JPH04184094A - Flat circular heat pipe - Google Patents
Flat circular heat pipeInfo
- Publication number
- JPH04184094A JPH04184094A JP2307542A JP30754290A JPH04184094A JP H04184094 A JPH04184094 A JP H04184094A JP 2307542 A JP2307542 A JP 2307542A JP 30754290 A JP30754290 A JP 30754290A JP H04184094 A JPH04184094 A JP H04184094A
- Authority
- JP
- Japan
- Prior art keywords
- heat pipe
- heat
- lid
- groove
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 238000010521 absorption reaction Methods 0.000 claims abstract description 7
- 238000001704 evaporation Methods 0.000 claims abstract description 6
- 239000007788 liquid Substances 0.000 claims abstract description 3
- 230000005855 radiation Effects 0.000 claims abstract 4
- 230000005494 condensation Effects 0.000 claims description 4
- 238000009833 condensation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 241000239290 Araneae Species 0.000 claims description 3
- 230000001154 acute effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011257 definitive treatment Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
【発明の詳細な説明】
ヒートパイプによる半導体素子の冷却の場合、半導体素
子の細密化による発熱量は、高度技術の日進月歩により
高温の熱量が発生する。ところが半導体素子の冷部方法
の決定的処理法がない今日である。素子自体の発熱量よ
り冷却能力が劣るその問題点は(1)素子自体とヒート
パイプの接触面に間層がある。ヒートパイプの熱輸送能
力はあってもその形状に欠点があり、その形状が円柱の
場合は素子との接触面が線であり、ヒートパイプが偏平
であっても、完全な偏平でなく湾曲面、凹凸面等で完全
な接触が冨めず熱輸送損失を招く点が指摘できる。(2
)そのヒートパイプによる放熱は、放熱面積を拡大ため
フィンをヒートパイプの凝縮側に装着し放熱を計る。そ
のフィンの装着法には圧入、溶剤による接着とがあり、
双方とも接触部による熱伝達損失が伴うものである。圧
入には接触面に空間ができ、ヒートパイプとフィンとの
伝熱間に伝熱損失が起る。溶剤による接着は、接着面に
溶剤があるため熱伝達損失をともなうものである。DETAILED DESCRIPTION OF THE INVENTION In the case of cooling a semiconductor element using a heat pipe, the amount of heat generated due to the miniaturization of the semiconductor element is increased due to the rapid progress of advanced technology. However, there is currently no definitive treatment method for cold parts of semiconductor devices. The problem is that the cooling capacity is inferior to the amount of heat generated by the element itself. (1) There is an interlayer on the contact surface between the element itself and the heat pipe. Although heat pipes have heat transport ability, their shape has drawbacks; if the shape is cylindrical, the contact surface with the element is a line, and even if the heat pipe is flat, it is not completely flat but a curved surface. It can be pointed out that complete contact cannot be achieved due to uneven surfaces, etc., resulting in heat transport loss. (2
) Heat dissipation by the heat pipe is measured by attaching fins to the condensing side of the heat pipe to expand the heat dissipation area. There are two ways to attach the fins: press-fitting and adhesive using solvent.
Both methods involve heat transfer loss due to contact. Press-fitting creates a space at the contact surface, which causes heat transfer loss during heat transfer between the heat pipe and the fins. Bonding using a solvent involves heat transfer loss due to the presence of the solvent on the bonding surface.
このような欠点を解決するために、該当の偏平・円形ヒ
ートパイプの発明である。先づ半導体素子とヒートパイ
プの接触面は、完全な偏平であり密着性がよく素子自体
の発熱量を多く吸収することができる。次に放熱処理と
して、フィンはヒートパイプと一体化した余薦で出来て
おり、フィンの圧入、接着の必要性がないため、伝熱損
失防止ができる。又ヒートパイプ密閉管容器内面の凝縮
側の吸収板を併設することで、密閉管内部の熱吸収率を
高めることができ、熱効率を引あげるものである。In order to solve these drawbacks, a corresponding flat and circular heat pipe was invented. First, the contact surface between the semiconductor element and the heat pipe is completely flat, has good adhesion, and can absorb a large amount of heat generated by the element itself. Next, as a heat dissipation treatment, the fins are made of a heat pipe integrated with the heat pipe, and there is no need for press-fitting or gluing the fins, so heat transfer loss can be prevented. In addition, by providing an absorption plate on the condensation side of the inner surface of the sealed heat pipe container, the heat absorption rate inside the sealed tube can be increased, and the thermal efficiency can be increased.
