JPH04179139A - Reliability life testing device - Google Patents

Abstract

PURPOSE:To enhance the accuracy of a reliability life test by a method wherein the title device is provided with an index rotating shaft, whose cylindrical part is mounted radially with a plurality of circuit boards with samples charged thereon at a prescribed angle, and heat insulating shutter mechanisms for making shutters, which partition a region including one circuit board or more in cooperation with the surface of a door, open and shut. CONSTITUTION:A door 9 is opened and samples 5 are mounted on all of circuit boards 4 which are mounted on an index rotating shaft 6 via sockets 3. Then, the door 9 is shut and a test is started. Then, the shaft 6 is rotated so that the circuit board 4 mounted with the samples 5 finished a prescribed testing time comes to the position to face the door 9. Then, when the board 4 is positioned, heat insulating shutter mechanisms 8 are actuated and a chamber in a partition range 7a, which is partitioned by two shutters and the door 9, is formed. Then, the door 9 is opened, the outside air is introduced in the chamber and the samples 5 are cooled. Then, after the samples are cooled, the input of electricity in the samples 5 is stopped and the samples 5 are detached from the board 4. Thereby, a higher-precision and efficient device can be obtained without needing the time to be needed for an interruption.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a special reliability testing device for semiconductor devices, and in particular to a structure of an electrical input supply socket for a sample in a thermostatic chamber in the device and a cooling chamber structure for a sample after testing. Regarding.

[Conventional technology]

Fig. 3 is a cross-sectional view of a constant temperature chamber in a reliability life test apparatus, which is an example of the conventional reliability life test apparatus. a test circuit board 4 for mounting the sample #I5 inside the thermostatic oven 1; a socket 3 for attaching the circuit board 4 to the inner wall of the thermostatic oven 1 and for electrical input; It has a heating element unit 1-2 that heats the temperature inside the constant temperature bath at a constant temperature.

When testing a semiconductor device using this reliability life test equipment, the semiconductor device as a sample is stored in a constant temperature 'N11, the test is carried out, and after the test time is over,
The power was turned off and the chamber was cooled until the temperature inside the chamber reached the room temperature of the installation chamber.Then, the electrical input supply to the sample was stopped and the sample was taken out.

Furthermore, the reason why the electrical input to the sample is stopped only after the temperature inside the chamber has been cooled is to prevent mobile ions, etc. inside the sample collected during the test from being diffused by heat.

FIG. 4 is a sectional view of a constant temperature chamber in a reliability life test apparatus showing another example of the conventional apparatus. In addition, other reliability life test devices, for example, as shown in FIG. 4, have a method in which a socket 3 for supplying electrical input for a sample is attached to a movable panel 12 and inserted into a constant temperature chamber 1 from the outside. The place for devices like Iruni is the connector for the electrical supply for the panel after the test is completed]
Electrical input was supplied from 3, and the panel 12 was removed from the panel 12, installed exclusively for cooling, and placed on a panel mount for cooling.

1. Problem to be solved by the invention] In the former case, the conventional reliability life test device mentioned in
It is necessary to cool the entire thermostatic chamber when taking out the sample after the test period. For example, if there are samples that have different test end times, they will be cooled all at once, so the test will have to be temporarily interrupted, resulting in a loss of time.

As another example, if a sample that has been tested for a long time and a sample that has been tested for a short time are tested together, the long-time test sample may be subjected to multiple thermal changes that are different from the original test results. Therefore, there is a problem with the accuracy of the test.

In addition, in the latter case, the panel must be inserted and removed for each test, which causes the problem of unstable temperature in the thermostatic chamber.Furthermore, it requires a dedicated cooling stand that is only used when cooling the panel. There were also some problems.

It is an object of the present invention to provide a reliable life test device that eliminates such problems.

[Means to solve the problem]

The reliability life test device of the present invention includes a constant temperature chamber having a door on at least one side, and an indexing rotating shaft placed inside the constant temperature chamber and having a plurality of circuit boards for mounting samples attached at a predetermined angle on the outer periphery. and a heat insulating shutter mechanism that opens and closes a shutter that is attached to the inner wall of the thermostatic chamber with the door in between and partitions into a chamber containing at least one circuit board.

