JPH04249331A - Wire bonding method and bonding tool - Google Patents

Wire bonding method and bonding tool

Info

Publication number
JPH04249331A
JPH04249331A JP3014458A JP1445891A JPH04249331A JP H04249331 A JPH04249331 A JP H04249331A JP 3014458 A JP3014458 A JP 3014458A JP 1445891 A JP1445891 A JP 1445891A JP H04249331 A JPH04249331 A JP H04249331A
Authority
JP
Japan
Prior art keywords
wire
bonding tool
bonding
tip
pressing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3014458A
Other languages
Japanese (ja)
Inventor
Yoshihiro Morita
義裕 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3014458A priority Critical patent/JPH04249331A/en
Publication of JPH04249331A publication Critical patent/JPH04249331A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78313Wedge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78313Wedge
    • H01L2224/78314Shape
    • H01L2224/78317Shape of other portions
    • H01L2224/78318Shape of other portions inside the capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/786Means for supplying the connector to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus

Abstract

PURPOSE:To accurately set the feed position of a wire and to reduce the size of a pressure face to a minimum regarding the wire bonding method and the bonding tool of various kinds of printed wiring boards which are used widely when various kinds of electronic apparatuses are constituted. CONSTITUTION:A clamper 14 which grips the tip of a wire 1 fed form a hole for wire feed use at a bonding tool 13 and which energizes a tension onto said wire 1 is installed on the side opposite to said hole for wire feed use. Said wire 1 onto which the tension has been energized by using said clamper 14 is bonded to a pad on a substrate by using the pressure face of said bonding tool 13.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、各種電子機器の構成に
広く使用される各種プリント配線基板のワイヤ接合方法
およびボンディングツールに関する。最近、特に大型電
算機等に装着されるプリント板は高集積化された各種電
子部品が高密度に実装されるに伴い、そのプリント配線
基板(以下基板と略称する)に形成されるパッドのサイ
ズも微小化の傾向を辿るとともに、基板の修復および改
造用に布線されるワイヤもパッドの微小化に対応して細
くなっている。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire bonding method and bonding tool for various printed wiring boards, which are widely used in the construction of various electronic devices. Recently, various highly integrated electronic components have been mounted at high density on printed circuit boards, especially those installed in large computers, etc., and the size of the pads formed on the printed wiring boards (hereinafter referred to as "boards") has increased. Along with the trend toward miniaturization of pads, the wires used for repairing and modifying boards are also becoming thinner in response to the miniaturization of pads.

【0002】そのために、ワイヤをパッドに押圧して超
音波あるいは熱により接合するボンディングツールの押
圧面も微小化が必要となるが、この押圧面に供給された
ワイヤの先端が移動してパッドに対する接合位置が変動
するから、ワイヤの供給位置が正確となって押圧面の最
小とすることができるワイヤ接合方法とボンディングツ
ールが必要とされている。
[0002] For this reason, the pressing surface of the bonding tool that presses the wire against the pad and joins it using ultrasonic waves or heat must also be miniaturized. Because the bonding location varies, there is a need for a wire bonding method and bonding tool that can accurately position the wire to provide a minimum pressure surface.

