JPH0417318A - Manufacture of solid electrolytic capacitor - Google Patents
Manufacture of solid electrolytic capacitorInfo
- Publication number
- JPH0417318A JPH0417318A JP12097790A JP12097790A JPH0417318A JP H0417318 A JPH0417318 A JP H0417318A JP 12097790 A JP12097790 A JP 12097790A JP 12097790 A JP12097790 A JP 12097790A JP H0417318 A JPH0417318 A JP H0417318A
- Authority
- JP
- Japan
- Prior art keywords
- foil
- metal
- semiconductor layer
- solid electrolytic
- electrolytic capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000007787 solid Substances 0.000 title claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 86
- 239000002184 metal Substances 0.000 claims abstract description 86
- 239000011888 foil Substances 0.000 claims abstract description 85
- 238000000034 method Methods 0.000 claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 239000004020 conductor Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims description 28
- 238000005520 cutting process Methods 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 description 11
- 229910001220 stainless steel Inorganic materials 0.000 description 11
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 description 10
- 238000005304 joining Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000004080 punching Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000004254 Ammonium phosphate Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- KQNKJJBFUFKYFX-UHFFFAOYSA-N acetic acid;trihydrate Chemical compound O.O.O.CC(O)=O KQNKJJBFUFKYFX-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 1
- 235000019289 ammonium phosphates Nutrition 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229940046892 lead acetate Drugs 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、生産効率が高く、コストダウンか可能で、し
かも特性の優れた固体電解コンデンサの製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a solid electrolytic capacitor that has high production efficiency, enables cost reduction, and has excellent characteristics.
従来、固体電解コンデンサを製造する場合には、先ず板
状の弁金属エツチング箔を打抜き等の手段により、不要
部分を除去し、複数の長方形部分が並列に、かつ一端が
連結された櫛形状、或は複数の長方形部分か長さ方向に
串ダンゴ状に連結され、さらに、複数の串ダンゴ状部分
の一端が接続されて並列している固体電解コンデンサ用
素子(以下、コンデンサ用素子という。)か用いられる
。これらコンデンサ用素子の長方形部分に、順次誘電体
酸化皮膜層、半導体層、導電体層を積層形成した後、上
記櫛形状のものは、長方形部分を切断分離し、串ダンゴ
状のものは、これを切断分離して、折曲げて長方形部分
を重ね合わせることが出来るようにした固体電解コンデ
ンサ素子(以下、コンデンサ素子という。)を用いて固
体電解コンデンサを作製している(例えば特公昭5’l
−10564号公報、特開昭59−61116号公報)
。Conventionally, when manufacturing a solid electrolytic capacitor, first, unnecessary parts are removed from a plate-shaped valve metal etched foil by means such as punching, and then a comb-shaped structure in which a plurality of rectangular parts are arranged in parallel and connected at one end, Or a solid electrolytic capacitor element (hereinafter referred to as a capacitor element) in which a plurality of rectangular parts are connected in a skewer shape in the length direction, and one end of the plurality of skewer-shaped parts are connected in parallel. or used. After sequentially laminating a dielectric oxide film layer, a semiconductor layer, and a conductive layer on the rectangular parts of these capacitor elements, the comb-shaped ones are cut and separated into rectangular parts, and the comb-shaped ones are made by cutting and separating the rectangular parts. A solid electrolytic capacitor is manufactured by using a solid electrolytic capacitor element (hereinafter referred to as a capacitor element) that can be cut and separated and bent to overlap the rectangular parts (for example, the
-10564, Japanese Patent Application Laid-Open No. 59-61116)
.
しかしながら、これらコンデンサ用素子は、弁金属エツ
チング箔を打抜いて作製されるので被打抜き箔の厚みが
薄いと、打抜き金型と被打抜き箔とか付着し、操作が困
難となるため、ある程度の厚みを有する弁金属エツチン
グ箔を使用しなければならない。However, these capacitor elements are manufactured by punching valve metal etched foil, so if the thickness of the foil to be punched is thin, the punching die and the foil to be punched will stick together, making operation difficult. Valve metal etched foil with a
この際、厚みか厚いと体積が大きくなり、これを用いて
つくられた固体電解コンデンサ(以下、コンデンサとい
う。)の半導体層の奥行きか長くなり、抵抗か増大して
、高周波性能か悪くなる。At this time, the thicker the capacitor, the larger the volume, the longer the depth of the semiconductor layer of the solid electrolytic capacitor (hereinafter referred to as a capacitor) made using this capacitor, the higher the resistance, and the worse the high frequency performance.
