JPH0425045U - - Google Patents

Info

Publication number
JPH0425045U
JPH0425045U JP6708790U JP6708790U JPH0425045U JP H0425045 U JPH0425045 U JP H0425045U JP 6708790 U JP6708790 U JP 6708790U JP 6708790 U JP6708790 U JP 6708790U JP H0425045 U JPH0425045 U JP H0425045U
Authority
JP
Japan
Prior art keywords
chamber
valve
position control
exhaust
import
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6708790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH087156Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6708790U priority Critical patent/JPH087156Y2/ja
Publication of JPH0425045U publication Critical patent/JPH0425045U/ja
Application granted granted Critical
Publication of JPH087156Y2 publication Critical patent/JPH087156Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Vibration Prevention Devices (AREA)
  • Fluid-Damping Devices (AREA)
JP6708790U 1990-06-25 1990-06-25 位置制御用バルブ Expired - Lifetime JPH087156Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6708790U JPH087156Y2 (ja) 1990-06-25 1990-06-25 位置制御用バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6708790U JPH087156Y2 (ja) 1990-06-25 1990-06-25 位置制御用バルブ

Publications (2)

Publication Number Publication Date
JPH0425045U true JPH0425045U (OSRAM) 1992-02-28
JPH087156Y2 JPH087156Y2 (ja) 1996-03-04

Family

ID=31600354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6708790U Expired - Lifetime JPH087156Y2 (ja) 1990-06-25 1990-06-25 位置制御用バルブ

Country Status (1)

Country Link
JP (1) JPH087156Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006046306A1 (ja) * 2004-10-29 2006-05-04 Fukoku Co., Ltd. 防振支持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006046306A1 (ja) * 2004-10-29 2006-05-04 Fukoku Co., Ltd. 防振支持装置
JPWO2006046306A1 (ja) * 2004-10-29 2008-05-22 株式会社フコク 防振支持装置

Also Published As

Publication number Publication date
JPH087156Y2 (ja) 1996-03-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term