JPH0421557U - - Google Patents

Info

Publication number
JPH0421557U
JPH0421557U JP6190090U JP6190090U JPH0421557U JP H0421557 U JPH0421557 U JP H0421557U JP 6190090 U JP6190090 U JP 6190090U JP 6190090 U JP6190090 U JP 6190090U JP H0421557 U JPH0421557 U JP H0421557U
Authority
JP
Japan
Prior art keywords
shutter
chamber
viewing port
front opening
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6190090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0740522Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990061900U priority Critical patent/JPH0740522Y2/ja
Publication of JPH0421557U publication Critical patent/JPH0421557U/ja
Application granted granted Critical
Publication of JPH0740522Y2 publication Critical patent/JPH0740522Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1990061900U 1990-06-12 1990-06-12 真空成膜装置のビューイングポート Expired - Fee Related JPH0740522Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061900U JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061900U JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Publications (2)

Publication Number Publication Date
JPH0421557U true JPH0421557U (OSRAM) 1992-02-24
JPH0740522Y2 JPH0740522Y2 (ja) 1995-09-20

Family

ID=31590566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061900U Expired - Fee Related JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Country Status (1)

Country Link
JP (1) JPH0740522Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10244144A (ja) * 1997-03-04 1998-09-14 Sumitomo Electric Ind Ltd 圧力隔壁
JP2016093761A (ja) * 2014-11-12 2016-05-26 三菱瓦斯化学株式会社 内部観察用サイトグラスの曇り防止装置、撹拌処理システム及び内部観察用サイトグラスの曇り防止方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03197673A (ja) * 1989-12-26 1991-08-29 Nec Corp 半導体装置の製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03197673A (ja) * 1989-12-26 1991-08-29 Nec Corp 半導体装置の製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10244144A (ja) * 1997-03-04 1998-09-14 Sumitomo Electric Ind Ltd 圧力隔壁
JP2016093761A (ja) * 2014-11-12 2016-05-26 三菱瓦斯化学株式会社 内部観察用サイトグラスの曇り防止装置、撹拌処理システム及び内部観察用サイトグラスの曇り防止方法

Also Published As

Publication number Publication date
JPH0740522Y2 (ja) 1995-09-20

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Legal Events

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