JPH0417507Y2 - - Google Patents
Info
- Publication number
- JPH0417507Y2 JPH0417507Y2 JP1986099762U JP9976286U JPH0417507Y2 JP H0417507 Y2 JPH0417507 Y2 JP H0417507Y2 JP 1986099762 U JP1986099762 U JP 1986099762U JP 9976286 U JP9976286 U JP 9976286U JP H0417507 Y2 JPH0417507 Y2 JP H0417507Y2
- Authority
- JP
- Japan
- Prior art keywords
- coupler
- entrance
- exit
- outlet
- fitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Closures For Containers (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (enEXAMPLES) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (enEXAMPLES) | 1986-06-28 | 1986-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637667U JPS637667U (enEXAMPLES) | 1988-01-19 |
| JPH0417507Y2 true JPH0417507Y2 (enEXAMPLES) | 1992-04-20 |
Family
ID=30968944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986099762U Expired JPH0417507Y2 (enEXAMPLES) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417507Y2 (enEXAMPLES) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009027165A (ja) * | 2007-07-23 | 2009-02-05 | Asml Netherlands Bv | 少量レジストディスペンサ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5992288B2 (ja) * | 2012-10-15 | 2016-09-14 | 東京エレクトロン株式会社 | ガス導入装置及び誘導結合プラズマ処理装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027703Y2 (enEXAMPLES) * | 1971-06-16 | 1975-08-16 |
-
1986
- 1986-06-28 JP JP1986099762U patent/JPH0417507Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009027165A (ja) * | 2007-07-23 | 2009-02-05 | Asml Netherlands Bv | 少量レジストディスペンサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637667U (enEXAMPLES) | 1988-01-19 |
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