この傾向は、上記長方形部分の面積か小さい場合、或は
長方形部分の間の距離か小さくなる場合には、さらに顕
著となる。This tendency becomes even more remarkable when the area of the rectangular portions is small or when the distance between the rectangular portions is small.
コンデンサ用素子を作製するには、上記打抜き以外に、
フォトエツチングによって所定形状の弁金属エツチング
箔を形成する方法も考えられるか、コストが高くなるば
かりでなく、上記弁金属工。In addition to the above-mentioned punching, in order to produce capacitor elements,
A method of forming a valve metal etched foil in a predetermined shape by photo-etching may also be considered, but this would not only increase the cost but also require the above-mentioned valve metal processing.
チング箔の表面状態は、通常の金属のように平滑でなく
、フォトエツチングした部分とマスクとの界面は不均一
となるのでこの方法は使用できない。This method cannot be used because the surface of the etched foil is not as smooth as ordinary metal, and the interface between the photoetched portion and the mask is non-uniform.
本発明は上記の事情に鑑みてなされたもので、効率よく
安価に生産され、しかも性能の優れたコンデンサの製造
方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method for manufacturing a capacitor that is efficiently produced at low cost and has excellent performance.
上記の目的を達成するため、本発明に係るコンデンサの
製造方法は、長尺テープ状弁金属エツチング箔を、金属
板または金属線の長さ方向に対して直角に先端を接続し
た後、所定の長さに切断し、並列に配置してコンデンサ
用素子を作製し、次いでこれら並列に配置されたそれぞ
れの弁金属エツチング箔の表面に誘電体酸化皮膜層、そ
の上面所定の位置に半導体層、さらにその上面に導電体
層を順次積層形成した後、上記金属板或は金属線から取
外すか、或は半導体層が形成されていない部所で切断し
て分離し、これらをコンデンサ素子として用いる。In order to achieve the above object, the method for manufacturing a capacitor according to the present invention involves connecting a long tape-shaped valve metal etching foil at a right angle to the length direction of a metal plate or metal wire, and then A capacitor element is fabricated by cutting to length and arranging them in parallel. Next, a dielectric oxide film layer is formed on the surface of each of the valve metal etching foils arranged in parallel, a semiconductor layer is added at a predetermined position on the upper surface, and After sequentially laminating conductive layers on the upper surface thereof, they are removed from the metal plate or metal wire, or separated by cutting at a portion where no semiconductor layer is formed, and used as a capacitor element.
或は、長尺テープ状弁金属エツチング箔として、表面に
誘電体酸化皮膜層が形成されている長尺テープ弁金属エ
ツチング箔を用いてもよい。Alternatively, as the long tape-shaped valve metal etching foil, a long tape valve metal etching foil having a dielectric oxide film layer formed on the surface may be used.
また、長尺テープ状弁金属エツチング箔を並列に位置さ
せ、同時に複数本ずつの先端を上記金属板、或は金属線
に接続することもできる。Further, it is also possible to arrange the long tape-shaped valve metal etching foils in parallel and connect the tips of a plurality of them to the metal plate or metal wire at the same time.
本発明の方法は上記の構成となっているので、弁金属エ
ツチング箔の厚みが薄(とも、金属板、或は金属線によ
って一端が連結された櫛形状のコンデンサ用素子が効率
よく、安価に得られる。Since the method of the present invention has the above-mentioned structure, the thickness of the valve metal etching foil is thin (also, the comb-shaped capacitor element connected at one end by a metal plate or metal wire can be efficiently and inexpensively used). can get.
本発明において使用される長尺テープ状の弁金属エツチ
ング箔としては、アルミニウム、タンタル、ニオブ、チ
タン、或はこれらを基質とする合金等弁作用を有する金
属のエツチング箔かいずれも使用できる。弁金属箔のエ
ツチング方法としては、電気化学的にエツチングするな
と公知の方法か用いられる。As the long tape-shaped valve metal etching foil used in the present invention, any etching foil of a metal having valve action such as aluminum, tantalum, niobium, titanium, or an alloy having these as a substrate can be used. As a method for etching the valve metal foil, a known method such as electrochemical etching may be used.
上記長尺テープ状の弁金属エツチング箔は、表面に予め
誘電体酸化皮膜層が形成されていてもよい。The long tape-shaped valve metal etching foil may have a dielectric oxide film layer formed on its surface in advance.
