JPH0425228U - - Google Patents

Info

Publication number

JPH0425228U

JPH0425228U JP6777890U JP6777890U JPH0425228U JP H0425228 U JPH0425228 U JP H0425228U JP 6777890 U JP6777890 U JP 6777890U JP 6777890 U JP6777890 U JP 6777890U JP H0425228 U JPH0425228 U JP H0425228U

Authority

JP

Japan

Prior art keywords

group material

opening

source boat

material transport

transport gas

Prior art date

1990-06-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 4
• 239000000463 material Substances 0.000 claims 5
• 150000001875 compounds Chemical class 0.000 claims 1
• 239000011148 porous material Substances 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000011144 upstream manufacturing Methods 0.000 claims 1
• 239000002994 raw material Substances 0.000 description 3
• 239000000758 substrate Substances 0.000 description 2
• 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1
• 239000012808 vapor phase Substances 0.000 description 1

Cited By (1)