JPH04206615A - Manufacture of deposited film for capacitor - Google Patents

Abstract

PURPOSE:To prevent a base film from being damaged thermally by a method wherein a deposited film which is wound on a backup roll is pressed from the upper part by using an elastic roll whose hardness and modulus of tensile elasticity are specified and the deposited film is irradiated with a laser beam. CONSTITUTION:Tension rollers 5 and 6 are arranged and installed on the introduction side and the extraction side of a deposited film 1 at a backup roll 3. An elastic roll 7 whose contact pressure can be adjusted with reference to the deposited film 1 by using a fluid-pressure cylinder 9 is arranged and installed. The elastic roll 7 is formed of a rubber material at a hardness of 100 or lower or of a plastic whose modulus of tensile elasticity is at 500kg/mm<2> or lower. In addition, a laser beam is irradiated form a laser beam irradiation part 2; a margin part is formed. Thereby, the deposited film 1 in a close contact state can be irradiated with the laser even by means of a small tension, and it is possible to prevent a base film from being damaged thermally.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a vapor-deposited film for a capacitor. This article relates to a technique for preventing thermal tm (1=) of a film.

[Prior Art] Metal-deposited films have been conventionally used as substrates for wound capacitors or multilayer capacitors.

In order to prevent short circuits, this vapor-deposited film needs to have a continuous non-metal-deposited portion along one side edge in the longitudinal direction of the vapor-deposited film. This non-evaporated area is usually called a margin.

Conventionally, the tape mask method and the oil mask method have been generally used as methods for forming the margin. The tape mask method is a method in which multiple thin endless tapes are used to mask the surface of the undeposited film during vapor deposition.
The oil mask method is a method in which oil is applied or sprayed to a portion corresponding to the margin portion to prevent metal deposition during vapor deposition.

A vapor deposited film for one capacitor element is obtained by slitting the center of the width of the margin formed by these methods and winding it up.

It has been pointed out that the above methods are methods for forming non-evaporated areas during vapor deposition, the tape mask method requires a complicated process of attaching multiple tapes, and the oil mask method has drawbacks such as blurring of margin boundaries. has been done. In recent years, a method has been devised in which a margin portion is formed by applying a laser beam to a plastic film deposited on the entire surface of the plastic film at predetermined locations to remove metal. The second laser method eliminates the drawbacks of the tape mask and oil mask methods described above. A typical example is JP-A-57-11
These include invention No. 8822 and invention No. 170026/1988.

[Problem to be solved by the invention] As mentioned above, it has become possible to efficiently form margins of precise width using the laser method, but on the other hand, equipment has become increasingly smaller and more sophisticated. In preparation for this, the mainstream of film is shifting to ultra-thin films of 4μ or less.

By the way, since the laser method focuses on the vapor-deposited metal and uses its energy to vaporize the metal and cause it to scatter and disappear, the metal vapor-deposit film is at a high temperature for 14 hours. Therefore, in order to minimize thermal damage to the base film, it is necessary to irradiate the base film with the laser while keeping the film in close contact with a metal hack-up roll. However, if the film is thin, applying tension to improve its adhesion to the roll will cause the film to stretch, create vertical wrinkles, and trap air. It is difficult to increase the tension applied to the film.

The present invention has been made with these points in mind, and even if the tension applied to the base film is small, the film can be brought into close contact with the hack-up roll, and thermal damage to the base film can be prevented. Take it as a challenge.

[Means for Solving the Problems] In order to solve the above problems, the present invention proposes a method for manufacturing a vapor-deposited film for a capacitor that employs the following configuration. That is, in a method for manufacturing a vapor deposited film in which a margin portion having no vapor deposited film of a constant width continuous in the film running direction is formed by irradiating the vapor deposited film of the vapor deposited film with a laser beam, the film is wound around a hack-and-roll. The method is characterized in that the vapor-deposited film is brought into close contact with the backup roll by pressing the vapor-deposited film from above with an elastic roll, and then a laser beam is irradiated from above the film.

Examples of the film used in the present invention include polyethylene terephthalate, polypropylene, polycarbonate, polyphenylene sulfide, and the like. The vapor deposited metal is Af7, Zn, etc., and the vapor deposition thickness is 50~
A film in the range of ordinary vapor-deposited films for capacitors having a capacity of about 100 OA can be used.

