JPH04196016A - Manufacture of anisotropic conductive sheet - Google Patents

Manufacture of anisotropic conductive sheet

Info

Publication number
JPH04196016A
JPH04196016A JP32277390A JP32277390A JPH04196016A JP H04196016 A JPH04196016 A JP H04196016A JP 32277390 A JP32277390 A JP 32277390A JP 32277390 A JP32277390 A JP 32277390A JP H04196016 A JPH04196016 A JP H04196016A
Authority
JP
Japan
Prior art keywords
wire
wires
anisotropic conductive
conductive sheet
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32277390A
Other languages
Japanese (ja)
Inventor
Masaaki Muto
武藤 雅彰
Toru Yoshida
亨 吉田
Susumu Kasukabe
進 春日部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP32277390A priority Critical patent/JPH04196016A/en
Publication of JPH04196016A publication Critical patent/JPH04196016A/en
Pending legal-status Critical Current

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  • Non-Insulated Conductors (AREA)

Abstract

PURPOSE:To unify intervals between linear conductors and perform highly reliable contact connecting by adjacently arranging a plurality of insulatedly coated wires so as to solidify the insulatedly coated parts to form a wire aggregate and to cut it in the direction orthogonal to the longitudinal direction of the wire. CONSTITUTION:A plurality of insulatedly coated wires 1a are adjacently arranged, insulatedly coated parts 1b of the wires 1a are thermally press-fitted or solidified by a solvent to form a wire aggregate which is to be cut in the direction orthogonal to the longitudinal direction of the wire and the cut surfaces are made flat as occasion demands so as to be processed in a sheet shape 3. Accordingly, the wire intervals of an anisotropic conductive sheet are determined by the diameter of the insulatedly coated wires so that the wires can be arrayed at constant intervals when the diversity of diameters is controlled. Thereby, no rough or dense part in a wire distribution is generated so as to unify the number of wires per unit area at any part of the sheet surface and to provide highly reliable contact-connection between the opposing electrode pads.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体L S I等電子部品、あるいは回路
基板の電極バットを互いに向かい合わせて接触接続する
ための異方性導電シートの製造方法に係り、特に狭ピッ
チな電極パッド間の電気的接触を行うのに好適な製造方
法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing an anisotropic conductive sheet for contacting and connecting electrode butts of electronic components such as semiconductor LSI or circuit boards facing each other. In particular, the present invention relates to a manufacturing method suitable for making electrical contact between electrode pads at a narrow pitch.

〔従来の技術〕[Conventional technology]

電子部品の小型化、薄形化に伴い、半導体L SI等の
電子部品あるいは回路基板の電極パッド部はより一層狭
ピッチ化され、電気的な信頼性の高い接触接続が必要と
されている。近年電子部品と回路基板の電極パッドを互
いに向い合わせて接触接続を行う場合、両者の電極パッ
ドの間に、シー!・の厚み方向にのみ導電性を有する異
方性導電シートを介在させ、両者の回路基板間を加圧状
態で固定する方法が用いられている。このような異方性
導電シー!・の製造方法として例えば特開昭59−58
709では、磁性を有する長さのほぼ等しいフィシメン
1〜状の短い線状導電体を、電気的に絶縁特性を有する
マトリックス液中に分散させ、この混合液を線状導電体
の長さと同等の間隔をもつ2平面間に充填し、厚み方向
に均一磁界を作用させ、線状導電体を混合液の厚み状態
に配向させた状態でマトリックス液を固化させる方法が
とられている。以上のような製造上程により作られた異
方性導電シートは、比較的容易に製造することができる
か、近接する線状導電体の間隔に対する配慮がなされて
おらず、線状導電体密度にばらつきが生じ、接触可能な
電極バットサイズの仕様の決定が困難である。
As electronic components become smaller and thinner, the pitch of the electrode pads of electronic components such as semiconductor LSIs or circuit boards is becoming narrower, and contact connections with high electrical reliability are required. In recent years, when making contact connections with the electrode pads of electronic components and circuit boards facing each other, there is a gap between the two electrode pads. A method is used in which an anisotropic conductive sheet having conductivity only in the thickness direction is interposed and the two circuit boards are fixed under pressure. Such an anisotropic conductive sea! For example, as a manufacturing method for
In 709, short linear conductors in the shape of ficimene with magnetic properties of approximately equal length are dispersed in a matrix liquid having electrically insulating properties, and this mixed liquid is dispersed into a matrix liquid having a length equivalent to that of the linear conductors. A method is used in which the matrix liquid is solidified in a state in which it is filled between two planes having an interval, a uniform magnetic field is applied in the thickness direction, and the linear conductors are oriented in the thickness state of the mixed liquid. The anisotropic conductive sheet made by the manufacturing process described above is either relatively easy to manufacture or does not take into account the spacing between adjacent linear conductors, and the density of the linear conductors is limited. Variations occur, making it difficult to determine the specifications of the contactable electrode butt size.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術は、長さのほぼ等しい短い線状導電体を絶
縁性マ[・リクス液中に分散させ磁界の作用により、配
向させて固化したものであり、線状導電体の間隔は一定
にはならす、粗な部分あるいは密な部分か生し、密な部
分で十分に接触できる電極バットサイズあるいは電極ピ
ッチであっても粗な部分では不1゛分な接触となる可能
性がある。
In the above conventional technology, short linear conductors of approximately equal length are dispersed in an insulating matrix liquid and are oriented and solidified by the action of a magnetic field, and the intervals between the linear conductors are constant. Even if the electrode butt size or electrode pitch is such that sufficient contact can be made in the dense areas, insufficient contact may occur in the rough areas.

