JP4716157B2

JP4716157B2 - Capacitor element manufacturing equipment

Info

Publication number: JP4716157B2
Application number: JP2001262675A
Authority: JP
Inventors: 洋仁藤; 俊博岡部; 顯治石井; 厚坂井
Original assignee: Murata Manufacturing Co Ltd
Current assignee: Murata Manufacturing Co Ltd
Priority date: 2000-09-01
Filing date: 2001-08-31
Publication date: 2011-07-06
Anticipated expiration: 2021-08-31
Also published as: JP2002203756A

Description

【０００１】
【発明の属する技術分野】
本発明は、単板コンデンサ素子の製造に用いるコンデンサ素子部材の製造装置に関する。さらに詳しく言えば、弁金属となる一定長さの矩形状の金属箔を金属製ガイド（ガイド部材）に接合してなる櫛歯状のコンデンサ素子部材を製造する装置、及びその装置に使用する金属箔自動送り装置、金属箔の切断装置、並びに前記切断装置により得られる金属箔に関する。
【０００２】
【背景技術】
近年、電子機器の性能向上と共にその小型化及び携帯化が進行し、これに使用される電子部品の小型化、高性能化が進んでいる。特に、電源の出力平滑回路部に用いられるコンデンサとしては、高周波域において低インピーダンスであって等価直列抵抗値（ＥＳＲ値）の低いコンデンサが求められている。
【０００３】
導電性高分子を電解質とする固体電解コンデンサは、単板コンデンサ素子を積層することによって低インピーダンスで低ＥＳＲの小型大容量のコンデンサとすることが可能であり、多くの固体電解コンデンサが提案されている。
【０００４】
従来、固体電解コンデンサに用いる単板コンデンサ素子の製造方法として、幅広の金属箔を用い、これを打ち抜いてコンデンサ素子となる複数の突起部分とその支持部分が一体化した櫛歯状の形状とし、支持部分を台座板等に固定した後にコンデンサ素子部分の加工を行い、この部分を支持部分から切り離して積層する方法が提案されている（特開平5-166681号公報等）。また、金属箔をフォトエッチング等によって所定形状に加工した後にコンデンサ素子単板として加工し、積層する方法が提案されている（特開平9-36003号公報等）。しかし、これらの方法は何れも経済性が不十分で、また生産効率も低い問題がある。
【０００５】
従来の上記製造方法に対し、金属板または金属線（ガイド部材）の側縁に、その長さ方向に対して直角に長尺テープ状の金属箔を接続して所定長さに切断し、これを繰り返してガイド部材に多数の金属箔が並列に接合した櫛歯状の形状とし、これらの金属箔の表面に誘電体酸化皮膜層、半導体層及び導電体層を順次形成した後に、金属箔をガイド部材から分離して固体電解コンデンサ素子として用いる方法が本発明者等によって提案されている〔特開平4-17318号公報（特許第2828317号）〕。この方法は製造効率が良く、固体電解コンデンサ素子を低コストで製造できる利点を有している。
【０００６】
【発明の開示】
本発明は、先に提案した上記製造方法を生産性良く実施するための製造装置に関し、弁金属となる矩形状の金属箔を金属製ガイド（ガイド部材）に接合してなる櫛歯状のコンデンサ素子部材を生産性良く製造する装置を提供するものである。また、この製作工程において、金属箔を単純にシェア切断すると切断面にバリやクラックが発生しやすく金属箔にダメージを与える。このような箔のダメージは単板コンデンサ素子の特性低下を招き、固体電解コンデンサ、特に積層型固体電解コンデンサの製造効率が低下するという問題を生じるので、切断後に切断刃の間に隙間（クリアランス）を形成して切断位置から待避する機構を設け、これによりバリやクラックの発生を抑えた装置を提供する。また、金属箔の溶接時に溶接機の電極が汚れると連続的に溶接するのが難しくなるので電極の自動研磨機構を設け、連続的にかつ精度良く金属箔を接合できるようにした製造装置を提供する。
