JPH04216954A - Liquid jet recording head, manufacture thereof and recording apparatus equipped with said recording head - Google Patents

Abstract

PURPOSE:To manufacture a strong head not generating the elution of a resist (the so-called reduction of a film) in a developing process for preparing a precise and highly reliable liquid jet recording head by a lithographic technique. CONSTITUTION:A first photosensitive material layer 3 composed of a heat- crosslinkable positive resist photosensitive to ionizing radiation is provided on a substrate 1 having an ink emitting energy generating element 2 provided thereto to be thermally crosslinked and subsequently exposed through a pattern for forming ink passages to form the pattern latent image formed parts 6 of the ink passages. Subsequently, a second photosensitive material layer 5 photosensitive to light of 30nm or more is provided on the exposed material layer 3 and exposed through patterns for forming an ink supply port and ink emitting orifices to obtain the pattern latent image formed part 9 of the ink supply port and the pattern latent image formed parts 8 of the ink emitting orifices. Thereafter, the latent image formed parts 6,9,8 formed by exposure are dissolved and removed by a solvent to manufacture a head.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid jet recording head for generating ink droplets used in an ink jet recording system, a method for manufacturing the same, and a recording apparatus equipped with the liquid jet recording head.

0002

2. Description of the Related Art A liquid jet recording head applied to an ink jet recording system (liquid jet recording system) generally has a fine ink discharge opening (orifice), an ink channel, and a part of the ink channel that discharges ink. During recording, when the energy generating element is activated, small droplets of ink are ejected from the ejection port and land on the recording paper. Printing and recording are performed. Conventionally, as a method for manufacturing such a liquid jet recording head, for example, a plate of glass or metal is used, fine grooves are formed on the plate by processing means such as cutting or etching, and then the grooves are formed. It is known to form ink channels by joining plates to other suitable plates.

However, in a liquid jet recording head manufactured by such a conventional method, the inner wall surface of the ink path to be cut may not be sufficiently smooth, or distortion may occur in the ink path due to a difference in etching rate. Therefore, it is difficult to obtain an ink path with constant flow path resistance, and there are problems in that the recording characteristics of the liquid jet recording head after manufacturing tend to vary. In addition, there was also a drawback that the plate was easily chipped or cracked during cutting, resulting in a poor manufacturing yield. Furthermore, when etching is performed, there are many manufacturing steps, which has the disadvantage of increasing manufacturing costs. Furthermore, as a common drawback of the above conventional methods, a grooved plate with an ink path formed thereon and a driving element (ejection ejection When bonding the lid plate provided with the energy generating element (energy generating element), it is difficult to align these plates, and there is also a problem that mass production is lacking.

[0004] Furthermore, under the normal usage environment, a liquid jet recording head uses ink (generally, an ink liquid mainly composed of water and often not neutral, or an ink liquid mainly composed of an organic solvent). etc.) are in constant contact with Therefore, the head structural material that makes up the liquid jet recording head does not deteriorate in strength due to the influence of ink.
On the other hand, it is desired that the ink does not contain any harmful components that would reduce the suitability of the ink. However, in the above-mentioned conventional methods, it was not always possible to select materials suitable for these purposes due to constraints such as processing methods.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and provides a liquid jet recording head that is inexpensive, precise, and highly reliable, a method for manufacturing the same, and a liquid jet recording head that includes the head. The purpose is to provide a recording device with

[0006] Also, a novel liquid jet recording head capable of supplying a liquid jet recording head having a configuration in which the liquid flow path is microfabricated with high accuracy and high yield, a method for manufacturing the same, and the present head are provided. It is also an object of the present invention to provide a recording device that has the following characteristics.

[0007] Also, a new liquid jet recording head capable of supplying a liquid jet recording head that has less mutual influence with ink and has excellent mechanical strength and chemical resistance, a method for manufacturing the same, and a recording apparatus equipped with this head. The purpose is also to provide.

