JPH04231461A - Protector for sputtering target and packaging method - Google Patents

Abstract

PURPOSE:To prevent the adhesion of dust on the sputtering surface of a target and the damage of the sputtering surface by coating the target for sputtering with a cylindrical protector having a specific structure, then inserting the target into a bag-shaped material and hermetically sealing the bag-shaped material. CONSTITUTION:The target 1 for sputtering is covered with the protector 4 consisting of a cylindrical packing plate opened at one end at the time of handling or preserving the above-mentioned target 1. The cylindrical protector 4 is so mounted that its open end and at least a part of the surface of the peripheral edge 2 of the protector 4 bonded and held by the target material 1 come into contact with each other. The target 1 is then fixed by a rubber band 3 in such a manner that the sputtering surface thereof maintains a contactless state. This target is inserted into the bag-shaped material 6 and the gas therein is evacuated to a reduced pressure or to a vacuum and the bag-shaped material is sealed, or a low pressure inert gas such as Ar is sealed after evacuating. The sputtering surface of the target 1 is prevented from being stained by the dust and form being damaged by the contact of the protector 4.

Description

[Detailed description of the invention]

0001

[Field of Industrial Application] The present invention relates to a protector for a target in a sputtering apparatus, and a protector for preventing dust from adhering to the target surface and damage to the target surface during handling or storage of the target, and a protector for preventing the surface from being damaged. Regarding the packaging method of the target used.

0002

BACKGROUND ART Conventionally, methods for packaging sputtering targets of this type include (1) placing the target in a bag-like packing, evacuating the gas in the packing to reduce the pressure or create a vacuum, and closing the packing; ) Place the target in a bag-like packing, replace the gas inside the packing with an inert gas, and close the packing; or (3) Place the target in a sealed container with bolts, etc. to avoid contact with the sputtering surface of the target. Methods have been proposed in which it is fixed and vacuum evacuated or gas replaced.

0003

Problems to be Solved by the Invention As mentioned above, the conventional method using bag-shaped packing, for example,
Method (2) has the disadvantage that the packing material is brought into close contact with the surface of the target by exhaust gas, and foreign matter adhering to the surface of the packing material is transferred to the surface of the target. When the packing and target move, there is a problem in that the packing and target rub against each other, generating dust, etc., which adheres to the target surface. Furthermore, in any of these methods, since the sputtering surface of the target covered with packing comes into contact with a hard object, there is a risk that damage such as cracking or chipping may occur on the target surface.

On the other hand, method (3) uses a protective container to prevent the above-mentioned dust from adhering to it;
■In order to fix the target, holes for bolts are required in the backing plate, which makes the shape of the backing plate complicated, and due to the vacuum seal mechanism when using the target, there are no holes for bolts in the target. be unsuitable for ■The structure is complex. ■Since the target is completely housed, the shape is considerably larger than the target, which is not necessarily desirable because of problems such as inconvenience in transportation and storage.

[0005]

[Means for Solving the Problems] The present inventors have conducted intensive studies to solve the above problems, and as a result, have completed the present invention. That is, the first aspect of the present invention is that when the target material and the backing plate are overlapped, the backing plate has at least a portion of the peripheral edge of the backing plate protruding from the sputtering surface of the target. A cylindrical protector that covers the bonded target material, one end of the protector being closed;
The other open part has an inner diameter sufficient to contain at least the target material, and the backing plate has an inner diameter that cannot contain the target material, and the second invention relates to a sputtering target protector. This invention relates to a sputtering target packaging method characterized by inserting a target material coated with a tool into a bag-like object and sealing the bag-like object, or sealing the bag-like object by evacuating the gas inside the bag-like object. .

Next, the present invention will be further explained based on the drawings. The sputtering target protector of the present invention is shown in FIG.
As shown in the figure, it has a shape in which one end of the cylindrical object (4 in the figure) is sealed, and the surface of at least a part of the periphery of the backing plate that adheres and holds the open end and the target material (in the figure) 2) By mounting the sputtering surface so that it is in contact with the sputtering surface of the target, the sputtering surface of the target can be protected from contact with anything. Although the shape of the cylindrical object of this protective equipment is not limited, it is preferably selected depending on the shape of the target. For example, in the case of a circular target, a cylindrical shape is suitable. Further, the inner diameter of this protector is at least sufficient to contain the target material, and the inner diameter is such that the backing plate cannot contain the target material.