【0003】0003

【従来の技術】従来のワイヤ接合方法およびボンディン
グツールは、図7(a) に示すように角柱の先端に押
圧面3aを設けるとともにそのワイヤ1供給側の先端縁
を傾斜させて、その面にワイヤ1の供給と同一方向のワ
イヤフィード用ホール3−1 を穿設したボンディング
ツール3の一端側を、図6に示す如く超音波発振装置と
直結した超音波トランスデューサ2の先端部に垂直に固
定することにより、当該ボンディングツール3の前記押
圧面3aを図示していない基板と平行に対向させている
。  そして、図示していないワイヤ繰り出し装置から
、図7(a) に示すボンディングツール3のワイヤフ
ィード用ホール3−1 を挿通させて押圧面3aに供給
されたワイヤ1の先端を、当該ボンディングツール3を
下降させて図示していない基板上のパットへ押圧するこ
とによりワイヤ1の先端部が曲折するので、超音波トラ
ンスデューサ2からボンディングツール3に超音波を加
えて押圧面3aでワイヤ1の先端部と前記基板上のパッ
トが接合されている。
2. Description of the Related Art Conventional wire bonding methods and bonding tools, as shown in FIG. One end side of the bonding tool 3, which has a hole 3-1 for wire feed in the same direction as the supply of the wire 1, is fixed vertically to the tip of the ultrasonic transducer 2 directly connected to the ultrasonic oscillator as shown in FIG. By doing so, the pressing surface 3a of the bonding tool 3 is made to face a substrate (not shown) in parallel. Then, from a wire feeding device (not shown), the tip of the wire 1, which has been passed through the wire feed hole 3-1 of the bonding tool 3 shown in FIG. The tip of the wire 1 is bent by lowering it and pressing it against a pad on a substrate (not shown), so ultrasonic waves are applied from the ultrasonic transducer 2 to the bonding tool 3 to bend the tip of the wire 1 on the pressing surface 3a. and the pads on the substrate are bonded.

【0004】0004

【発明が解決しようとする課題】以上説明した従来のワ
イヤ接合方法とボンディングツールで問題となるのは、
ボンディングツール3の押圧面3aに供給されたワイヤ
1はワイヤフィード方向幅にフリーの状態であって、基
板のパッドにこのワイヤ1の先端を接合する時に移動し
てボンディングツール3の押圧面3aに対するワイヤ1
の接合部分の位置が変動するから、図7(b) に示す
ようにこの押圧面3aのワイヤフィード方向幅Wをワイ
ヤ1の直径Dに対して略4倍にする必要が生じている。
[Problems to be Solved by the Invention] The problems with the conventional wire bonding method and bonding tool described above are as follows.
The wire 1 supplied to the pressing surface 3a of the bonding tool 3 is in a free state in the width in the wire feed direction, and when bonding the tip of the wire 1 to the pad of the substrate, it moves against the pressing surface 3a of the bonding tool 3. wire 1
Since the position of the joint portion changes, it is necessary to make the width W of the pressing surface 3a in the wire feed direction approximately four times the diameter D of the wire 1, as shown in FIG. 7(b).

【0005】そのため、基板のパッドに対してワイヤ1
の接合位置が変動するとともに大きな該押圧面3aで接
合しているので同一パッドに複数本のワイヤ1を接合す
ることができないという問題が生じている。本発明は上
記のような問題点に鑑み、ワイヤの供給位置が正確とな
って押圧面の大きさを最小とすることができる新しいワ
イヤ接合方法およびボンディングツールの提供を目的と
する。
Therefore, the wire 1 is connected to the pad of the board.
Since the bonding position changes and the bonding is performed at the large pressing surface 3a, a problem arises in that a plurality of wires 1 cannot be bonded to the same pad. SUMMARY OF THE INVENTION In view of the above problems, the present invention aims to provide a new wire bonding method and bonding tool that can accurately supply the wire and minimize the size of the pressing surface.

【0006】[0006]

【課題を解決するための手段】本発明は、図2に示すボ
ンディングツール13のワイヤフィード用ホール13−
1から供給されたワイヤ1の先端を把持して当該ワイヤ
1にテンションに付勢するクランパ14を、図1に示す
ように前記ワイヤフィード用ホール13−1の反対側に
設けて、マニアルにより前記ワイヤ1の先端を当該クラ
ンパ14にて把持させるか、または、図3に示す成形治
具15により、図4に示す如くワイヤフィード用ホール
13−1から供給されたワイヤ1の先端部を曲折して前
記クランパ14にて把持させ、図1に示す如く当該クラ
ンパ14によりワイヤ1にテンションを付勢した状態で
上記ボンディングツール13の押圧面13aを基板上の
パッドに押圧してワイヤ1を接合する。
[Means for Solving the Problems] The present invention provides wire feeding holes 13-
A clamper 14 that grips the tip of the wire 1 fed from the wire 1 and applies tension to the wire 1 is provided on the opposite side of the wire feed hole 13-1 as shown in FIG. Either the tip of the wire 1 is held by the clamper 14, or the tip of the wire 1 fed from the wire feed hole 13-1 is bent by the forming jig 15 shown in FIG. 3 as shown in FIG. The bonding tool 13 is gripped by the clamper 14, and the wire 1 is bonded by pressing the pressing surface 13a of the bonding tool 13 against the pad on the substrate while applying tension to the wire 1 by the clamper 14 as shown in FIG. .

