JP2002062313A - Electrical inspecting jig and its manufacturing method - Google Patents

Electrical inspecting jig and its manufacturing method

Info

Publication number
JP2002062313A
JP2002062313A JP2000250756A JP2000250756A JP2002062313A JP 2002062313 A JP2002062313 A JP 2002062313A JP 2000250756 A JP2000250756 A JP 2000250756A JP 2000250756 A JP2000250756 A JP 2000250756A JP 2002062313 A JP2002062313 A JP 2002062313A
Authority
JP
Japan
Prior art keywords
insulating
inspection jig
conductive material
conductive
exposed portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000250756A
Other languages
Japanese (ja)
Inventor
Yukio Akiyama
幸穂 秋山
Yoshihisa Yoshida
美久 吉田
Takahiro Shibayama
孝寛 柴山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP2000250756A priority Critical patent/JP2002062313A/en
Publication of JP2002062313A publication Critical patent/JP2002062313A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electrical inspection jig which is highly finer than a conventional electric inspection jig and to provide its manufacturing method. SOLUTION: Two retainer plates 21a and 21b, in which through-holes 22 formed at prescribed positions are faced so as to be fixed by a fixation jig 31, and conductive wires 11 are inserted into the through-holes 22 in the respective retainer plates 21a and 21b. An insulation fixing part 41, into which an insulating resin is poured so as to be hardened, is formed between the retainer plates 21a and 21b and is cut at a cutting line 23. Then, the conductive wires 11 are fixed to prescribed positions of an insulating substrate 41a, and it is possible to obtain the electric inspection jig 100, in which exposed parts 11a of the linear conductive wires 11 are formed on one face of the insulating substrate 41a and in which the linear conductive wires 11 in prescribed lengths are formed on the other face.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プリント配線板等
の配線基板の電気検査に使用される電気検査用治具及び
その製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical inspection jig used for electrical inspection of a wiring board such as a printed wiring board and a method of manufacturing the same.

【0002】[0002]

【従来の技術】プリント基板及び各種半導体パッケージ
用基板(TAB、BGA、CSP等)の電気検査治具に
は、スプリングプローブを使ったもの、リジッドプロー
ブを使ったものなどがある。
2. Description of the Related Art Electrical inspection jigs for printed circuit boards and various semiconductor package substrates (TAB, BGA, CSP, etc.) include those using a spring probe and those using a rigid probe.

【0003】プリント基板及び各種半導体パッケージ用
基板は高精細化が進んでおり最小ピッチが100μm以
下の製品も登場している。しかし、従来型のプローブを
使った電気検査治具はプローブ間最小ピッチの限界が1
50〜200μmであるため、製品の高精細化に追いつ
いていない状況にある。このように高精細化の進んだプ
リント基板及び各種半導体パッケージ用基板は、電気素
子の実装前に電気検査を行うことが出来ないという問題
を有している。
[0003] Printed circuit boards and substrates for various types of semiconductor packages have become increasingly fine, and products having a minimum pitch of 100 µm or less have appeared. However, electric inspection jigs using conventional probes have a limit of a minimum pitch between probes of one.
Since the thickness is 50 to 200 μm, the product cannot keep up with high definition of the product. Printed circuit boards and various types of semiconductor package substrates, which have been improved in definition in this way, have a problem that an electric test cannot be performed before mounting an electric element.

【0004】また、従来のプローブで電気検査できる範
囲のプリント基板及び各種半導体パッケージ用基板で
も、プローブ間最小ピッチの限界値に近いピッチである
場合には、各製品のパターンの電気検査治具を個別に製
作する必要があり、コストがかかるという問題も有して
いる。
[0004] Further, even in the case of a printed circuit board and a substrate for various semiconductor packages within the range that can be electrically inspected by the conventional probe, if the pitch is close to the limit value of the minimum pitch between the probes, the electric inspection jig of the pattern of each product is required. There is also a problem in that it has to be manufactured individually and costs are high.

【0005】[0005]

【発明が解決しようとする課題】本発明は、上記の問題
点に鑑み考案されたもので、従来よりも高精細な電気検
査治具及びその製造方法を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been devised in view of the above problems, and has as its object to provide an electric inspection jig with higher definition than before and a method for manufacturing the same.

【0006】[0006]

【課題を解決するための手段】本発明において上記課題
を達成するために、まず請求項1の発明は、配線基板の
電気的不良の有無を検査する電気検査用治具であって、
所定の位置に配置された複数の線状の導電性材料の間
が、絶縁材料によって絶縁されて絶縁基材が形成されて
おり、絶縁基材の一方の面は、前記導電性材料の長さ方
向の垂直面で切断された導電性材料の露出部が形成され
ており、他方の面は、前記導電性材料にて引き出し線が
形成されていることを特徴とする電気検査用治具とした
ものである。
In order to achieve the above object, the present invention firstly provides an electric inspection jig for inspecting the presence or absence of an electric failure of a wiring board,
A plurality of linear conductive materials arranged at predetermined positions are insulated by an insulating material to form an insulating base, and one surface of the insulating base has a length equal to the length of the conductive material. An exposed portion of the conductive material cut in a direction perpendicular to the direction is formed, and the other surface is an electrical inspection jig characterized in that a lead line is formed of the conductive material. Things.