"Example〕 Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a cross-sectional view of a constant temperature chamber in a reliability life test apparatus showing an embodiment of the present invention. This reliability9. ? As shown in the figure, the life test apparatus includes a plurality of circuit boards 4 for mounting samples radially and at equal angles around the index rotary shaft 6 disposed in a thermostatic chamber 1, and An indexing mechanism (not shown) that indexes the rotary shaft 6 at equal angles and rotates it twice is attached to the inner wall of the thermostatic chamber 1 with the door in between (=I) and a complete range including one circuit board 4. It has a heat insulating shutter mechanism that opens and closes a shutter that isolates heat from 7a.The rest is the same as the conventional one.

Next, the operation of this reliability life test device will be explained. First, the door 9 is opened, and the test pieces F:+5 are attached to all of the circuit boards 4 that are attached to the index rotation shaft 6 through the sockets 1-3. Next, door 9 is closed and the test is started. Next, the circuit board 4 to which the sample 5 after the predetermined test time is attached is mounted.
The index rotation shaft 6 is rotated so that it comes to a position facing the door 9. Next, once the circuit board 4 is positioned, the heat insulating shutter device [8 is operated to form a chamber with a partition area 7a partitioned by two shutters and a door 9. Next, the door 9 is opened, outside air is introduced, and the sample 5 is cooled. Next, after the sample 5 has cooled, the electrical input to the sample 5 is stopped, and the sample 5 is removed from the circuit board 4.

In addition, if there is a new sample to start testing, sample 5
is mounted on the circuit board 4 and installed in the open electrical input supply socket 3. After starting electrical input to the sample again, inject an atmosphere with the same temperature as the temperature inside the constant temperature chamber created by the constant temperature atmosphere generator to make the temperature of the cooling chamber the same as the temperature of the constant temperature chamber. Thereafter, the heat insulating shutter mechanism 8 is operated and the shutter is pulled back to return to the original constant temperature bath. Other samples that are undergoing this retest will not be subject to changes in test conditions and will be able to obtain stable test stress.

FIG. 2 is a sectional view of a constant temperature chamber in a reliability life test apparatus showing another embodiment of the present invention. As shown in the figure, this 6-reliability life test device has an additional heat insulating shutter mechanism 8 that forms not only the end range 7a but also the end range 7b.

This determines the amount of sample to be taken out and the sample IF to be put in.
It has the feature that the size of the partition range to be cooled can be varied by changing the amount of l. In addition, in order to cool the large-capacity tithing chamber, a cold air supply section 10 is also installed to cool the sample.
It also has a function that quickly cools the temperature of the partitioned room to room temperature.

Furthermore, a hot air supply section 11 is provided in order to quickly bring the temperature of the thermostatic chamber up after reloading the sample.

The rest is the same as the previous embodiment.

This embodiment has the advantage of being more versatile than the previous embodiment by providing more shutter mechanisms. Furthermore, there is the advantage that testing time can be further saved.

〔Effect of the invention〕

As described above, in the present invention, a plurality of circuit boards on which a sample is loaded cooperates with an index rotation shaft attached to the cylindrical part radially at a predetermined angle and a door surface, and at least one circuit By providing an insulating shutter mechanism that opens and closes the shutter that partitions the area containing the substrate, samples stored in the thermostatic chamber can be taken out and replenished at will without maintaining the temperature inside the chamber. This has the effect that the life test equipment can obtain more efficient reliability without requiring much time.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a constant temperature chamber in a reliability life test site showing one embodiment of the present invention, and FIG. 2 is a cross-sectional view of a constant temperature chamber in a reliability life test apparatus showing another embodiment of the present invention. , FIG. 3, and FIG. 4 are cross-sectional views of a constant temperature chamber in an example of a conventional reliability life test device. 1... Constant temperature chamber, 2... Heating element unit I~, 3...
Socket, 4... Circuit board, 5... Sample, 6... Index rotation axis, 7a, 7b... Partition range, 8... Heat insulation shutter mechanism, 9... Door, 10... Cold air supply section ,1
]...Hot air supply unit, ]2...Panel, 13.Connector. One-

Claims (1)

[Claims] a constant temperature chamber having a door on at least one side; an indexing rotating shaft disposed within the constant temperature chamber and having a plurality of circuit boards for mounting samples attached at a predetermined angle on the outer periphery thereof; and an inner wall of the constant temperature chamber with the door in between. 1. A reliability lifespan test apparatus comprising: a heat insulating shutter mechanism that opens and closes a shutter that is attached to a chamber and partitions into a chamber containing at least one of the circuit boards.