JPH0418655U - - Google Patents
Info
- Publication number
- JPH0418655U JPH0418655U JP5680190U JP5680190U JPH0418655U JP H0418655 U JPH0418655 U JP H0418655U JP 5680190 U JP5680190 U JP 5680190U JP 5680190 U JP5680190 U JP 5680190U JP H0418655 U JPH0418655 U JP H0418655U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- planetarium
- concave portion
- window
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680190U JPH0418655U (en, 2012) | 1990-05-29 | 1990-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680190U JPH0418655U (en, 2012) | 1990-05-29 | 1990-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418655U true JPH0418655U (en, 2012) | 1992-02-17 |
Family
ID=31580953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5680190U Pending JPH0418655U (en, 2012) | 1990-05-29 | 1990-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418655U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339181A (ja) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | ウエハ保持治具 |
-
1990
- 1990-05-29 JP JP5680190U patent/JPH0418655U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339181A (ja) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | ウエハ保持治具 |