【0007】また、請求項2の発明は、前記絶縁基材の
他方の面に形成されている導電性材料の一部が被覆材で
覆われていることを特徴とする請求項1記載の電気検査
用治具としたものである。
According to a second aspect of the present invention, there is provided the electric device according to the first aspect, wherein a part of the conductive material formed on the other surface of the insulating base is covered with a coating material. This is an inspection jig.

【0008】また、請求項3の発明は、前記絶縁基材の
一方の面の導電性材料の露出部にめっきが施されている
ことを特徴とする請求項1または請求項2記載の電気検
査用治具としたものである。
According to a third aspect of the present invention, there is provided the electrical inspection according to the first or second aspect, wherein the exposed portion of the conductive material on one surface of the insulating base is plated. Jig.

【0009】また、請求項4の発明は、所定の位置に配
置された複数の線状の導電性材料の一部を絶縁材料によ
って固定して絶縁性固定部を形成し、その絶縁性固定部
の一方の面を前記導電性材料の長さ方向の垂直面で切断
し、前記絶縁基材及び前記導電性材料の露出部を形成す
ることを特徴とする電気検査用治具の製造方法としたも
のである。
According to a fourth aspect of the present invention, a plurality of linear conductive materials disposed at predetermined positions are fixed with an insulating material to form an insulating fixing portion, and the insulating fixing portion is formed. Cutting the one surface of the conductive material along a vertical surface in the longitudinal direction of the conductive material to form an exposed portion of the insulating base material and the conductive material. Things.

【0010】また、請求項5の発明は、再溶融可能な被
覆材で被覆された多数の導電性材料を束ねた後、その一
部の被覆材を溶融し、硬化させることによって絶縁性固
定部を形成して前記導電性材料を相互に固定した後、そ
の絶縁性固定部の一方の面を前記導電性材料の長さ方向
の垂直面で切断し、前記絶縁基材及び前記導電性材料の
露出部を形成することを特徴とする電気検査用治具の製
造方法としたものである。
Further, according to the invention of claim 5, after bundling a large number of conductive materials covered with a re-meltable coating material, a part of the coating material is melted and cured to thereby fix the insulating fixing portion. After the conductive material is fixed to each other, one surface of the insulating fixing portion is cut along a vertical surface in the longitudinal direction of the conductive material, and the insulating base and the conductive material are cut off. According to another aspect of the present invention, there is provided a method of manufacturing an electrical inspection jig, wherein an exposed portion is formed.

【0011】さらにまた、請求項6の発明は、前記導電
性材料の露出部にめっきを施すことを特徴とする請求項
4または請求項5記載の電気検査用治具の製造方法とし
たものである。
Further, according to a sixth aspect of the present invention, there is provided a method of manufacturing an electrical inspection jig according to the fourth or fifth aspect, wherein the exposed portion of the conductive material is plated. is there.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態につき
説明する。図1(b)は本発明の請求項1の電気検査用
治具の一実施例を示す斜視図、図2(b)は請求項2の
電気検査用治具の一実施例を示す斜視図、図1(c)は
図1(b)の電気検査用治具の斜視図をA−A線で切断
した構成断面図、図2(c)は図2(b)の電気検査用
治具の斜視図をA−A線で切断した構成断面をそれぞれ
示す。図1(a)は請求項1の電気検査用治具の製造方
法、図2(a)は請求項1または請求項2の電気検査用
治具の製造方法の概略を示したものである。
Embodiments of the present invention will be described below. FIG. 1B is a perspective view showing an embodiment of the electrical inspection jig of claim 1 of the present invention, and FIG. 2B is a perspective view showing an embodiment of the electrical inspection jig of claim 2. FIG. 1C is a sectional view of the electric inspection jig of FIG. 1B taken along line AA, and FIG. 2C is an electric inspection jig of FIG. 2B. Is a sectional view taken along line AA of the perspective view of FIG. FIG. 1A schematically shows a method for manufacturing the electrical inspection jig according to claim 1, and FIG. 2A schematically shows a method for manufacturing the electrical inspection jig according to claim 1 or 2.