[0008]

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present inventors investigated various methods of manufacturing liquid jet recording heads using lithography techniques. After the materials (materials) are laminated and insolubilized in advance, a pattern latent image of the ink path is formed on this using ionizing radiation, and the positive resist is eluted (so-called film thinning) in the final development step.
Therefore, the present invention was completed based on the knowledge that it is possible to manufacture a head with excellent adhesion between the positive resist and the laminated upper layer. That is, the present invention provides an ink discharge port, an ink supply port, an ink path communicating with the ink discharge port and the ink supply port, and an ink discharge port disposed corresponding to the ink path and used for discharging ink. In the method of manufacturing a liquid jet recording head having an energy generating element that generates energy, a first ink path forming first resist made of a thermally crosslinked positive resist sensitive to ionizing radiation is provided on a substrate on which the energy generating element is disposed. After providing a photosensitive material layer and crosslinking and insolubilizing the first photosensitive material layer, the insolubilized first photosensitive material layer is exposed to a pattern for forming an ink path using ionizing radiation, and then the first photosensitive material layer Further, a second photosensitive material layer sensitive to light having a main emission wavelength of 300 nm or more is provided on top, and this layer has a main emission wavelength of 300 nm or more.
A pattern exposure for forming an ink discharge port and an ink supply port is performed using light of nm or more, and then the first and second photosensitive material layers are developed. Further, liquid jet recording includes an ink ejection port, an ink path communicating with the ink ejection port, and an energy generating element disposed corresponding to the ink path and generating energy used for ejecting ink. In the head manufacturing method, a first photosensitive material layer for forming an ink path made of a thermally crosslinked positive resist sensitive to ionizing radiation is provided on a substrate on which the energy generating element is disposed and an ink supply port is provided. After the first photosensitive material layer is crosslinked and insolubilized, the insolubilized first photosensitive material layer is exposed to a pattern for forming an ink path using ionizing radiation, and then a main emission wavelength of 300 nm is further applied on the first photosensitive material layer. A second photosensitive material layer that is sensitive to the above light is provided, and this is subjected to pattern exposure for forming ink ejection ports with light having a main emission wavelength of 300 nm or more, and then the first and second photosensitive material layers are developed. It is something to do. Furthermore, the present invention relates to a liquid jet recording head manufactured by the above method, and a recording apparatus equipped with the above head.

The present invention will be explained in detail below with reference to the drawings.

FIGS. 1 to 7 are explanatory diagrams of a method for manufacturing a recording head according to the present invention, and the head according to the present invention is manufactured on a substrate 1 shown in FIG. This substrate 1 is made of glass, for example.
It is made of ceramics, plastics, metal, etc., and functions as a part of the ink path constituent member described later, and also functions as a support for the photosensitive material layer described later.
If it meets the above purpose, its shape, material, etc.
It can be used without any particular restrictions. On the substrate 1, a predetermined number (two in this figure) of energy generating elements 2, such as electrothermal transducers and piezoelectric elements, which generate energy used to eject ink are arranged. Such an energy generating element 2 applies ejection energy to the ink liquid to eject ink droplets, thereby performing recording. For example, when an electrothermal conversion element is used as the energy generation element 2, this element generates ejection energy by heating the nearby recording liquid. Further, for example, when a piezoelectric element is used, ejection energy is generated by mechanical vibration of this element.

Note that control signal input electrodes (not shown) are connected to these elements 2 in order to operate these elements 2. Further, generally, various functional layers such as a protective layer can be provided for the purpose of improving the durability of these energy generating elements.

Next, as shown in FIG. 2, a first photosensitive material layer 3 made of a crosslinked positive resist is provided on the substrate 1 on which the energy generating element 2 is disposed. Photosensitive material layer 3
As a method for forming the film, a solution containing a photosensitive material may be applied by a solvent coating method, or a dry film coated with a photosensitive material may be prepared and then laminated onto a substrate using a lamination method. .

