JPH0425045U

JPH0425045U -

Info

Publication number: JPH0425045U
Application number: JP6708790U
Authority: JP
Priority date: 1990-06-25
Filing date: 1990-06-25
Publication date: 1992-02-28
Anticipated expiration: 2005-06-25
Also published as: JPH087156Y2

Description

[Brief explanation of the drawing]

第１図はこの考案の要部を拡大して示す部分断
面図、第２図〜第４図はそれぞれ除振台本体の位
置制御動作を示す断面図、第５図は除振装置全体
を示す正面図、第６図はこの考案の第二実施例を
示す断面図、第７図はこの考案の別例を示す部分
断面図である。１……除振台本体、２……空気ばね、３……圧
力容器、４……ばね部、６……位置制御用バルブ
、７……バルブ本体、８……Ｉ／Ｏ室、１０……
インポート室、１２……圧縮空気源、１３……イ
グゾースト室、１５……給気用弁孔、１６……開
閉弁、１６ａ……摺動筒部、１７……押圧ばね、
１８……連通路、１８ａ……イグゾースト側排気
用弁孔、１９……ピストン、１９ａ……収容凹部
、２０……圧縮ばね、２１……球状開閉弁、２４
……レバー、２７……円錐状開閉弁。 Fig. 1 is a partial cross-sectional view showing an enlarged view of the main parts of this invention, Figs. 2 to 4 are cross-sectional views showing the position control operation of the vibration isolator main body, and Fig. 5 shows the entire vibration isolator. A front view, FIG. 6 is a sectional view showing a second embodiment of this invention, and FIG. 7 is a partial sectional view showing another example of this invention. DESCRIPTION OF SYMBOLS 1...Vibration isolation table body, 2...Air spring, 3...Pressure vessel, 4...Spring part, 6...Position control valve, 7...Valve body, 8...I/O chamber, 10... …
Import chamber, 12...Compressed air source, 13...Exhaust chamber, 15...Air supply valve hole, 16...Opening/closing valve, 16a...Sliding cylinder part, 17...Press spring,
18... Communication passage, 18a... Exhaust side exhaust valve hole, 19... Piston, 19a... Housing recess, 20... Compression spring, 21... Spherical opening/closing valve, 24
...Lever, 27...Conical opening/closing valve.

Claims

[Scope of utility model registration request]

An I/O chamber 8 that communicates with a position control actuator such as a cylinder or air spring 2 that supports the vibration isolation table body 1 with respect to the valve body 7, an import chamber 10 that communicates with a compressed air source 12, and a position control actuator. The I/O chamber 8 and the import chamber 10 are connected to each other through an air supply valve hole 15, and a tapered opening/closing mechanism is provided to open and close the air supply valve hole 15. The valve 16 is housed in the import chamber 10, and the I/O chamber 8 has a sliding cylinder portion 16 provided in the tapered on-off valve 16.
The outer peripheral surface of a is the I/O chamber 8 and the exhaust chamber 1.
A communication passage 18 is formed in the sliding cylinder part 16a to communicate the I/O chamber 8 and the exhaust chamber 13, and 13 is the vibration isolation table main body 1
A piston 19 that slides in response to the operation of the on-off valve 16 and is always biased in a direction away from the on-off valve 16 is disposed, and the exhaust chamber 1 of the communication passage 18
Position control characterized in that a spherical on-off valve 21 or a conical on-off valve 27 for opening and closing the third side exhaust valve hole 18a and the piston 19 is movably accommodated. valve.