【0013】電気検査用治具100は、図1(b)及び
(c)に示すように、絶縁性の材料からなる絶縁基材4
1aの一方の面に線状の導電性材料11の露出部11a
が、他方の面に線状の導電性材料11が所定の長さ形成
された構造である。電気検査用治具200は、図2
(b)及び(c)に示すように、絶縁性の材料からなる
絶縁基材221の一方の面に線状の導電性材料212の
露出部212aが、他方の面に被覆材で211で覆われ
た線状の導電性材料212が所定の長さ形成された構造
である。
As shown in FIGS. 1 (b) and 1 (c), the electric inspection jig 100 includes an insulating base material 4 made of an insulating material.
The exposed portion 11a of the linear conductive material 11 is formed on one surface of
Has a structure in which a linear conductive material 11 is formed on a predetermined length on the other surface. The electric inspection jig 200 is shown in FIG.
As shown in (b) and (c), an exposed portion 212a of a linear conductive material 212 is covered on one surface of an insulating base material 221 made of an insulating material with a covering material 211 on the other surface. This is a structure in which a drawn linear conductive material 212 is formed with a predetermined length.

【0014】電気検査用治具100の製造方法について
述べる。まず、所定位置に貫通孔22が形成された2ヶ
の保持板21a及び21bが対向して固定治具31に固
定されており、導電性線材11をそれぞれの保持板21
a及び21bの貫通孔22に挿入し、2ヶの保持板21
a及び21bの所定位置に配列された導電性線材11を
得る。
A method for manufacturing the electric inspection jig 100 will be described. First, two holding plates 21a and 21b each having a through hole 22 formed at a predetermined position are fixed to a fixing jig 31 so as to face each other.
a and 21b are inserted into the through holes 22 and the two holding plates 21
The conductive wires 11 arranged at predetermined positions a and 21b are obtained.

【0015】ここで、保持板21a及び21bに形成す
る貫通孔22の配列パターンは、各種の格子状配列や個
別製品の電極配列パターンに合わせた配列である。貫通
孔22の形成方法としては、ドリルなどによる機械加
工、レーザー加工、エッチングプロセスなどがある。ま
た、保持板21a及び21bは固定治具31によって、
互いに平行に、所定の距離をおいて配置される。導電性
線材11は保持板21a及び21bの同じ位置にある貫
通孔22に一本または一束ずつ通されている。導電性線
材11は銅、金などの各種の金属線、カーボンファイバ
ーなどの導電性の材質で作られており、必要に応じて絶
縁被覆または酸化膜が形成されている。また、導電性線
材11のそれぞれの両端は図示せぬ固定治具により、一
定の張力がかかった状態で保持されている。
Here, the arrangement pattern of the through holes 22 formed in the holding plates 21a and 21b is an arrangement in accordance with various lattice arrangements and electrode arrangement patterns of individual products. Examples of a method of forming the through hole 22 include mechanical processing with a drill or the like, laser processing, an etching process, and the like. The holding plates 21a and 21b are fixed by a fixing jig 31.
They are arranged parallel to each other and at a predetermined distance. The conductive wires 11 are passed through the through holes 22 at the same position of the holding plates 21a and 21b, one by one or one by one. The conductive wire 11 is made of a conductive material such as various types of metal wires such as copper and gold, and carbon fiber, and has an insulating coating or an oxide film as necessary. Both ends of the conductive wire 11 are held by a fixing jig (not shown) under a certain tension.

【0016】次に、保持板21aと保持板21bの間に
絶縁性の樹脂を流し込み硬化させて絶縁性固定部41を
形成する(図1(a)参照)。絶縁性固定部41は導電
性線材11を保持し、隣接する導電性線材11どうしを
絶縁する役割を持つ。絶縁性固定部41は、シリコン系
ゴムなどの各種のゴムまたはエポキシ系樹脂などの各種
の樹脂であり、最初は流体で保持板21aと保持板21
bの間に流し込まれて脱泡処理を施した後、熱、光等に
より硬化させる。
Next, an insulating resin is poured between the holding plate 21a and the holding plate 21b and hardened to form an insulating fixing portion 41 (see FIG. 1A). The insulating fixing portion 41 has a role of holding the conductive wires 11 and insulating adjacent conductive wires 11 from each other. The insulating fixing portion 41 is made of various kinds of rubber such as silicone rubber or various kinds of resin such as epoxy resin.
b, and after being subjected to defoaming treatment, is cured by heat, light or the like.

【0017】次に、図1(a)に示す絶縁性固定部41
を切断線23で切断すると、図1(b)及び(c)に示
すように、絶縁基材41aの所定位置に導電性線材11
が固定され、絶縁基材41aの一方の面に線状の導電性
材料11の露出部11aが、他方の面に所定の長さの線
状の導電性材料11が形成された電気検査用治具100
が形成される。切断面に凹凸や切り屑がある場合には必
要に応じて、切断面を研磨する。絶縁基材41aの他方
の面の導電性材料11の端部は、引き出し線として直
接、またはコネクタ、端子台等を経由して、電気検査用
のテスターの端子に接続される。
Next, the insulating fixing portion 41 shown in FIG.
Is cut along the cutting line 23, as shown in FIGS. 1B and 1C, the conductive wire 11 is placed at a predetermined position on the insulating base material 41a.
Is fixed, and an exposed portion 11a of the linear conductive material 11 is formed on one surface of the insulating base material 41a, and a linear conductive material 11 having a predetermined length is formed on the other surface. Tool 100
Is formed. If the cut surface has irregularities or chips, the cut surface is polished as necessary. The end of the conductive material 11 on the other surface of the insulating base material 41a is connected to a terminal of a tester for electrical inspection directly as a lead wire or via a connector, a terminal block or the like.

