JPH0423130U - - Google Patents

Info

Publication number
JPH0423130U
JPH0423130U JP6454090U JP6454090U JPH0423130U JP H0423130 U JPH0423130 U JP H0423130U JP 6454090 U JP6454090 U JP 6454090U JP 6454090 U JP6454090 U JP 6454090U JP H0423130 U JPH0423130 U JP H0423130U
Authority
JP
Japan
Prior art keywords
plasma
extraction window
disposed
reaction chamber
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6454090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6454090U priority Critical patent/JPH0423130U/ja
Publication of JPH0423130U publication Critical patent/JPH0423130U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP6454090U 1990-06-18 1990-06-18 Pending JPH0423130U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6454090U JPH0423130U (cs) 1990-06-18 1990-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6454090U JPH0423130U (cs) 1990-06-18 1990-06-18

Publications (1)

Publication Number Publication Date
JPH0423130U true JPH0423130U (cs) 1992-02-26

Family

ID=31595580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6454090U Pending JPH0423130U (cs) 1990-06-18 1990-06-18

Country Status (1)

Country Link
JP (1) JPH0423130U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0932127A (ja) * 1995-07-13 1997-02-04 Kaneko:Kk 家屋の防湿構造と一体パネル工法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241182A (ja) * 1987-03-27 1988-10-06 Matsushita Electric Ind Co Ltd 膜形成装置
JPH02156088A (ja) * 1988-12-07 1990-06-15 Anelva Corp バイアスｅｃｒ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241182A (ja) * 1987-03-27 1988-10-06 Matsushita Electric Ind Co Ltd 膜形成装置
JPH02156088A (ja) * 1988-12-07 1990-06-15 Anelva Corp バイアスｅｃｒ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0932127A (ja) * 1995-07-13 1997-02-04 Kaneko:Kk 家屋の防湿構造と一体パネル工法

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