また、上記テープ状弁金属エツチング箔を並列に接続す
る金属板、或は金属線は、弁金属エツチング箔を接続で
きる機能と強度を有し、また弁金属エツチング箔を接続
しても、たわまなければ特に制限なく、例えばステンレ
ス鋼、銅、鉄、アルミニウム、ニッケル等の板、或は線
かあげられる。Furthermore, the metal plate or metal wire that connects the tape-shaped valve metal etching foils in parallel has the function and strength to connect the valve metal etching foils, and even if the valve metal etching foils are connected, the metal plates or metal wires have the strength and function to connect the valve metal etching foils. If not, there are no particular limitations, and examples include plates or wires made of stainless steel, copper, iron, aluminum, nickel, etc.
その長さは、テープ状弁金属エツチング箔の幅と接続す
る個数と、間隔によって決まる。金属板、金属線の厚み
或は直径は接続される弁金属エツチング箔の個数によっ
ても変わるが、板においては通常厚みかO,1mm以上
、数mm以下のものか用いられ、線においては径が1m
m以上、数mm以下のものか用いられる。Its length is determined by the width of the tape-shaped valve metal etching foil, the number of connected pieces, and the spacing. The thickness or diameter of the metal plate or metal wire varies depending on the number of valve metal etching foils to be connected, but for plates the thickness is usually 0.1mm or more and for several mm or less, and for wires the diameter is 1m
A length of 1 m or more and a few mm or less is used.
上記誘電体酸化皮膜層(以下、酸化皮膜層或は化成膜と
いう。)は、弁金属自体の酸化皮膜層であっても、或は
弁金属エツチング箔上に設けられた、他の誘電体の酸化
物層であってもよいか、特に弁金属自体の酸化物からな
る層であることが望ましい。The dielectric oxide film layer (hereinafter referred to as an oxide film layer or a chemically formed film) may be an oxide film layer of the valve metal itself or another dielectric film provided on the valve metal etching foil. It may be an oxide layer of the valve metal itself, or preferably a layer consisting of an oxide of the valve metal itself.
いずれの場合にも酸化物層を設ける方法としては、従来
公知の方法を用いることが出来る。In either case, a conventionally known method can be used to provide the oxide layer.
例えば、アルミニウム箔を用いる場合、アルミニウム箔
の表面を電気化学的にエツチングし、さらにほう酸、お
よびほう酸アンモニウムの水溶液中で電気化学的に処理
すればアルミニウム箔上にアルミナ誘電体からなる酸化
物層か形成される。For example, when using aluminum foil, if the surface of the aluminum foil is electrochemically etched and further electrochemically treated in an aqueous solution of boric acid and ammonium borate, an oxide layer consisting of an alumina dielectric is formed on the aluminum foil. It is formed.
また、使用される半導体層の組成および作製方法には特
に制限ないが、コンデンサの性能を高めるには、本発明
者か先に提出したように二酸化鉛、または二酸化鉛と硫
酸鉛を主成分として、従来公知の化学析出法、電気化学
的析出法(特開昭6351321号公報)を用いるのか
望ましい。Although there are no particular restrictions on the composition or manufacturing method of the semiconductor layer used, in order to improve the performance of the capacitor, it is recommended that lead dioxide, or lead dioxide and lead sulfate be used as main components, as proposed by the present inventor. It is preferable to use a conventionally known chemical deposition method or electrochemical deposition method (Japanese Unexamined Patent Publication No. 6351321).
半導体層の表面に形成される導電体層は、例えば導電ペ
ーストの固化、メツキ、金属蒸着、耐熱性の導電樹脂フ
ィルムの積層等公知の方法によって形成される。The conductive layer formed on the surface of the semiconductor layer is formed by a known method such as solidification of a conductive paste, plating, metal vapor deposition, or lamination of a heat-resistant conductive resin film.
次に、上記弁金属エツチング箔、金属板等を用いてコン
デンサ用素子、さらにコンデンサ素子の作製方法を金属
板を用いる場合を代表例として説明する。Next, a capacitor element using the above-mentioned valve metal etching foil, metal plate, etc., and a method for manufacturing the capacitor element will be described using a case where a metal plate is used as a representative example.