【0007】また他の方法として、図5に示すように押
圧面23aとその周縁にワイヤ1のフィードをガイドす
るガイド溝23−2を形成したボンディングツール23
を使用することにより基板上のパッドに当該ワイヤ1を
接合する。
As another method, as shown in FIG. 5, a bonding tool 23 is provided in which a pressing surface 23a and a guide groove 23-2 for guiding the feeding of the wire 1 are formed on the periphery of the pressing surface 23a.
The wire 1 is bonded to the pad on the substrate by using a .

【0008】[0008]

【作用】本発明では、ボンディングツール13のワイヤ
フィード用ホール13−1から押圧面13aに供給され
たワイヤ1の先端を把持して、該ワイヤフィード用ホー
ル13−1の反対側に設けたクランパ14で引っ張って
当該ワイヤフィード用ホール13−1との間のワイヤ1
にテンションを付勢すると、上記押圧面13aに対する
ワイヤ1の通過位置は常に一定となり、その状態でボン
ディングツール13の押圧面13aを基板上のパッドに
押圧して接合すると、接合されたワイヤ1は前記パッド
に対して正確な位置に接合される。
[Operation] In the present invention, the tip of the wire 1 supplied from the wire feed hole 13-1 of the bonding tool 13 to the pressing surface 13a is gripped, and a clamper provided on the opposite side of the wire feed hole 13-1 is used. 14 and the wire 1 between it and the wire feed hole 13-1.
When tension is applied to the above-mentioned pressing surface 13a, the passing position of the wire 1 with respect to the pressing surface 13a is always constant, and when the pressing surface 13a of the bonding tool 13 is pressed and bonded to the pad on the substrate in this state, the bonded wire 1 is It is bonded to the pad in a precise position.

【0009】また、図5に示すような押圧面23aとそ
の周縁にワイヤ1のフィードをガイドするガイド溝23
−2を形成されたボンディングツール23を使用するこ
とにより、ワイヤフィード用ホール23−1から供給さ
れたワイヤ1はガイド溝23−2で押圧面23aに誘導
されて供給位置が正確となる。そのため、ワイヤ1の供
給位置が一定となって押圧面13a,23aのワイヤ供
給方向の幅を最小とすることができるので、基板上のパ
ッドに対するワイヤ1の接合位置が正確になるとともに
、同一パッドに複数本のワイヤ1を接合することが可能
となる。
Further, as shown in FIG. 5, a guide groove 23 for guiding the feed of the wire 1 is provided on the pressing surface 23a and its periphery.
By using the bonding tool 23 formed with the wire 2, the wire 1 fed from the wire feed hole 23-1 is guided to the pressing surface 23a by the guide groove 23-2, and the feeding position becomes accurate. Therefore, the supply position of the wire 1 becomes constant and the width of the pressing surfaces 13a, 23a in the wire supply direction can be minimized, so that the bonding position of the wire 1 to the pad on the substrate becomes accurate, and the same pad It becomes possible to join a plurality of wires 1 to each other.