また接触可能な電極バットサイズズあるいはピッチを決
定することか容易でなく、更には一定サイズの7トリク
ス液中に同一本数の線状導電体を分散させて作成した複
数個の完成品の個々の導電体の分布は、すべて異なり、
例えば接触可能な最小の電極パッドサイズや電極ピッチ
を決定するのが因鰺であるという課題がある。
In addition, it is not easy to determine the contactable electrode butt size or pitch, and furthermore, it is difficult to determine the contactable electrode butt size or pitch, and it is also difficult to determine the individual The distribution of conductors is all different;
For example, there is a problem in that it is important to determine the minimum contactable electrode pad size and electrode pitch.

本発明の目的は、上記課題を解決することにあり、線状
導電体の間隔を一定にするとともに、信頼性の高い接触
接続を実現させる異方性導電シートの製造方法を提供す
ることにある。
An object of the present invention is to solve the above-mentioned problems, and to provide a method for manufacturing an anisotropic conductive sheet that makes the distance between linear conductors constant and realizes highly reliable contact connection. .

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために、複数の絶縁被覆されたワイ
ヤを近接配置させ、ワイヤの絶縁被覆部を熱圧着あるい
は、溶剤により固着してワイヤ集合体を形成し、ワイヤ
の長手方向に対し直交する方向に切断すると共に必要に
応じて切断面を平坦化してシート状に加工する製法を採
用した。
In order to achieve the above objective, a plurality of insulated wires are arranged close to each other, the insulated parts of the wires are bonded by thermocompression or fixed with a solvent to form a wire assembly, and the wires are arranged perpendicular to the longitudinal direction of the wires. We adopted a manufacturing method in which the material is cut in the same direction, and if necessary, the cut surface is flattened and processed into a sheet shape.

そして更に好ましくは、上記工程に引き続き断面のワイ
ヤ表面に耐食性、良導体あるいは硬度の高い金属めっき
を施す工程を付加したり、」−記シート状に加圧したの
ち、エツチングにより一部絶縁被覆部を除去すると共に
必要に応じてワイヤ表面に耐食性、良導体あるいは硬度
の高い金属めっきを施す工程を付加することにより接触
特性を向上がることかできる。
More preferably, following the above step, a step of applying corrosion-resistant, good conductor, or hard metal plating to the wire surface of the cross section is added, or after pressurizing the wire into a sheet shape, a part of the insulating coating is removed by etching. The contact characteristics can be improved by removing the wire and adding a step of plating the wire surface with corrosion-resistant, good conductor, or hard metal, if necessary.

〔作用〕[Effect]

上記した製造方法によれば異方性導電シートのワイヤ間
隔は、絶縁被覆ワイヤの径によって決まり、径のばらつ
きを制御すれば、一定の間隔でワイヤを並べることがで
き、その結果ワイヤ分布の粗な部分あるいは密の部分は
生じず、シート面のどの部分でも単位面積あたりのワイ
ヤ本数を一定にすることができる。
According to the above manufacturing method, the wire spacing of the anisotropic conductive sheet is determined by the diameter of the insulated wire, and if the variation in diameter is controlled, the wires can be arranged at a constant spacing, resulting in a rough wire distribution. There are no rough or dense areas, and the number of wires per unit area can be kept constant in any part of the sheet surface.

〔実施例〕〔Example〕

以下、本発明による一実施例を第1図、第2図及び第3
図を用いて説明する。第1図は本発明の一実施例の製造
プロセスを示したものである。図示のように本例では、
まずタングステン(W)、ステンレスあるいはベリリウ
ム(Be)−銅(Cu)等の線材、あるいは必要に応し
てこれらの線材の表面をニッケル(Ni) 、金(Au
)、ロジウム(Rh)等の金属めっきを施したワイヤ表
面をシリコンゴムあるいはフッ素樹脂等の絶縁性材料で
被覆した線材を多数準備する。
An embodiment according to the present invention will be described below with reference to FIGS. 1, 2, and 3.
This will be explained using figures. FIG. 1 shows a manufacturing process of an embodiment of the present invention. In this example, as shown,
First, wires such as tungsten (W), stainless steel, or beryllium (Be)-copper (Cu) are coated, or if necessary, the surface of these wires is coated with nickel (Ni) or gold (Au).
), a large number of wire rods are prepared in which the surface of the wire is plated with metal such as rhodium (Rh) and coated with an insulating material such as silicone rubber or fluororesin.