【０００７】
さらに、本発明は前記コンデンサ素子部材の製造装置を生産性よく実施するための、長尺テープ状の金属箔を自動的に一定長さ送り出す定寸送り機構を有する自動送り装置を提供する。また、長尺テープ状の金属箔は薄いため、箔の切断や箔表面の損傷を受けやすいので、好ましくは箔の切断や箔表面の損傷を防止する手段を備え、金属製ガイドに複数の金属箔を接合する工程において、リールに巻かれた長尺テープ状金属箔を傷つけず、また金属箔を変形させずに位置精度良く一定長さで送ることのできる金属箔自動送り装置を提供する。
【０００８】
さらに、本発明は前記コンデンサ素子部材の製造装置において使用する長尺テープ状の金属箔の切断装置及び金属箔の切断方法を提供する。従来の切断装置では、コンデンサ素子シートをカッターやダイシングソーを用いて切断し（特開平9-260218号公報）、あるいはレーザビームで切断して（特開平5-299309号公報）コンデンサ素子を製作しているが、カッターやダイジングソーによる切断では切断面にダレやクラックなどの変形が生じやすく、また金属箔のエッチング層（誘電体層）の剥落を招くなど切断面に与えるダメージが大きい。このような箔のダメージは単板コンデンサ素子の特性低下を招き、積層形固体電解コンデンサの製造効率が低下するという問題を生じる。レーザによる切断は切断面に与えるダメージは比較的少ないが、設備が高価で製造コストが嵩み、設備も大型化する問題がある。
【０００９】
本発明は金属箔に対してこのようなダメージを与えず、切断面のバリやクラックまたは変形を殆ど生じない切断装置及び切断方法を提供する。
【００１０】
すなわち、本発明は以下の構成からなるコンデンサ素子部材の製造装置、その装置で使用する金属箔自動送り装置と金属箔の切断装置、金属の切断方法及びその方法により得られる金属箔に関する。
【００１１】
１．単板コンデンサ素子の製造に用いるコンデンサ素子部材の製造装置であって、ガイド部材に向かって金属箔を一定長さで送出する自動送り機構、金属箔をガイド部材に接合する機構、接合した金属箔を切断する機構を有することを特徴とするコンデンサ素子部材の製造装置。
２．自動送り機構が、金属箔を一定長さで送出する定寸送り機構、リールから引き出した金属箔の弛みを調節する弛み機構、金属箔の送出位置を整える位置決め機構を有する前項１に記載のコンデンサ素子部材の製造装置。
３．自動送り機構が、金属箔を一定長さで送出する定寸送り機構、リールから引き出した金属箔の弛みを調節する弛み機構、金属箔の送出位置を整える位置決め機構、及び金属箔表面の粉塵を除去する機構を有する前項１に記載のコンデンサ素子部材の製造装置。
４．接合機構が溶接手段を有する前項１乃至３のいずれかひとつに記載するコンデンサ素子部材の製造装置。
５．接合機構の溶接手段がスポット溶接である前項４に記載のコンデンサ素子部材の製造装置。
６．接合機構が連続式スポット溶接であり、さらに電極の研磨機構を有する前項４に記載のコンデンサ素子部材の製造装置。
７．切断機構が金属箔を挟み込んで切断するシェア切断である前項１乃至６のいずれかひとつに記載のコンデンサ素子部材の製造装置。
８．切断機構が金属箔を挟み込んで切断するシェア切断であり、切断後に切断刃の間に隙間を生じて退避する機構を有する前項１乃至６のいずれかひとつに記載のコンデンサ素子部材の製造装置。
９．金属箔の送出方向に沿って、自動送り機構、切断機構、及び接合機構が順に配設されている前項１乃至８のいずれかひとつに記載のコンデンサ素子部材の製造装置。
１０．金属箔の送出方向に沿って、自動送り機構、接合機構、及び切断機構が順に配設されている前項１乃至８のいずれかひとつに記載のコンデンサ素子部材の製造装置。
