JPH0418352U

JPH0418352U -

Info

Publication number: JPH0418352U
Application number: JP5807790U
Authority: JP
Priority date: 1990-06-01
Filing date: 1990-06-01
Publication date: 1992-02-17

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す概略図、第２
図は同オゾン計の除湿器を示す拡大断面図、第３
図はオゾン分解器のオゾン破過率の経時変化を示
すグラフ、第４図は試料ガスの湿度とオゾン分解
器のオゾン分解率との関係を示すグラフ、第５図
はオゾン分解器の温度とオゾン破過率との関係を
示すグラフ、第６図は従来の紫外線吸収式オゾン
計を示す概略図である。５……オゾン分解器、６……紫外線吸収セル、
１４……除湿器、２１……チユーブ。 Fig. 1 is a schematic diagram showing an embodiment of the present invention;
The figure is an enlarged sectional view showing the dehumidifier of the same ozone meter.
The figure is a graph showing the change over time in the ozone breakthrough rate of the ozone decomposer, Figure 4 is a graph showing the relationship between the humidity of the sample gas and the ozone decomposition rate of the ozone decomposer, and Figure 5 is a graph showing the relationship between the temperature of the ozone decomposer and the ozone decomposition rate. A graph showing the relationship with the ozone breakthrough rate, and FIG. 6 is a schematic diagram showing a conventional ultraviolet absorption type ozone meter. 5... Ozone decomposer, 6... Ultraviolet absorption cell,
14...Dehumidifier, 21...Tube.

Claims

[Scope of Claim for Utility Model Registration] 1. An ozone decomposer that is equipped with an ozone decomposer using a metal oxide ozone decomposer and an ultraviolet absorbance measuring section, and that measures the ultraviolet absorbance of a sample gas that has passed through the ozone decomposer and the ozone decomposer. In the ultraviolet absorption type ozone meter, the ultraviolet absorbance of the sample gas that does not pass through is measured by the ultraviolet absorbance measurement section, and the ozone concentration in the sample gas is determined from the difference between the two ultraviolet absorbances. An ultraviolet absorption type ozone meter characterized in that a dehumidifier for the sample gas is arranged upstream of the measurement section, and the sample gas is dehumidified by the dehumidifier and then flows to the ozone decomposer and the ultraviolet absorbance measurement section. . 2. The dehumidifier has a sample gas passage partitioned by a moisture permeable membrane made of a material that does not substantially decompose ozone, and by providing a pressure difference between the inside and outside of the moisture permeable membrane, the sample gas passage 2. The ozone meter according to claim 1, wherein moisture in the sample gas flowing therethrough is diffused to the outside through a moisture permeable membrane.