Solven coating is a method in which the photosensitive material solution is applied onto a substrate using a spin coater, roll coater, wire bar, etc., and then the solvent is dried and removed to form a photosensitive material layer.

The crosslinked positive resist used in the present invention has the following general formula:

[0015]

It is a polymer compound having a structural unit which can be disintegrated by exposure and a structural unit which can be crosslinked, as shown by the following formula (R and R' represent side chains other than hydrogen).

Examples of collapsible structural units include esters of methacrylic acid such as polymethyl methacrylate, polyethyl methacrylate, polyiso-propyl methacrylate, poly n-butyl methacrylate, poly tert-butyl methacrylate, and polyα-methylstyrene. , polyisobutylene, polymethylisopropynylketone, polyvinylketone, polyphenylisopropynylketone, and the like.

[0017] Examples of crosslinkable structural units include polymethacrylic acid, their acid chlorides, and alkyl esters. Among the above structural units, the collapsible structural units are preferably esters of methacrylic acid from the viewpoint of sensitivity, and the crosslinkable structural units are preferably polymethacrylic acid and its acid chloride from the viewpoint of ease of crosslinking.

[0018] The copolymerization ratio (mole ratio) of the crosslinkable structural unit and the collapsible structural unit is 1:100 to 1:100.
The ratio is preferably 100:10. Specific examples of crosslinked positive resists in which these crosslinkable structural units and collapsible structural units are copolymerized include polymers having the following structures, but the present invention is not limited thereto.

[0019]

[Case 2]

[0020]

[Chemical formula 3] (In the formula, R and R' represent an alkyl group, and l, m, and n represent arbitrary integers.) Also, the following formula

[0021]

It is also possible to use a compound in which the collapsible structural unit and the crosslinkable structural unit are the same, such as polymethyl methacrylamide represented by the formula (wherein p represents an integer).

Furthermore, it is also possible to copolymerize structural units other than the above-mentioned structural units for the purpose of adjusting the physical properties (solubility, film-forming properties, glass transition point) of the crosslinked positive resist.

These cross-linked positive resists easily form cross-links between molecules by means such as heating and gel, becoming insoluble in solvents and having a main emission wavelength of X-rays, electron beams or
By irradiating with ionizing radiation such as deep UV light of 0 nm or less, the molecular chains are cut and the material becomes soluble in a solvent.

In the present invention, the first photosensitive material layer 3 formed on the substrate 1 as described above is then thermally crosslinked to make it insoluble in a solvent. Insolubilization is 150-2
It is preferable to maintain the temperature at 20°C for about 5 to 60 minutes.

In the present invention, as shown in FIG. 3, an ink path forming mask 4 is placed on the upper surface of the first photosensitive material layer 3 cross-linked and insolubilized as described above, and a It irradiates with ionizing radiation. As a result, the molecular chains of the cross-linked positive resist in the exposed areas are cut, and as shown in FIG. This enables development. The main exposure means may be one-shot exposure through a photomask, or direct drawing using an electron beam, ion beam, or the like.

In the present invention, a second photosensitive material layer 5 is then further provided as shown in FIG. 4 on the first photosensitive material layer 3 patterned with the latent image of the ink path as described above. It is.

The resist used for the second photosensitive material layer 5 includes general positive type and negative type resists that are sensitive to light having a main emission wavelength of 300 nm or more. When laminating these resists on the first photosensitive material layer 3, it is necessary to do so in such a way that the latent image forming portion of the first photosensitive material layer 3, which is the lower layer, does not have an adverse effect such as being dissolved and removed. There is. If the second photosensitive material layer 5 is formed by a dry film lamination method, the effect on the first photosensitive material layer is extremely slight. Furthermore, when using the solvent coating method, the exposed portion of the first photosensitive material layer 3 (that is, the portion that can be developed by molecular chain scission) is affected by the coating solvent when the second photosensitive material layer 5 is coated. Care must be taken to ensure that this does not occur. Further, by using a method such as thinly coating the surface of the first photosensitive material layer 3 with a silane coupling agent or the like, it is possible to form two layers without restrictions on the coating solvent.