発明した該当の偏平−円形ヒートパイプは、固型で円型
をした底の部分図1に示す、その内面の側面にヒートパ
イプのすなわち蒸発部にV字型のグルーブ構図3に示す
加工を施し、内面の底面部、該当ヒートパイプの蒸発部
区2に示す、クモの巣形又はクロス形に細い■字形のグ
ルー溝加工を設けることで底面部のグルーブとなす。次
は底面部と側面部との曲り角図4に示すに、■字形で深
い溝を設け該当の製品をヒートパイプとして使用する時
、ヒートパイプ取り付け角度が平面、垂直、斜め等の角
度をつけて取り付けた場合でも、図4のV字形深溝の毛
細管圧力により底面部図2のクモの巣状又はクロス状7
字溝に切られた紹いグルーブを伝って、底面部全域に作
動液が行き渡るものである。The invented flat-circular heat pipe has a solid, circular bottom part shown in Figure 1, and the inner side surface of the heat pipe, that is, the evaporation part, has a V-shaped groove as shown in Figure 3. , on the bottom surface of the inner surface, as shown in the evaporation section 2 of the heat pipe concerned, a thin ■-shaped glue groove is provided in the shape of a spider web or cross to form a groove on the bottom surface. Next, the bending angle between the bottom and side parts As shown in Figure 4, a deep ■-shaped groove is provided. When using the product as a heat pipe, the heat pipe can be installed at a flat, vertical, or diagonal angle. Even if it is installed, the bottom surface will have a spider web shape or a cross shape 7 in Figure 2 due to the capillary pressure of the V-shaped deep groove in Figure 4.
The hydraulic fluid flows through the introduction groove cut into a shape and spreads over the entire bottom surface.
以上は函渠底面部と作動液の働きである。The above is the function of the bottom of the box conduit and the hydraulic fluid.
次に図5に示すのは図1の固型に取り付けるフタの部分
となる金属加工品であり、図6に示す円型金属板の内面
部、ヒートパイプ密閉管内部の凝縮部にあたる部分で、
フタの板状に対し直角に羽根状の吸熱板を設け、フタで
ある金属と共金で加工を厖し凝縮部の吸熱面積を大にす
るための金属板の羽根状を併設し、その金属板とフタの
金属との付け根のコーナー部分を、凝縮部の湯液グルー
ブとして使用するものである。Next, Fig. 5 shows the metal work that will be the part of the lid attached to the solid body in Fig. 1, and the inner surface of the circular metal plate shown in Fig. 6, the part corresponding to the condensation part inside the heat pipe sealed tube,
A blade-shaped heat absorbing plate is installed at right angles to the plate shape of the lid, and a blade-shaped metal plate is installed to increase the heat absorption area of the condensation part by processing the same metal as the metal of the lid. The corner of the base of the plate and the metal of the lid is used as the hot liquid groove in the condensing section.
図7に示すフィンは凝縮部で吸熱した熱量を、フタの金
属と同じ金属で加工を篤し、フィンとして使用すること
により次熱能力の増加を計るものである。以上に述べた
図1函渠部品と図5のフタ用の部品とを図8に示す、フ
タ止め段の位置に図5のフタを沈め、その円周を溶着し
減圧の後、作動液を注入のあとヒートパイプとして使用
するものである。The fins shown in FIG. 7 are designed to absorb heat absorbed in the condensing section by processing the same metal as the lid and using the fins to increase the secondary heat capacity. The box conduit parts in Figure 1 and the lid parts in Figure 5 described above are shown in Figure 8.The lid in Figure 5 is submerged in the position of the lid stopper step, the circumference is welded, the pressure is reduced, and the hydraulic fluid is removed. After injection, it is used as a heat pipe.
該当の偏平・円形ヒートパイプを製作の径、半導体の大
きさより少々大きめに、熱伝導のよい金属片を作り1、
銀ペーストを用いて接着しその金属片の側面部より中心
点まで穴をあけ、熱電対を挿入し金属片の平面部の片側
に半導体を接着し、もう一方の平面部に該当のヒートパ
イプを接着して、ヒートパイプの測定篤し次の結果を得
ることができた。但)ボトムヒートでの測定(2)トッ
プヒートでの測定(3)垂直での測定(4)45度に角
度をつけての測定、以上の測定の結果いずれも、−9二
度程度の温度差はあるものの、良好な測定ができた。Make a piece of metal with good thermal conductivity for the diameter of the corresponding flat/circular heat pipe, which is slightly larger than the size of the semiconductor.1.
Glue the metal piece using silver paste, make a hole from the side of the metal piece to the center point, insert the thermocouple, glue the semiconductor to one side of the flat part of the metal piece, and attach the corresponding heat pipe to the other flat part. After adhering, we measured the heat pipe and obtained the following results. However, the results of the above measurements: (2) Measurement at top heat, (3) Vertical measurement, (4) Measurement at an angle of 45 degrees, the temperature is about -9 degrees. Although there were differences, good measurements were made.
