JPH0423448A - Board accommodation cassette - Google Patents

Abstract

PURPOSE:To prevent a board from slipping down from a board accommodation cassette, by limiting coming of the board in and out of the board accommodation cassette by moving up and down a rod specifying a structure. CONSTITUTION:A board drop preventing stopper is constructed of a rod 23 of a specific structure and a board drop preventing plate 24, and grooves 26, 42, 43 and 44 of specific structures are made in the rod 23. Besides, a board accommodation cassette is provided with a projection 25 which is put in the groove 26 of the rod 23, and when the rod 23 is moved up and down, it is made to rotate, since the groove 26 is limited by the projection 25. According to this constitution, the projection for preventing the drop of a board blocks up the entrance and exit of the board automatically when the board accommodation cassette is lifted up, and therefore the board is prevented from slipping down. When the cassette is placed on a flat part, besides, the projection for preventing the drop of the board detaches automatically from the entrance and exit of the board.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the shape and structure of a substrate slip prevention device in a substrate storage cassette for glass, quartz, silicon, and gallium arsenic flat substrates.

[Conventional technology]

Conventionally, substrate storage cassettes have a structure in which a substrate storage groove is formed in a box-shaped case-like cassette to store a plurality of substrates, as described in the catalog of Yodogawa Kasei Co., Ltd.

[Problem to be solved by the invention]

The above-mentioned conventional technology has a problem in that when the substrate storage cassette is lifted and the substrate entrance/exit is turned downward, the substrates slide out of the substrate storage cellar 1 and, in some cases, fall down and break.

The purpose of the present invention is to prevent the board from slipping from the board cassette using a board fall prevention device when the board storage cassette is lifted, and furthermore, if the board cassette is placed on a flat surface, the board will automatically fall. It is an object of the present invention to provide a substrate storage cassette with an automatically opening/closing substrate fall prevention device in which the prevention device is released.

[Means to solve the problem]

In order to achieve the above purpose, a stopper for preventing substrates from falling is provided at the substrate entrance/exit of the substrate storage cassette, and when the substrate storage cassette is lifted, the stopper automatically comes out to the substrate entrance/exit to prevent the substrates from coming out completely. Further, the substrate storage cassette is provided with a mechanism in which the stopper automatically moves away from the substrate entrance/exit when the substrate storage cassette is placed on a flat part of the loader/unloader of the apparatus.

[Effect]

A rotatable rod is provided at the substrate entrance/exit of the substrate storage cassette to serve as a device to prevent substrates from falling, and the rod is pulled out from the bottom of the substrate storage cassette, and by using the movement of the substrate storage cassette to be retracted to the bottom by its own weight, a diagonal groove is formed in the rod. By digging the board and providing a protrusion on the substrate storage cassette side, the rod rotates. Furthermore, when the substrate storage cassette is lifted, the movement of the rod coming out from the bottom of the substrate storage cassette due to the weight of the rod is the reverse rotational movement described above. By attaching a protrusion to prevent the board from slipping out on the rod, when the board storage cassette is lifted up, the bar rotates and the protrusion to prevent the board from slipping out blocks the entrance/exit of the board. Even if the second board entrance/exit is facing downward, the board will not slide out of the board storage cassette and will not fall.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 4. A stopper 12 for preventing substrate fall of a specific structure is provided on the substrate entrance/exit side of the substrate storage cellars 1 to 11 (FIG. 1).

The substrate fall prevention stopper 12 may be provided on the right side, on the left side, or on both the left and right sides of the substrate storage cassette 11 in which the substrates are taken in and out. One side is preferable in consideration of dust generation in moving parts.

The substrate fall prevention stopper is composed of a specific structure of a stopper 23 and a substrate fall prevention plate 24, and grooves 26.4-2.43 and 4.4 of a specific structure are dug in the support 23. Also,
The board storage cassettes 1~ are provided with protrusions 25, which enter grooves 26 in the rods 23, and by moving the rods 23 downward by 1'', the movement of the rods is restricted by the grooves 26 by the protrusions 25, so that the rods rotate. . The groove part A of the rod is a groove 42 in the same direction as the longitudinal direction of the rod.
, 4.4 at the ends of the grooves to restrict the rotation of the rod 23 when the rod is raised to the top and when it is lowered to the bottom.