第1図ないし第2図は、本発明の方法を実施する装置の
一例を示すもので、図中符号1は長尺テープ状弁金属エ
ツチング箔(以下、箔という)2が巻回された供給ロー
ルである。1 and 2 show an example of an apparatus for carrying out the method of the present invention, in which reference numeral 1 denotes a supply of a long tape-shaped valve metal etching foil (hereinafter referred to as foil) 2 wound thereon. It's a roll.
上記筒2は、供給ロール1からガイドロール3によって
引出され、ガイドレール4を通って送出される。端部が
金属板5に到達すると、接合機6が降下し、箔2を金属
板5に、電気的、或は機械的に接合する。上記接合方法
としては、例えばかしめ付け、半田付け、導電ペースト
による接合、超音波溶接、スポyト溶接、電子ビーム溶
接なとかあげられる。続いて、カッター等によりA−A
部分て箔2を切断する。The cylinder 2 is drawn out from the supply roll 1 by a guide roll 3 and sent out through a guide rail 4. When the end reaches the metal plate 5, the joining machine 6 descends and joins the foil 2 to the metal plate 5 electrically or mechanically. Examples of the joining method include caulking, soldering, joining using conductive paste, ultrasonic welding, dropper welding, and electron beam welding. Next, cut A-A with a cutter etc.
Cut the foil 2 in parts.
次いて金属板5を矢印7方向に所定寸法移動させ上記操
作を繰返す。このようにして、金属板5の一方の側に、
所定の間隔で、長方形の箔2の一端が接続された櫛形状
のコンデンサ用素子か作製される。Next, the metal plate 5 is moved by a predetermined distance in the direction of the arrow 7 and the above operation is repeated. In this way, on one side of the metal plate 5,
A comb-shaped capacitor element is produced in which one ends of rectangular foils 2 are connected at predetermined intervals.
なお、上記説明では、長方形の箔2“を1枚ずつ接続し
たが、供給ロール1を複数曲べて、箔2を送り出し、同
時に複数枚の長方形の箔2′を金属板に接続して生産効
率を高めることもできる。In the above explanation, the rectangular foils 2'' are connected one by one, but it is also possible to bend the supply roll 1 multiple times, feed out the foils 2, and connect multiple rectangular foils 2' to the metal plate at the same time. It can also increase efficiency.
また、金属板5に箔2を接合した後、切断して長方形の
箔2“とじたが、先に切断して長方形の箔2′ とした
後、これを金属板5に接合してもよいし、切断と接合を
同時に行ってもよい。切断した後接合する場合には、切
断された長方形の箔2′を金属板5の所定の位置に置く
ために、例えば真空系で長方形の箔2”を吸着する方法
を利用してもよい。例えば真空ラインの先に接続された
、移動自在なパイプを長方形の箔2′ にあてて箔を吸
着し、さらにスイッチ等でパイプの真空ラインを遮断す
ることによって箔をパイプから脱離させる方法等かあげ
られる。In addition, after joining the foil 2 to the metal plate 5, the foil 2' was cut and bound into a rectangular foil 2', but it is also possible to first cut the foil 2' into a rectangular foil 2' and then join this to the metal plate 5. However, cutting and joining may be performed at the same time. When joining after cutting, the rectangular foil 2' is cut in a vacuum system, for example, in order to place the cut rectangular foil 2' at a predetermined position on the metal plate 5. ” may be used. For example, a method can be used in which a movable pipe connected to the end of a vacuum line is applied to a rectangular foil 2' to adsorb the foil, and then the foil is detached from the pipe by cutting off the vacuum line of the pipe with a switch, etc. I can give it to you.
上記コンデンサ用素子の寸法は、供給ロールに巻回する
箔2の幅および切断線A−Aの位置を選ぶことによって
自由に調整することかでき、また金属板上に接合する箔
間隙は金属板の送り幅によって任意に選ぶことかできる
。The dimensions of the capacitor element described above can be freely adjusted by selecting the width of the foil 2 wound around the supply roll and the position of the cutting line A-A, and the gap between the foils bonded to the metal plate is It can be selected arbitrarily depending on the feed width.
次に、本発明の方法で作製したコンデンサ用素子からコ
ンデンサを作製する方法について説明する。Next, a method for manufacturing a capacitor from a capacitor element manufactured by the method of the present invention will be described.