第1図 分解図 1@器の函形底面部 2容器内底面部のグルーブ 3容器内側面部のグルーブ 4容器内角の鋭角グルーブ 5容器上面のフタ ロ密閉管内部の吸熱板 7密閉管に付帯する放熱板 t1g2図 ヒートパイプ組立図 特許出厘人 伊藤 さとみ オ l■ #Jノ]Z Figure 1 Exploded view 1@ Box-shaped bottom part of the vessel 2 Groove on the bottom of the container 3Groove on the inner side of the container 4 acute angle grooves inside the container 5 Lid on top of container B Heat absorption plate inside the sealed tube 7 Heat sink attached to sealed tube t1g2 diagram heat pipe assembly diagram Patent agent Satomi Ito o l■ #Jノ]Z
Claims (1)
蒸発部)と図5に示す上面フタの部(凝縮部)から構成
された偏平・円形ヒートパイプである。図1に示す函形
底面部の内面底部全域、図2に示すクモの巣状又はクロ
ス状にV字型溝を設け、その溝をグルーブとして使用す
る(蒸発部)。側面部図3に示す内面の側面部全面にも
V字型の溝を設け側面グルーブとして使用する。次に底
面部と側面部の角図4に示す、鋭角の深溝の加工をする
。 2 上面フタの部図5に示す、単体の素材金属の表面部
に図7に示す一体物でフインを併設し、放熱面積を大に
し、放熱時の金属伝熱損失を最小にして最大の放熱効果
が期待できる。 図5のフタ金属の裏面図6に示す密閉管内部面にも、表
面のフインと同様金属片を併設し、蒸気の吸熱面を大に
して、金属片の付け根のコーナー部を帰液促進を計るグ
ルーブとして使用するものである。[Claims] 1. The relevant heat pipe has a box-shaped bottom portion (
This is a flat, circular heat pipe consisting of an evaporation section) and an upper lid section (condensation section) shown in FIG. A V-shaped groove is provided in the entire inner bottom part of the box-shaped bottom part shown in FIG. 1 in a spider web shape or a cross shape shown in FIG. 2, and the groove is used as a groove (evaporation part). A V-shaped groove is also provided on the entire surface of the side surface of the inner surface shown in FIG. 3, and is used as a side groove. Next, deep grooves with acute angles are machined at the corners of the bottom and side surfaces, as shown in Figure 4. 2 Top Lid Part The surface of the single material metal shown in Figure 5 is provided with integrated fins as shown in Figure 7 to increase the heat radiation area, minimize metal heat transfer loss during heat radiation, and maximize heat radiation. You can expect good results. The inner surface of the sealed tube shown in Figure 6, which shows the back side of the lid metal in Figure 5, is also equipped with a metal piece, similar to the fins on the front side, to increase the heat absorption surface of the steam, and to promote liquid return at the corner of the base of the metal piece. It is used as a measuring groove.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2307542A JPH07104110B2 (en) | 1990-11-13 | 1990-11-13 | Heat dissipation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2307542A JPH07104110B2 (en) | 1990-11-13 | 1990-11-13 | Heat dissipation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04184094A true JPH04184094A (en) | 1992-07-01 |
JPH07104110B2 JPH07104110B2 (en) | 1995-11-13 |
Family
ID=17970351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2307542A Expired - Lifetime JPH07104110B2 (en) | 1990-11-13 | 1990-11-13 | Heat dissipation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07104110B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7480992B2 (en) | 2000-12-22 | 2009-01-27 | Hitachi, Ltd. | Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof |
CN109539846A (en) * | 2018-11-23 | 2019-03-29 | 西安交通大学 | A kind of flat-plate heat pipe with gradient wetting structure |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102869943A (en) * | 2010-05-19 | 2013-01-09 | 日本电气株式会社 | Ebullient cooling device |
JP2013007501A (en) * | 2011-06-22 | 2013-01-10 | Nec Corp | Cooling device |
-
1990
- 1990-11-13 JP JP2307542A patent/JPH07104110B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7480992B2 (en) | 2000-12-22 | 2009-01-27 | Hitachi, Ltd. | Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof |
CN109539846A (en) * | 2018-11-23 | 2019-03-29 | 西安交通大学 | A kind of flat-plate heat pipe with gradient wetting structure |
WO2020103194A1 (en) * | 2018-11-23 | 2020-05-28 | 西安交通大学 | Flat-plate heat pipe with gradient wetting structure |
Also Published As
Publication number | Publication date |
---|---|
JPH07104110B2 (en) | 1995-11-13 |
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