【0018】また、絶縁基材41aの他方の面の導電性
材料11は、お互いに接触する可能性がある。検査時の
電気的短絡を防止するためには、導電性材料11にあら
かじめ絶縁被覆を形成しておくか、絶縁基材41aと導
電性材料11の端部との間の導電性材料11に絶縁被覆
を形成してやればよい。
The conductive material 11 on the other surface of the insulating base 41a may come into contact with each other. In order to prevent an electrical short circuit at the time of the inspection, an insulating coating is formed on the conductive material 11 in advance, or the conductive material 11 between the insulating base material 41a and the end of the conductive material 11 is insulated. What is necessary is just to form a coating.

【0019】電気検査用治具100の電極11aの配列
パターンは、保持板21a及び21bに形成しておいた
貫通孔22の配列パターンで決まる。貫通孔22の配列
パターンを各種の格子状にしておけば、被検査体のパタ
ーンに関係なく使用可能な電気検査用治具ができる。ま
た、貫通孔22の配列パターンを個別製品のパターンに
合わせておけば、個別製品対応の電気検査用治具100
の作製が可能である。
The arrangement pattern of the electrodes 11a of the electric inspection jig 100 is determined by the arrangement pattern of the through holes 22 formed in the holding plates 21a and 21b. If the arrangement pattern of the through-holes 22 is formed in various lattice shapes, an electric inspection jig that can be used irrespective of the pattern of the inspection object can be obtained. Also, if the arrangement pattern of the through holes 22 is matched with the pattern of the individual product, the electric inspection jig 100
Can be produced.

【0020】電気検査用治具100の電極11aの最小
ピッチは、保持板21a及び21bに形成できる貫通孔
22の最小ピッチで決まる。例えば、現在実用されてい
るドリル刃には直径50μm程度のものがあり、これを
使用すればピッチ100μm程度の貫通孔を形成するこ
とができる。直径40μm程度の金属線も存在し、導電
性線材11として利用することが出来る。従って現状で
は電気検査用治具100の電極11aのピッチは100
μm程度にすることが可能である。
The minimum pitch of the electrodes 11a of the electrical inspection jig 100 is determined by the minimum pitch of the through holes 22 that can be formed in the holding plates 21a and 21b. For example, some drill blades currently in practical use have a diameter of about 50 μm, and if these are used, through holes with a pitch of about 100 μm can be formed. There is also a metal wire having a diameter of about 40 μm, which can be used as the conductive wire 11. Therefore, at present, the pitch of the electrodes 11a of the electrical inspection jig 100 is 100
It is possible to make it about μm.

【0021】電気検査用治具200の製造方法について
述べる。図2(a)に示す線状の導電性線材212が絶
縁被覆材211で被覆された多数の被覆導電性線材21
0を図示せぬ固定治具によって固定し、被覆導電性線材
束を作製する。必要に応じて各被覆導電性線材210の
両端部に一定の張力をかけて固定する。この状態で被覆
導電性線材束の絶縁被覆材211の一部を再溶融・硬化
処理して、絶縁性固定部220を作製する。
A method for manufacturing the electric inspection jig 200 will be described. A large number of coated conductive wires 21 in which the linear conductive wire 212 shown in FIG.
0 is fixed by a fixing jig (not shown) to produce a coated conductive wire bundle. If necessary, fixed tension is applied to both ends of each coated conductive wire 210 by applying a certain tension. In this state, a part of the insulating coating material 211 of the coated conductive wire bundle is re-melted and hardened to produce the insulating fixing portion 220.

【0022】ここで、導電性線材212は銅、金などの
各種金属線またはカーボンファイバーなどの導電性の材
質で作られている。また、絶縁被覆材211は再溶融・
硬化が可能な各種のゴムまたは各種の樹脂で作られてい
る。
Here, the conductive wire 212 is made of a conductive material such as various metal wires such as copper and gold or carbon fiber. The insulating coating material 211 is re-melted
It is made of various curable rubbers or various resins.