１１．自動送り機構によって金属箔をその先端がガイド部材に届くまで一定長さ送り出し、次に接合機構によって金属箔先端をガイド部材に押圧して溶接し、溶接後、切断機構によって金属箔を一定長さに剪断し、この金属箔の送出から切断に至る一連の動作を繰り返すことにより、矩形の金属箔をガイド部材に複数接合して櫛歯状のコンデンサ素子部材を製造する前項１乃至１０のいずれかひとつに記載のコンデンサ素子部材の製造装置。
１２．単板コンデンサ素子部材の製造装置で用いられる金属箔自動送り装置であって、テープ状の金属箔を挟み込んで送り出す少なくとも一対のピンチローラと、該ピンチローラを一定回転させる手段と、その駆動手段とからなる定寸送り機構を有し、金属箔を一定長さで送ることを特徴とする金属箔自動送り装置。
１３．定寸送り機構が、ピンチローラと、その軸端に設けたピニオンギアと、これに噛合するラックギア、及びラックギアに連結した駆動手段とによって形成されている前項１２に記載の金属箔自動送り装置。
１４．定寸送り機構が、ピンチローラと、その軸端に設けたプーリと、これに装着した動力伝達ベルト、及び該ベルトに連結したステッピングモータによって形成されている前項１２に記載の金属箔自動送り装置。
１５．長尺テープ状の金属箔を巻装保持するリールと、その回転手段、及び該リールからピンチローラの間に配設された位置センサーとからなる自動弛み機構を有する前項１２乃至１４のいずれかに記載の金属箔自動送り装置。
１６．金属箔の送り方向に沿って配設されたスライドテーブルと、該テーブルを金属箔の送り方向に対して側方に押圧する手段と、金属箔の送り幅を制御するように該テーブル上面に立設されたロール状のベアリングとからなる水平位置決め機構を有する前項１２乃至１５のいずれかに記載の金属箔自動送り装置。
１７．スライドテーブルに対し金属箔の浮き上がりを防止する上下位置決め機構を有する前項１２乃至１６のいずれかに記載の金属箔自動送り装置。
１８．金属箔表面に気体を吹き付けて表面の粉塵を吹き飛ばす噴射手段と、吹き飛ばされた粉塵を吸い込む吸引管からなる粉塵除去機構を有する前項１２乃至１７のいずれかに記載の金属箔自動送り装置。
１９．単板コンデンサ素子部材製造装置で用いられ金属箔の切断装置であって、金属箔を挟み込む上下動自在な一対の刃を有し、一方の刃が弾性力によって他方の刃に押圧して軸支されており、さらにこの弾性力に抗して一方の刃を押し離す手段が設けられており、これにより切断後に切断刃を離して退避させる機構が形成されていることを特徴とする金属箔の切断装置。
２０．弾性力を生じる手段が、金属バネ、空気バネ、またはゴム弾性体である前項１９に記載の金属箔の切断装置。
２１．弾性力がバネ力である前項１９に記載の金属箔の切断装置。
２２．金属箔を挟み込む上刃と下刃、この上刃と下刃を支えるフレーム、フレームの上下動手段を有しており、下刃はその基端部が上刃の根本にバネを介して軸着されると共にその先端部が下刃フレームにバネを介して軸着されており、これにより下刃が上刃に密着し、その基端部を中心にして回動自在に形成されており、さらに下刃の基端部を上刃から押し離す押圧ロッドが設けられている前項１９乃至２１のいずれかひとつに記載の金属箔の切断装置。
２３．単板コンデンサ素子の製造に用いる金属箔を挟み込んで切断するシェア切断方法において、切断後に切断刃間に隙間を形成し、切断刃を離して退避させることを特徴とする金属箔の切断方法。
２４．金属箔が単板コンデンサ素子の弁金属箔である前項２３に記載の金属箔の切断方法。
２５．弁金属箔が、アルミニウム、タンタル、チタン、ニオブまたはその合金の薄箔である前項２４に記載の金属箔の切断方法。
２６．切断刃の隙間が０.１〜１.０ｍｍの範囲である前項２３乃至２５のいずれかひとつに記載の金属箔の切断方法。
２７．前項２３乃至２６のいずれかに記載の切断方法によって得られた金属箔。
２８．金属箔の切断面のクラック幅が０.１ｍｍ以下である前項２７に記載の金属箔。
