JP2005302838A - Positioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve stability by suppressing the rolling and pitching during a stage transfer by enhancing the dynamic stiffness of the stage. <P>SOLUTION: The straightness error of the positioning device can be reduced by the actions of tension members 61A and 61B, but, on the other side, the dynamic stiffness of the stage may be lowered. Therefore, a supporting member 63 to which the tension members 61A and 61B are attached is formed in a rectangular frame-like shape and left and right linear guide bearings 31A dn 31B are connected to the member 63 through the supporting member 63. Owing to the supporting member 63, the movement of the linear guide bearings 31A and 31B are interlocked with each other by means of the supporting member 63. When the bearings 31A and 31B are slid, the bearings 31A and 31B individually generate rolling and pitching. However, the movement of the rolling and pitching can be reduced by suppressing the rolling and pitching by means of the supporting member 63. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a semiconductor exposure apparatus, an assembly / inspection apparatus, a precision machine tool and the like for forming a pattern on a flat substrate such as a semiconductor wafer or a liquid crystal panel.

  Conventionally, as a positioning device used in, for example, a semiconductor exposure apparatus, an assembly / inspection apparatus, a precision machine tool, etc., on a slider (table) that moves on a lower axis (for example, the X axis as the first direction), There is an apparatus that constitutes an upper shaft (for example, a Y-axis as the second direction) based on a slider (table) of the lower shaft. This type of positioning device has a configuration in which a driving device that drives a slider that moves on a lower shaft takes a weight including a slider that moves on the upper shaft, a driving device that drives the slider, and the like. Therefore, it has been difficult to move the slider sufficiently fast.

  For the purpose of reducing the load applied to the lower drive device and the lower shaft of the positioning device and moving the slider at high speed, for example, an X-axis slider and a Y-axis slider are arranged on the same plane, and one slider ( For example, a stage is placed on an X-axis slider) so as to be slidable in a direction orthogonal to this (in this case, the Y-axis direction), and this stage and the other slider (in this case, the Y-axis slider) are mutually connected. There has been proposed a positioning device connected so as to allow relative movement in the X-axis direction and restrain relative movement in the Y-axis direction. In the positioning device having this configuration, it is not necessary for the driving device for one slider to receive the weight including the driving device for driving the other slider. Load can be reduced.

  However, since this positioning device has a configuration in which two sliders are arranged in a plane, the size of the device increases and it is difficult to achieve space saving.

  For this reason, a long-life positioning device has been proposed that can reduce the load on the lower drive device and the lower shaft, move the slider at high speed, and achieves high precision and space saving. (See Patent Document 1).

  In this Patent Document 1, a first positioning device that positions a first slider with respect to a base in the X-axis direction by a first driving device, and a second slider with respect to the base that is Y by a second driving device. And a second positioning device for positioning in the axial direction, the first driving device and the second driving device are provided on the base, and the first slider and the second slider are arranged to overlap in the Z-axis direction, and the stage A positioning device is provided that engages both the first slider and the second slider.

Further, in Patent Document 1, the stage is connected to the first slider via a tension member, and fluctuations in load from the stage and the second slider can be absorbed by the tension member. Therefore, the variation in the load between the stage and each slider due to the difference in vertical straightness error between the stage and each slider can be suppressed, and the positioning accuracy can be improved.
JP 2002-158274 A

  However, since the stage has a structure in which the first slider and the second slider are interspersed by a plurality of sliding members, the variation in load is absorbed by the tension member. However, rolling and pitching occur in each sliding member at the time of sliding, leading to a decrease in dynamic rigidity.

  An object of the present invention is to obtain a positioning device that can suppress the rolling and pitching during the movement of the stage and improve the stability by considering the above facts and increasing the dynamic rigidity of the stage.