次に例えば第2図に示すようなスプリング性の円筒コイ
ル状保持治具2の中に線材1を挿入し、寄せ集めワイヤ
集合体を形成する。次に例えば隣接する絶縁被覆部1b
、 l’b間に隙間ができなくなるまで外部より力を加
え、その後加熱して隣接する絶縁被覆間1b、 Ib’
を接着する。あるいは、例えば被覆線材を寄せ集めた段
階で低荷重で外部より力を加えた状態で絶縁被覆部を溶
かす液体あるいは雰囲気中に放置させたのち隣接するワ
イヤの絶縁被覆部1b、 lb’の隙間がなくなるまで
外部よりカを加え、溶剤が十分に乾燥するまで保持して
おく。このようにしてできたワイヤの集合体をワイヤの
長手方向と直交するように切断し、必要に応じて切断面
を平坦化させ第3図に示す異方性導電シート3を製作す
る。またその後切断面のワイヤ表面(1a)をニッケル
(Ni) 、金(Au) 、ロジウム(Rh)等の金属
めっきを施こしても、切断面の絶縁被覆1bをエツチン
グ等により一部除去してもよく、更に露出したワイヤl
a表面を上記金属によりめっきしてもよい。完成した異
方導電シート3は必要に応じて切断して使用してもよい
Next, the wire 1 is inserted into a spring-like cylindrical coil-shaped holding jig 2 as shown in FIG. 2, for example, to form a wire assembly. Next, for example, the adjacent insulation coating portion 1b
Apply external force until there is no gap between 1b and 1b', and then heat to separate the adjacent insulation coatings 1b and 1b'
Glue. Alternatively, for example, when the covered wires are gathered together, a low load is applied from the outside and the insulation coating is left in a liquid or atmosphere that melts the insulation coating, and then the gaps between the insulation coatings 1b and lb' of adjacent wires are removed. Add force from the outside until it runs out, and hold until the solvent is sufficiently dry. The wire assembly thus produced is cut perpendicularly to the longitudinal direction of the wires, and the cut surfaces are flattened if necessary to produce an anisotropic conductive sheet 3 as shown in FIG. 3. Furthermore, even if the wire surface (1a) on the cut surface is plated with metal such as nickel (Ni), gold (Au), rhodium (Rh), etc., the insulation coating 1b on the cut surface is partially removed by etching, etc. Even more exposed wires
The surface a may be plated with the above metal. The completed anisotropic conductive sheet 3 may be cut and used as necessary.

以」二の方法によれば、ワイヤを一定の間隔で規則正し
く並らべることができ、その結果シート面のどの部分で
も単位面積あたりのワイヤ本数を一定にすることができ
従来技術のものに比し大幅に導通不良が低減され、接触
接続の信頼性が大幅に向上される。
According to the second method, the wires can be arranged regularly at regular intervals, and as a result, the number of wires per unit area can be made constant in any part of the sheet surface, which is different from the conventional technology. In comparison, conduction defects are significantly reduced, and the reliability of contact connection is greatly improved.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、半導体LSIチッ
プあるいは回路基板の電極パッドと、それと対向する回
路基板を異方性導電シートで接触接続される場合、対向
する電極パッド間は高信頼に接触接続されるという効果
がある。
As explained above, according to the present invention, when the electrode pads of a semiconductor LSI chip or a circuit board and the opposing circuit board are connected in contact with each other using an anisotropic conductive sheet, the opposing electrode pads can be contacted with high reliability. It has the effect of being connected.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による一例での製造工程を示す図、第2
図は本発明による製造プロセスのワイヤを近接配置され
た斜視図、第3図は本発明による異方性導電シートの斜
視図である。 1a・・・ワイヤ      1b・・・絶縁被覆2・
・・円筒コイル状保持治具 3・・・異方性導電シート
FIG. 1 is a diagram showing an example of the manufacturing process according to the present invention, and FIG.
The figure is a perspective view of wires arranged in close proximity in the manufacturing process according to the present invention, and FIG. 3 is a perspective view of an anisotropic conductive sheet according to the present invention. 1a...Wire 1b...Insulation coating 2.
...Cylindrical coil holding jig 3...Anisotropic conductive sheet

Claims (1)

