JPH04176124A - Centrifugal drying machine - Google Patents

Abstract

PURPOSE:To make it possible to suppress to the minimum the generation of stains caused by the splashed back water and the adverse effect caused by the fragments of breakage, dust and the like by a method wherein an isolation chamber, with which the inside wall of the drying container formed by an isolation plate, which is vertically erected on a basket supporting cylinder surrounding the respective basket, and the baskets are partitioned. CONSTITUTION:In a centrifugal drying machine provided with a basket retaining cylinder 4 which is rotated in a drying container 1, carrier-housing baskets 3 containing the material to be dried and attached to the basket retaining cylinder 4 at an equiangle to the center of a rotating shaft 5, and a cover 2 to be covered on the drying container 1 and having an air-intake hole in the center part; an isolated chamber 8, which is separating the inner wall of the drying container 1, formed by a separating plate vertically erected on the basket retaining cylinder 4 surrounding the separating basket 3, and the basket 3 is provided. For example, the above-mentioned isolated chamber 8 is constructed by the separating plate, which is erected vertical to the basket retaining cylinder 4, and a ceiling plate, the water thrown away by high-speed rotation is moved inside the isolated chamber 8 without scattering to outside the isolation chamber 8, and the water passes through an inner exhaust hole 10 and exhausted.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a centrifugal dryer that uses centrifugal force to dry objects that have been subjected to water washing or the like.

[Conventional technology]

As shown in the cross-sectional view of FIG. 2, a conventional centrifugal dryer has a Haskeller 1-3 that can store a carrier for storing objects to be dried in a drying chamber inside a drying container 1 having an M2 that can be opened and closed from the top. Haskella +-3 are fixed to Haskella 1 to support cylinder 4 which serve as a rotary table, and furthermore, it has a rotating shaft 5 and a motor 6 for rotating this frame-shaped basket support cylinder 4.

The material to be dried placed in the Haskeller 1-3 is dried by high-speed rotation processing at the same time as the lid 2 is closed. and,
The water blown away by centrifugal force is drained through a drain lower provided in a lower tray at the bottom of the drying container 1.

[Problem to be solved by the invention]

In conventional centrifugal dryers, when the material to be dried is set, it is rotated and dried without being isolated from the surroundings, so substances that are detached from the material during rotation are stored in the drying chamber. It was scattered everywhere, causing re-deposition, and was extremely poor in terms of cleanliness.

For example, the released moisture scatters in the drying chamber and re-attaches to the material to be dried, reducing drying efficiency and causing smearing.
Alternatively, if an item to be dried is damaged during rotation, the damaged item may fly around the drying chamber and re-adhere to other items to be dried, causing a build-up.

If the above-mentioned defects occur and the material is sent to the next process as it is, it may cause poor adhesion of the photosensitive resin, especially in the semiconductor manufacturing process, resulting in over-etching or pattern formation due to dirt. This sometimes caused defects, which affected the condition of the centrifugal dryer and the yield of semiconductor devices.

[Failure to solve the problem]

The centrifugal dryer of the present invention has an isolation chamber that surrounds each basket and is formed by a separation plate vertically erected on a basket support cylinder to partition the inner wall of the drying container and the husk. .

[Example] Next, an example of the present invention will be described with reference to the drawings. As shown in the plan view showing the internal structure of FIG. 1(a) and the longitudinal cross-sectional view of FIG. , motor 6
a rotating shaft 5 connected to the rotary shaft 5, a basket support base 4 that supports the Haskera l-3 and rotates by the rotary shaft 5, an isolation chamber 8 installed in the basket support base 4 to isolate individual baskets; An internal drain 10 for draining moisture etc. from each isolation room 8 and an external drain 9 from the drying room.
The internal drain port 10 and the external drain port 9 each also serve as an exhaust port for intake air. The structure is such that the moisture blown away by the high-speed rotation moves inside the isolation chamber 8 without scattering outside the isolation chamber 8, and is drained through the internal drain port]0. Further, the isolation chamber 8 is formed by a separation plate and a ceiling plate that are vertically erected on the basket support base 4. Furthermore, to put the carrier in and out of basket 3,
Do this through the air intake hole in the ceiling board.

〔Effect of the invention〕

That is, according to the present invention, the individual baskets 3 and the isolation chamber are separated, and the wastewater inside the isolation chamber is discharged to the outside from the internal drain port 10 located at the bottom of the isolation chamber, thereby preventing the occurrence of stains due to splashing and debris due to breakage. This device can be expected to be used particularly in semiconductor manufacturing equipment where dust is a concern, as it can minimize the negative effects of dust and dirt.

In addition, even if the shape of the isolation room, the length, and shape of the internal drainage port are different, if the method does not affect the effects of each item to be dried on other items, the effects can be obtained at the same time. Needless to say.

[Brief explanation of drawings]

FIGS. 1(a) and 1(b) are a plan view and a sectional view showing the internal structure of an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional centrifugal dryer. ]...Drying container, 2 ・Lid, 3...Basket, 4
- Basket support tube, 5... Rotating shaft, 6... Motor, 7... Drain port, 8... Isolation chamber, 9 - External drain port, 10. Internal drain port.

Claims (1)

[Claims] A basket support tube that rotates within the drying container, a basket that is mounted on the basket support tube at equal angles around a rotation axis and stores a carrier containing the dried material, and an air intake hole in the center of the basket support tube. In a centrifugal dryer having a lid that covers the drying container, an isolation chamber is formed by a separation plate that surrounds each of the baskets and stands vertically on the basket support cylinder, and partitions between the inner wall of the drying container and the basket. A centrifugal dryer characterized by the following: