JPH0419521U - - Google Patents
Info
- Publication number
- JPH0419521U JPH0419521U JP6037190U JP6037190U JPH0419521U JP H0419521 U JPH0419521 U JP H0419521U JP 6037190 U JP6037190 U JP 6037190U JP 6037190 U JP6037190 U JP 6037190U JP H0419521 U JPH0419521 U JP H0419521U
- Authority
- JP
- Japan
- Prior art keywords
- ejection part
- jetting section
- workpiece
- pressurized gas
- ejection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6037190U JPH0419521U (ko) | 1990-06-07 | 1990-06-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6037190U JPH0419521U (ko) | 1990-06-07 | 1990-06-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0419521U true JPH0419521U (ko) | 1992-02-19 |
Family
ID=31587680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6037190U Pending JPH0419521U (ko) | 1990-06-07 | 1990-06-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0419521U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007238288A (ja) * | 2006-03-09 | 2007-09-20 | Seiko Epson Corp | ワーク搬送装置 |
-
1990
- 1990-06-07 JP JP6037190U patent/JPH0419521U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007238288A (ja) * | 2006-03-09 | 2007-09-20 | Seiko Epson Corp | ワーク搬送装置 |
JP4595841B2 (ja) * | 2006-03-09 | 2010-12-08 | セイコーエプソン株式会社 | ワーク搬送装置 |
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