[0007]Although not necessarily necessary, holes (5 in the figure), grooves, etc. of arbitrary shape may be provided at any location of the cylindrical object, for example, on the side wall, so as not to obstruct the internal airflow in the packaging method described later. It is preferable to keep it. When using the protective equipment,
There is no need to perform any processing on the target material and the backing plate, and a normal target may be used in a preferred manner. Moreover, the internal size of this protector is large enough to accommodate the target material without contacting it.

Next, the packaging method of the present invention will be explained. The target fitted with protective equipment as shown in Figure 1 is shown in Figure 2.
It is inserted into a bag-like object 6 as shown in the figure, and the gas inside is evacuated or sealed without being evacuated. At this time, the protective equipment is fixedly attached by external pressure, but it may also be fixed using a simple device such as a rubber band or adhesive tape. Also, as shown in Figure 3, a target fitted with protective gear is inserted into a bag-like object, and the gas inside is replaced with a specific gas, such as nitrogen, argon, or helium, which is inert to the target material. It is also possible to seal it. Further, as described above, the internal gas can be evacuated and sealed. The material of the bag is not particularly limited, but it may be made of soft synthetic resin such as polyvinyl chloride, polyethylene, or polypropylene.
or a film is preferred.

Next, embodiments of the present invention will be illustrated. Figure 1
This is an example in which the protective equipment of the present invention is attached to a circular target. A protective device 4 having holes 5 for passing airflow is attached to cover the target 1. The protector 4 and the target 1 are in contact with each other via the backing plate peripheral portion 2 and are not in contact with the sputtering surface of the target. This embodiment is an example in which a rubber band 3 is used to secure the protective equipment 4. The target fitted with the protective equipment 4 in this manner is inserted into the bag-like object 6 as shown in FIG. 2, and the gas inside is evacuated to create a reduced pressure or vacuum and the bag-like object 6 is sealed. Similarly to the above example, the target 1 equipped with the protective equipment 4 as shown in FIG. 1 is inserted into the bag-like object 6 as shown in FIG. 0.5 argon gas
After filling to about atmospheric pressure, seal it.

0010

Effects of the Invention By using the present invention, it is possible to easily prevent dust from adhering to the sputtering surface of a sputtering target and from damaging the same, and the target is convenient to handle.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of one embodiment of the present invention, showing an example in which a target material is covered with a protective device.

FIG. 2 shows an example in which a sputtering target is inserted into a bag-like object and sealed.

FIG. 3 shows an example in which a sputtering target is inserted into a bag-like object and sealed.

[Explanation of symbols]

1: Sputtering target 2: Backing plate periphery 3: Rubber band 4: Protective equipment 5: Airflow passage hole 6: Bag-like object 7: Space filled with vacuum or replacement gas

Claims (3)

[Claims] Claim 1: A target material bonded to a backing plate, wherein when the target material and the backing plate are overlapped, at least a portion of the peripheral edge of the backing plate protrudes from the sputtering surface of the target. A cylindrical protector that covers a target material, one end of the protector is closed, the other open part has an inner diameter sufficient to contain at least the target material, and the backing plate is Protective equipment for sputtering targets with inner diameters that cannot be enclosed. 2. A target material bonded to a backing plate, wherein when the target material and the backing plate are overlapped, at least a portion of the peripheral edge of the backing plate protrudes from the sputtering surface of the target. A cylindrical protector that covers a target material, one end of the protector is closed, the other open part has an inner diameter sufficient to contain at least the target material, and the backing plate is A target material coated with a sputtering target protector having an inner diameter that cannot be contained inside the bag is inserted into a bag-like object and the bag-like object is sealed, or the gas inside the bag-like object is evacuated and sealed. How to package sputtering targets. Claim 3: A target material covered with protective equipment,
3. The packaging method according to claim 2, further comprising inserting the bag into a bag-like object, replacing the gas inside the bag-like object, and then sealing the bag.