【0010】0010

【実施例】以下図1乃至図5について本発明の実施例を
詳細に説明する。図1は本発明の一実施例によるワイヤ
接合方法を示す模式図、図2は第一実施例のボンディン
グツール先端部を示す模式図、図3は本実施例のワイヤ
成形治具を示す模式図、図4は成形治具によるワイヤ曲
折順序を示す模式図、図5は第二実施例のボンディング
ツール先端部の模式図を示す。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS. 1 to 5. FIG. 1 is a schematic diagram showing a wire bonding method according to an embodiment of the present invention, FIG. 2 is a schematic diagram showing the tip of a bonding tool according to the first embodiment, and FIG. 3 is a schematic diagram showing a wire forming jig according to the present embodiment. , FIG. 4 is a schematic diagram showing the wire bending order by the forming jig, and FIG. 5 is a schematic diagram showing the tip of the bonding tool of the second embodiment.

【0011】図中において、図6および図7と同一部材
には同一記号が付してあるが、その他の13, 23は
基板修復および改造時にワイヤをパッドに接合するボン
ディングツール,14はワイヤの先端を挟持してテンシ
ョンを付勢するクランパ, 15はワイヤの先端部をボ
ンディングツールの先端形状に成形する成形治具である
。第一のボンディングツール13は、図2(a) に示
すように角柱の一端側を超音波トランスデューサへ固定
できるように形成して、他端に押圧面13aを設けると
ともにその一側面を傾斜させてその面にワイヤ1の供給
方向と同一のワイヤフィード用ホール13−1を従来と
同形状に形成し、図2(b) に示す如く押圧面13a
のワイヤフィード方向幅Wをワイヤ1の直径Dに対して
略1.5Dに形成したものである。
In the figure, the same members as in FIGS. 6 and 7 are given the same symbols, and 13 and 23 are bonding tools for bonding wires to pads during board repair and modification, and 14 is a wire bonding tool. A clamper 15 clamps the tip and applies tension, and 15 is a forming jig that shapes the tip of the wire into the shape of the tip of a bonding tool. As shown in FIG. 2(a), the first bonding tool 13 is formed so that one end of the prism can be fixed to the ultrasonic transducer, and the other end is provided with a pressing surface 13a, and one side of the prism is inclined. A wire feeding hole 13-1 is formed on that surface in the same shape as the conventional one in the same direction as the feeding direction of the wire 1, and a pressing surface 13a is formed as shown in FIG. 2(b).
The width W in the wire feed direction is approximately 1.5D relative to the diameter D of the wire 1.

【0012】クランパ14は、図1に示すように第一の
ボンディングツール13のワイヤフィード用ホール13
−1から押圧面13aに供給されて反対側に突出したワ
イヤ1の先端を把持するように形成され、第一のボンデ
ィングツール13のワイヤフィード用ホール13−1と
反対側上部に配設されて、該ワイヤ1の先端を把持する
と前記ワイヤフィード用ホール13−1とにより当該ワ
イヤ1にテンションえ付勢されるよう構成されたもので
ある。
The clamper 14 is connected to the wire feed hole 13 of the first bonding tool 13 as shown in FIG.
- 1 to the pressing surface 13a and protrudes to the opposite side, and is arranged at the upper part of the wire feed hole 13-1 of the first bonding tool 13 opposite to the wire feed hole 13-1. , when the tip of the wire 1 is gripped, the wire 1 is tensioned and biased by the wire feed hole 13-1.

【0013】成形治具15は、図3(a) に示すよう
にブロックの中央部に第一ボンディングツール13の押
圧面13aが嵌入できる直方体の凹部15−1を成形し
て、その凹部15−1の中心線方向に、図3(b) に
示す如き前記第一ボンディングツール13の押圧面13
aに供給されたワイヤ1を、第一ボンディングツール1
3のワイヤフィード用ホール13−1から押圧面13a
を経由して上記クランパ14の方向となるような成形用
の溝部15−2を形成し、凹部15−1の底面および一
方で対向する側面より当該溝部15−2にワイヤ1を誘
導する傾斜面を設けている。
The forming jig 15 has a rectangular parallelepiped recess 15-1 into which the pressing surface 13a of the first bonding tool 13 can fit, in the center of the block, as shown in FIG. 3(a). 1, the pressing surface 13 of the first bonding tool 13 as shown in FIG.
The wire 1 supplied to the first bonding tool 1
3 from the wire feed hole 13-1 to the pressing surface 13a
A forming groove 15-2 is formed in the direction of the clamper 14 through the groove 15-2, and an inclined surface guides the wire 1 into the groove 15-2 from the bottom surface of the recess 15-1 and the opposing side surface. has been established.