表面に誘電体酸化皮膜を有する長方形の弁金属エツチン
グ箔か複数枚接続されたコンデンサ用素子の所定部分に
半導体層を形成するが、並列している複数枚の長方形の
弁金属エツチング箔上に同時に半導体層が形成される。A semiconductor layer is formed on a predetermined portion of a capacitor element in which a plurality of rectangular valve metal etching foils having a dielectric oxide film on the surface are connected. A semiconductor layer is formed.
この場合、半導体層を形成する位置は、電気ショートを
防くために、金属板に接続しないようにあらかじめ位置
合わせをしておくことが肝要である。半導体層の種類と
して、従来公知のものか採用できるか、特に本発明者等
か特開昭63−51621号公報で提案した二酸化鉛、
たまは二酸化鉛と硫酸鉛を主成分とした半導体層か、作
製したコンデンサの高周波特性が良好なため好ましい。In this case, it is important that the position where the semiconductor layer is formed be aligned in advance so that it does not connect to the metal plate in order to prevent electrical short-circuits. As for the type of semiconductor layer, are there any conventionally known ones that can be used? In particular, lead dioxide, which was proposed by the present inventors in JP-A No. 63-51621,
A semiconductor layer mainly composed of lead dioxide and lead sulfate is preferable because the produced capacitor has good high frequency characteristics.
半導体層まで形成したコンデンサ用素子を従来公知のカ
ーボンペーストおよび/または銀ペースト浴に浸漬し、
引き上げることにより、半導体層上に導電体層が形成さ
れる。ついで各々の弁金属エツチング箔を金属板から取
りはずすか、あるいは半導体層が形成されていない部所
で弁金属エツチング箔を切断して、個々のコンデンサ素
子とする。さらに、半導体層か形成されていない弁金属
エツチング箔部分と、導電体層が形成されている部分に
各々リート線を取付ける。最後に、例えば樹脂モールド
、樹脂ケース、金属製の外装ケース、樹脂のディッピン
グ、ラミネートフィルムによる外装などにより各種用途
の汎用コンデンサ製品とすることができる。The capacitor element formed up to the semiconductor layer is immersed in a conventionally known carbon paste and/or silver paste bath,
By pulling up, a conductor layer is formed on the semiconductor layer. Each of the valve metal etched foils is then removed from the metal plate, or the valve metal etched foils are cut at locations where no semiconductor layer is formed to produce individual capacitor elements. Furthermore, REET wires are attached to the valve metal etched foil portion where the semiconductor layer is not formed and to the portion where the conductor layer is formed. Finally, it can be made into a general-purpose capacitor product for various uses by, for example, resin molding, resin case, metal outer case, resin dipping, laminated film outer case, etc.
実施例1
幅3 m m、長さ250mのアルミニウム化成石(4
0μF/cm’)を巻回した供給ロールを装置にセット
し、これより引出した箔をカイトロールで引出し、カイ
トレールを通して箔の先端を長さ40mm、 mo、5
mmのステンレス製の板上に突出せしめた。ついてステ
ンレス板上に設けられたスポット溶接機(日本アビオニ
クス株式会社製)によって電気的、機械的に接合し、さ
らにステンレス板の側面から5mmの所で、ステンレス
板の長手方向に平行に箔を切断した。次いてステンレス
板を長手方向に4a+m送り再度箔の引出し、ステンレ
ス板への接続、切断を繰り返した。このようにして、ス
テンレス板の側面に、側面から5mmの長さで幅が3m
mの長方形の箔が、間隔1 mmで100個並んだ櫛形
状のコンデンサ用素子を作製した。Example 1 Aluminum chemical stone (4
A supply roll wound with 0 μF/cm') was set in the device, the foil pulled out from this was pulled out with a kite roll, and the tip of the foil was passed through the kite rail to a length of 40 mm, mo, 5
It was made to protrude onto a stainless steel plate of mm. The foil was then electrically and mechanically joined using a spot welder (manufactured by Nippon Avionics Co., Ltd.) installed on the stainless steel plate, and the foil was then cut parallel to the longitudinal direction of the stainless steel plate at a distance of 5 mm from the side of the stainless steel plate. did. Next, the stainless steel plate was moved 4 a+m in the longitudinal direction, and the process of pulling out the foil again, connecting it to the stainless steel plate, and cutting it was repeated. In this way, on the side of the stainless steel plate, a length of 5 mm from the side and a width of 3 m is attached.
A comb-shaped capacitor element was prepared in which 100 pieces of rectangular foil of m diameter were lined up at an interval of 1 mm.