  The present invention includes a plurality of first rail members provided in parallel to each other along a first direction, and a plurality of second rails provided in parallel to each other along a direction orthogonal to the first direction. And a first slider that is slidably supported by the first rail member, and the first slider is used as the first rail member with respect to the fixed portion. First positioning means for sliding along and positioning, a second slider slidably supported by the second rail member, and the second slider with respect to the fixed portion. Second positioning means for sliding and positioning along the second rail member, and a plurality of first sliding members in a second direction with respect to the first slider , And a plurality of second sliders in the first direction relative to the second slider The stage supported by each of the first and second sliders is positioned through the sliding member, and either the first slider or the second slider is engaged with the stage via the tension member. The positioning device is configured to slide at least one of the plurality of first sliding members or the plurality of second sliding members sliding in the same direction while maintaining three-dimensional linearity. Therefore, it has the connection reinforcement member connected for this purpose.

  According to the present invention, since both the first positioning means and the second positioning means are provided in the fixed portion, it is possible to reduce the load on one driving device such as the other driving device.

  The connection reinforcing member is slid while maintaining three-dimensional linearity with respect to at least one of the plurality of first sliding members or the plurality of second sliding members sliding in the same direction. For this reason, since they are connected, individual non-linear movement of the sliding member can be suppressed, and dynamic rigidity can be increased.

  Particularly, in the present invention, either the first slider supported by the first rail or the second slider supported by the second rail connects the sliding members that slide in the same direction to each other. By connecting with each other, it is possible to suppress the occurrence of rolling and pitching of the individual sliding members, which are feared to be supported through the tension member, and it is possible to maintain a sense of stability while the stage is moving. it can.

  The maintenance of the three-dimensional linearity means suppression of rolling and pitching during the sliding.

  Further, in the present invention, the stage is engaged with both the first slider and the second slider, and the first slider and the second slider are in the first direction and the second slider. It is characterized by being arranged so as to overlap with a third direction orthogonal to both directions.

  Since the first slider and the second slider are arranged so as to overlap in the third direction orthogonal to the first direction and the second direction, the arrangement area of these sliders is minimized. be able to.

  As described above, the present invention has an excellent effect that by increasing the dynamic rigidity of the stage, the rolling and pitching during the stage movement can be suppressed and the stability can be improved.

  FIG. 1 is a plan view showing a positioning device according to the present embodiment, FIG. 2 is a front view of the positioning device shown in FIG. 1, and FIG. 3 is a schematic perspective view showing a main part of the positioning device shown in FIG. is there.

  As shown in FIGS. 1 to 3, the positioning device 1 includes a base 11 and a first positioning device 10 that is provided on the base 11 and positions the first slider 12 in the X-axis direction (first direction). And a second positioning device 20 provided on the base 11 for positioning the second slider 13 in the Y-axis direction (second direction), the first positioning device 10 and the second positioning device 20, And a stage 30 positioned in the X-axis direction and the Y-axis direction.

  The first positioning device 10 includes a first driving device 14 as first positioning means for moving the first slider 12 in the X-axis direction with respect to the base 11.

  The first drive device 14 is engaged with the X-axis ball screw nut 15 fixed to the lower surface (back surface) of the first slider 12, and the X-axis ball screw nut 15, and rotates to rotate the X-axis ball screw nut 15. An X-axis ball screw shaft 16 that moves in the X-axis direction and an X-axis motor 17 that rotates the X-axis ball screw shaft 16 are main components.

  The X-axis motor 17 is fixed to the base 11 or a portion that does not substantially move (not shown). An X-axis coupling 18 is interposed between the X-axis ball screw shaft 16 and the X-axis motor 17.

  X-axis ball screw shaft support portions 19 and 21 for rotatably supporting the X-axis ball screw shaft 16 on the base 11 are provided near and opposite to the X-axis coupling 18 of the X-axis ball screw shaft 16.

  The first slider 12 has a substantially rectangular surface that is long in the Y-axis direction, and an opening 24 is formed at a substantially central portion thereof.

  Two X-axis linear guide bearings 23A and 23B that engage with X-axis linear guide rails 22A and 22B provided on the base 11 along the X-axis direction are respectively provided on the lower surfaces of both ends in the Y-axis direction of the first slider 12. It is provided one by one. In addition, linear guide bearings 31A and 31B as first sliding members of the stage 30, which will be described in detail later, are provided on the upper surfaces of both ends in the X-axis direction of the first slider 12 along the edge of the opening 24. Linear guide rails 25A and 25B for guiding in the direction are formed.