【0014】第二のボンディングツール23は、図5(
b) に示すように押圧面23aのワイヤフィード方向
幅Wをワイヤ1の直径Dに対して2Dに形成して、半円
状,例えば前記ワイヤ1の直径に対して1.2〜1.5
倍のガイド溝(23−2)を、図5(a) に示すよう
に押圧面23aとワイヤ供給側および排出側に形成した
ものである。上記第一のボンディングツールを使用した
ワイヤ接合方法は、図1に示すように超音波トランスデ
ューサ2に固定された第一ボンディングツール13を下
降させて、図2(a) に示すように先端の押圧面13
aが図示していない基板上のパットと一定寸法,例えば
ワイヤ1の直径より若干大きな隙間を形成する。
The second bonding tool 23 is shown in FIG.
b) As shown in FIG. 1, the width W of the pressing surface 23a in the wire feed direction is formed to be 2D relative to the diameter D of the wire 1, so that the width W of the pressing surface 23a is 2D relative to the diameter D of the wire 1.
Double guide grooves (23-2) are formed on the pressing surface 23a, the wire supply side, and the wire discharge side, as shown in FIG. 5(a). The wire bonding method using the first bonding tool described above involves lowering the first bonding tool 13 fixed to the ultrasonic transducer 2 as shown in FIG. 1, and pressing the tip as shown in FIG. 2(a). Face 13
A is formed with a pad on a substrate (not shown) to form a gap of a certain size, for example, slightly larger than the diameter of the wire 1.

【0015】そして、この隙間にワイヤフィード用ホー
ル13−1より供給されたワイヤ1を挿入して、図1に
示す如く前記ワイヤ1の先端をワイヤフィード用ホール
13−1と反対側上部に配設されたクランパ14に把持
させて、当該クランパ14とワイヤフィード用ホール1
3−1とで押圧面13aと接触したワイヤ1にテンショ
ンを付勢する。また、テンション付勢の自動化をはかる
ために、前記ボンディングツール13の押圧面13aと
前記パットの隙間にワイヤフィード用ホール13−1よ
り供給されたワイヤ1を挿入して、図4(a) で示す
ようにワイヤ1の先端部を逆ヘ字形に折り曲げ、その状
態で図3に示す成形治具15の凹部15−1に押圧面1
3aを挿入することにより、ワイヤ1の先端部が図4(
b) に示すように先端部を逆梯形状に曲折して、更に
ワイヤ1を繰り出して再び曲折することにより図4(c
) に示す如くその先端が前記クランパ14の位置とな
るように成形され、この先端を当該クランパ14で把持
してワイヤ1にテンションを付勢する。
Then, the wire 1 supplied from the wire feed hole 13-1 is inserted into this gap, and the tip of the wire 1 is placed on the upper side opposite to the wire feed hole 13-1 as shown in FIG. The provided clamper 14 is held, and the clamper 14 and the wire feed hole 1 are connected to each other.
3-1 applies tension to the wire 1 in contact with the pressing surface 13a. Further, in order to automate the tension application, the wire 1 fed from the wire feed hole 13-1 is inserted into the gap between the pressing surface 13a of the bonding tool 13 and the pad, as shown in FIG. 4(a). As shown, the tip of the wire 1 is bent into an inverted F-shape, and in this state, the pressing surface 1 is inserted into the recess 15-1 of the forming jig 15 shown in FIG.
3a, the tip of the wire 1 becomes as shown in Fig. 4 (
By bending the tip end into an inverted ladder shape as shown in b), and then letting out the wire 1 and bending it again, the wire 1 is bent again.
), the wire 1 is shaped so that its tip is located at the position of the clamper 14, and this tip is gripped by the clamper 14 to apply tension to the wire 1.

