JPH04249711A - Distance measuring apparatus - Google Patents

Distance measuring apparatus

Info

Publication number
JPH04249711A
JPH04249711A JP5991A JP5991A JPH04249711A JP H04249711 A JPH04249711 A JP H04249711A JP 5991 A JP5991 A JP 5991A JP 5991 A JP5991 A JP 5991A JP H04249711 A JPH04249711 A JP H04249711A
Authority
JP
Japan
Prior art keywords
camera
ring
image
distance measuring
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5991A
Other languages
Japanese (ja)
Inventor
Koichi Masuda
増田 弘一
Kenichi Matsumura
謙一 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5991A priority Critical patent/JPH04249711A/en
Publication of JPH04249711A publication Critical patent/JPH04249711A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To obtain a small-size distance measuring apparatus capable of measuring the distance to a measuring plane in a short time. CONSTITUTION:A parallel luminous flux with a ring cross section is cast to planes A, B to be measured. An image of the ring on each plane A, B is photographed by a camera 11. The distances l1, l2 to the respective planes A, B from the camera 11 are measured from the size of the radii r1, r2 of the ring images A', B' photographed by the camera 11. Moreover, angles of the measuring planes to a view line 7 of the camera are obtained from the degree of flatness of the elliptical rings A', B' (the angles are deviated from 90 deg. if the degree of flatness is increased). The maximum inclining direction (which is the direction of a longer diameter of the ellipse) is thus obtained from the inclination of the ellipse.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、測距装置に関し、特に
簡易なポイント計測に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a distance measuring device, and more particularly to a simple point measuring device.

【0002】0002

【従来の技術】従来、この種の測距装置は、レーザスポ
ット光を利用した三角測量を適用した装置、もしくはビ
ーム像を利用したレンズ側のオートフォーカスを適用し
た装置であった。
2. Description of the Related Art Conventionally, this type of distance measuring device has been a device that applied triangulation using a laser spot light, or a device that applied autofocus on the lens side using a beam image.

【0003】図2は三角測量を適用した測距装置を示す
図で、レーザ管21でレーザビーム22を測定物24に
照射し、測定物24を2次元CCDカメラ23で撮像し
、レーザビーム22とレーザビーム22が測定物24に
当り乱反射して2次元CCDカメラ23に入射する光の
光路との2直線の交点より測定物の距離を測定する。
FIG. 2 is a diagram showing a distance measuring device to which triangulation is applied. A laser tube 21 irradiates a laser beam 22 onto a measuring object 24, a two-dimensional CCD camera 23 takes an image of the measuring object 24, and the laser beam 22 The distance of the object to be measured is measured from the intersection of two straight lines between the laser beam 22 and the optical path of the light that hits the object 24, is diffusely reflected, and enters the two-dimensional CCD camera 23.

【0004】図3はオートフォーカスを適用した測距装
置を示す図で、フォーカス調整機構33を備えた2次元
CCDカメラ34の光軸にハーフミラー32によりレー
ザ管31のレーザビームを配置し、測定物35上のレー
ザビームの投写を2次元カメラ34で撮像し、ジャスト
ピントとなったフォーカスポイントを見つけ、その時の
光学系の状態からCCDカメラ34と測定物35の間の
距離を求める。図4(a)はピントが前の時の2次元C
CDカメラ34による撮像した画像を示し、図4(b)
はジャストピントの時の2次元CCDカメラ34による
画像を示し、図4(c)はピントが奥の時の2次元CC
Dカメラ34による画像を示す。
FIG. 3 is a diagram showing a distance measuring device to which autofocus is applied, in which a laser beam from a laser tube 31 is placed by a half mirror 32 on the optical axis of a two-dimensional CCD camera 34 equipped with a focus adjustment mechanism 33. The projection of the laser beam onto the object 35 is imaged by a two-dimensional camera 34, the focus point that is just in focus is found, and the distance between the CCD camera 34 and the measurement object 35 is determined from the state of the optical system at that time. Figure 4(a) shows the two-dimensional C when the focus is in front.
An image captured by the CD camera 34 is shown in FIG. 4(b).
4(c) shows an image taken by the two-dimensional CCD camera 34 when the focus is just right, and FIG. 4(c) shows the two-dimensional CC image when the focus is far away.
An image taken by the D camera 34 is shown.

