JPH04182658A - Photosensitive drum - Google Patents
Photosensitive drumInfo
- Publication number
- JPH04182658A JPH04182658A JP31229790A JP31229790A JPH04182658A JP H04182658 A JPH04182658 A JP H04182658A JP 31229790 A JP31229790 A JP 31229790A JP 31229790 A JP31229790 A JP 31229790A JP H04182658 A JPH04182658 A JP H04182658A
- Authority
- JP
- Japan
- Prior art keywords
- film
- diamond
- photosensitive drum
- mum
- several
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 9
- 239000010432 diamond Substances 0.000 claims abstract description 9
- 239000010408 film Substances 0.000 abstract description 29
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052711 selenium Inorganic materials 0.000 abstract description 3
- 239000011669 selenium Substances 0.000 abstract description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 2
- 239000002356 single layer Substances 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は複写機、レーザープリンター及びファクシミリ
等に用いられる感光ドラムの表面に被覆される半導体膜
材料に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor film material coated on the surface of a photosensitive drum used in copying machines, laser printers, facsimile machines, and the like.
［従来の技術］
従来、感光ドラム表面にはセレン膜、アモルファスシリ
コン膜、又はアモルファス炭化硅素膜が形成されて成る
のが通例であった。[Prior Art] Conventionally, a selenium film, an amorphous silicon film, or an amorphous silicon carbide film has usually been formed on the surface of a photosensitive drum.
［発明が解決しようとする課題］
しかし、上記従来技術によると感光ドラムの耐摩耗性が
充分では無いと言う課題があった・本発明はかかる従来
技術の課題を解決し、耐摩耗性の良好な感光ドラムを提
供することを目的とする。[Problems to be Solved by the Invention] However, according to the above-mentioned prior art, there was a problem that the abrasion resistance of the photosensitive drum was not sufficient.The present invention solves the problem of the prior art and provides a photosensitive drum with good abrasion resistance. The purpose of the present invention is to provide a photosensitive drum.
［課題を解決する為の手段］
上記課題を解決し、上記目的を達成する為に本発明は感
光ドラムに関し、ドラム表面にダイアモ ゛ンド膜又は
ダイアモンド様炭素膜を形成する手段を取ることを基本
とする。[Means for Solving the Problems] In order to solve the above-mentioned problems and achieve the above-mentioned objects, the present invention relates to a photosensitive drum, and basically takes a means of forming a diamond film or a diamond-like carbon film on the drum surface. shall be.
［実施例］ 以下、実施例により本発明を詳述する。[Example] Hereinafter, the present invention will be explained in detail with reference to Examples.
いま、アルミ合金等から成るドラム表面にＣＶＤ法、Ｐ
ｖ１ＯＣＶＤ法あるいはスパッタ法等により数ミクロン
厚さのダイアモンド膜あるいはダイアモンド様炭素膜を
単層あるいは多層にて形成すると、ダイアモンド膜やダ
イアモンド様炭素膜は半導体である為に、感光ドラムと
しての作用があると共に薄い膜でも耐摩耗性の良好な感
光ドラムを作製することができる。Currently, CVD method, P
When a diamond film or diamond-like carbon film with a thickness of several microns is formed in a single layer or in multiple layers by the v1 OCVD method or sputtering method, it acts as a photosensitive drum because the diamond film or diamond-like carbon film is a semiconductor. At the same time, a photosensitive drum with good wear resistance can be produced even with a thin film.
尚、従来の数十ミクロンから数百ミクロン厚さのセレン
膜、炭化硅素膜あるいはシリコン膜による感光ドラムの
表面に数ミクロン厚さのダイアモンド膜やダイアモンド
様炭素膜あるいはそれらの多層膜を形成しても良い事は
言うまでもない。In addition, a diamond film, a diamond-like carbon film, or a multilayer film thereof is formed on the surface of the photosensitive drum, which is made of a selenium film, silicon carbide film, or silicon film with a thickness of several tens of microns to several hundred microns. Needless to say, it's a good thing.
［発明の効果］
本発明により耐摩耗性の良好な感光ドラムが提供できる
効果があると共に、薄い半導体膜でも良い感光ドラムを
提供することが出来る効果もある。[Effects of the Invention] The present invention has the advantage of being able to provide a photosensitive drum with good wear resistance, and also has the effect of being able to provide a good photosensitive drum even with a thin semiconductor film.
以 上 出願人 セイコーエプソン株式会社 代理人弁理士 鈴木喜三部（他１名）that's all Applicant: Seiko Epson Corporation Representative Patent Attorney Kizobe Suzuki (1 other person)
Claims (1)
ド様炭素膜が形成されて成る事を特徴とする感光ドラム
。A photosensitive drum characterized in that the drum is formed with at least a diamond film or a diamond-like carbon film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31229790A JPH04182658A (en) | 1990-11-17 | 1990-11-17 | Photosensitive drum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31229790A JPH04182658A (en) | 1990-11-17 | 1990-11-17 | Photosensitive drum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04182658A true JPH04182658A (en) | 1992-06-30 |
Family
ID=18027557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31229790A Pending JPH04182658A (en) | 1990-11-17 | 1990-11-17 | Photosensitive drum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04182658A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735818A (en) * | 2019-03-01 | 2019-05-10 | 深圳南科超膜材料技术有限公司 | A kind of toner cartridge preparation method of combination high-power impulse magnetron sputtering technology |
-
1990
- 1990-11-17 JP JP31229790A patent/JPH04182658A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735818A (en) * | 2019-03-01 | 2019-05-10 | 深圳南科超膜材料技术有限公司 | A kind of toner cartridge preparation method of combination high-power impulse magnetron sputtering technology |
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