【0023】さらに、図2(a)の切断線で切断する
と、図2(b)及び(c)に示すように、絶縁基材22
1の所定位置に導電性線材212が固定され、絶縁基材
221の一方の面に導電性線材212の露出部212a
が、他方の面に絶縁被覆材211で被覆された導電性線
材212が所定の長さ形成された電気検査用治具200
が形成される。切断面に凹凸や切り屑がある場合には必
要に応じて、切断面を研磨する。絶縁基材221の他方
の面の絶縁被覆材211で被覆された導電性線材212
の端部は、引き出し線として直接、またはコネクタ、端
子台等を経由して、電気検査用のテスターの端子に接続
される。ここで、絶縁基材221の他方の面に形成され
ている導電性線材212は、あらかじめ絶縁被覆材21
1で被覆されているため、お互いが接触し、電気的に短
絡することはない。
Further, when cut along the cutting line in FIG. 2A, as shown in FIG. 2B and FIG.
1, a conductive wire 212 is fixed to a predetermined position, and an exposed portion 212a of the conductive wire 212 is provided on one surface of the insulating base material 221.
However, an electrical inspection jig 200 having a conductive wire 212 coated on the other surface with an insulating coating 211 on a predetermined length is formed.
Is formed. If the cut surface has irregularities or chips, the cut surface is polished as necessary. The conductive wire 212 covered with the insulating covering material 211 on the other surface of the insulating base material 221
Is connected to a terminal of a tester for electrical inspection directly as a lead wire or via a connector, a terminal block or the like. Here, the conductive wire 212 formed on the other surface of the insulating base material 221 is
Since they are covered with 1, they do not come into contact with each other and are electrically short-circuited.

【0024】電気検査用治具200の電極212aの配
列パターンは、絶縁被覆材211の断面形状やサイズを
選ぶことにより制御することが出来る。図3(a)に示
すような断面形状が円形の絶縁被覆材211を使用した
場合には、三角形の頂点に導電性線材212の露出部2
12aがある三角格子状の配列パターンとなる。隣接す
る露出部212aの間の距離は、絶縁被覆材211の厚
みにより制御する。また絶縁被覆材211の断面形状を
楕円形にした場合には歪んだ三角格子状の配列パターン
を作ることが可能である。
The arrangement pattern of the electrodes 212a of the electric inspection jig 200 can be controlled by selecting the cross-sectional shape and size of the insulating covering material 211. When the insulating coating material 211 having a circular cross section as shown in FIG. 3A is used, the exposed portion 2 of the conductive wire 212
12a is a triangular lattice-shaped arrangement pattern. The distance between the adjacent exposed portions 212a is controlled by the thickness of the insulating covering material 211. When the cross-sectional shape of the insulating covering material 211 is elliptical, it is possible to form a distorted triangular lattice-like arrangement pattern.

【0025】また、図3(b)に示すような断面形状が
三角形の絶縁被覆材231を使用した場合には、六角形
の頂点に導電性線材212の露出部212aがある六角
格子状の配列パターンとなる。隣接する電極212a間
の距離は、絶縁被覆材231の厚さにより制御する。ま
た絶縁被覆材231の断面形状の三角形の辺の長さを選
ぶ事により歪んだ六角格子状の配列パターンを作ること
も可能である。
When the insulating coating material 231 having a triangular cross section as shown in FIG. 3B is used, a hexagonal lattice-like arrangement in which an exposed portion 212a of the conductive wire 212 is provided at the hexagonal vertex. It becomes a pattern. The distance between the adjacent electrodes 212a is controlled by the thickness of the insulating covering material 231. It is also possible to form a distorted hexagonal lattice arrangement pattern by selecting the length of the sides of the triangle of the cross-sectional shape of the insulating coating material 231.

【0026】また、図3(c)に示すような断面形状が
四角形の絶縁被覆材241を使用した場合には、四角形
の頂点に導電性線材212の露出部212aがある四角
格子状の配列パターンとなる。隣接する露出部212a
間の距離は、絶縁被覆材241の厚さにより制御する。
また絶縁被覆材241の断面形状の四角形の辺の長さを
選ぶ事により歪んだ四角格子状の配列パターンを作るこ
とも可能である。
When an insulating coating 241 having a rectangular cross section as shown in FIG. 3 (c) is used, a square lattice-shaped array pattern having an exposed portion 212a of a conductive wire 212 at the apex of the square is used. Becomes Adjacent exposed part 212a
The distance between them is controlled by the thickness of the insulating covering material 241.
In addition, by selecting the length of the sides of the square of the cross-sectional shape of the insulating coating material 241, it is possible to form a distorted square lattice-like arrangement pattern.

【0027】電気検査用治具200の導電性線材212
の露出部212aの最小ピッチは、導電性線材212の
直径と絶縁被覆材211の厚さで決まる。現在、直径4
0μm程度の導電性線材が存在し、膜厚20μm程度の
絶縁被覆材を施すことが可能である。従って現状では電
気検査用治具200の導電性線材212の露出部212
aのピッチを80μm程度にまですることが可能であ
る。
The conductive wire 212 of the electric inspection jig 200
The minimum pitch of the exposed portion 212a is determined by the diameter of the conductive wire 212 and the thickness of the insulating covering material 211. Currently, diameter 4
A conductive wire having a thickness of about 0 μm exists, and an insulating coating having a thickness of about 20 μm can be applied. Therefore, at present, the exposed portion 212 of the conductive wire 212 of the electric inspection jig 200 is provided.
The pitch a can be reduced to about 80 μm.