The wavelength of the light beam used in the present invention is 1.06.
A typical example is a μm YAG laser. It is preferable that the laser beam is transmitted from the oscillation source to the irradiation tip using an optical fiber, and this method makes it easier to adjust the position of the irradiation tip in the width direction. Also, laser light is not a continuous wave.

It is desirable to irradiate in a pulsed manner using a switch operation. Further, the cross-sectional shape of the light beam is desirably an ellipse or a rectangle elongated in the flow direction, since it is necessary to connect the spots of the pulse waves and create a continuous non-deposited area. Q if it is a quadrilateral
In the switch operation, it is most preferable in terms of energy efficiency because the switch-off time can be extended. The irradiation amount is 2
mJ/mm 2 to 10 mJ/mm is preferred. The frequency of the Q switch is usually 0.5 KHz to 10 KHz.

[Example] The method of the present invention will be specifically explained below with reference to the drawings.

The accompanying drawings are conceptual diagrams of the main parts of the method and apparatus for forming margins on a vapor-deposited film using a laser method according to the present invention. The vapor-deposited film 1 is unwound as a roll (not shown) and sent to the laser beam irradiation section 2 without being guided by guide rollers.

A metal backup roll 3 is provided in the laser beam irradiation section 2.
An emission optical system 4 for irradiating the deposited film with laser light is disposed around the . Further, tension rolls 5 and 6 are provided on the film introduction side and the film exit side of the backup roll 3, respectively, and the vapor-deposited film 1 is wound around the circumferential surface of the backup roll 3 by these tension rolls 5 and 6. ing.

Reference numeral 7 denotes an elastic roll disposed between the tension roll 5 on the film introduction side and the injection optical system 4 in order to press the vapor-deposited film from above against the backup roll after the vapor-deposited film is wound around the backup roll 3. be. This elastic roll 7 is rotatably attached to a support shaft 8, and is configured so that the contact pressure with respect to the backup roll 3 can be adjusted by a fluid pressure cylinder 9.

The elastic roll may be formed using rubber having a hardness of 100 or less, or plastic having a tensile modulus of 500 kg/m2 or less.

In this way, the vapor-deposited film is wound around the backup roll, and the wrapped film is further pressed with an elastic roll to bring it into close contact with the backup roll.Then, a laser beam is irradiated from above the film so that the vapor-deposited film continues in the direction of film flow. A margin portion without a deposited film of a certain width is formed. The vapor-deposited film for a capacitor thus obtained is cut into a predetermined width using a slitter (not shown) to obtain a rolled product.

[Effects of the Invention] As explained above, the present invention involves pressing the vapor-deposited film wound around the backup roll from above with an elastic roll to bring the vapor-deposited film into close contact with the backup roll, and then irradiating the vapor-deposited film with a laser beam. Because of this, even if the tension applied to the base film is small, the film can be brought into close contact with the backup roll, and the excellent effect of preventing thermal damage to the base film is exhibited.

[Brief explanation of the drawing]

The accompanying drawing is a conceptual diagram of a main part of an apparatus for forming a margin on a vapor-deposited film according to the present invention using a laser method. 1: Deposited film, 2: Laser light irradiation section, 3: Backup roll, 4. Laser emission optical system, 5 and 6. Tension roll, 7: Elastic roll, 8: Support shaft, 9. fluid pressure cylinder

Claims (1)

[Claims] 1. By irradiating the vapor deposited film with a laser beam,
In a method for manufacturing a vapor-deposited film that forms a margin portion having no vapor-deposited film of a constant width that continues in the film running direction; the vapor-deposited film is wound around a backup roll and is pressed from above with an elastic roll to force the vapor-deposited film onto the backup roll. 1. A method for producing a vapor deposited film for a capacitor, which comprises bringing the vapor deposited film into close contact with the film, and then irradiating the vapor deposited film with a laser beam. 2. A method for producing a vapor-deposited film for a capacitor, in which the elastic roll is made of a rubber material having a hardness of 100 or less. 3. A method for producing a vapor-deposited film for a capacitor, wherein the elastic roll is made of a plastic material with a tensile modulus of 500 kg/mm or less.