JPH0422467A - Nozzle - Google Patents

Abstract

PURPOSE:To prevent that air bubbles are contained in the central part of an applied liquid even when a liquid including air bubbles is applied by applying the liquid using a nozzle having an air bubble separating part provided between the suction port and emitting port thereof. CONSTITUTION:An air bubble separation part 2 is provided between a suction port 1 and an emitting port 6. Even when a liquid including air bubbles is applied by opening this nozzle, no air bubbles are contained in the central part of the applied liquid and a smooth coating surface can be obtained, and the coating irregulairy due to air bubbles is eliminated. Therefore, for example, when an adhesive is emitted, uniform film thickness is obtained and stable adhesion becomes possible.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a nozzle used in a dispenser device or the like.

[Prior Art 1 An example of a conventional nozzle will be explained using FIG. 4. A hole 22 with an optimum diameter is bored inside the nozzle body 21. Liquids such as resist and adhesive flow down through the holes 22 and are applied to IC boards, circuit boards, and the like.

[Problem to be Solved by the Invention 1] However, according to the conventional nozzle, when a liquid such as a resist or adhesive containing air bubbles is applied, air bubbles are left throughout the applied liquid. , the bubbles expand during heating during curing, resulting in a decrease in adhesive strength. Otherwise, there is a problem that the adhesive strength varies. Further, when the liquid is a photosensitive resist, there is a problem that poor exposure occurs in the bubble portion, making it impossible to obtain good Bakun reproducibility. In this way, a problem occurs in which the characteristics of each liquid used are deteriorated.

The present invention has been made to solve the above problems,
The objective is to provide a nozzle that does not contain air bubbles in the center of the applied liquid even if the liquid that contains air bubbles is applied therein.

[Means for Solving the Problems 1] The nozzle of the present invention is characterized in that a bubble separating section is provided between the supply port and the discharge port.

[Example] An example of the nozzle of the present invention will be described with reference to the sectional view of FIG. 1 is a nozzle inlet, which is a part to be attached to the dispenser. From the inlet 1 the tube extends towards the center of the nozzle and is connected into the bubble separation section 2 to the discharge section 3 which discharges upwards. The bubble separating section 2 is composed of a hole 4 for discharging rising bubbles and a bypass path 5 connected to the hole 4 on the outer periphery of the nozzle. A discharge port 6 is formed below the bubble separating section 2 . The bypass passage 5 and the discharge port are at approximately the same height.

When liquid containing bubbles flows in from the supply port 1, the liquid is discharged from the discharge section 3 into the bubble separation section 2. At this time, bubbles in the liquid are collected upward, pass through the hole 4, and are guided into the bypass path 5. The liquid from which the bubbles have been separated is discharged from the lower discharge port 6.

As a result, there are no air bubbles in the center of the ejected liquid, so when applying resist or adhesive, there are no air bubbles in the central important area. It is rotated with a spinner to spread the resist, but since there are no air bubbles in the center, after rotation with a spinner, resist ribs without air bubbles can be obtained over the entire surface. Furthermore, even when the adhesive is discharged, there are no air bubbles in the center, so even when used for attaching IC chips, etc., stable adhesive strength can be obtained.

In the above embodiment, the outlet of the bypass path 5 is provided around the discharge port 6, and the liquid containing bubbles comes out near the liquid that does not contain bubbles, but as shown in FIG. Thus, the outlet of the bypass path 7 can be carried far away from the discharge port 9 by the piping 8, and air bubbles can be completely separated.

Moreover, as shown in FIG. 3, if the volume of the bubble separating section 10 is made sufficiently large, a bypass path is not necessary. If the release valve 11 is set up and suction is applied, the air bubbles can be easily removed.

[Effects of the Invention] According to the present invention described above, even if a liquid containing gas inside is discharged, the liquid is guided to the outer periphery and outside, so that the center of the discharged liquid is No air bubbles are generated, a smooth coating surface is obtained, and uneven coating due to air bubbles is eliminated. Therefore, for example, when dispensing adhesive, a uniform film thickness is obtained, allowing for stable adhesion.
Furthermore, when used for coating a photosensitive resist, etc., stable resist coating can be achieved, and the quality is improved due to the uniformity of exposure.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing one embodiment of the nozzle of the present invention, and FIG.
The figure is a sectional view showing another embodiment of the nozzle of the present invention, FIG. 3 is a diagram showing still another embodiment of the nozzle of the present invention, and FIG. 4 is a diagram showing a conventional nozzle. 1...Inlet port 2.10...Bubble separation section 3...Discharge section 4...85.7...Bypass path 6.9...・Discharge port 8...Piping 11...Discharge valve 21...Nozzle body 22...8 or more

Claims (1)

[Claims] A nozzle characterized in that a bubble separating section is provided between an inlet and an outlet.