【0028】図4(a)及び図5(a)は本発明の請求
項3記載の導電性材料の露出部にめっきが施された電気
検査用治具の斜視図を、図4(b)及び図5(b)は図
5(a)及び図5(a)の電気検査用治具の斜視図をA
−A線で切断した構成断面図をそれぞれ示す。
FIGS. 4 (a) and 5 (a) are perspective views of an electric inspection jig in which an exposed portion of a conductive material according to the third aspect of the present invention is plated. 5 (b) is a perspective view of the electrical inspection jig of FIGS. 5 (a) and 5 (a).
The configuration sectional views taken along line -A are shown.

【0029】図4(a)及び(b)の100aは請求項
1記載の電気検査用治具100の導電性材料11の露出
部11aにめっき被膜51が形成された電気検査用治具
を示したものである。図5(a)及び(b)の200a
は請求項1または2記載の電気検査用治具200の導電
性線材212の露出部212aにめっき被膜231が形
成された電気検査用治具を示したものである。
4 (a) and 4 (b) show an electric inspection jig in which the plating film 51 is formed on the exposed portion 11a of the conductive material 11 of the electric inspection jig 100 according to the first embodiment. It is a thing. 5a and 5b 200a
9 shows an electric inspection jig in which a plating film 231 is formed on an exposed portion 212a of a conductive wire 212 of the electric inspection jig 200 according to claim 1 or 2.

【0030】導電性材料11の露出部11aへのめっき
処理は、まず、電気検査治具100の絶縁基材41aの
一方の面の導電性材料11の露出部11aを電解めっき
液に漬け、絶縁基材41aの他方の面の導電性材料11
から電気を流して電解めっきを行うと、導電性材料11
の露出部11aにめっきが施され、めっき被膜51が形
成される。このめっき被膜51の、厚さ、形状、材質を
選択することにより電極11aの先端に種々の性質を付
加することができる。
First, the exposed portion 11a of the conductive material 11 is plated by dipping the exposed portion 11a of the conductive material 11 on one surface of the insulating base material 41a of the electric inspection jig 100 in an electrolytic plating solution. The conductive material 11 on the other surface of the base material 41a
When electroplating is performed by flowing electricity from the conductive material 11
The exposed portion 11a is plated to form a plating film 51. By selecting the thickness, shape, and material of the plating film 51, various properties can be added to the tip of the electrode 11a.

【0031】なお、電気検査用治具100の切断工程に
より、導電性材料11の露出部11aが絶縁基材41a
の表面より凹んでしまった場合には、このめっき処理工
程により導電性材料11の露出部11aの先端を絶縁基
材41aの表面の高さまで戻すことができる。さらに、
めっき被膜を厚く付けることにより、導電性材料11の
露出部11aの先端に凸状のめっき被膜51を形成で
き、被検査物の表面に接触しやすくなる。
In the cutting step of the electrical inspection jig 100, the exposed portion 11a of the conductive material 11 is
In this case, the tip of the exposed portion 11a of the conductive material 11 can be returned to the height of the surface of the insulating base material 41a. further,
By providing a thick plating film, a convex plating film 51 can be formed at the tip of the exposed portion 11a of the conductive material 11, and the surface of the inspection object can be easily contacted.

【0032】このめっき被膜51の材質を適宜選択した
り、複数種類のめっき処理を組み合わせることにより、
めっき被膜の先端の電気伝導度や硬度、耐摩耗度などの
機械強度を制御することが可能である。電気伝導度を良
くする場合には銅めっきが、硬度を上げる場合にはニッ
ケルめっきが望ましい。
By appropriately selecting the material of the plating film 51 or combining a plurality of types of plating treatments,
It is possible to control mechanical strength such as electrical conductivity, hardness, and abrasion resistance at the tip of the plating film. Copper plating is desirable for improving electrical conductivity, and nickel plating is desirable for increasing hardness.

【0033】さらに、めっき被膜51先端の表面状態を
制御するために薄いめっき被膜を形成することも可能で
ある。表面酸化膜の形成防止のためには、金またはロジ
ウムめっきが望ましい。この金またはロジウムめっき
は、電解めっきでも無電解めっきでも良い。
Further, it is also possible to form a thin plating film in order to control the surface condition of the tip of the plating film 51. Gold or rhodium plating is desirable for preventing the formation of a surface oxide film. This gold or rhodium plating may be electrolytic plating or electroless plating.