【0005】[0005]

【発明が解決しようとする課題】上記した従来の三角測
量による測距装置は、レーザを出す場所とカメラで取る
場所に一定の距離が必要のために穴の中での測量には適
用できず、また装置が大きくなるという欠点がある。ま
た、オートフォーカスによるものは、フォーカス調整を
機械で行なうため、ポイントデータを取る時間がかかる
という欠点がある。
[Problem to be Solved by the Invention] The conventional distance measuring device using triangulation described above cannot be applied to surveying inside a hole because a certain distance is required between the place where the laser is emitted and the place where the camera is used. , there is also the disadvantage that the device becomes larger. Furthermore, the autofocus system has the disadvantage that it takes time to collect point data because the focus adjustment is performed mechanically.

【0006】[0006]

【課題を解決するための手段】本発明の測距装置は、断
面がリング状の平行な光束を測定平面に投光し、前記光
束による前記測定平面物上のリング像をカメラで撮像し
、このカメラによる前記リング像の画像の半径の大きさ
から前記カメラから前記測定平面までの距離を計測する
ことを特徴とする。
[Means for Solving the Problems] The distance measuring device of the present invention projects a parallel light beam having a ring-shaped cross section onto a measurement plane, and images a ring image on the measurement plane object by the light beam with a camera, The method is characterized in that the distance from the camera to the measurement plane is measured from the size of the radius of the ring image taken by the camera.

【0007】[0007]

【実施例】次に、本発明について図面を参照して説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be explained with reference to the drawings.

【0008】図1(a)は本発明の一実施例を示す図で
、レーザ管1のレーザビームをレンズ2およびコリメー
タレンズ4ならびにこれらの間に配置した遮光板3で断
面がリング状のレーザ平行ビームを作り、これをハーフ
ミラー5により2次元CCDカメラ11の視線を中心と
したリング状レーザ平行ビーム6にする。リング状レー
ザ平行ビーム6によって照らされた測定平面(図1には
測定平面AおよびBを示す)を2次元CCDカメラ11
で撮像し、測定平面のレンズ8による像がCCD10上
に結ばれる。
FIG. 1(a) is a diagram showing an embodiment of the present invention, in which a laser beam from a laser tube 1 is guided through a lens 2, a collimator lens 4, and a light shielding plate 3 disposed between them into a laser beam having a ring-shaped cross section. A parallel beam is created and converted into a ring-shaped laser parallel beam 6 centered on the line of sight of a two-dimensional CCD camera 11 using a half mirror 5. A measurement plane illuminated by a ring-shaped laser parallel beam 6 (measurement planes A and B are shown in FIG. 1) is captured by a two-dimensional CCD camera 11.
, and an image of the measurement plane by lens 8 is focused on CCD 10 .

【0009】このようにして、測定平面A,Bの画像A
′,B′が図1(b),(c)に示すように得られる。
In this way, the image A of the measurement planes A and B
', B' are obtained as shown in FIGS. 1(b) and (c).

【0010】この画像A′,B′のリング半径のr1 
r2 (リングが楕円をなす時はもっとも長い半径)は
レンズ8に近い測定平面Aの画像A′の半径r1 が大
きく、レンズ8から遠い測定平面Bの画像B′の半径r
2 は小さくなる。このような関係から得られた画像リ
ングの半径によってカメラからの測定物の距離を算出す
る。
[0010] r1 of the ring radius of these images A' and B'
r2 (the longest radius when the ring forms an ellipse) is the radius r1 of the image A' of the measurement plane A close to the lens 8, and the radius r1 of the image B' of the measurement plane B far from the lens 8.
2 becomes smaller. The distance of the object to be measured from the camera is calculated from the radius of the image ring obtained from this relationship.

