JPH0420050U - - Google Patents

Info

Publication number
JPH0420050U
JPH0420050U JP6095590U JP6095590U JPH0420050U JP H0420050 U JPH0420050 U JP H0420050U JP 6095590 U JP6095590 U JP 6095590U JP 6095590 U JP6095590 U JP 6095590U JP H0420050 U JPH0420050 U JP H0420050U
Authority
JP
Japan
Prior art keywords
immersion tank
substrate
film forming
photoresist film
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6095590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2522826Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6095590U priority Critical patent/JP2522826Y2/ja
Publication of JPH0420050U publication Critical patent/JPH0420050U/ja
Application granted granted Critical
Publication of JP2522826Y2 publication Critical patent/JP2522826Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6095590U 1990-06-08 1990-06-08 感光膜形成装置 Expired - Lifetime JP2522826Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6095590U JP2522826Y2 (ja) 1990-06-08 1990-06-08 感光膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6095590U JP2522826Y2 (ja) 1990-06-08 1990-06-08 感光膜形成装置

Publications (2)

Publication Number Publication Date
JPH0420050U true JPH0420050U (enrdf_load_html_response) 1992-02-19
JP2522826Y2 JP2522826Y2 (ja) 1997-01-16

Family

ID=31588778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6095590U Expired - Lifetime JP2522826Y2 (ja) 1990-06-08 1990-06-08 感光膜形成装置

Country Status (1)

Country Link
JP (1) JP2522826Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6133633B2 (ja) 2013-03-06 2017-05-24 株式会社小糸製作所 灯具および灯具アセンブリの取付方法

Also Published As

Publication number Publication date
JP2522826Y2 (ja) 1997-01-16

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