JPH04176529A - Guide device for movement - Google Patents

Abstract

PURPOSE:To prevent static accuracy from lowering and a dynamic posture accuracy from deteriorating, by guiding the vertical direction of a Y stage by a surface plate, the lateral direction by the fixed guide arranged on the surface plate, and making the guide in the vertical direction of an X stage by the surface plate and the guide in the lateral direction as one face of the Y stage side face. CONSTITUTION:A surface plate is a reference face at its upper face and a fixed guide 2 becomes reference at its side face. A Y stage 4 is floated from a surface plate 1 by supplying air to a static pressure air bearing, and moved along the fixed guide 2 by two actuators 7a, 7b. Also, an X stage 5 is floated from the surface plate 1 by supplying air to the static pressure air bearing, and moved in an X direction by a driving actuator 8 with the one face of the side face of the Y stage 4 as the guide. Thus, both of the guides in the vertical direction of the X stage and Y stage are executed by the surface plate, no moving load is generated on the stage of the counter part side even in case of the X or Y stage being moved, and the static posture accuracy can be held well.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention is applicable to semiconductor exposure equipment, precision measuring instruments, precision processing machines, etc. for high-speed movement, P! The present invention relates to a movement guide device that repeatedly performs close positioning.

[Prior Art] FIG. 6 shows a conventional movement guide device. In the same figure, 1
is a surface plate, and Y as a moving mechanism in the Y direction is mounted on the surface plate.
Equipped with stage 4. Further, an X stage 5 is mounted on the Y stage 4 as a moving mechanism in the X direction.

[Problem to be solved by the invention] However, in the above conventional example, the device has a stacked structure,
That is, since the surface plate 1, Y stage 4, and X stage 5 are stacked on top of each other, the height increases.

Furthermore, when the X stage 5 moves, an unbalanced load is generated on the Y stage 4, causing the Y stage 4 to deform as shown in FIG.
The static accuracy of stage 5 is degraded. Furthermore, assuming that the X, Y stage is a rigid body, the dynamic movement of the X, Y, and stage has six degrees of freedom as shown in Figure 8, and all six degrees of freedom of the X, Y stage are rapidly generated. Because of this, there were drawbacks such as a decrease in dynamic posture accuracy.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and an object of the present invention is to provide a movement guide device that does not have a high structure and prevents deterioration of static accuracy and dynamic posture accuracy due to unbalanced loads during movement. shall be.

[Means and effects for solving the problem] In order to achieve the above object, in the present invention, one fixed guide is arranged on the surface plate, and a static air bearing is used to connect the fixed guide and the surface plate. A first movable body is supported so as to move parallel to the fixed guide, and a static air bearing is used to connect the second movable body to the first movable body between the first movable body and the surface plate. In the movement guide mechanism, the first movable body is guided in the vertical direction by the surface plate, the lateral direction is guided by the fixed guide, and the second movable body is guided in the vertical direction by the fixed guide. The vertical guide is a surface plate, and the lateral guide is a side surface of the first movable body.

In the above configuration, since both the X and X stages move based on the surface plate and the fixed guide, no moving load is generated and the static posture accuracy does not change.

In addition, pitching of the X stage and vibration in the horizontal and vertical directions are not achieved at all.

The rolling of the X-stage is transmitted through the X-stage only through the gap in the hydrostatic air bearing. As a result, vibrations are suppressed as much as possible, and dynamic posture can be maintained with high precision.

In addition, the static pressure air bearings in the vertical and lateral directions of the X stage, and the vertical and lateral inner metal parts of the has been established. This prevents the stage from coming off the guide, and ensures the rigidity of the static air bearing due to the preload.Also, the stage will not fall off regardless of the direction in which the stage is installed, even if it is installed vertically, horizontally, or upside down.

[Embodiment] An embodiment of the present invention is shown in Figs. 1 to 5. Fig. 1 is a perspective view, Fig. 2 is a sectional view taken along line AA' in Fig. 1, and Fig. 3 is a
A view from arrow B in the figure, Figure 4 is a back view, and Figure 5 is a view D- in Figure 2.
It is a D' sectional view.

1 is a surface plate, the upper surface of which serves as a reference surface.

2 is a fixed guide, and its side serves as a reference. 4 is an X stage as a moving body, and 5 is an X stage as a moving body. 6 (6a, 6b.

6c, 6d) are porous hydrostatic air bearings, 6a is X
Vertical direction of stage, 6b is horizontal direction of X stage, 6C
6d guides the X stage in the vertical direction, and 6d guides the X stage in the lateral direction.