  The second positioning device 20 includes a second driving device 34 that moves the second slider 13 in the Y-axis direction with respect to the base 11. The second drive device 34 is engaged with the Y-axis ball screw nut 35 fixed to the lower surface (back surface) of the second slider 13, and the Y-axis ball screw nut 35, thereby rotating the Y-axis ball screw nut 35. A main component is a Y-axis ball screw shaft 36 that is moved in the Y-axis direction and a Y-axis motor 37 that rotates the Y-axis ball screw shaft 36.

  The Y-axis motor 37 is fixed to the base 11 or a portion (not shown) that does not substantially move. A Y-axis coupling 38 is interposed between the Y-axis ball screw shaft 36 and the Y-axis motor 37.

  Y-axis ball screw shaft support portions 39 and 41 for rotatably supporting the Y-axis ball screw shaft 36 on the base 11 are provided in the vicinity of and opposite to the Y-axis coupling 38 of the Y-axis ball screw shaft 36.

  The second slider 13 has a substantially rectangular surface that is long in the X-axis direction, and an opening 44 is formed at a substantially central portion thereof. Two Y-axis linear guide bearings 43A and 43B that engage with Y-axis linear guide rails 42A and 42B provided on the base 11 along the Y-axis direction are respectively provided on the lower surfaces of both ends of the second slider 13 in the X-axis direction. It is provided one by one.

  In addition, linear guide bearings 32A and 32B as second sliding members of the stage 30, which will be described in detail later, are provided on the upper surfaces of both ends in the Y-axis direction of the second slider 13 along the edge of the opening 44. Linear guide rails 45A and 45B for guiding in the direction are formed.

  Note that the second slider 13 is arranged in a state of overlapping the first slider 12 in the upward direction, that is, in the Z-axis direction (direction perpendicular to the X-axis direction and the Y-axis direction) without interfering with each other. ing.

  The stage 30 has a substantially square surface, and an opening 54 is formed at a substantially central portion thereof. Two linear guide bearings 32 </ b> A and 32 </ b> B described above that engage with linear guide rails 45 </ b> A and 45 </ b> B provided on the second slider 13 are provided on the lower surfaces of both ends in the Y-axis direction of the stage 30.

  Support members 62 </ b> A and 62 </ b> B are provided on the lower surfaces of both ends of the stage 30 in the X-axis direction. At the lower ends of the support members 62A and 62B, one end portions of tension members 61A and 61B are respectively fixed by bolts 65 between the support members 62A and 62B and the reinforcing members 64A and 64B. In addition, as the tension members 61A and 61B, plate springs are used that are rigid in the horizontal direction and hardly reduce the straightness in the horizontal direction and the yawing accuracy.

  The other end portions of the tension members 61A and 61B are fixed by bolts 65 sandwiched between leaf spring receiving portions 63E and 63E and reinforcing members 64A and 64B fixed to a rectangular frame-shaped support member 63 as a connection reinforcing member. And is supported from below by the support member 63.

  With the above configuration, the stage 30 is connected to the first slider 12 via the tension members 61A and 61B. Therefore, fluctuations in load from the stage 30 and the second slider 13 can be absorbed by the tension members 61A and 61B, and due to the difference in vertical straightness error between the stage 30 and the sliders 12 and 13. Variations in the load between the stage 30 and the sliders 12 and 13 can be suppressed, and positioning accuracy can be improved.

  Also, as shown in FIGS. 4 to 6, the support member 63 is provided with a pair of leg portions 63A on the lower surface of one opposite side thereof.

  The leg portion 63A has a prismatic shape and the lowermost portion is widened to form a flange portion 63B. The flange portion 63B is provided with a circular hole 63C (see FIG. 5). A bolt 67 is passed through the circular hole 63C and is screwed into the linear guide bearings 31A and 31B. Thus, the support member 63 is supported by the linear guide bearings 31A and 31B, and connects the two linear guide bearings 31A and 31B by the other opposite side.

