JPH0425046U - - Google Patents
Info
- Publication number
- JPH0425046U JPH0425046U JP6708890U JP6708890U JPH0425046U JP H0425046 U JPH0425046 U JP H0425046U JP 6708890 U JP6708890 U JP 6708890U JP 6708890 U JP6708890 U JP 6708890U JP H0425046 U JPH0425046 U JP H0425046U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- chamber
- exhaust
- import
- position control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008676 import Effects 0.000 claims description 5
- 238000002955 isolation Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Vibration Prevention Devices (AREA)
- Fluid-Damping Devices (AREA)
Description
第１図はこの考案の位置制御用バルブの基準位
置を示す断面図、第２図〜第４図はそれぞれ除振
台本体の位置制御動作を示す断面図、第５図は除
振装置全体を示す正面図、第６図はピストンスト
ロークと給気量及び排気量との関係を示すグラフ
である。
１……除振台本体、２……空気ばね、３……圧
力容器、４……ばね部、６……位置制御用バルブ
、７……バルブ本体、８……Ｉ／Ｏ室、１０……
インポート室、１２……圧縮空気源、１３……イ
グゾースト室、１５……給気用弁孔、１６……開
閉弁、１６ａ……摺動筒部、１７……押圧ばね、
１８……連通路、１８ａ……イグゾースト側排気
用弁孔、１９……ピストン、１９ａ……収容凹部
、２０……圧縮ばね、２１……球状開閉弁、２４
……レバー、２８……バイパス通路、２９……バ
イパス用弁孔、３１……バイパス用開閉弁。
Fig. 1 is a sectional view showing the reference position of the position control valve of this invention, Figs. 2 to 4 are sectional views showing the position control operation of the vibration isolator main body, and Fig. 5 shows the entire vibration isolator. The front view shown in FIG. 6 is a graph showing the relationship between the piston stroke, the intake air amount, and the displacement amount. DESCRIPTION OF SYMBOLS 1...Vibration isolation table body, 2...Air spring, 3...Pressure vessel, 4...Spring part, 6...Position control valve, 7...Valve body, 8...I/O chamber, 10... …
Import chamber, 12...Compressed air source, 13...Exhaust chamber, 15...Air supply valve hole, 16...Opening/closing valve, 16a...Sliding cylinder part, 17...Press spring,
18... Communication passage, 18a... Exhaust side exhaust valve hole, 19... Piston, 19a... Housing recess, 20... Compression spring, 21... Spherical opening/closing valve, 24
... lever, 28 ... bypass passage, 29 ... bypass valve hole, 31 ... bypass on-off valve.
Claims (1)
リンダや空気ばね２などの位置制御用アクチユエ
ータに連通するＩ／Ｏ室８と、圧縮空気源１２に
連通するインポート室１０と、位置制御用アクチ
ユエータ内の空気を大気開放するイグゾースト室
１３とを設け、前記Ｉ／Ｏ室８と前記インポート
室１０を給気用弁孔１５により連通するとともに
、この給気用弁孔１５を開閉するテーパ状開閉弁
１６をインポート室１０に収容し、前記Ｉ／Ｏ室
８にはテーパ状開閉弁１６に設けた摺動筒部１６
ａをその外周面がＩ／Ｏ室８とイグゾースト室１
３との区間で気密性をもつて往復摺動可能に挿通
し、前記摺動筒部１６ａには前記Ｉ／Ｏ室８と前
記イグゾースト室１３を連通する連通路１８を形
成し、前記イグゾースト室１３には除振台本体１
の動作に応じて摺動し、かつ前記開閉弁１６から
常時離隔する方向に付勢されたピストン１９を配
設し、さらに前記連通路１８のイグゾースト室１
３側排気用弁孔１８ａと、前記ピストン１９との
間に該排気用弁孔１８ａを開閉するための開閉弁
２１を配設し、前記バルブ本体７には前記インポ
ート室１０側とＩ／Ｏ室８側とを連通するバイパ
ス通路２８を形成し、前記開閉弁１６には該開閉
弁１６が所定量開口動作された場合に前記バイパ
ス通路２８を開放するためのバイパス用開閉弁３
１を連動可能に設けたことを特徴とする位置制御
用バルブ。 An I/O chamber 8 that communicates with a position control actuator such as a cylinder or air spring 2 that supports the vibration isolation table body 1 with respect to the valve body 7, an import chamber 10 that communicates with a compressed air source 12, and a position control actuator. The I/O chamber 8 and the import chamber 10 are connected to each other through an air supply valve hole 15, and a tapered opening/closing mechanism is provided to open and close the air supply valve hole 15. The valve 16 is housed in the import chamber 10, and the I/O chamber 8 has a sliding cylinder portion 16 provided in the tapered on-off valve 16.
The outer peripheral surface of a is the I/O chamber 8 and the exhaust chamber 1.
A communication passage 18 is formed in the sliding cylinder part 16a to communicate the I/O chamber 8 and the exhaust chamber 13, and 13 is the vibration isolation table main body 1
A piston 19 that slides in response to the operation of the on-off valve 16 and is always biased in a direction away from the on-off valve 16 is disposed, and the exhaust chamber 1 of the communication passage 18
An on-off valve 21 for opening and closing the exhaust valve hole 18a is disposed between the third side exhaust valve hole 18a and the piston 19, and the valve body 7 is connected to the import chamber 10 side and the I/O side. A bypass passage 28 communicating with the chamber 8 side is formed, and the on-off valve 16 includes a bypass on-off valve 3 for opening the bypass passage 28 when the on-off valve 16 is opened by a predetermined amount.
1. A position control valve characterized in that 1 is interlockably provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6708890U JPH087157Y2 (en) | 1990-06-25 | 1990-06-25 | Position control valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6708890U JPH087157Y2 (en) | 1990-06-25 | 1990-06-25 | Position control valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0425046U true JPH0425046U (en) | 1992-02-28 |
| JPH087157Y2 JPH087157Y2 (en) | 1996-03-04 |
Family
ID=31600356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6708890U Expired - Lifetime JPH087157Y2 (en) | 1990-06-25 | 1990-06-25 | Position control valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087157Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006222143A (en) * | 2005-02-08 | 2006-08-24 | Fujikura Rubber Ltd | Leveling adjusting device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5325062B2 (en) * | 2009-09-29 | 2013-10-23 | 倉敷化工株式会社 | Control valve drive mechanism |
| JP5635828B2 (en) * | 2010-07-27 | 2014-12-03 | 倉敷化工株式会社 | Control mechanism for vibration isolation table |
-
1990
- 1990-06-25 JP JP6708890U patent/JPH087157Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006222143A (en) * | 2005-02-08 | 2006-08-24 | Fujikura Rubber Ltd | Leveling adjusting device |
| JP4486521B2 (en) * | 2005-02-08 | 2010-06-23 | 藤倉ゴム工業株式会社 | Leveling adjustment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH087157Y2 (en) | 1996-03-04 |
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