JPH04208880A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH04208880A
JPH04208880A JP2340108A JP34010890A JPH04208880A JP H04208880 A JPH04208880 A JP H04208880A JP 2340108 A JP2340108 A JP 2340108A JP 34010890 A JP34010890 A JP 34010890A JP H04208880 A JPH04208880 A JP H04208880A
Authority
JP
Japan
Prior art keywords
test
comparator
output
circuits
outputs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2340108A
Other languages
Japanese (ja)
Other versions
JP3057760B2 (en
Inventor
Takao Ouchi
大内 隆夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2340108A priority Critical patent/JP3057760B2/en
Publication of JPH04208880A publication Critical patent/JPH04208880A/en
Application granted granted Critical
Publication of JP3057760B2 publication Critical patent/JP3057760B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To make quality judgment simple by providing a plurality of test circuits to supply test data and control signals to a macro cell, and a quality judging circuit to judge the quality from test signals to be output from the plurality of test circuits. CONSTITUTION:Outputs of several BIST circuits 12a, 13a, 17a are connected to a comparator 18 as a quality judging circuit and an address generating element 23 outputs an address stepped by a test enable signal 21. A write data generating element 24 supplies test writing data to RAMs 12, 13, 17 and a write pulse generating element 25 supplies a timing signal to a test writing pulse generating element of the RAMs 12, 13, 17. Data output from the RAMs 12, 13, 17 are supplied to a first output comparator 26 and transmitted to the comparator 18. The comparator 18 compares signals to receive from the BIST circuits 12a, 13a, 17a, judges those qualities, and outputs those results to a pin 16.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は半導体装置のテスト法に関し、特にBIST付
きRAMマクロセルを複数個有する場合のゲートアレイ
方式半導体装置のテスト法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for testing a semiconductor device, and particularly to a method for testing a gate array type semiconductor device having a plurality of BIST-equipped RAM macro cells.

[従来の技術] 従来、RAM等のマクロセルを含むゲートアレイの種類
としては、特定RAMのマクロパターンを有するRAM
付きゲートアレイ及びゲートアレ、イセルの組合せを利
用してRAMマクロを構成するSOG型ゲートアレイが
知られていた。
[Prior Art] Conventionally, as a type of gate array including macro cells such as RAM, there is a RAM having a macro pattern of a specific RAM.
An SOG type gate array has been known that constitutes a RAM macro using a combination of a gate array with a gate array and a gate array and an isher.

この篠ゲートアレイにおいて、通常RAMマクロセルの
試験では、データ入力、データ出力、書き込み信号人力
、アドレス入力等を他の一般入力、出力信号ピンと外部
端子と共用して実施する。すなわちテストモード時にお
いては、外部から直接にデータ等の入力を行い、RAM
を動作させてテストを行ってきた。
In this Shino gate array, RAM macrocell testing is usually performed by sharing data input, data output, write signal input, address input, etc. with other general input, output signal pins, and external terminals. In other words, in the test mode, data etc. are input directly from the outside, and the RAM
I have tested it by running it.

また、テストに必要な信号を内部で発生させるテスト(
BIST)回路をともなったRAMを使用した場合でも
、個々の回路内で閉じたテストをそれぞれ実行していた
In addition, tests that generate the signals necessary for the test internally (
Even when using RAM with circuits (BIST), each closed test was performed within each individual circuit.

[発明が解決しようとする課題] 近年、SOG型ゲートアレイ構成が、増加しており、構
成が異なるRAMを複数固有するSOG型ゲートアレイ
も登場している。しかしながら、このようなRAMを複
数有していると、個別にテストが実行されるのでテスト
に必要とするビン数が増加するという問題点があった。
[Problems to be Solved by the Invention] In recent years, SOG gate array configurations have been increasing, and SOG gate arrays that have multiple RAMs with different configurations have also appeared. However, when a plurality of such RAMs are provided, a problem arises in that the number of bins required for the test increases because the test is executed individually.

テスト入力を通常の入力、出力信号とテスト信号を共用
化するにしても、共用されるビンに付随して設けられた
分岐回路が性能を悪化させるという欠点がある。
Even if the test input is a common input and the output signal and the test signal are shared, there is a drawback that the branch circuit provided in association with the shared bin deteriorates the performance.

またBIST回路を用いたとしても、RAMの構成など
が異なるとテスト入力を共用化することは困難であった
Furthermore, even if a BIST circuit is used, it is difficult to share test inputs if the RAM configurations are different.

[課題を解決するための手段] 本発明の要旨は、記憶回路として機能する複数のマクロ
セルを有する半導体装置において、上記複数のマクロセ
ルにそれぞれ付随して設けられ、外部から供給されるテ
ストイネーブル信号ζこより活性化され外部から供給さ
れるテストクロックに応答してマクロセルにテストデー
タと制御信号を供給し、各マクロセルの記憶回路の機能
を表すテスト信号を出力する複数のテスト回路と、複数
のテスト回路から出力されるテスト信号から良否を判定
し、その結果を外部に出力する良否判定回路とを備えた
ことである。
[Means for Solving the Problems] The gist of the present invention is that in a semiconductor device having a plurality of macro cells functioning as a memory circuit, a test enable signal ζ provided in association with each of the plurality of macro cells and supplied from the outside. A plurality of test circuits that supply test data and control signals to the macrocell in response to a test clock that is activated from the outside and is supplied from the outside, and output a test signal representing the function of the memory circuit of each macrocell, and a plurality of test circuits. The present invention includes a pass/fail judgment circuit that judges pass/fail from the test signal output from the test signal and outputs the result to the outside.