【0034】[0034]

【発明の効果】本発明の電気検査治具及びその製造方法
によれば、線状の導電性材料を絶縁材料によって所定形
状の絶縁性固定部を形成し、該絶縁性固定部を所定厚に
切断加工するため、高密度の電極配列パターンを有する
電気検査用治具を再現性良く作製でき、かつ従来よりも
高精細な製品に対応可能な電気検査用治具を提供できる
という優れた実用上の効果を有する。
According to the electric inspection jig and the method of manufacturing the same of the present invention, an insulating fixing portion of a predetermined shape is formed from a linear conductive material by an insulating material, and the insulating fixing portion is formed to a predetermined thickness. Because of the cutting process, it is possible to produce an electrical inspection jig with a high-density electrode array pattern with good reproducibility and to provide an electrical inspection jig that can handle products with higher definition than before. Has the effect of

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は、本発明の請求項1記載の電気検査用
治具の製造方法の概略を示す説明図である。(b)は、
本発明の請求項1記載の電気検査用治具100の構成を
示す斜視図である。(c)は、(b)記載の電気検査用
治具100の斜視図をA−A線で切断した構成断面図で
ある。
FIG. 1 (a) is an explanatory view schematically showing a method for manufacturing an electric inspection jig according to claim 1 of the present invention. (B)
FIG. 1 is a perspective view showing a configuration of an electric inspection jig 100 according to claim 1 of the present invention. (C) is a cross-sectional view of the configuration of the electric inspection jig 100 described in (b), taken along line AA.

【図2】(a)は、本発明の請求項4記載の電気検査用
治具の製造方法の概略を示す説明図である。(b)は、
本発明の請求項2記載の電気検査用治具200の構成を
示す斜視図である。(c)は、(b)記載の電気検査用
治具200の斜視図をA−A線で切断した構成断面図で
ある。
FIG. 2 (a) is an explanatory view schematically showing a method for manufacturing an electrical inspection jig according to claim 4 of the present invention. (B)
FIG. 3 is a perspective view showing a configuration of an electric inspection jig 200 according to claim 2 of the present invention. (C) is a cross-sectional view of the configuration of the electric inspection jig 200 described in (b), which is cut along line AA.

【図3】(a)〜(c)は、本発明の電気検査用治具の
製造に用いる絶縁被覆材で被覆さた導電性線材の各種の
形態を示す構成断面図である。
3 (a) to 3 (c) are cross-sectional views showing various configurations of a conductive wire covered with an insulating coating used for manufacturing the electrical inspection jig of the present invention.

【図4】(a)は、本発明の請求項1記載の電気検査用
治具100の導電性材料11の露出部11aにめっき被
膜51が形成された電気検査用治具100aの斜視図を
示す。(b)は、(a)記載の電気検査用治具100a
の斜視図をA−A線で切断した構成断面図である。
FIG. 4 (a) is a perspective view of an electric inspection jig 100a in which a plating film 51 is formed on an exposed portion 11a of a conductive material 11 of the electric inspection jig 100 according to claim 1 of the present invention. Show. (B) shows the electrical inspection jig 100a described in (a).
FIG. 2 is a cross-sectional view of the configuration taken along the line AA of the perspective view of FIG.

【図5】(a)は、本発明の請求項2記載の電気検査用
治具200の導電性線材212の露出部212aにめっ
き被膜231が形成された電気検査用治具200aの斜
視図を示す。(b)は、(a)記載の電気検査用治具2
00aの斜視図をA−A線で切断した構成断面図であ
る。
FIG. 5 (a) is a perspective view of an electric inspection jig 200a in which a plating film 231 is formed on an exposed portion 212a of a conductive wire 212 of the electric inspection jig 200 according to claim 2 of the present invention. Show. (B) is an electric inspection jig 2 described in (a).
FIG. 2 is a configuration sectional view of a perspective view taken along line AA of the perspective view of 00a.

【符号の説明】[Explanation of symbols]

11……導電性材料 11a……導電性材料の露出部 21a、21b……保持板 22……貫通孔 23……切断線 31……固定治具 41……絶縁性固定部 41a……絶縁基材 51、231……めっき被膜 100、200……電気検査用治具 100a、200a……めっき被膜が形成された電気検
査用治具 210、230、240……被覆導電性線材 211、231、241……絶縁被覆材 212……導電性線材 212a……導電性線材の露出部 220……絶縁性固定部 221……絶縁基材
11: conductive material 11a: exposed portion of conductive material 21a, 21b: holding plate 22: through hole 23: cutting line 31: fixing jig 41: insulating fixing portion 41a: insulating base Material 51, 231 Plating film 100, 200 ... Electric inspection jig 100a, 200a ... Electric inspection jig 210, 230, 240 with plating film formed ... Conducting conductive wire 211, 231, 241 ...... Insulating coating material 212 ... Conductive wire 212a ... Exposed portion of conductive wire 220 ... Insulating fixing portion 221 ... Insulating base material

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G003 AA07 AG03 AG08 AG12 AH05 2G011 AA02 AA10 AA15 AA16 AA17 AB06 AC14 AD01 AE01 AF06 2G014 AA01 AB51 AB59 AC10  ──────────────────────────────────────────────────の Continued on the front page F term (reference) 2G003 AA07 AG03 AG08 AG12 AH05 2G011 AA02 AA10 AA15 AA16 AA17 AB06 AC14 AD01 AE01 AF06 2G014 AA01 AB51 AB59 AC10