7 (7a, 7b) is a drive actuator for the X stage, and 8 is a drive actuator for the X stage, for example, a near motor, a hydraulic DC motor, etc. are used in this embodiment. 9 (9a.

9b, 9c, 9d) are static air bearings 6 (68-6d)
It is a preload mechanism of
It is described in No. 35.

In this embodiment, the X stage 4 includes a static air bearing 6a,
By supplying air to 6b, it floats above the surface plate 1 and moves along the fixed guide 2 by two actuators 7a and 7b.

In addition, the X stage 5 is floated above the surface plate 1 like the X stage 4 by supplying air to the static pressure air bearings 6c and 6d.
The X stage 4 is moved in the X direction by a drive actuator 8 using one side surface as a guide.

Further, 9a is a lateral preload mechanism for the X stage, which prevents the X stage from coming off the guide and also guarantees the rigidity of the hydrostatic air bearing 6a. 9b is a vertical preload mechanism for the X stage, which guarantees the vertical rigidity of the X stage. 9c and 9d are preload mechanisms of the X stage, respectively, and have the same function as the preload of the X stage.

In the above configuration, both the X stage and the vertical direction of the X stage are guided from the surface plate, and even if the X stage or the X stage moves, no moving load is generated on the other stage, and static posture accuracy is maintained. is kept in good condition.

The rapid build-up of vibrations in the vertical direction (X direction in Figure 1), vertical direction (Z direction in Figure 1) and pitching of the X stage have been completely eliminated.

In addition, rolling vibrations were transmitted to the X stage through the gap between the static air bearings to minimize the rapid build-up of vibrations.

It becomes possible to construct the surface plate 1, the fixed guide 2, the Y stage 4, and the X stage 5 from different types of members having different coefficients of thermal expansion.

Compared to the conventional movement guide device shown in FIG. 6, the X stage is made to overhang the fixed guide 2 or the Y stage driving actuators 7a, 7b, so that the areas occupied by the surface plate movable bodies are made approximately the same. Furthermore, by applying sufficient force to the preload magnet, the stage can be installed in any direction.

[Effects of the Invention] As explained above, according to the present invention, a single fixed guide is arranged on the surface plate, the vertical direction of the Y stage is guided by the surface plate, the horizontal direction is guided by the fixed guide, and the X stage By using the surface plate as the vertical guide and the side surface of the Y stage as the lateral guide, the moving load on the Y stage is eliminated, and the
, the rapid generation of vibration between the Y stages has been completely eliminated in the horizontal direction (X direction), vertical direction, and pitching of the X stage (rolling of the Y stage). Furthermore, the rolling of the X stage (pitching of the Y stage) is transmitted only through the gap between the static pressure air bearings, which minimizes the rapid buildup of vibrations and enables highly accurate positioning.

Furthermore, it becomes possible to create a highly accurate moving guide device that does not cause differences in characteristics due to thermal expansion.

[Brief explanation of drawings]

FIG. 1 is a perspective view of the embodiment of the present invention, FIG. 2 is a sectional view taken along line AA' of the embodiment of FIG. 1, FIG. 3 is a view taken along arrow B of the embodiment of FIG. 1, and FIG. is a rear view of the embodiment shown in Fig. 1, Fig. 5 is a sectional view taken along line DD' in Fig. 2, Fig. 6 is a perspective view of the conventional device, and Figs. FIG. 8 is an explanatory diagram of the stage movement direction. 1: Base, 2 Fixed guide, 4 Y stage, 5, X stage, 6: Hydrostatic air bearing, 7: Linear motor for driving Y stage, 8: Linear motor for driving x stage, 9, Preload mechanism for static pressure bearing It is. Patent Applicant Canon Co., Ltd. Agent Patent Attorney Tetsuya Ito Agent Patent Attorney Tatsuo Ito

Claims (2)

[Claims] (1) A surface plate having a guide reference surface, a fixed guide provided on the surface plate, a first movable body that moves on the surface plate along the fixed guide, and a first movable body that moves on the surface plate along the fixed guide. the fixed guide and a second movable body that moves in a direction perpendicular to the base plate; A movement guide device characterized in that it has a separate configuration so as not to be attached. (2) A static pressure gas bearing and a restraint means are provided between the first movable body and the fixed guide and the surface plate, and the second
2. The movement guide device according to claim 1, further comprising a static pressure gas bearing and a restraint means provided between the moving body, one side of the first moving body, and the surface plate.