２９．金属箔の切断面のクラック幅が０.０５ｍｍ以下である前項２７に記載の金属箔。
３０．前項２７に記載の金属箔の表面に、誘導体酸化皮膜層、半導体層及び導電体層を有するコンデンサ素子
【００１２】
【発明の実施の形態】
以下、図面に示す実施例を参照して本発明を具体的に説明する。
図１は本発明に係るコンデンサ素子部材の製造装置の全体構成を示す概略斜視図、図２及び図３は自動送り機構（装置）の概略側面図、図４は自動送り機構に設けた位置決め手段の概略平面図、図５は切断機構（装置）の概略斜視図、図６（ａ）〜（ｈ）は金属箔の接合から切断に至る一連の動作の説明図である。なお、図１及び図５において切断機構のフレームは一部を切り欠いて示している。
【００１３】
図示する本発明のコンデンサ素子部材製造装置は、長尺テープ状の金属箔１をガイド部材３に向かって一定長さで送り出す自動送り機構１０、この金属箔１の先端をガイド部材３に接合する機構５０、接合した金属箔１を一定長さに切断する機構４０を有しており、切断された矩形状の金属箔２がガイド部材３の側端に複数並列に接合された櫛歯状のコンデンサ素子部材を製作する装置である。この部材を用いて矩形状の金属箔２に誘電体酸化皮膜層、半導体層、及び導電体層が順次形成され、この金属箔２は最終的にガイド部材から切断分離されて単板固体電解コンデンサ素子として用いられる。本発明のコンデンサ素子部材の製造装置はこのような固体電解コンデンサー素子の製造ラインにおいて用いられる装置である。
【００１４】
図１に示す装置構成では、金属箔１はガイド部材３の移動方向に対し、その側方へ向かって送り出されるように配設されており、その送出方向に沿って自動送り機構１０、位置決め機構３０、切断機構４０、及び接合機構５０が順に配設されている。切断機構４０の前方にはガイド部材３が位置し、その上方に接合機構５０が設けられている。以下、各機構あるいはその機構を有する装置例について具体的に説明する。
【００１５】
（Ａ）自動送り装置
図７は本発明に係るコンデンサ素子部材の製造装置で使用する金属箔自動送り装置を示す部分外観斜視図、図８は自動弛み機構の概略図、図９及び図３は定寸送り機構の概略図、図１０〜図１２は金属箔の水平及び上下位置決め機構の概略図、図１３は粉塵除去機構の概略図である。
【００１６】
図示する本発明の金属箔自動送り装置１０は、長尺テープ状の金属箔１を巻装保持する手段と、これを傷付けず、また変形せずに引き出す自動弛み機構１５、この金属箔１を一定長さで送る定寸送り機構２０、定寸送りされた金属箔の水平及び上下の位置を定める位置決め機構３０によって構成されている。位置決めされた金属箔１は接合切断装置４０に導かれ、金属箔１の先端が金属製ガイド３の側端に接合された後に一定長さに切断され、順次この接合と切断が繰り返されて金属製ガイド３の側端に多数の金属箔２が並列に接合した櫛歯状の部材が形成される。この部材を用いて金属箔の部分に誘電体酸化皮膜層、半導体層、及び導電体層が順次形成され、この金属箔は最終的にガイド部材から切断分離されて単板固体電解コンデンサ素子として用いられる。金属箔自動送り装置はこのような製造ラインにおいて、長尺テープ状の金属箔を接合切断装置に送り込む装置である。
【００１７】
リール１１に巻装された長尺テープ状の金属箔１は定寸送り機構２０に導かれるが、本発明の自動送り装置１０はリール１１と定寸送り機構２０との間で金属箔に引張り力が発生しないように自動弛み機構１５を有する。図８に図示する自動弛み機構１５は、長尺テープ状の金属箔１を巻装保持するリール１１と、その回転手段１２、該リール１１から引き出された金属箔１を挟み込んで回転するピンチローラ１３、及びリール１１とピンチローラ１３の間に配設された位置センサ１４によって構成されている。位置センサ１４は引き出されたテープ状金属箔１の上下位置を検出するものであり、金属箔１の上側に配設された上限センサ１４ａと金属箔１の下側に配設された下限センサ１４ｂを有している。これらのセンサは一般にフォトセンサ等の非接触タイプのセンサが用いられる。