The groove 43 of the rod 23 allows the substrate storage cassette to be placed on a flat surface, and when the rod 23 is aligned with the bottom surface of the substrate storage cassette 21, the substrate fall prevention stopper 24 allows the direction in which the board storage cassette is not limited to entering and exiting the substrate storage cassette. Direction, board storage capacity Cera 1~
21. , 22 are lifted, the support 23 is lowered by its own weight from the bottom of the substrate storage cassette 21, and the groove 43 is dug so that the support 23 rotates and the stopper 24 for preventing substrate fall faces in a direction that restricts the entry and exit of the substrate. Figure 4(b) is A of Figure 4(a).
This is a developed view of the part, and the angle of rotation is determined by x/X. For example, if this value is about 1/4, then 23 will be about 9
If the bar is rotated by 0° and this value is about 1/2, then the bar will be 180
° Rotate. Further, in FIG. 4(b), the groove portion 43 is formed into a straight line, but it may be formed into an arc. The smoothness with which the rod rotates is determined by the value of y/x, and the larger this value, the smoother the rod rotates.

Furthermore, although the grooves are integrated in this embodiment, a plurality of grooves may be provided. In this embodiment, the board drop prevention stopper 1 to the collar 24 may have a rectangular plate shape or a specific shape such as a comb shape, and the board drop prevention stopper 24 may be made of a material softer than the board, such as Teflon, or may be pasted. Prevents scratches on the board. In addition, in this embodiment, the rod 2 is
In order to prevent 23 from falling off, the diameter of the rod is partially changed, but stoppers 51 and 52 may be provided to restrict the upper and lower sides of 23, as shown in FIG. 5(a).

Furthermore, as shown in FIG. 6, parts 61 and 62 made of a material with a small coefficient of friction may be provided between the substrate storage cassette and the support 23 in order to make the rotation of the support 23 smooth.

Next, another embodiment will be explained with reference to FIGS. 7 and 8. In the embodiment described above, when the board storage cassette is lifted, a part of the rod 23 comes out from the bottom of the board storage cassette, but the rod 23 is made long enough so that it does not come out from the bottom even when the board storage cassette is lifted, and the rod 23 is attached to the part where the board is held. A protrusion 72 may be provided, or a structure may be adopted in which the protrusion 82 comes out from the bottom surface by placing it at a specific location. Further, in the present invention, the rod is provided with a groove and the substrate storage cassette is provided with a protrusion to rotate the rod, but conversely, the substrate storage cassette may be provided with a groove and the rod may be provided with a protrusion.

〔Effect of the invention〕

According to the present invention, when the substrate storage cassette is lifted, the protrusion for preventing substrates from falling automatically blocks the substrate entrance/exit, so that the substrates will not slip even if the substrate entrance/exit is directed downward.

In addition, when the substrate storage cassette is placed on a flat surface such as the loader or unloader of the device, the protrusion to prevent substrates from falling automatically moves away from the substrate entrance/exit, which prevents contamination from hands and adhesion of dust when doing it manually. There are some effects that can be achieved.

Furthermore, since cracks caused by falling substrates and adhesion of foreign matter due to chipping can be significantly reduced, yields can be improved.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of an embodiment of the present invention, Fig. 2 is a partial view of an embodiment of the invention when Fig. 1 is placed on a plane, and Fig. 3 is a diagram when Fig. 1 is lifted up. 4 is a detailed view of FIGS. 2 and 3, FIGS. 5 and 6 are detailed views of an embodiment of the present invention, and FIGS. 7 and 8 are detailed views of an embodiment of the present invention. FIG. 3 is a partial diagram of an example. 11 - Board storage cassette, 12... Board drop prevention 1
-Brim 123...rod, 24...board fall prevention plate, 25
・Protrusion, 26, 42, 4.3, 4.4...Groove, 51° 52...S1 to collar 172, 82...Protrusion.

Claims (1)

[Claims] 1. In a substrate storage cassette for storing flat substrates made of glass, quartz, silicon, gallium arsenide, plastic, etc., a rotating rod with a specific structure is provided at the entrance and exit of the substrate, and the rod is provided with an oblique groove. A protrusion is provided in the substrate storage cassette to restrict the movement of the groove, the rod rotates along the groove, a protrusion is provided on the rod, and the substrate is moved in and out of the substrate storage cassette by moving the rod up and down. A board storage cassette characterized by restricting. 2. The substrate storage cassette according to claim 1, wherein the rod is provided with a protrusion, the substrate storage cassette is provided with a groove, and the substrate is restricted from entering and leaving the substrate storage cassette by moving the rod up and down. 3. The substrate storage cassette according to claim 1 or 2, characterized in that a member made of a material different from that of the rod and the substrate storage cassette is provided between the rod and the substrate storage cassette.