  With the support member 63, the movement of the linear guide bearings 31A and 31B is interlocked with each other by the support member 63. Even if there is an element in which the linear guide bearings 31A and 31B can roll and pitch when sliding. This can be limited, and as a result, rolling and pitching can be suppressed.

  The support member 63 has a frame shape (the opening 63D is formed in the center) according to the shape of the stage 30, and this is an apparatus installed on the stage 30 extending downward from the upper surface of the stage 30. This is for the purpose of avoiding the interference with the shape, and the opening 63D is not necessarily provided if it is not necessary.

  Below, the specific operation | movement of the positioning apparatus 1 which concerns on this Embodiment is demonstrated.

  When positioning the stage 30 in the X-axis direction, when the X-axis motor 17 is driven to rotate the X-axis ball screw shaft 16, the X-axis ball screw nut 15 starts moving along the X-axis ball screw shaft 16 according to this rotation. To do. By this movement, the stage 30 moves in the X-axis direction (for example, the right direction in FIG. 1). When the stage 30 reaches a predetermined position, the driving of the X-axis motor 17 is stopped and the stage 30 is stopped at that position. If it is desired to move the stage 30 leftward as shown in FIG. 1, the X-axis motor 17 may be driven to rotate the X-axis ball screw shaft 16 in the opposite direction.

  On the other hand, when the stage 30 is moved in the Y-axis direction, when the Y-axis motor 37 is driven to rotate the Y-axis ball screw shaft 36, the Y-axis ball screw nut 35 moves along the Y-axis ball screw shaft 36 as described above. To start. By this movement, the stage 30 moves in the Y-axis direction (for example, the upward direction in FIG. 1). When the stage 30 reaches a predetermined position, the drive of the Y-axis motor 37 is stopped, and the stage 30 is stopped at that position. If the stage 30 is to be moved downward as shown in FIG. 1, the Y-axis motor 37 may be driven to rotate the Y-axis ball screw shaft 36 in the opposite direction.

  Here, since the first driving device 14 and the second driving device 34 are fixed to the base 11 in the positioning device 1 according to the first embodiment, the weight and driving of the driving devices 14 and 34 are driven. The load applied at that time is not applied to the first slider 12 located on the lower side. Moreover, it can also reduce that the load of the other drive device is applied to one drive device.

  When the first drive device is driven and the stage 30 and the first slider 12 move in the X-axis direction, the stage 30 moves to the linear guide rails 45A and 45B, and the first slider 12 moves to the X-axis. They are guided by the linear guide rails 22A and 22B, respectively. Here, there is no problem as long as the moving directions of the stage 30 and the first slider 12 are exactly coincident with the X-axis direction. Does not match exactly. In particular, in the case of the configuration of the positioning device of the present invention, the rate of the straightness error in the vertical direction becomes high. That is, the difference between the vertical shakes when moving in the X-axis direction is relatively large. When both are connected without a tension member, such straightness in the vertical direction interferes with each other, an extra force acts between the two, and such a useless force between the two acts. The fluctuation may affect the decrease in positioning accuracy in the X-axis direction.

  Therefore, by connecting the stage 30 and the first slider 12 via the tension members 61A and 61B, the difference in straightness error between the stage 30 and the first slider 12 (particularly in the vertical direction) is tensioned. Absorption was performed by the members 61A and 61B. Thereby, an excessive force applied between the two is suppressed, and when both move in the X-axis direction, a decrease in positioning accuracy due to such a change in load is also prevented.

  Similarly, by connecting the stage 30 and the first slider 12 via tension members 61A and 61B, the difference in straightness error between the stage 30 and the second slider 13 is also absorbed by the tension members 61A and 61B. . As a result, even when the stage 30 and the second slider 13 move in the Y-axis direction, an excessive force applied between both the stage 30 and the second slider 13 is suppressed, and a decrease in positioning accuracy is also prevented. .