【００１８】
金属箔に引張り力を与えると、破断したり、箔が伸びて箔容量が変化するなどの問題が生じる。このため、リール１１と定寸送り機構２０との間で金属箔１に引張り力が発生しないように、回転手段１２によってリール１１を送り出し方向に回転させ、引き出された金属箔１を常に弛んだ状態に保たせる。この弛み量が少なくて金属箔１が上方に引っ張られた状態になると、上限センサー１４ａがこの状態を検知し、回転手段１２に指令を送り、リール１１を送り出し方向に回転して金属箔１の弛みを大きくする。一方、金属箔１の弛み量が大きすぎると、箔がテーブルに接触して汚れたり傷が付くなどの問題があるので、下限センサー１４ｂが金属箔１を検知して回転手段１２に指令を送り、リール１１の回転を制限して金属箔１の弛みを小さくする。
【００１９】
定寸送り機構２０はテープ状の金属箔１を一定長さで送り出す手段であり、テープ状の金属箔１を挟み込んで送り出す少なくとも一対のピンチローラ２１、２２と、該ピンチローラ２１、２２を一定回転させる手段と、その駆動手段によって形成されている。図９に示す例では、このピンチローラ２１、２２のうち金属箔１の下側に位置する駆動ローラ２１に一方向クラッチが内蔵されており、このローラ軸端にピニオンギア２３が装着されており、これに噛合するラックギア２４が設けられている。ラックギア２４にはアクチュエータ等の駆動手段２５が連結している。なお、ピンチローラ２１、２２の金属箔と接触する表面の材質は金属箔を傷つけず、かつ送り長さの精度を維持するために磨耗の少ない合成樹脂を用いると良い。
【００２０】
上記定寸送り機構２０において、金属箔１は駆動ピンチローラ２１及び従動ピンチローラ２２によって上下に挟み込まれ、アクチュエータ等２５によってラック２４が一定長さ往復運動するのに対応してピニオンギヤ２３が回転し、内蔵された一方向クラッチを通じてこのピニオンギヤ２３の回転が駆動ローラ２１に伝達され、従動ローラ２２と一体になって金属箔１を一定長さ送り出す。図９に示す例ではラック２４が上昇したときにのみ一方向クラッチが繋がってローラ２１が回転し、金属箔１が送られる。ラック２４が下降するときにはクラッチが外れ、金属箔は送られない。このラック２４の移動距離によって金属箔１の送り長さが決定される。なお、アクチュエータ２５はエアシリンダーやカム駆動などの駆動方式によって限定されず何れでもよい。また、駆動ローラ２１と従動ローラ２２の駆動・従動関係は逆でも良く、ともに駆動ローラの場合でも良い。
【００２１】
図３に示す定寸送り機構２０は、アクチュエーターとしてステッピングモーター２９を用い、ラックギアの代りにタイミングベルト２７を用いた例である。ピンチローラ２２の軸端に設けたプーリ２６とステッピングモータ２９に連結したプーリ２８との間に動力伝達ベルト２７が装着されている。このベルトには歯付きベルトを用いると良い。パルス等によりモータ２９の回転数が制御され、小刻みに正確な等回転角運動がピンチローラ２１に伝達され、ピンチローラ２１、２２が定回転して金属箔１が一定長さ送り出される。
【００２２】
リール１１から供給される金属箔１は前述の弛み機構１５によって非拘束の状態にある。このため、金属箔１を金属製ガイド３の所定位置に溶接するには、次のような位置決め機構があると好ましい。図１０〜図１２に示す位置決め機構３０は、金属箔１の送り方向に沿って配設されたスライドテーブル３１と、該テーブル３１を金属箔１の送り方向に対して側方に押圧する手段（押圧ロッド）３６と、金属箔１の送り幅を制御するようにテーブル３１の上面に立設されたロール状のベアリング（ミニチュアベアリング）３２からなる水平位置決め機構、及び金属箔１をテーブル３１の上面に押圧して浮き上がりを防止する上下位置決め機構を有している。
【００２３】