The two-layer photosensitive material layers 3 and 5 formed by the above method are further subjected to pattern exposure to form ink discharge ports and supply ports, as shown in FIG. That is, a mask 7 is placed on the photosensitive material layer 5, and light with a main emission wavelength of 300 nm or more is irradiated from above the mask (in the direction of arrow B in FIG. 5). As a result, as shown in FIG. 6, pattern latent image forming portions 8 of the ink discharge ports and pattern latent image forming portions 9 of the ink supply ports are formed on the photosensitive material layer 5. This pattern exposure of the second photosensitive material layer 5 is performed at a main emission wavelength of 300 nm as described above.
Since the above-mentioned light is used, even if the first photosensitive material layer 3 is exposed, problems such as cleavage of its molecular chains do not occur.

In the present invention, the block body 10 formed by sequentially laminating the first photosensitive material 3 and the second photosensitive material 5 on the substrate 1 as described above is then developed,
As a result, the latent image forming portions 6, 8, and 9 are dissolved and removed.
As shown in FIG. 7, an ink path 11, an ink discharge port 12, and an ink supply port 13 corresponding to each other are formed, thereby obtaining a liquid jet recording head of the present invention. When the exposed areas of the first and second photosensitive material layers 3 and 5 can be developed with the same solvent, they can be developed all at once, but when they cannot be developed with the same solvent, they can be developed sequentially with appropriate solvents. do. In the case of the liquid jet recording head shown in FIG. 7, since the ink ejection direction and the ink supply port are both on the same side of the substrate 1, development is performed on the upper second photosensitive material layer 5. After this, it is desirable to develop the lower first photosensitive material layer 3. Further, in the liquid jet recording head shown in FIG. 7, it is possible to supply ink by providing a joining member 14 for ink supply.

On the other hand, in the liquid jet recording head shown in FIG. 8, the ink supply port 13 is formed through the substrate 1, and when this configuration is adopted, the first photosensitive material in the lower layer is Layer 3 may be developed first. In this recording head, it is possible to supply ink by providing an ink supply section 15 as shown in FIG. Of course, it is also possible to supply ink using other means and shapes.

Although this example shows a liquid jet recording head having two ejection ports, it goes without saying that the same applies to a high-density multi-array liquid jet recording head in which a larger number of ejection ports are arranged in parallel. It can be manufactured by

The present invention brings about excellent effects particularly in a bubble jet recording head and recording apparatus among liquid jet recording (ink jet recording) systems.

For its typical configuration and principle, see, for example, US Pat. Nos. 4,723,129 and 4,740.
No. 796. This method can be applied to both the so-called on-demand type and continuous type, but especially in the case of the on-demand type, it is necessary to arrange the liquid (ink) in accordance with the sheet and liquid path that hold it. By applying at least one drive signal corresponding to the recording information to the electrothermal transducer element, thermal energy is generated that causes the electrothermal transducer to rapidly rise in temperature beyond nucleate boiling, thereby reducing the heat of the recording head. This is effective because it causes film boiling on the action surface, resulting in the formation of bubbles in the liquid (ink) that correspond one-to-one to this drive signal. The growth and contraction of the bubble causes liquid (ink) to be ejected through the ejection port to form at least one drop. It is more preferable to use this drive signal in a pulse form, since the growth and contraction of bubbles can be carried out immediately and appropriately, so that ejection of liquid (ink) with particularly excellent responsiveness can be achieved. As this pulse-shaped drive signal, those described in US Pat. No. 4,463,359 and US Pat. No. 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 are adopted as the invention regarding the temperature increase rate of the heat acting surface, even more excellent recording can be performed.