[発明の作用コ 本発明の構成によると、テスト回路はテストクロック信
号及びテストイネーブル信号を人力し、マクロセルの記
憶回路の構成によらない期待値を表すテスト信号を出力
し、良否判定回路がテスト信号に基づき半導体装置とし
ての良否を判断する。
[Operation of the Invention] According to the configuration of the present invention, the test circuit manually inputs the test clock signal and the test enable signal, outputs a test signal representing an expected value independent of the configuration of the memory circuit of the macrocell, and the pass/fail judgment circuit performs the test. The quality of the semiconductor device is determined based on the signal.

[実施例] 第1図は第1実施例を示すブロック図であり、ケートア
レイは複数のRAM12,13,17を含んて半導体チ
ップ11上に集積されている。各RAM12.13はそ
の動作のみを制御し、かつRAM出力をマルチプレクサ
により出力するBIST回路12 a、  13 a、
  17 aが付随して設けられている。各BIST回
路12a、13a、17aの出力は良否判定回路として
の比較器18に接続されており、第2図に示されている
ように、アドレス発生部23はテストイネーブル信号2
2で活性化されテストクロック信号21により歩進する
アドレスを出力する。タイミング発生部27もテストイ
ネーブル信号により活性化されアドレスの歩道ごとにタ
イミング信号を発生し、このタイミング信号に同期して
、ライトデータ発生部24はRAM12,13.17に
テスト書き込みデータを、ライトパルス発生部25はR
AM]2゜13.17のテスト書き込みパルス発生部に
タイミング信号を供給する。RAM12,13,17か
ら出力されるデータは出力第1次比較器26に供給され
、比較器18に送られる。比較器18はBIST回路1
2a、13a、17aから送られて来る信号を比較して
良否を判定し、その結果をピン16に出力する。
[Embodiment] FIG. 1 is a block diagram showing a first embodiment, in which a Kate array including a plurality of RAMs 12, 13, and 17 is integrated on a semiconductor chip 11. Each RAM 12.13 has a BIST circuit 12a, 13a, which controls only its operation and outputs the RAM output by a multiplexer.
17a is attached thereto. The output of each BIST circuit 12a, 13a, 17a is connected to a comparator 18 as a pass/fail judgment circuit, and as shown in FIG.
2 and outputs an address that is incremented by the test clock signal 21. The timing generator 27 is also activated by the test enable signal and generates a timing signal for each address, and in synchronization with this timing signal, the write data generator 24 writes test write data to the RAMs 12, 13, and 17 with write pulses. The generating section 25 is R
A timing signal is supplied to the test write pulse generator of 2°13.17 AM]. Data output from the RAMs 12, 13, and 17 is supplied to an output primary comparator 26 and sent to a comparator 18. Comparator 18 is BIST circuit 1
The signals sent from 2a, 13a, and 17a are compared to determine whether they are good or bad, and the result is output to pin 16.

第3図は本発明の実施例であり、比較回路の他にスピー
ド測定用のフリップフロップ35a〜35cを含めた良
否判定回路3Aとしての比較器36の例である。図にお
いて、31は半導体チップ、37はテストクロック、3
8はテストイネーブル信号、32〜34はRAM、32
a 〜34aはBIsは1回路である。回路動作は第1
実施例と同様なので省略する。
FIG. 3 shows an embodiment of the present invention, and shows an example of a comparator 36 as a pass/fail judgment circuit 3A including flip-flops 35a to 35c for speed measurement in addition to the comparison circuit. In the figure, 31 is a semiconductor chip, 37 is a test clock, and 3
8 is a test enable signal, 32 to 34 are RAM, 32
A to 34a have one BIs circuit. Circuit operation is the first
Since this is similar to the embodiment, the description will be omitted.