テーブル３１の上面には金属箔１の両側にロール状のベアリング３２が立設されており（図示する例では２対）、このベアリング３２によって金属箔１の水平方向の位置が規整される。スライドテーブル３１は金属箔１の送り方向に対して側方へ摺動できるようにスタンド３７に設置されており、この摺動方向に押圧ロッド３６が設けられている。押圧ロッド３６はテーブル３１の側方に位置するフレーム３５にバネ３８を介して支持されており、このバネ力によってテーブル３１を側方に押付けている。押圧ロッド３６のねじ込み量を調整することによって押圧力が制御され、テーブル３１の水平方向の位置が調整される。バネ３８は金属バネに限らず、弾性力を有する弾性体であればよい。
【００２４】
また、図示する装置例では上下位置決め機構を形成する４個のガイドローラ３４がテーブル３１の上側に配設されている。このガイドローラ３４は金属箔１の送り方向に沿って回転するようにスタンド３７に軸支されており、かつ金属箔の浮き上がりを抑えるようにテーブル上面の金属箔表面から数１０ミクロンの間隙を保って設置されている。なお、この上下位置決め機構はガイドローラ３４に限らず板状ないしベルト状の部材によって形成しても良い。また、図示する装置例では、リール１１の側から送り方向に向かって、定寸送り機構２０の次に位置決め機構３０が設けられているが、この順序を逆にして位置決め機構３０の次に定寸送り機構２０を設けても良い。
【００２５】
また、スリットされた金属箔１にはその表面にスリット時に発生する切粉等が付着していることがある。本発明の金属箔自動送り装置は、好ましくは、この粉塵を除去する機構５２を有する。図１３に示す粉塵除去機構５２は、金属箔１の表面に気体を吹き付けて粉塵を吹き飛ばす噴射手段５３と、吹き飛ばされた粉塵を吸い込む吸引管５４によって形成されている。噴射手段５３は金属箔表面に向かって設置した噴射ノズルと圧縮気体（空気など）の供給手段によって形成すれば良い。本機構５２は圧縮気体による粉塵の飛散を防止するようにカバー（図示省略）で覆われている。金属箔の表面から取り除いた粉塵は吸引管５４を通じてバキュームクリーナなどによって吸引し系外に除去すれば良い。なお、この粉塵除去機構５２は自動弛み機構１５、定寸送り機構２０、位置決め機構３０の間に適宜設けることができるが、自動弛み機構１５とその他の機構の間に設けることが好ましい。
【００２６】
（Ｂ）切断装置
図１４は本発明に係るコンデンサ素子部材の製造装置で使用する長尺テープ状の金属箔の切断装置の構成を示す概略斜視図、図１５はその作動状態を示す説明図である。なお、図１４及び図１５（Ａ）〜（Ｄ）において切断機構のフレームは一部を切り欠いて示している。
【００２７】
図１４の切断装置は金属箔を挟み込んでシェア切断する装置であり、切断後に切断刃間に隙間を形成し、切断刃を離して退避させることを特徴とする。また、切断装置は、金属箔を挟み込む上下動自在な一対の刃を有し、一方の刃は弾性力によって他方の刃に押圧して軸支されており、さらにこの弾性力に抗して一方の刃を押し離す手段が設けられており、これにより切断後に切断刃を離して退避させる機構が形成されていることを特徴とする。
【００２８】
本切断装置では、一方の刃が弾性力によって他方の刃に押圧して軸支されている。一般に弾性力は外力によって弾性変形をうけている弾性体がその変形を元に戻そうとする力であり、天然ゴム、加硫ゴム、シリコーンゴムなどのゴム弾性体、コイルバネ、板バネ、渦巻バネなどの金属バネ、あるいは空気の弾性を利用した空気バネを使用することができる。特に金属バネが機械要素として使用できる。図１４の装置では金属バネを用いている。
【００２９】
図示する装置例において、切断装置４０はテープ状の金属箔１を上下に挟み込むように配設された上刃４１と下刃４２を有しており、この上刃４１は上刃フレーム４３に一体に形成されている。一方、下刃４２の一端（基端部）４２ａはバネ４５を介して上刃フレーム４３に軸着されており、また他端（先端部）４２ｂはバネ４６を介して押さえフレーム４４に軸着されている。これらのフレーム４３、４４はおのおのアクチュエータ等の駆動手段（図示省略）に連結されており、上下動自在に形成されている。また、下刃４２はその両端部に設けたバネ４５、４６によって上刃４１に押し付けられており、切断時に上刃４１と下刃４２の間に隙間（クリアランス）が生じないように形成されている。
