JPH04178573A - Measuring device for semiconductor integrated circuit - Google Patents

Abstract

PURPOSE:To perform correct measurement corrected with the temperature of a measurement section even when the temperature of the measurement section is not kept constant by detecting the temperature of the measurement section of a handler, and converting the data into the measured standard value or measured data corresponding to the temperature. CONSTITUTION:A temperature detection section 2 is provided on the measurement section 1 of a handler 10 connected to an IC to be measured, the temperature Ta of the measurement section 1 is detected, and the temperature information ST is sent to a tester 20. The tester 20 converts the sent temperature information with a converting circuit 3 and transfers it to a condition generating circuit 4 determining the correction condition of measurement. The circuit 4 corrects it to the measured standard value SC according to the temperature coefficient equation determined by the temperature dependent characteristic in advance and sends it to a calculating circuit 5 for comparison with the measured data SM. The circuit 5 outputs the comparison result SO of the data SM and the standard value SC.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a measuring device for semiconductor integrated circuits.

[Conventional technology]

Conventionally, this type of semiconductor integrated circuit measuring equipment consists of a measuring device (hereinafter referred to as a tester) having an electrical measuring circuit and an automatic supply/storage device (hereinafter referred to as a handler) that handles and blows semiconductor integrated circuits (hereinafter referred to as IC). It was possible to measure the electrical characteristics of the IC by electrically connecting the IC to the IC.

[Problem to be solved by the invention]

In the conventional IC measuring device described above, the temperature of the handler measurement section is affected by the indoor air conditioning around the handler, and due to its structure, the temperature of the handler measurement section is affected by the structure of the handler, which prevents wind flow in the measurement section. When the air conditioner was in the room, it could not be controlled by indoor air conditioning alone.

In addition, it costs a lot of money to bring the measuring section of the handler to a constant temperature state, which creates a big problem when adjusting the measuring section and troubleshooting troubles.

This makes it possible to improve the performance of the in-vehicle air conditioning in the case of measurement items where the temperature of the measuring section has a significant effect on the measurement results, such as the hold characteristics of DRAM.

There was a drawback that the yield of good ICs was affected by the structure of the handler.

[Means to solve the problem]

The semiconductor integrated circuit measuring device of the present invention includes a handler having a temperature detection section that detects the temperature of a measurement section that is connected to a semiconductor integrated circuit under test to measure electrical characteristics and outputs temperature data; The tester includes a conversion circuit that receives input and outputs a conversion signal, and a tester that has an arithmetic circuit that inputs, compares and calculates the measurement data of the measuring section and standard values.

〔Example〕

FIG. 1 is a block diagram of a first embodiment of the present invention.

By providing the temperature detection section 2 in the measurement section 1 of the handler 10 connected to the IC to be measured 30, the temperature T of the measurement section 1 is detected and temperature information s, r is sent to the tester 20.

In the tester 20, the sent temperature information ST is converted by a conversion circuit 3 and transferred to a condition generation circuit 4 that determines measurement correction conditions.

The condition generation circuit 4 corrects the measurement standard value Sc to a measurement standard value Sc according to a temperature coefficient formula determined in advance based on temperature dependence characteristics, and sends it to the arithmetic circuit 5 where it is compared with the measurement data SM.

Therefore, the arithmetic circuit 5 calculates the comparison result S between the measurement data SM and the standard value Sc. Output.

FIG. 2 is a block diagram of a second embodiment of the invention.

According to the temperature information T of the temperature detection unit 2 of the handler 10, the measurement data SM of the measurement unit 1 is converted to the conversion circuit 31 of the tester 20°.
It is corrected and sent to the calculation circuit 5, where it is compared and calculated together with the standard value Scs of the condition generation circuit 4a, and the result So is output.

〔Effect of the invention〕

As explained above, the present invention detects the temperature of the measurement part of the handler and converts it into a measurement standard value or measurement data that corresponds to the temperature. turbulence, interruption of air-conditioned air,
Even if the temperature of the measurement part cannot be maintained at a constant temperature due to heat generation from surrounding equipment or parts, correct measurement can be performed by correcting the temperature of the measurement part.

[Brief explanation of drawings]

FIG. 1 is a block diagram of a first embodiment of the invention, and FIG. 2 is a block diagram of a second embodiment of the invention. ]... Measuring unit, 2... Temperature detection unit, 3.3a... Conversion circuit, 4.48... Condition generation circuit, 5... Arithmetic circuit, 10... Handler, 20, 20. ...Tester, 3
o... IC0 to be measured Agent Patent attorney Shinto Hara 1 Guan Yu 2 Figure

Claims (1)

[Claims] a handler having a temperature detection section that detects the temperature of a measurement section connected to a semiconductor integrated circuit under test to measure electrical characteristics and outputs temperature data; a conversion circuit that inputs the temperature data and outputs a conversion signal; A tester for measuring a semiconductor integrated circuit, comprising: a tester having an arithmetic circuit that inputs, compares and calculates the measurement data of the measurement section and standard values.