[0034] The configuration of the recording head includes a combination configuration of an ejection port, a liquid flow path, and an electrothermal transducer element (a straight liquid flow path or a right-angled liquid flow path) as disclosed in each of the above-mentioned specifications. The present invention also includes configurations using US Pat. No. 4,558,333 and US Pat. No. 4,459,600, which disclose configurations in which the heat acting portion is disposed in a bending region. In addition, Japanese Patent Application Laid-Open No. 123670 of 1982 discloses a configuration in which a common slit is used as a discharge part for a plurality of electrothermal transducer elements, and a method for absorbing pressure waves of thermal energy is disclosed. The present invention is also effective with a configuration based on Japanese Patent Application Laid-Open No. 138461 of 1981, which discloses a configuration in which the openings correspond to the discharge ports.

Furthermore, as a full-line type recording head that can simultaneously record across the entire width of recording paper, there is a configuration that satisfies the length by a combination of a plurality of recording heads as disclosed in the above-mentioned specification, Any configuration as a pair of recording heads may be used, but the present invention can more effectively utilize the above-described configuration.

In addition, a replaceable chip type recording head that is attached to the apparatus main body enables electrical connection with the apparatus main body and ink supply from the apparatus main body, or a replaceable chip type recording head that is integrated into the recording head itself. The present invention is also effective in a cartridge-type recording head that is provided in a conventional manner.

[0037] Furthermore, by adding recovery means and preliminary auxiliary means for the recording head to the recording apparatus, the effect of the recording head obtained by the present invention can be further stabilized.
This is preferable. Specifically, these include a capping means, a cleaning means, a pressurizing or suction means, an electric heat exchanger element or a separate heating element, or a combination of these as a backup for the recording head. It is also effective to add a heating means, a means for performing a preliminary ejection mode in which ejection is performed other than printing, etc. to perform stable printing.

Furthermore, the recording mode of the recording apparatus is not limited to a mode in which only mainstream colors such as black are recorded, but also a recording head configured integrally or a plurality of recording heads combined, but different colors can be used. multiple colors or
The present invention is also extremely effective for a recording head of an apparatus having at least one full color by color mixture.

Further, the recording head obtained by the present invention has the following features:
Even if the ink is not a liquid, it is an ink that solidifies at room temperature or lower, and becomes soft or liquid at room temperature, or a temperature adjustment range of 30°C or higher and 70°C or lower, which is the temperature adjustment range generally used in inkjet. It can also be applied to materials that become soft or liquid. That is, it is sufficient if the ink is in a liquid state when the recording signal is applied. In addition, ink that actively prevents temperature rise due to thermal energy by absorbing it as energy for the ink's change from a solid state to a liquid state, or that solidifies when left to prevent ink evaporation. In any case, by applying thermal energy according to the recording signal, the ink is liquefied and ejected as liquid ink, or the ink has already begun to solidify by the time it reaches the recording medium. The use of ink that is liquefied only by energy is also applicable to the recording head according to the present invention. In such a case, the ink is held in a liquid or solid state in the recesses or through holes of the porous sheet, as described in JP-A-54-56847 or JP-A-60-71260. It may also be configured to face the electrothermal transducer element. In the present invention,
The most effective method for each of the above-mentioned inks is to implement the above-mentioned film boiling method.

FIG. 10 is an external perspective view showing an example of an inkjet recording apparatus (IJRA) equipped with a recording head obtained according to the present invention as an inkjet head cartridge (IJC).

In the figure, reference numeral 20 denotes an inkjet head cartridge (IJC) equipped with a nozzle group for ejecting ink toward the recording surface of recording paper fed onto a platen 24. A carriage HC 16 holds the IJC 20, is connected to a part of the drive belt 18 that transmits the driving force of the drive motor 17, and is slidable on two guide shafts 19A and 19B arranged parallel to each other. By doing so, it becomes possible to reciprocate the recording paper of the IJC 20 over the entire width.