【００３０】
本切断装置４０には切断後に切断刃がクリアランスを生じて退避する機構が設けられている。この退避機構は下刃４２をバネ力に抗して押し戻す押圧ロッド４７によって形成されている。この押圧ロッド４７は下刃４２の基端部に向かって突き出すように設置されており、アクチュエータ等の駆動手段４８に往復動自在に連結されている。また、押圧ロッド４７の先端は上刃４１及び下刃４２の上下動によってロッド４７の先端が下刃４２から外れないように下方に延びて形成されている。なお、押圧ロッド４７は下刃４２の先端部側あるいはその両端に設置してもよい。
【００３１】
図１５（Ａ）に示すように、上刃４１と下刃４２の間に金属箔１が挟み込まれた状態で押さえフレーム４４が上昇すると、フレーム４４に軸着している下刃４２の先端部４２ｂが一緒に押し上げられ、上刃４１の根本付近に軸着されている基端部４２ａを中心にして下刃４２が回転する。この下刃４２の回転によって上刃４１と下刃４２の間に挟み込まれている金属箔１が切断される（図１５（Ｂ））。
【００３２】
金属箔１の切断後、駆動手段４８によって押圧ロッド４７が前方に突き出し、バネ力に抗して下刃４２を押さえフレーム側に押し戻し（図１５（Ｃ））、上刃４１との間にクリアランス（Ｌ）を生じさせる（図１５（Ｃ））。下刃４２はこのクリアランス（Ｌ）を保って待機位置に下降する（図１５（Ｄ））。このため金属箔の切断面に与えるダメージを極力抑えることができ、切断面の変形やバリまたはクラックの発生を防止することができる。なお、クリアランス（Ｌ）は０.１〜１.０ｍｍ、好ましくは０.２〜０.８ｍｍ、より好ましくは０.３〜０.７ｍｍの範囲であれば良い。この待避機構によって金属箔の切断面に生じるクラックの幅を、好ましくは金属箔の厚さの０.１〜１.０倍、より好ましくは０.１〜０.８倍、さらに好ましくは０.１〜０.５倍の範囲に抑えることができる。
【００３３】
なお、刃の材質はステンレス、セラミックス、ダイヤモンド、高速度鋼、超硬合金などのように金属箔より硬度が高いものが適当であり、高速度鋼、ステンレスまたはセラミックスが好ましい。またテープ状金属箔は単板コンデンサ素子の弁金属となるアルミニウム、タンタル、チタン、ニオブまたはその合金が用いられ、この金属箔の厚さは１０〜３００μｍ、好ましくは１０〜２００μｍ、さらに好ましくは１０〜１２０μｍの薄箔が適当である。また、金属箔の幅は０.５〜１００ｍｍ、好ましくは１〜５０ｍｍの範囲が良い。
【００３４】
図１４に示す本発明の切断装置（切断ユニット）、市販の洋裁ハサミ、解剖ハサミ及び紙裁断機を用いて、おのおのアルミニウム箔（幅３ｍｍ、厚さ１００μｍ）を切断した。各切断面の顕微鏡写真を図１６、図１７、図１８及び図１９（Ａ）、図１９（Ｂ）に示す。本発明の切断ユニットを用いた切断面の幅は０.０４５ｍｍであり（図１６）、殆どクラックが生じない状態であった。一方、市販の洋裁ハサミを用いた切断面のクラック幅は０.１１６ｍｍ（図１７）であり、解剖ハサミを用いた切断面のクラック幅は０.１５０ｍｍ（図１８）、紙裁断機を用いた切断面のクラック幅は何れも０.１１３ｍｍ（図１９（Ａ）、図１９（Ｂ））であり、本発明の切断ユニットを用いたものに比べてクラック幅が３倍程度大きかった。
【００３５】
（Ｃ）接合機構
図１において、５０は金属箔１の先端をガイド部材３に接合する接合機構であり、カシメ等の機械的接合、ハンダ溶接、抵抗溶接、レーザー溶接手段などを有する。金属箔を連続的に接合するにはスポット溶接機、レーザー溶接機などが好ましい。さらに、経済性の点からスポット溶接機が好ましい。図１に示すように、溶接機のヘッド（電極）５１はガイド部材３の上方に上下動自在に設けられている。好ましくは、連続的に溶接できるよう電極５１の自動研磨手段（図示省略）が設けられている。この溶接ヘッド５１は金属箔１の送出状態及び切断機構の動作に対応して上下動し、金属箔１の先端をガイド部材３に溶接する。