【0011】なお、リング状レーザ平行ビーム6の半径
をR、2次元CCDカメラ11の視野化をθ、レンズ8
から測定平面A,Bまでの距離をl1 l2 とすると
Note that the radius of the ring-shaped laser parallel beam 6 is R, the field of view of the two-dimensional CCD camera 11 is θ, and the lens 8 is
Let the distance from the measurement planes A and B be l1 l2

【0012】0012

【0013】となる(kは定数)。(k is a constant).

【0014】また、画像A′,B′のリングの半径rを
得る場合に、第4図(a)〜(c)に示すように円の外
周でなく第4図(d)〜(f)に示すようにリングを用
いているため、2次元CCDカメラ11のピントがずれ
ても正しい半径rを得ることができる。第4図(a)〜
(c)は断面が円状のビームで測定平面を照射した場合
の2次元CCDカメラ11の画像を示す図、第4図(d
)〜(f)は断面がリング状のビームで測定平面を照射
した場合の画像を示す図で、第4図(a),(d)はピ
ントが前の時、第4図(b),(e)はジャストピント
の時、第4図(c),(f)はピントが奥の時の図であ
る。リング状の場合はカメラのピントがずれても、リン
グが太くなるだけで、リング中心は変化しないため正し
い半径rを得ることができる。
In addition, when obtaining the radius r of the ring of images A' and B', the radius r of the ring in FIGS. Since a ring is used as shown in the figure, even if the two-dimensional CCD camera 11 is out of focus, the correct radius r can be obtained. Figure 4(a)~
(c) is a diagram showing an image of the two-dimensional CCD camera 11 when the measurement plane is irradiated with a beam having a circular cross section, and FIG.
) to (f) are diagrams showing images when the measurement plane is irradiated with a beam with a ring-shaped cross section. 4(e) is a diagram when the camera is in just focus, and FIGS. 4(c) and 4(f) are diagrams when the camera is in focus. In the case of a ring shape, even if the camera goes out of focus, the ring only becomes thicker and the center of the ring does not change, so the correct radius r can be obtained.

【0015】さらに得られた画像のリングの楕円の偏平
率によって測定平面のカメラ視線との角度が、(偏平率
が大きくなれば角度が90°よりずれていく)得られ、
楕円のかたむきによりその最大傾斜方向が(楕円の長径
方向が最大傾斜方向となる)得られる。
Furthermore, the angle between the measurement plane and the camera's line of sight is obtained by the oblateness of the ellipse of the ring of the obtained image (as the oblateness increases, the angle deviates from 90°),
By tilting the ellipse, its maximum inclination direction is obtained (the major axis direction of the ellipse is the maximum inclination direction).

【0016】以上により測定平面のカメラからの距離と
傾斜が計測出来る。
As described above, the distance and inclination of the measurement plane from the camera can be measured.

【0017】[0017]

【発明の効果】以上説明したように本発明は、リング状
光束を測定平面に投光して得られた画像を解析すること
によって、短時間で測定平面までの距離を測定できる小
型の測距装置が得られる効果がある。
As explained above, the present invention provides a compact distance measuring system that can measure the distance to a measurement plane in a short time by projecting a ring-shaped light beam onto the measurement plane and analyzing the image obtained. There is an effect that the device can obtain.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】図1(a)は本発明の一実施例を示す図、図1
(b)および(c)はそれぞれ2次元CCDカメラ11
による測定平面AおよびBを画像を示す図である。
[FIG. 1] FIG. 1(a) is a diagram showing one embodiment of the present invention, FIG.
(b) and (c) are two-dimensional CCD cameras 11, respectively.
FIG. 2 is a diagram illustrating images of measurement planes A and B according to FIG.

【図2】従来の三角測量による測距装置を示す図である
FIG. 2 is a diagram showing a conventional distance measuring device using triangulation.

【図3】従来のオートフォーカスによる測距装置を示す
図である。
FIG. 3 is a diagram showing a conventional distance measuring device using autofocus.