【0016】そして、図1に示すように曲折されたワイ
ヤ1の先端をクランパ14により把持してワイヤフィー
ド用ホール13−1とでワイヤ1にテンションを付勢し
、その状態で上記ボンディングツール13を下降させて
押圧面13aによりワイヤ1を押圧して超音波で図示し
ていない基板上のパットと接合する。また、第二のボン
ディングツール23による接合方法は、図5(a) に
示すように先端の押圧面23aが図示していない基板上
のパットと一定,例えばワイヤ1の直径と略等しい隙間
となるようにボンディングツール23を下降させ、ワイ
ヤフィード用ホール23−1よりワイヤ1を押圧面23
aに供給することにより、当該ワイヤ1の先端部がガイ
ド溝23−2と前記パットで曲折して先端が排出側より
突出し、その状態でボンディングツール23を更に下降
させて押圧面23aに位置するワイヤ1をパットに接合
する。
Then, as shown in FIG. 1, the tip of the bent wire 1 is gripped by the clamper 14 and tension is applied to the wire 1 through the wire feed hole 13-1, and in this state, the bonding tool 13 is is lowered to press the wire 1 with the pressing surface 13a and bond it to a pad on a substrate (not shown) using ultrasonic waves. Further, in the bonding method using the second bonding tool 23, as shown in FIG. 5(a), the pressing surface 23a at the tip has a constant gap with a pad on a substrate (not shown), for example, approximately equal to the diameter of the wire 1. Lower the bonding tool 23 as shown, and feed the wire 1 through the wire feed hole 23-1 onto the pressing surface 23.
By supplying wire 1 to point a, the tip of the wire 1 is bent by the guide groove 23-2 and the pad, and the tip protrudes from the discharge side, and in this state, the bonding tool 23 is further lowered to be located on the pressing surface 23a. Wire 1 is joined to the pad.

【0017】その結果、ボンディングツール13, 2
3へのワイヤ1の供給位置が正確となって押圧面13a
,23aのワイヤ供給方向の幅を最小とすることができ
るので、基板上のパッドに対するワイヤ1の接合位置が
正確になるとともに、同一パッドに複数本のワイヤ1を
接合することができる。なお、本実施例はプリント基板
のワイヤ接合方法およびボンディングツールについて説
明したが、プリント基板のみに限定されずに半導体装置
のワイヤ接合方法およびボンディングツールに使用して
も良い。
As a result, bonding tools 13, 2
The feeding position of the wire 1 to the pressing surface 13a becomes accurate.
, 23a in the wire supply direction, the bonding position of the wire 1 to the pad on the substrate becomes accurate, and a plurality of wires 1 can be bonded to the same pad. Although this embodiment has been described with respect to a wire bonding method and a bonding tool for printed circuit boards, the present invention is not limited to only printed circuit boards, and may be used for wire bonding methods and bonding tools for semiconductor devices.

【0018】[0018]

【発明の効果】以上の説明から明らかなように本発明に
よれば極めて簡単な方法と構成で、ワイヤの供給位置が
正確となるとともにボンディングツールの押圧面を最小
とすることができる等の利点があり、著しい経済的及び
、信頼性向上の効果が期待できるワイヤ接合方法および
ボンディングツールを提供することができる。
[Effects of the Invention] As is clear from the above description, the present invention has advantages such as being able to accurately supply the wire and minimizing the pressing surface of the bonding tool with an extremely simple method and configuration. Therefore, it is possible to provide a wire bonding method and a bonding tool that can be expected to be significantly economical and to improve reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】  本発明の一実施例によるワイヤ接合方法を
示す模式図である。
FIG. 1 is a schematic diagram showing a wire bonding method according to an embodiment of the present invention.

【図2】  第一実施例のボンディングツール先端部を
示す模式図である。
FIG. 2 is a schematic diagram showing the tip of the bonding tool of the first embodiment.

【図3】  本実施例のワイヤ成形治具を示す模式図で
ある。
FIG. 3 is a schematic diagram showing the wire forming jig of this example.