26 is a head recovery device, IJC20
It is disposed at one end of the movement path of the camera, for example, at a position opposite to the home position. The head recovery device 26 is operated by the driving force of the motor 22 via the transmission mechanism 23, and the I
Perform capping of JC20. In connection with the capping of the IJC 20 by the cap portion 26A of the head recovery device 26, ink suction is performed by an appropriate suction means provided within the head recovery device 26, or by appropriate pressure means provided in the ink supply path to the IJC 20. Ejection recovery processing is performed, such as removing thickened ink within the nozzle by forcefully feeding the ink and forcibly discharging it from the ink ejection port. In addition, IJC is protected by capping at the end of recording, etc.

Reference numeral 30 denotes a blade as a wiping member, which is disposed on the side surface of the head recovery device 26 and is made of silicone rubber. The blade 30 is a blade holding member 30
The head recovery device 26 is held in cantilever form at A.
Similarly, it is operated by a motor 22 and a transmission mechanism 23, and can be engaged with the discharge surface of the IJC 20. This allows the blade 30 to protrude into the movement path of the IJC 20 at an appropriate timing during the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26, and to cause the blade 30 to protrude into the movement path of the IJC 20 at an appropriate timing during the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26. It is used to wipe off condensation, moisture, dust, etc.

[0044]

[Examples] The present invention will be explained in more detail with reference to Examples below. (Crosslinked positive resist) A copolymer compound of methyl methacrylate, methacrylic acid, and methacrylic acid chloride was synthesized as a typical crosslinked positive resist.

First, methyl methacrylate 60.07
g (0.6 mol), methacrylic acid 2.61 g (0.6 mol),
03 mol), azoisobutyronitrile (0.25 g) was dissolved in 90 g of benzene and stirred at 60° C. for 4 hours under a nitrogen stream. Next, hexane is gradually added to the reaction solution to obtain a white viscous precipitate. The precipitate is dissolved in benzene again, reprecipitated with hexane, and finally freeze-dried from the benzene solution to obtain white polymer A. Next, methyl methacrylate, methacrylic acid, methacrylic acid chloride (m
ol ratio 0.52:0.013:0.0013) to obtain white polymer B. Polymer A and Polymer B were mixed to make a crosslinked positive resist. (Example 1) A liquid jet recording head having the configuration shown in FIG. 7 was manufactured according to the operating procedure shown in FIGS. 1 to 7.

First, on a glass substrate on which an electrothermal conversion element (heater made of material HfB2) as an energy generating element is formed, the cross-linked positive resist solution (of the polymer A and the polymer B) is applied as a first photosensitive material layer. Equivalent mixture of chlorobenzene/dichloromethane (=8/2)2
0 wt% solution) was applied and dried at 80°C for 1 hour. (Film thickness after drying: 25 μm). Next, the whole board was heated to 200°C.
, to cause a crosslinking reaction in the resist by heating for 15 minutes. At this point, the first photosensitive material layer becomes insoluble in the developer. Next, a mask with a pattern corresponding to the ink path was overlaid on the crosslinked positive resist film, and a PLA manufactured by Canon Co., Ltd.
Light irradiation was performed by contact exposure using a -520 mask aligner. Light irradiation amount is 80mj/cm2
It was about. In the exposed area, polymer chains are cut (disintegrated) and become soluble in a developer during subsequent development processing.

Next, a positive dry film "OZATECR" was applied as a second photosensitive material layer on the positive resist film.
255'' (manufactured by Hoechst) to a thickness of 25 μm by lamination. A mask with a pattern corresponding to the ink discharge ports and the ink supply ports was placed on the second photosensitive material layer, and light irradiation was performed in the same manner as in the first photosensitive material layer. (However, the light irradiation mainly used light of 300 nm or more through a cold mirror.) The exposure amount of this layer was about 100 mJ/cm2.