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】配線基板の電気的不良の有無を検査する電
気検査用治具であって、所定の位置に配置された複数の
線状の導電性材料の間が、絶縁材料によって絶縁されて
絶縁基材が形成されており、絶縁基材の一方の面は、前
記導電性材料の長さ方向の垂直面で切断された導電性材
料の露出部が形成されており、他方の面は、前記導電性
材料にて引き出し線が形成されていることを特徴とする
電気検査用治具。
An electric inspection jig for inspecting an electric failure of a wiring board, wherein a plurality of linear conductive materials arranged at predetermined positions are insulated by an insulating material. An insulating base material is formed, and one surface of the insulating base material is formed with an exposed portion of the conductive material cut at a vertical surface in a longitudinal direction of the conductive material, and the other surface is An electrical inspection jig, wherein a lead wire is formed of the conductive material.
【請求項2】前記絶縁基材の他方の面に形成されている
導電性材料の一部が被覆材で覆われていることを特徴と
する請求項1記載の電気検査用治具。
2. The electrical inspection jig according to claim 1, wherein a part of the conductive material formed on the other surface of the insulating base is covered with a covering material.
【請求項3】前記絶縁基材の一方の面の導電性材料の露
出部にめっきが施されていることを特徴とする請求項1
または請求項2記載の電気検査用治具。
3. The plating method according to claim 1, wherein an exposed portion of the conductive material on one surface of the insulating base is plated.
Alternatively, the electrical inspection jig according to claim 2.
【請求項4】所定の位置に配置された複数の線状の導電
性材料の一部を絶縁材料によって固定して絶縁性固定部
を形成し、その絶縁性固定部の一方の面を前記導電性材
料の長さ方向の垂直面で切断し、前記絶縁基材及び前記
導電性材料の露出部を形成することを特徴とする電気検
査用治具の製造方法。
4. An insulating fixing part is formed by fixing a part of a plurality of linear conductive materials arranged at predetermined positions with an insulating material, and one surface of the insulating fixing part is connected to the conductive fixing part. A method for manufacturing an electrical inspection jig, comprising cutting an insulating material and an exposed portion of the conductive material by cutting the insulating material along a vertical surface in a longitudinal direction of the conductive material.
【請求項5】再溶融可能な被覆材で被覆された多数の導
電性材料を束ねた後、その一部の被覆材を溶融し、硬化
させることによって絶縁性固定部を形成して前記導電性
材料を相互に固定した後、その絶縁性固定部の一方の面
を前記導電性材料の長さ方向の垂直面で切断し、前記絶
縁基材及び前記導電性材料の露出部を形成することを特
徴とする電気検査用治具の製造方法。
5. After bundling a large number of conductive materials coated with a remeltable coating material, a part of the coating material is melted and cured to form an insulating fixing portion to form the conductive material. After the materials are fixed to each other, one surface of the insulating fixing portion is cut along a vertical surface in the longitudinal direction of the conductive material to form an exposed portion of the insulating base material and the conductive material. Characteristic method of manufacturing a jig for electrical inspection.
【請求項6】前記導電性材料の露出部にめっきを施すこ
とを特徴とする請求項4または請求項5記載の電気検査
用治具の製造方法。
6. The method according to claim 4, wherein the exposed portion of the conductive material is plated.
JP2000250756A 2000-08-22 2000-08-22 Electrical inspecting jig and its manufacturing method Pending JP2002062313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000250756A JP2002062313A (en) 2000-08-22 2000-08-22 Electrical inspecting jig and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000250756A JP2002062313A (en) 2000-08-22 2000-08-22 Electrical inspecting jig and its manufacturing method

Publications (1)

Publication Number Publication Date
JP2002062313A true JP2002062313A (en) 2002-02-28

Family

ID=18740277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000250756A Pending JP2002062313A (en) 2000-08-22 2000-08-22 Electrical inspecting jig and its manufacturing method

Country Status (1)

Country Link
JP (1) JP2002062313A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006035856A1 (en) * 2004-09-30 2006-04-06 Jsr Corporation Circuit device inspecting electrode apparatus, method for manufacturing the same and circuit device inspecting apparatus
JP2009524800A (en) * 2006-01-03 2009-07-02 フォームファクター, インコーポレイテッド Probe array structure and manufacturing method of probe array structure
JP2014038057A (en) * 2012-08-20 2014-02-27 Organ Needle Co Ltd Tip shape of probe for charge/discharge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006035856A1 (en) * 2004-09-30 2006-04-06 Jsr Corporation Circuit device inspecting electrode apparatus, method for manufacturing the same and circuit device inspecting apparatus
JP2009524800A (en) * 2006-01-03 2009-07-02 フォームファクター, インコーポレイテッド Probe array structure and manufacturing method of probe array structure
JP2014038057A (en) * 2012-08-20 2014-02-27 Organ Needle Co Ltd Tip shape of probe for charge/discharge

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