  Further, although the straightness error can be reduced by the action of the tension members 61A and 61B, the dynamic rigidity may be lowered. Therefore, the support member 63 to which the tension members 61A and 61B are attached has a rectangular frame shape, and the left and right linear guide bearings 31A and 31B are connected via the support member 63.

  With the support member 63, the movements of the linear guide bearings 31 </ b> A and 31 </ b> B are interlocked with each other by the support member 63.

  That is, when the linear guide bearings 31A and 31B slide, the linear guide bearings 31A and 31B individually generate rolling and pitching and have low dynamic rigidity. However, this can be suppressed by the support member 63, and the movement of rolling and pitching can be reduced.

  According to experiments, it is found that the natural frequency due to rolling of the individual linear guide bearings 31A and 31B is remarkably improved by connecting the linear guide bearings 31A and 31B with the support member 63 having a rectangular frame shape. It was. In the experiment, it has been confirmed that the frequency 41 Hz is improved to 200 Hz or more.

  In the present embodiment, a case where a motor, a ball screw nut, and a ball screw shaft are used for the first driving device 14 and the second driving device 34 has been described. Various members such as a combination of pulleys, a linear motor as a motor, and the like can be used. Further, when it is desired to suppress magnetic field fluctuations such as an application using an electron beam, a ball screw nut and a ball screw shaft or a belt or the like is used for the first driving device 14 and the second driving device 34. That is, it is desirable to use a rotary motor in which the motor itself does not move instead of a linear motor.

    Furthermore, the number of guide rails and the number of linear guide bearings engaged therewith can be appropriately changed.

It is a top view which shows the positioning apparatus which concerns on embodiment of this invention. It is a front view of the positioning apparatus shown in FIG. It is a schematic perspective view which shows the principal part of the positioning apparatus shown in FIG. It is the IV-IV sectional view taken on the line of FIG. It is a top view of the supporting member (connection reinforcement member) concerning this embodiment. It is a perspective view of the supporting member (connection reinforcement member) concerning this embodiment.

Explanation of symbols

1 Positioning device 11 Base (fixed part)
12 1st slider 13 2nd slider 10 1st positioning device (1st positioning means)
20 Second positioning device (second positioning means)
14 1st drive device (1st positioning means)
22A, 22B X-axis linear guide rail (first rail member)
23A, 23B X-axis linear guide bearing 30 Stage 30
31A, 31B Linear guide bearing (first sliding member)
25A, 25B Linear guide rail 34 Second driving device (second positioning means)
42A, 42B Y-axis linear guide rail (second rail member)
43A, 43B Y-axis linear guide bearing 32A, 32B Linear guide bearing (second sliding member)
45A, 45B Linear guide rail 62A, 62B Support member (connection reinforcement member)
64A, 64B Reinforcement member 61A, 61B Tension member 63 Support member 63A Leg part 63B Flange part 63C Circular hole 67 Bolt

Claims (3)

A plurality of first rail members provided in parallel to each other along a first direction; and a plurality of second rail portions provided in parallel to each other along a direction orthogonal to the first direction. Fixing part,
A first slider slidably supported on each of the first rail members;
First positioning means for sliding and positioning the first slider along the first rail member with respect to the fixed portion;
A second slider slidably supported on each of the second rail members;
Second positioning means for sliding and positioning the second slider along the second rail member with respect to the fixed portion;
Via a plurality of first sliding members in a second direction with respect to the first slider, and via a plurality of second sliding members in a first direction with respect to the second slider, A positioning device that positions a stage that is supported so as to be independently movable, and in which either the first slider or the second slider is engaged with the stage via a tension member. A connecting reinforcing member connected to at least one of the plurality of first sliding members or the plurality of second sliding members sliding in the direction so as to maintain sliding in a three-dimensional linearity. A positioning device characterized by comprising:   2. The positioning apparatus according to claim 1, wherein the three-dimensional linearity is maintained by suppressing rolling and pitching during the sliding. The stage is engaged with both the first slider and the second slider, and the first slider and the second slider are orthogonal to both the first direction and the second direction. The positioning device according to claim 1, wherein the positioning device is disposed so as to overlap with the third direction.

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