Next, the substrate is immersed in a developer (1% caustic soda aqueous solution) and developed for about 30 minutes while stirring to develop the second photosensitive material layer and form an ink discharge port and an ink supply port. did. Furthermore, the first photosensitive material layer was developed by immersing it in toluene and developing for about 30 minutes while stirring, thereby forming ink channels. Although it varies depending on the resist material selected, the positive resist, which is the second photosensitive material layer, is inferior in mechanical strength, solvent resistance, and heat resistance when patterned as is, so heat treatment at 150°C for 30 minutes is performed to improve the above properties. I let it happen. Finally, an ink supply member was adhered to the ink supply port to create a liquid jet recording head.

When the above liquid jet recording head was attached to a recording device and recording was performed using ink consisting of pure water/glycerin/Direct Black 154 (water-soluble black dye) = 65/30/5, stable printing was obtained. was possible.

Further, a recording test was conducted for 6 months with this liquid ejecting recording head attached to a recording apparatus, but there was no occurrence of deposits in the ink or instability of ejection due to clogging.
Stable printing was possible, and no deformation of the ejection port occurred. (Example 2) As the second photosensitive material layer of Example 1, 4,
A dry film prepared by adding 5 wt % of 4'-diazide chalcone was laminated to a thickness of 25 μm. This second photosensitive material layer was a negative type resist, and light irradiation was performed in the same manner as in Example 1, except that a negative pattern corresponding to the ejection ports and the ink supply port was used as a mask. Next, a liquid ejecting head was produced in the same manner as in Example 1 except that toluene was used as the developer for the second layer in the developing step.

[0051] This liquid jet recording head was installed in a recording device and tested for 6 months, but there was no occurrence of precipitates in the ink or instability of ejection due to clogging, and stable printing was possible. There was no deformation of the discharge port at all.

[0052]

[Effects of the Invention] The present invention has the following advantages: (1) Since the main process for creating the head is based on lithography technology using photoresist, photosensitive dry film, etc., it is extremely easy to form the detailed parts of the head in a desired pattern. Not only is this possible, but many heads with the same configuration can be processed simultaneously.

■No cutting process is required on the discharge port surface, and the distance between the element and the discharge port can be adjusted by controlling the coating thickness of the resist film, so the distance between the element and the discharge port is constant and the inner surface of the discharge port is It is possible to stably manufacture smooth heads, improving yield and printing quality.

(2) It is possible to easily and reliably align the main components, and heads with high dimensional accuracy can be manufactured at a high yield.

(2) The head can be manufactured by at least two resist coating and exposure steps and one development step, and productivity can be improved.

(2) For the second photosensitive material layer, either a positive type or a negative type resist material can be used, so there is a wide range of material selection. Furthermore, by appropriately adjusting the initiator concentration in the positive or negative resist, it is possible to process the second photosensitive material layer into a concave or convex shape.

■The first photosensitive material layer is made of a strong cross-linked positive resist, and in order to laminate the second photosensitive material layer undeveloped, the adhesion can be improved by means such as pressing with stronger pressure. I can do it.

(2) In the developing step, the first photosensitive material layer hardly loses its thickness, so that the adhesion with the second photosensitive material layer is not impaired. It has the following effects.

[Brief explanation of the drawing]

FIG. 1 is a schematic perspective view showing the state of a substrate before ink passages and ejection ports are formed in a head manufacturing method according to the present invention.

FIG. 2: In the head manufacturing method according to the present invention, the first
FIG. 2 is a schematic perspective view showing the state of a substrate on which a photosensitive material layer is formed.

FIG. 3: In the head manufacturing method according to the present invention, the first
FIG. 3 is a schematic diagram showing a state of pattern exposure applied to a photosensitive material layer.

FIG. 4 In the head manufacturing method according to the present invention, the second
FIG. 3 is a schematic diagram showing a laminated state of photosensitive material layers.