次に、作製したコンデンサ用素子を用い、公知の方法に
よりコンデンサを作製した。Next, a capacitor was manufactured by a known method using the manufactured capacitor element.
先ず、コンデンサ用素子の長方形箔側をステンレス板の
側面から0.51を残して、りん酸およびりん酸アンモ
ニウム水溶液中に浸漬し、再化成した。つづいて、酢酸
鉛三水和物24モル/Qの水溶液と過硫酸アンモニウム
4モル/Cの水溶液の混合液に長方形箔の部分を、ステ
ンレス板の側面から2111mを残して浸漬し、40℃
で1時間反応させ二酸化鉛25wt%、硫酸鉛75wt
%からなる半導体層を形成した。さらに、カーホンペー
スト槽、銀ペースト槽に順次浸漬して半導体層上に導電
体層上に導電体層を形成した後、ステンレス板の側面か
ら1.51の部分で全ての箔を切断した。First, the rectangular foil side of the capacitor element was immersed in an aqueous solution of phosphoric acid and ammonium phosphate, leaving 0.51 mm from the side of the stainless steel plate, to reconstitute it. Next, the rectangular foil part was immersed in a mixed solution of 24 mol/Q aqueous solution of lead acetate trihydrate and 4 mol/C aqueous solution of ammonium persulfate, leaving a distance of 2111 m from the side of the stainless steel plate at 40°C.
25 wt% lead dioxide, 75 wt% lead sulfate
% was formed. Furthermore, after forming a conductor layer on the semiconductor layer and the conductor layer by sequentially immersing it in a carphone paste bath and a silver paste bath, all the foils were cut at a portion of 1.51 mm from the side surface of the stainless steel plate.
次いで別に用意した2枚の銅板(幅2mm、長さ5+n
m、厚さ0 、1 mm)に、作製した箔の導電体層部
および誘電体層部のみ存在する部分(0,5X3mmの
部分)を各々のせ、前者は銀ペーストで、後者はスボ、
)溶接で電気的、機械的に接続し、これを樹脂封口して
コンデンサを作製した。作製したコンデンサの特性値を
測定して第1表に示した。Next, two separately prepared copper plates (width 2 mm, length 5 + n
The parts (0.5 x 3 mm) of the fabricated foil where only the conductor layer and dielectric layer exist were placed on the foils (0.5 mm x 3 mm), the former was coated with silver paste, the latter was coated with stubs,
) A capacitor was fabricated by electrically and mechanically connecting them by welding and sealing them with resin. The characteristic values of the manufactured capacitor were measured and shown in Table 1.
第 1 表
但し、(1)は120Hz、(2)は100KHz、(
3)は10 Vての値である。Table 1 However, (1) is 120Hz, (2) is 100KHz, (
3) is the value at 10 V.
以上説明したように、本発明に係る電解コンデンサ用素
子の製造方法は、長尺テープ状弁金属工・ノチング箔を
順次送り出しつつ、金属板または金属線に接続し切断す
ることによって、箔が連続的に接続されるので、従来の
方法に比較して極めて効率がよく、また金型による大型
箔からの打ち抜きによって作製していないので箔間隔を
極めて小さくとれるため、一つの素子中の筒数を多くと
ることができコストダウンができる。As explained above, in the method for manufacturing an element for an electrolytic capacitor according to the present invention, a long tape-shaped valve metal work/notching foil is sequentially fed out, connected to a metal plate or metal wire, and then cut, so that the foil is continuous. This method is extremely efficient compared to the conventional method, and since it is not manufactured by punching out large foils using a mold, the spacing between the foils can be kept extremely small, so the number of tubes in one element can be reduced. You can save more and reduce costs.
さらに、これを用いて作製した固体電解コンデンサは、
特性か優れる等の長所を有している。Furthermore, the solid electrolytic capacitor produced using this
It has advantages such as superior characteristics.
第1図および第2図は本発明の方法を実施する装置の一
例を示す図で、第1図は側面図、第2図は第1図の■〜
■線矢視図である。
1・・・・・・供給ロール、
2・・・・・・長尺テープ状弁金属エツチング箔2′・
・・・・・長方形の箔、
3・・・・・ガイドロール、
4・・・・ガイドレール、
5・・・・・・金属板、
6・・・・・・接合機、
7・・・・矢印。
(箔)1 and 2 are diagrams showing an example of an apparatus for carrying out the method of the present invention. FIG. 1 is a side view, and FIG. 2 is a side view of FIG.
