquid reservoir 3
The liquid injected into the groove 9 is naturally injected into the groove 37 due to the surface tension of the side wall or bottom of the liquid reservoir 39 and the surface tension of the groove 37 . At this time, the liquid is injected into the liquid reservoir 39 by injecting the liquid that has become spherical at the tip of the fine tube 29 into the liquid reservoir 39, which is the injection destination.
This is done by contacting the side wall surface or bottom surface of No.9. In addition, to discharge the liquid from the difference groove 37, after positioning it to the liquid reservoir 39, insert the fine tube 29 into the liquid in the liquid reservoir 39, reduce the pressure inside the transparent pipe 32 and the fine tube 29 with the pump 12, and then The liquid is sucked in and discharged from the difference groove 37 through the point 29.

[0021] As described above, the sensor-integrated liquid injection and discharge mechanism has the advantage that it can almost solve the problem of relative positional deviation between the nozzle and the point groove caused by manufacturing errors and assembly errors.

[0022]

[Problems to be Solved by the Invention] However, the sensor-integrated liquid injection and discharge mechanism shown in FIG. 5 also uses positive or negative air pressure for liquid injection or discharge, similar to the device shown in FIGS. 3 or 4. Therefore, a pump, piping, etc. are required, which increases the volume of the entire device, and there is also the problem that it is difficult to maintain stable performance of the pump over a long period of time.

In view of the above-mentioned conventional problems, the present invention provides a sensor-integrated liquid injection/drainage mechanism that can reduce the volume of the entire device and can inject or discharge liquid with high reliability over a long period of time. The purpose is to

[0024]

Means for Solving the Problems In order to achieve the above-mentioned object, the present invention provides a first aspect in which a plurality of optical waveguides are arranged so as to intersect with each other in a matrix, and each intersection is formed at a predetermined angle with the optical waveguide. Light emitted from a light source is irradiated onto a matrix optical switch, which is formed by providing grooves and a liquid reservoir that is continuous with each groove and has a predetermined reflection pattern on the bottom surface, and the reflected light is reflected by an objective lens. An image is formed on a light receiving element, and based on the obtained image information, the center of the objective lens is positioned so that it almost coincides with the center of the reflection pattern, and the optical waveguide core is then In a sensor-integrated liquid injection/discharge mechanism that discharges or sucks a refractive index matching liquid having a refractive index substantially equal to the refractive index of and a sensor-integrated liquid injection/discharge mechanism comprising means for arbitrarily switching and guiding the light emitted from the light source to either the member or the matrix optical switch; The optical waveguides are arranged so as to intersect with each other in a matrix, and grooves are provided at each intersection to form a predetermined angle with the optical waveguide, and a liquid reservoir is provided continuous to each groove and having a predetermined reflection pattern on the bottom surface thereof. A matrix optical switch consisting of a light source is irradiated with light emitted from a light source, the reflected light is imaged on a light receiving element by an objective lens, and based on the image information obtained, the center of the objective lens is the center of the reflection pattern. and a sensor-integrated liquid injection/discharge system that discharges or suctions a refractive index matching liquid having a refractive index approximately equal to the refractive index of the optical waveguide core from a fine tube provided near the center of the objective lens. In the mechanism,
A means for configuring a part of a liquid tank storing a refractive index matching liquid with an electricity-temperature conversion element, or arranging an electricity-temperature conversion element inside the liquid tank, and supplying electricity to the electricity-temperature conversion element. We propose a liquid injection and discharge mechanism with an integrated sensor.

[0025]

[Operation] According to claim 1 of the present invention, the light emitted from the light source is guided to the member that absorbs light and expands, so that the member expands, thereby forming a liquid tank for storing the refractive index matching liquid. The internal volume of the liquid tank becomes smaller, and the refractive index matching liquid is discharged from the liquid tank to the outside through the microtube.