FIG. 5: In the head manufacturing method according to the present invention, the second
FIG. 3 is a schematic diagram showing a state of pattern exposure applied to a photosensitive material layer.

FIG. 6 is a schematic perspective view showing pattern latent image forming portions such as ink paths and ejection ports formed in the head manufacturing method according to the present invention.

FIG. 7 is a schematic diagram showing an embodiment of the head of the present invention provided with ink supply means.

FIG. 8 is a schematic diagram showing another embodiment of the head of the present invention in which ink is supplied from the opposite side of the substrate with respect to the ink ejection direction.

9 is a schematic diagram of the head of FIG. 8 provided with ink supply means; FIG.

FIG. 10 is an explanatory diagram of a recording device to which a head according to the present invention can be attached.

[Explanation of symbols]

1 Substrate 2 Energy generating element 3 First photosensitive material layer 4 Mask 5 Second photosensitive material layer 6 Latent image forming section 7 Mask 8 Latent image forming section 9 Latent image forming section 10 Block body 11 Ink path 12 Ink discharge port 13 Ink supply port 16 Carriage 17 Drive motor 18 Drive belt 19A Guide shaft 19B Guide shaft 20 Inkjet head cartridge 22
Cleaning motor 23 Transmission mechanism 24 Platen 26 Cap member 30 Blade 30A Blade holding member.

Claims (6)

[Claims] 1. An ink discharge port, an ink supply port, an ink path that communicates the ink discharge port and the ink supply port, and an ink path disposed corresponding to the ink path and used for discharging ink. In the method of manufacturing a liquid jet recording head having an energy generating element that generates energy, a first ink path forming first resist made of a thermally crosslinked positive resist sensitive to ionizing radiation is provided on a substrate on which the energy generating element is disposed. After providing a photosensitive material layer and crosslinking and insolubilizing the first photosensitive material layer, exposing the insolubilized first photosensitive material layer to a pattern for forming an ink path using ionizing radiation,
Next, a main emission wavelength of 30 nm is further formed on the first photosensitive material layer.
A second photosensitive material layer that is sensitive to light of 0 nm or more is provided, and this is subjected to pattern exposure for forming an ink discharge port and an ink supply port with light having a main emission wavelength of 300 nm or more, and then the first and second photosensitive material layers are exposed. A method of manufacturing a liquid jet recording head, which comprises developing a material layer. 2. An inkjet device comprising an ink ejection port, an ink path communicating with the ink ejection port, and an energy generating element disposed corresponding to the ink path and generating energy used for ejecting ink. In the method for manufacturing a liquid jet recording head, a first photosensitive material layer for forming an ink path made of a thermally crosslinked positive resist sensitive to ionizing radiation is provided on a substrate on which the energy generating element is disposed and an ink supply port is provided. After crosslinking and insolubilizing the first photosensitive material layer, the insolubilized first photosensitive material layer is exposed to a pattern for forming an ink path using ionizing radiation, and then a main light emitting layer is further formed on the first photosensitive material layer. A second photosensitive material layer sensitive to light with a wavelength of 300 nm or more is provided, and this is subjected to pattern exposure for forming ink ejection orifices with light having a main emission wavelength of 300 nm or more, and then the first and second photosensitive material layers are formed. 1. A method of manufacturing a liquid jet recording head, the method comprising: developing a liquid jet recording head. 3. A liquid jet recording head manufactured by the manufacturing method according to claim 1 or 2. 4. The liquid jet recording head according to claim 3, wherein the energy generating element is an electrothermal converter that generates thermal energy as the energy. 5. The liquid jet recording head according to claim 3, wherein the liquid jet recording head is of a full line type in which a plurality of ink ejection ports are provided over the entire width of the recording area of the recording medium. 6. A liquid jet recording head comprising at least the liquid jet recording head according to claim 3, wherein the ink ejection orifice is provided opposite to the recording surface of the recording medium, and a member for mounting the head. Characteristic liquid jet recording device.