JPH0420050U - - Google Patents
Info
- Publication number
- JPH0420050U JPH0420050U JP6095590U JP6095590U JPH0420050U JP H0420050 U JPH0420050 U JP H0420050U JP 6095590 U JP6095590 U JP 6095590U JP 6095590 U JP6095590 U JP 6095590U JP H0420050 U JPH0420050 U JP H0420050U
- Authority
- JP
- Japan
- Prior art keywords
- immersion tank
- substrate
- film forming
- photoresist film
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007654 immersion Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6095590U JP2522826Y2 (ja) | 1990-06-08 | 1990-06-08 | 感光膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6095590U JP2522826Y2 (ja) | 1990-06-08 | 1990-06-08 | 感光膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0420050U true JPH0420050U (cs) | 1992-02-19 |
| JP2522826Y2 JP2522826Y2 (ja) | 1997-01-16 |
Family
ID=31588778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6095590U Expired - Lifetime JP2522826Y2 (ja) | 1990-06-08 | 1990-06-08 | 感光膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522826Y2 (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6133633B2 (ja) | 2013-03-06 | 2017-05-24 | 株式会社小糸製作所 | 灯具および灯具アセンブリの取付方法 |
-
1990
- 1990-06-08 JP JP6095590U patent/JP2522826Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2522826Y2 (ja) | 1997-01-16 |
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