Further, according to claim 2, by supplying electricity to the electricity-temperature conversion element, the element generates heat, which causes the refractive index matching liquid in the liquid tank to expand, and the liquid tank to expand by that amount. The refractive index matching liquid is discharged to the outside through the microtube.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the sensor-integrated liquid injection and discharge mechanism of the present invention. In the figure, the same components as those of the conventional example are designated by the same reference numerals. That is, 20 is a semiconductor laser,
21 is a collimator lens, 22 is a beam shaping prism,
23 is a total reflection prism, 24 is a polarizing beam splitter,
25 is a λ/4 plate, 27 is a lens holder, 28 is an objective lens, 29 is a microtube, 30 is an imaging lens, 31 is a CCD,
50 is a total reflection prism mounting stand, 51 is a linear guide, 52
is a ball screw, 53 is a total reflection prism motor, 54 is a heating lens, 55 is a light absorber, 56 is a light shutter, 57
58 is an LD drive current switch and a liquid tank. The matrix optical switch to which this embodiment is applied is the same as that shown in FIG. 6, and the positioning in the difference point groove is also substantially the same as the conventional example shown in FIG.

First, positioning to the liquid reservoir near the target difference point groove will be explained.

At the time of positioning, the total reflection prism mounting base 50 is in the position shown in FIG. The emitted light from the semiconductor laser 20 driven by the LD drive current switch 57 switched to the low output side passes through the collimator lens 21 and the beam shaping prism 22, and then is converted into a circularly shaped linearly polarized parallel beam 40. After that, the optical path is bent by 90 degrees by the total reflection prism 23 and enters the polarizing beam splitter 24. The linearly polarized parallel beam 40 incident on the polarizing beam splitter 24 is totally reflected by the polarizing beam splitter 24, and is further converted from the linearly polarized parallel beam 40 into a circularly polarized beam 41 by the λ/4 plate 25. Thereafter, the circularly polarized beam 41 passes through a liquid tank 58 filled with a liquid (not shown) and is focused by the objective lens 28 held in the lens holder 27, and is focused on a reflection pattern provided in the liquid reservoir 39 of the matrix optical switch 34. 38 irradiation. This circularly polarized beam 4
1 is set so that the diameter of the beam spot is slightly larger than the reflection pattern 38, as described above.

After passing through the λ/4 plate 25 and the polarizing beam splitter 24, the circularly polarized reflected beam 43 reflected from the reflection pattern 38 becomes a linearly polarized reflected beam having a phase difference of 90 degrees from the linearly polarized parallel beam 40 on the previous outgoing path. 44 and is transmitted through the polarizing beam splitter 24. The linearly polarized reflected beam 44 transmitted through the polarized beam splitter 24 is imaged on the CCD 31 via the imaging lens 30 and the optical shutter 56, and a pattern corresponding to the reflection pattern 38 is enlarged on the CCD 31 as described above. imaged. The address position of the corresponding difference point groove 37 is detected from the image information of the pattern imaged on the CCD 31, and the position of the center of gravity of the pattern is calculated, and the necessary steps are performed in order for the center of gravity position to match the center position of the CCD 31. By calculating the transfer amount and transferring based on the calculated result, the liquid is positioned at the target liquid reservoir 39.

Next, the injection and discharge of liquid into the target difference point groove will be explained.

In order to inject the liquid into the target difference groove 37, after positioning the liquid in the liquid reservoir 39 which is continuous with the difference groove 37, drive the total reflection prism motor 53 directly connected to the ball screw 52, and move the reflection prism mounting base. 50 is positioned in the position shown in FIG. Next, the high output light 46 from the semiconductor laser 20 driven by the LD drive current switch 57 switched to the high output side is focused by the heating lens 54 and irradiates the light absorber 55 . The light absorber 55 is a black-dyed copper piece-like object, and is heated by laser beam irradiation and its volume expands. When the volume of the light absorber 55 expands, the liquid in the liquid tank 58 is discharged through the microtube 29 and injected into the liquid reservoir 39. The liquid injected into the liquid reservoir 39 is naturally injected into the difference groove 37 due to the surface tension of the side wall surface or bottom of the liquid reservoir 39 and the surface tension of the difference groove 37 . To explain more precisely, the injection of liquid into the liquid reservoir 39 involves transferring the liquid that has become spherical at the tip of the microtube 29 to the liquid reservoir 39 which is the injection destination.
Do this by contacting the side wall or bottom of the