[発明の効果] 本発明は以上説明したように、ワードピット構成によら
ないテスト出力とするテスト回路と良否判定回路により
、良否判定の簡易化を図ることができ、またテスト端子
数の削減という効果を有する。さらζこテストプログラ
ムテストパターンの生成等の工数の削減されるという効
果を有する。
[Effects of the Invention] As explained above, the present invention can simplify pass/fail judgment by using a test circuit and a pass/fail judgment circuit that output test output without depending on the word pit configuration, and also has the advantage of reducing the number of test terminals. have an effect. Furthermore, this has the effect of reducing the number of man-hours required for generating test program test patterns.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は第1実施例のブロック図、第2図はBIST回
路を示すブロック図、第3図は第2実施・例のブロック
図である。 11・・・・・・・・半導体チップ、 12.17.13・・・RAMマクロ、14・・・・・
・・・・テストクロック入力信号、12a、 13a、
 17a・・・ ・8181回路、15・・・・・・・
・テストイネーブル信号、16・・・・・・・・テスト
出力、 18・・・・・・・・比較器良否判定比較器、21・・
・・・・・・テストクロック信号、22・・・・・・・
・テストイネーブル信号、23・・・・・・・・アドレ
ス発生部、24・・・・・・・・ライトデータ発生部、
25・・・・・・・・ライトパルス発生部、26・・・
・・・・・出力第1次比較器、27・・・・・・・・タ
イミング発生部、31・・・・・・・・半導体チップ、 32.33,34k・・BIST(tRAMマクロ、3
5.35’、35”  ・・・フリップフロップ、36
・・・・・・・比較器、 37・・・・・・・テストクロック信号、38・・・・
・・・テストイネーブル信号、39・・・・・・・テス
ト出力信号、 3A・・・・・・・フリップフロップ付良否判定回路。 特許出願人  日本電気株式会社
FIG. 1 is a block diagram of the first embodiment, FIG. 2 is a block diagram showing a BIST circuit, and FIG. 3 is a block diagram of the second embodiment. 11... Semiconductor chip, 12.17.13... RAM macro, 14...
...Test clock input signal, 12a, 13a,
17a... ・8181 circuit, 15...
・Test enable signal, 16...Test output, 18...Comparator quality judgment comparator, 21...
...Test clock signal, 22...
・Test enable signal, 23...Address generation section, 24...Write data generation section,
25......Light pulse generation section, 26...
...Output primary comparator, 27...Timing generator, 31...Semiconductor chip, 32.33,34k...BIST (tRAM macro, 3
5.35', 35"...Flip-flop, 36
......Comparator, 37...Test clock signal, 38...
...Test enable signal, 39...Test output signal, 3A...Pass/fail judgment circuit with flip-flop. Patent applicant: NEC Corporation

Claims (1)

【特許請求の範囲】 記憶回路として機能する複数のマクロセルを有する半導
体装置において、上記複数のマクロセルにそれぞれ付随
して設けられ、外部から供給されるテストイネーブル信
号により活性化され外部から供給されるテストクロック
に応答してマクロセルにテストデータと制御信号を供給
し、各マクロセルの記憶回路の機能を表すテスト信号を
出力する複数のテスト回路と、 複数のテスト回路から出力されるテスト信号から良否を
判定し、その結果を外部に出力する良否判定回路とを備
えたことを特徴とする半導体装置。
[Scope of Claims] In a semiconductor device having a plurality of macro cells functioning as a memory circuit, a test device provided along with each of the plurality of macro cells, activated by a test enable signal supplied from the outside, and supplied from the outside. Multiple test circuits supply test data and control signals to the macrocell in response to a clock, and output test signals representing the functions of the memory circuits of each macrocell, and pass/fail is determined from the test signals output from the multiple test circuits. and a pass/fail determination circuit that outputs the result to the outside.
JP2340108A 1990-11-30 1990-11-30 Semiconductor device Expired - Lifetime JP3057760B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2340108A JP3057760B2 (en) 1990-11-30 1990-11-30 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2340108A JP3057760B2 (en) 1990-11-30 1990-11-30 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH04208880A true JPH04208880A (en) 1992-07-30
JP3057760B2 JP3057760B2 (en) 2000-07-04

Family

ID=18333797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2340108A Expired - Lifetime JP3057760B2 (en) 1990-11-30 1990-11-30 Semiconductor device

Country Status (1)

Country Link
JP (1) JP3057760B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5553082A (en) * 1995-05-01 1996-09-03 International Business Machines Corporation Built-in self-test for logic circuitry at memory array output
US7057948B2 (en) 2003-04-28 2006-06-06 Kabushiki Kaisha Toshiba Semiconductor integrated circuit device having a test function
JP2006252702A (en) * 2005-03-11 2006-09-21 Nec Electronics Corp Semiconductor integrated circuit apparatus and its inspection method
JP2007179731A (en) * 1997-06-23 2007-07-12 Samsung Electronics Co Ltd Merged memory and logic integrated semiconductor device, and merged memory test method
JP2007294015A (en) * 2006-04-25 2007-11-08 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit and bist circuit design method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5553082A (en) * 1995-05-01 1996-09-03 International Business Machines Corporation Built-in self-test for logic circuitry at memory array output
JP2007179731A (en) * 1997-06-23 2007-07-12 Samsung Electronics Co Ltd Merged memory and logic integrated semiconductor device, and merged memory test method
US7057948B2 (en) 2003-04-28 2006-06-06 Kabushiki Kaisha Toshiba Semiconductor integrated circuit device having a test function
JP2006252702A (en) * 2005-03-11 2006-09-21 Nec Electronics Corp Semiconductor integrated circuit apparatus and its inspection method
JP2007294015A (en) * 2006-04-25 2007-11-08 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit and bist circuit design method

Also Published As

Publication number Publication date
JP3057760B2 (en) 2000-07-04

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