■It is a line arrow view. 1... Supply roll, 2... Long tape-shaped valve metal etching foil 2'.
... Rectangular foil, 3 ... Guide roll, 4 ... Guide rail, 5 ... Metal plate, 6 ... Joining machine, 7 ...・Arrow. (foil)
Claims (3)
は金属線の長さ方向に対して直角に先端を接続した後、
所定の長さに切断し、並列に配置して固体電解コンデン
サ用素子を作製し、次いでこれら並列に配置されたそれ
ぞれの弁金属エッチング箔の表面に誘電体酸化皮膜層、
その上面所定の位置に半導体層、さらにその上面に導電
体層を順次積層形成した後、上記金属板或は金属線から
取外すか、或は半導体層が形成されていない部所で切断
して分離し、これらを固体電解コンデンサ素子として用
いることを特徴とする固体電解コンデンサの製造方法。(1) After connecting the tips of the long tape-shaped valve metal etching foil at right angles to the length direction of the metal plate or metal wire,
A solid electrolytic capacitor element is produced by cutting to a predetermined length and placing them in parallel, and then a dielectric oxide film layer,
After sequentially forming a semiconductor layer at a predetermined position on the upper surface and a conductor layer on the upper surface, it is removed from the metal plate or metal wire, or separated by cutting at a location where the semiconductor layer is not formed. and a method for manufacturing a solid electrolytic capacitor, characterized in that these are used as a solid electrolytic capacitor element.
体酸化皮膜層が形成されている長尺テープ弁金属エッチ
ング箔であり、並列に配置されたそれぞれの弁金属エッ
チング箔の表面に順次積層されるのが、所定の位置に半
導体層、その上面に導電体層である請求項(1)記載の
固体電解コンデンサの製造方法。(2) The long tape-shaped valve metal etching foil is a long tape valve metal etching foil with a dielectric oxide film layer formed on the surface, and is sequentially applied to the surface of each valve metal etching foil arranged in parallel. 2. The method of manufacturing a solid electrolytic capacitor according to claim 1, wherein what is laminated is a semiconductor layer at a predetermined position and a conductor layer on the upper surface of the semiconductor layer.
された複数本の長尺テープ状弁金属エッチング箔である
請求項(1)または(2)記載の固体電解コンデンサの
製造方法。(3) The method for manufacturing a solid electrolytic capacitor according to claim 1 or 2, wherein the long tape-like valve metal etching foil is a plurality of long tape-like valve metal etching foils arranged in parallel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12097790A JP2828317B2 (en) | 1990-05-10 | 1990-05-10 | Method for manufacturing solid electrolytic capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12097790A JP2828317B2 (en) | 1990-05-10 | 1990-05-10 | Method for manufacturing solid electrolytic capacitor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0417318A true JPH0417318A (en) | 1992-01-22 |
JP2828317B2 JP2828317B2 (en) | 1998-11-25 |
Family
ID=14799727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12097790A Expired - Lifetime JP2828317B2 (en) | 1990-05-10 | 1990-05-10 | Method for manufacturing solid electrolytic capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2828317B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002203756A (en) * | 2000-09-01 | 2002-07-19 | Showa Denko Kk | Manufacturing system of capacitor device member |
US7398593B2 (en) | 2000-09-01 | 2008-07-15 | Showa Denko K.K. | Apparatus for producing capacitor element member |
CN110085427A (en) * | 2019-03-28 | 2019-08-02 | 南通南铭电子有限公司 | A kind of capacitor guide pin formation device |
-
1990
- 1990-05-10 JP JP12097790A patent/JP2828317B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002203756A (en) * | 2000-09-01 | 2002-07-19 | Showa Denko Kk | Manufacturing system of capacitor device member |
US7398593B2 (en) | 2000-09-01 | 2008-07-15 | Showa Denko K.K. | Apparatus for producing capacitor element member |
US7617595B2 (en) | 2000-09-01 | 2009-11-17 | Showa Denko K.K. | Apparatus for producing capacitor element member |
JP4716157B2 (en) * | 2000-09-01 | 2011-07-06 | 株式会社村田製作所 | Capacitor element manufacturing equipment |
CN110085427A (en) * | 2019-03-28 | 2019-08-02 | 南通南铭电子有限公司 | A kind of capacitor guide pin formation device |
Also Published As
Publication number | Publication date |
---|---|
JP2828317B2 (en) | 1998-11-25 |
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