On the other hand, the liquid from the difference groove 37 is discharged from the liquid reservoir 3.
9, the total reflection prism motor 53 directly connected to the ball screw 52 is driven to move the reflection prism to the reflection prism mounting base 5.
0 to the position shown in FIG. Next, the high output light emitted from the semiconductor laser 20 driven by the LD drive current switch 57 switched to the high output side irradiates and heats the liquid reservoir 39 on the matrix optical switch 34 . By this heating, the liquid mainly composed of silicone oil is decomposed into low molecules with a low boiling point, and eventually evaporates to remove the liquid in the liquid reservoir 39 and the difference point groove 37 continuous thereto. Note that at this time, the strong reflected light from the matrix optical switch 34 is
Although there is a risk of damaging the CD 31, in this embodiment, this risk is avoided by closing the optical shutter 56 made of liquid crystal or the like.

FIG. 9 shows another embodiment of the present invention.
Here, the liquid in the liquid tank 58 is heated using an electric-temperature converting element 41 that can perform both heating and cooling by switching the direction of energization of a Peltier element or the like. That is, in the figure, 60 is an electric-temperature conversion element, 61 is a heat sink, and 62 is a power supply circuit. In this configuration, after positioning the target liquid reservoir 39, the power supply circuit 62
Electricity is then supplied to the electricity-temperature conversion element 61 to heat the liquid and expand its volume. When the volume of the liquid expands,
The liquid in the liquid tank 58 is discharged through the fine tube 29 and is transferred to the liquid reservoir 3.
Injected into 9. The liquid injected into the liquid reservoir 39 is naturally injected into the difference groove 37 due to the surface tension of the side wall surface or bottom of the liquid reservoir 39 and the surface tension of the difference groove 37 . More precisely, the liquid is injected into the liquid reservoir 39 by bringing the spherical liquid at the tip of the microtube 29 into contact with the side wall or bottom of the liquid reservoir 39, which is the injection destination. Further, after the liquid is injected, in order to prevent excessive injecting of the liquid due to overheating, electricity is supplied from the power supply circuit 62 to the electricity-temperature conversion element 61 in the opposite direction to that at the time of injection. Due to this reverse direction energization, the electricity-temperature conversion element 61 enters the cooling mode opposite to that described above, and the liquid tank 58
The liquid inside is cooled and its volume is reduced, and the liquid inside the fine tube 29 immediately flows back into the liquid tank 58 to prevent excessive injection of liquid. Note that the liquid is discharged in the same manner as in the embodiment shown in FIG.

[0035] According to this embodiment, mechanical operation during heating is not required, and no parts for that purpose are required, so that the device can be made more compact and highly reliable.

[0036]

As explained above, according to claim 1 of the present invention, the internal volume of the refractive index matching liquid tank is changed by using the light originally intended to illuminate the reflection pattern of the matrix optical switch. As a result, the refractive index matching liquid is injected into and discharged from the liquid reservoir, eliminating the need for conventional pumps and piping, making it possible to reduce the overall volume of the device and maintain high reliability over a long period of time. can.

According to claim 2 of the present invention, the electric
The refractive index matching liquid in the liquid tank is expanded by the heat of the temperature conversion element, and thereby the refractive index matching liquid is injected into or discharged from the liquid reservoir. is not required, the volume of the entire device can be reduced, and high reliability can be maintained over a long period of time.