【特許請求の範囲】 1、半導体LSIあるいは回路基板の電極パッドと、向
かい合うもう一方の半導体LSIあるいは回路基板の電
極パッドとを電気的に接触接続するための異方性導電シ
ートの製造方法において、複数の絶縁被覆されたワイヤ
を平行に近接配置する第1の工程と、該近接配置したワ
イヤを絶縁被覆部を熱圧着あるいは、溶剤により固着し
てワイヤ集合体を形成する第2の工程と、該ワイヤ集合
体のワイヤの長手方向に対し直交する方向に切断すると
共に必要に応じて切断面を平坦化する第3の工程とを有
して成ることを特徴とする異方性導電シートの製造方法
。 2、請求項1に記載の第3の工程に引き続き、断面金属
表面に導電性、耐食性あるいは硬度の高い金属めつきを
施す第4の工程を付加したことを特徴とする異方性導電
シートの製造方法。 3、請求項1に記載の第3の工程に引き続き、断面絶縁
体表面をエッチングにより一部除去する第4の工程を付
加したことを特徴とする異方性導電シートの製造方法。 4、請求項3に記載の第4の工程に引き続き、金属表面
に導電性、耐食性あるいは硬度の高い金属めっきを施す
第5の工程を付加したことを特徴とする異方性導電シー
トの製造方法。 5、該ワイヤがタングステン(W)あるいはステンレス
あるいはベリリウム(Be)−銅(Cu)等の線材を用
い、また必要に応じてその表面をニッケル(Ni)、金
(Au)、ロジウム(Rh)等の金属めっきを施すこと
を特徴とする請求項1、2、3または4記載の異方性導
電シートの製造方法。 6、該ワイヤ表面を被覆する絶縁体が、シリコンゴムあ
るいはフッ素樹脂等で形成されることを特徴とする請求
項1、2、3、4、または5記載の異方性シートの製造
方法。
[Claims] 1. A method for manufacturing an anisotropic conductive sheet for electrically connecting an electrode pad of a semiconductor LSI or circuit board to an electrode pad of another semiconductor LSI or circuit board facing each other, a first step of arranging a plurality of insulated wires in parallel in close proximity; a second step of forming a wire assembly by thermocompression bonding or fixing the insulating coatings of the closely arranged wires with a solvent; A third step of cutting the wire assembly in a direction perpendicular to the longitudinal direction of the wires and, if necessary, flattening the cut surfaces. Method. 2. An anisotropic conductive sheet characterized in that, following the third step according to claim 1, a fourth step is added in which the cross-sectional metal surface is plated with a metal having high conductivity, corrosion resistance, or hardness. Production method. 3. A method for manufacturing an anisotropic conductive sheet, comprising adding a fourth step of partially removing the surface of the cross-sectional insulator by etching, subsequent to the third step according to claim 1. 4. A method for producing an anisotropic conductive sheet, characterized in that, following the fourth step according to claim 3, a fifth step is added in which the metal surface is plated with a metal having high conductivity, corrosion resistance, or hardness. . 5. The wire is made of tungsten (W), stainless steel, or beryllium (Be)-copper (Cu), and if necessary, the surface is coated with nickel (Ni), gold (Au), rhodium (Rh), etc. 5. The method for producing an anisotropic conductive sheet according to claim 1, wherein the anisotropic conductive sheet is subjected to metal plating. 6. The method for producing an anisotropic sheet according to claim 1, 2, 3, 4, or 5, wherein the insulator covering the wire surface is made of silicone rubber, fluororesin, or the like.
JP32277390A 1990-11-28 1990-11-28 Manufacture of anisotropic conductive sheet Pending JPH04196016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32277390A JPH04196016A (en) 1990-11-28 1990-11-28 Manufacture of anisotropic conductive sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32277390A JPH04196016A (en) 1990-11-28 1990-11-28 Manufacture of anisotropic conductive sheet

Publications (1)

Publication Number Publication Date
JPH04196016A true JPH04196016A (en) 1992-07-15

Family

ID=18147482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32277390A Pending JPH04196016A (en) 1990-11-28 1990-11-28 Manufacture of anisotropic conductive sheet

Country Status (1)

Country Link
JP (1) JPH04196016A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006302C2 (en) * 1997-06-12 1998-12-15 Seed Capital Investments Device for displaying information.
US6365949B1 (en) 1997-06-12 2002-04-02 Zetfolie B.V. Substrate having a unidirectional conductivity perpendicular to its surface, devices comprising such a substrate and methods for manufacturing such a substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006302C2 (en) * 1997-06-12 1998-12-15 Seed Capital Investments Device for displaying information.
US6365949B1 (en) 1997-06-12 2002-04-02 Zetfolie B.V. Substrate having a unidirectional conductivity perpendicular to its surface, devices comprising such a substrate and methods for manufacturing such a substrate

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