【図4】  本成形治具によるワイヤ曲折順序を示す模
式図である。
FIG. 4 is a schematic diagram showing the wire bending order by the present forming jig.

【図5】  第二実施例のボンディングツール先端部を
示す模式図である。
FIG. 5 is a schematic diagram showing the tip of a bonding tool of a second embodiment.

【図6】  従来のワイヤ接合方法を示す模式図である
FIG. 6 is a schematic diagram showing a conventional wire bonding method.

【図7】  従来のボンディングツールを示す模式図で
ある。
FIG. 7 is a schematic diagram showing a conventional bonding tool.

【符号の説明】[Explanation of symbols]

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】    ボンディングツール(13)のワ
イヤフィード用ホール(13−1)から供給されたワイ
ヤ(1) の先端を把持して、当該ワイヤ(1) にテ
ンションに付勢するクランパ(14)を前記ワイヤフィ
ード用ホール(13−1)の反対側に設け、当該クラン
パ(14)でテンションを付勢した該ワイヤ(1) を
上記ボンディングツール(13)の押圧面(13a) 
により基板上のパッドと接合してなることを特徴とする
ワイヤ接合方法。
Claim 1: A clamper (14) that grips the tip of the wire (1) supplied from the wire feed hole (13-1) of the bonding tool (13) and applies tension to the wire (1). is provided on the opposite side of the wire feed hole (13-1), and the wire (1), which is tensioned by the clamper (14), is placed on the pressing surface (13a) of the bonding tool (13).
A wire bonding method characterized by bonding a wire to a pad on a substrate.
【請求項2】    上記ボンディングツール(13)
の該ワイヤフィード用ホール(13−1)から供給され
た上記ワイヤ(1) の先端部を、凹部(15−1)に
当該ワイヤ(1) の成形用溝部(15−2)を形成し
た成形治具(15)により成形したことを特徴とする請
求項1記載のワイヤ接合方法。
[Claim 2] The bonding tool (13)
The tip of the wire (1) fed from the wire feed hole (13-1) is molded by forming a molding groove (15-2) for the wire (1) in the recess (15-1). The wire joining method according to claim 1, characterized in that the wire joining method is formed using a jig (15).
【請求項3】    上記ワイヤ(1) の接合用押圧
面(23a) と周縁に、ワイヤフィード用ホール(2
3−1)から供給されたワイヤ(1)の繰り出す方向に
ガイド溝(23−2)を形成したことを特徴とするワイ
ヤ接合用ボンディングツール。
3. A wire feeding hole (2
A bonding tool for wire joining, characterized in that a guide groove (23-2) is formed in the direction in which the wire (1) fed from the wire (3-1) is fed out.
JP3014458A 1991-02-05 1991-02-05 Wire bonding method and bonding tool Withdrawn JPH04249331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3014458A JPH04249331A (en) 1991-02-05 1991-02-05 Wire bonding method and bonding tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3014458A JPH04249331A (en) 1991-02-05 1991-02-05 Wire bonding method and bonding tool

Publications (1)

Publication Number Publication Date
JPH04249331A true JPH04249331A (en) 1992-09-04

Family

ID=11861606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3014458A Withdrawn JPH04249331A (en) 1991-02-05 1991-02-05 Wire bonding method and bonding tool

Country Status (1)

Country Link
JP (1) JPH04249331A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104772548A (en) * 2014-12-26 2015-07-15 中国航天科技集团公司第五研究院第五一三研究所 Electric connector welding and clamping device
KR20200078524A (en) * 2017-11-10 2020-07-01 슈운크 소노시스템스 게엠바하 Ultrasonic welding device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104772548A (en) * 2014-12-26 2015-07-15 中国航天科技集团公司第五研究院第五一三研究所 Electric connector welding and clamping device
KR20200078524A (en) * 2017-11-10 2020-07-01 슈운크 소노시스템스 게엠바하 Ultrasonic welding device
JP2021502254A (en) * 2017-11-10 2021-01-28 シュンク・ソノシステムズ・ゲーエムベーハー Ultrasonic welding equipment

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