[Brief explanation of the drawing]

[Fig. 1] A configuration diagram showing an embodiment of the sensor-integrated liquid injection and discharge mechanism of the present invention.

[Figure 2] Explanatory diagram showing an example of a matrix optical switch

[Figure 3] Configuration diagram showing an example of a conventional sensor-integrated liquid injection and discharge mechanism

[Figure 4] A configuration diagram showing another example of a conventional sensor-integrated liquid injection and discharge mechanism.

[Fig. 5] A configuration diagram showing still another example of the conventional sensor-integrated liquid injection and discharge mechanism.

[Figure 6] Explanatory diagram showing another example of a matrix optical switch

[Figure 7] Explanatory diagram of the pattern imaged on the sensor

[
Figure 8: Explanatory diagram of liquid injection operation in the sensor-integrated liquid injection and discharge mechanism in Figure 1

[Fig. 9] A configuration diagram showing another embodiment of the sensor-integrated liquid injection and discharge mechanism of the present invention.

[Explanation of symbols]

20... Semiconductor laser, 21... Collimator lens, 22...
Beam shaping prism, 23... Total reflection prism, 24... Polarizing beam splitter, 25... λ/4 plate, 27... Lens holder, 28... Objective lens, 29... Fine tube, 30... Imaging lens, 31... CCD, 50... Total reflection prism mounting stand, 5
DESCRIPTION OF SYMBOLS 1...Linear guide, 52...Ball screw, 53...Motor for total reflection prism, 54...Heating lens, 55...Light absorber, 5
6... Optical shutter, 57... LD drive current switching converter, 58... Liquid tank, 60... Electricity-temperature conversion element, 61... Heat sink, 62...
power circuit.

Claims (2)

[Claims] Claim 1: A plurality of optical waveguides are arranged so as to intersect with each other in a matrix, and each intersection is provided with a groove that forms a predetermined angle with the optical waveguide, and furthermore, a groove that is continuous with each groove and has a predetermined reflective surface on the bottom surface thereof is provided. A matrix optical switch comprising a liquid reservoir with a pattern is irradiated with light emitted from a light source, the reflected light is imaged on a light receiving element by an objective lens, and the objective lens is imaged based on the obtained image information. Positioning the objective lens so that its center substantially coincides with the center of the reflection pattern, and discharging or suctioning a refractive index matching liquid having a refractive index substantially equal to the refractive index of the optical waveguide core from a fine tube provided near the center of the objective lens. In the sensor-integrated liquid injection/drainage mechanism, a part of the liquid tank that stores the refractive index matching liquid is made up of a member that absorbs light and expands, and the light emitted from the light source is transmitted to either the member or the matrix optical switch. 1. A sensor-integrated liquid injection and discharge mechanism, characterized in that it is provided with a means for guiding light by arbitrarily switching between the two directions. 2. A plurality of optical waveguides are arranged so as to intersect with each other in a matrix, and grooves are provided at each intersection part to form a predetermined angle with the optical waveguides, and a predetermined reflective groove is provided on the bottom surface of each of the grooves and is continuous with each groove. A matrix optical switch comprising a liquid reservoir with a pattern is irradiated with light emitted from a light source, the reflected light is imaged on a light receiving element by an objective lens, and the objective lens is imaged based on the obtained image information. Positioning the objective lens so that its center substantially coincides with the center of the reflection pattern, and discharging or suctioning a refractive index matching liquid having a refractive index substantially equal to the refractive index of the optical waveguide core from a fine tube provided near the center of the objective lens. In the sensor-integrated liquid injection/discharge mechanism, a part of the liquid tank storing the refractive index matching liquid is configured with an electric-temperature conversion element, or the electric-temperature conversion element is disposed inside the liquid tank, and the electric - A sensor-integrated liquid injection/discharge mechanism characterized by providing a means for supplying electricity to a temperature conversion element.