【図4】図4(a)〜(c)は図3の測距装置の2次元
CCDカメラ23による画像を示す図、図4(d)〜(
f)は図1の実施例の2次元CCDカメラ11による画
像を示す図である。
4(a) to 4(c) are diagrams showing images taken by the two-dimensional CCD camera 23 of the distance measuring device in FIG. 3, and FIGS. 4(d) to (
f) is a diagram showing an image taken by the two-dimensional CCD camera 11 of the embodiment of FIG. 1;

【符号の説明】[Explanation of symbols]

1,21,31    レーザ管 2    レンズ 4    コリメータレンズ 5    ハーフミラー 6    リング状レーザ平行ビーム 7    カメラ視線 8    レンズ 10    CCD 11,23,34    2次元CCDカメラ22  
  レーザビーム 24,35    測定物 33    フォーカス調整機構
1, 21, 31 Laser tube 2 Lens 4 Collimator lens 5 Half mirror 6 Ring-shaped laser parallel beam 7 Camera line of sight 8 Lens 10 CCD 11, 23, 34 Two-dimensional CCD camera 22
Laser beams 24, 35 Measurement object 33 Focus adjustment mechanism

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  断面がリング状の平行な光束を測定平
面に投光し、前記光束による前記測定平面物上のリング
像をカメラで撮像し、このカメラによる前記リング像の
画像の半径の大きさから前記カメラから前記測定平面ま
での距離を計測することを特徴とする測距装置。
1. A parallel light beam having a ring-shaped cross section is projected onto a measurement plane, a ring image on the measurement plane by the light beam is imaged by a camera, and the radius of the image of the ring image taken by the camera is determined. A distance measuring device that measures a distance from the camera to the measurement plane.
【請求項2】  リング像の楕円偏平率によって前記測
定平面の傾きを求める請求項1記載の測距装置。
2. The distance measuring device according to claim 1, wherein the inclination of the measurement plane is determined based on the elliptic oblateness of the ring image.
JP5991A 1991-01-07 1991-01-07 Distance measuring apparatus Pending JPH04249711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5991A JPH04249711A (en) 1991-01-07 1991-01-07 Distance measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5991A JPH04249711A (en) 1991-01-07 1991-01-07 Distance measuring apparatus

Publications (1)

Publication Number Publication Date
JPH04249711A true JPH04249711A (en) 1992-09-04

Family

ID=11463636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5991A Pending JPH04249711A (en) 1991-01-07 1991-01-07 Distance measuring apparatus

Country Status (1)

Country Link
JP (1) JPH04249711A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198841A (en) * 2006-01-25 2007-08-09 Soatec Inc Optical measuring method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198841A (en) * 2006-01-25 2007-08-09 Soatec Inc Optical measuring method and apparatus

Similar Documents

Publication Publication Date Title
US4636626A (en) Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
JPS6220522B2 (en)
JP3509088B2 (en) Optical device for three-dimensional shape measurement
JP3749152B2 (en) Lens meter
JP3072805B2 (en) Gap spacing measurement method
US4429964A (en) Mirror-reflex camera with electronic rangefinder
JP2983673B2 (en) Method and apparatus for measuring radius of curvature
JPH04249711A (en) Distance measuring apparatus
KR890001454B1 (en) Auto focus system
JP2828145B2 (en) Optical section microscope apparatus and method for aligning optical means thereof
JP2003161610A (en) Optical measurement device
JPS5855804A (en) Body detecting device
JPH0210514Y2 (en)
JPS60125812A (en) Focusing detector
JPH06147845A (en) Edge detector and depth measuring equipment for tapered hole
JP2579977Y2 (en) Auxiliary floodlight for distance measurement
JP2004239646A (en) Optical measuring unit
JPH03130639A (en) Optical-axis aligning method for mtf measuring apparatus
JP2636017B2 (en) Tilt detection head
JPS58174808A (en) Distance measuring device
JPS62503049A (en) Methods and apparatus for orienting, inspecting and/or measuring two-dimensional objects
JP3306765B2 (en) Image forming apparatus having focus detecting means
JP2620143B2 (en) Distance measurement mechanism of autofocus device
JPH0558483B2 (en)
JPH02135310A (en) Automatic focusing camera with remote control function

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 19970121