【００３６】
次に、接合機構５０による接合切断の動作について説明する。図６に示すように、原位置（図６ａ）から自動送り機構１０によってテープ状金属箔１が一定長さ送り出され、金属箔１の先端がガイド部材の側端に達すると（図６ｂ）、溶接ヘッド５１が下降して金属箔１の先端をガイド部材に押圧して溶接する（図６ｃ）。溶接後、溶接ヘッド５１が上昇して溶接箇所を離れる一方、上刃４１が切断位置に下降する（図６ｄ）。次いで下刃４２が上昇し、下刃４２が上刃４１に密接した状態で金属箔１を切断する（図６ｅ）。切断後、押圧ロッド４７によって下刃４２が押し戻され、上刃４１との間に隙間が形成される（図６ｆ）。この隙間を保って下刃４２が下方に退避し（図６ｇ）、上刃４１が上方に戻り（図６ｈ）、原位置に復帰して次の切断動作のために待機する。原位置に復帰した溶接ヘッド５１は再び下降する間に自動研磨装置によって電極が研磨される。
【００３７】
金属箔１が切断され、上刃４１と下刃４２が原位置に退避すると、ガイド部材３が一定長さ前方に送り出され、接合された矩形状の金属箔２の隣に次の金属箔を接合するように待機する。次いで、本発明の装置が一連の上記溶接動作を繰り返し、矩形状の金属箔２をガイド部材３の側端に順次連続的に接合することによって櫛歯状のコンデンサ素子部材４が製造される。
【００３８】
以上、本発明の好適な実施例について説明したが、本発明は上記実施例に限定されない。本発明の技術思想を逸脱しない範囲において装置構成を種々に変更することができる。
【００３９】
【発明の効果】
本発明の製造装置によれば、金属箔にダメージを与えることなく一定長さ送り出し、金属箔の先端を連続的に金属製ガイド部材に接合し、この金属箔をバリやクラックの発生を極力少なくして切断できるので、単板コンデンサ素子を生産性良く製造することができる。
【図面の簡単な説明】
【図１】本発明に係る製造装置の全体構成を示す概略斜視図である。
【図２】本発明に係る金属箔自動送り装置の概略側面図である。
【図３】ステッピングモータを用いた金属箔自動送り装置の概略側面図である。
【図４】金属箔自動送り装置に設けた位置決め手段の概略平面図である。
【図５】本発明に係る長尺テープ状金属箔の切断装置の概略斜視図である。
【図６】金属箔の接合から切断に至る動作の説明図である。
【図７】本発明に係る金属箔自動送り装置を示す部分外観斜視図である。
【図８】自動弛み機構の概略図である。
【図９】ギヤ機構による定寸送り機構の概略図である。
【図１０】位置決め機構の概略平面図である。
【図１１】位置決め機構の概略正面図である。
【図１２】位置決め機構の概略側面図である。
【図１３】粉塵除去機構の概念図である。
【図１４】本発明に係る切断装置の構成を示す概略斜視図である。
【図１５】（Ａ）、（Ｂ）、（Ｃ）および（Ｄ）は切断作用の工程を示す工程図である。
【図１６】本発明切断装置による金属箔の切断面を示す顕微鏡写真である。
【図１７】洋裁ハサミを用いた金属箔の切断面を示す顕微鏡写真である。
【図１８】解剖ハサミを用いた金属箔の切断面を示す顕微鏡写真である。
【図１９】（Ａ）および（Ｂ）は紙裁断機を用いた金属箔の切断面を示す顕微鏡写真である。
【符号の説明】
１，２金属箔；３金属製ガイド；
１０金属箔自動送り装置；１１リール；
１２リール回転手段；１３ピンチローラ；
１４位置センサ；１５自動弛み機構；
２０定寸送り機構；２１，２２ピンチローラ；
２３ピニオンギア；２４ラックギア；
２５アクチュエータ；２６，２８プーリ；
２７ベルト；２９ステッピングモーター；
３０位置決め機構；３１スライドテーブル；
３２ベアリング；３４ガイドローラ；
３５フレーム；３６押圧ロッド；
３７スタンド；３８バネ；
４０接合切断装置；４１上刃；４２下刃；
４３，４４フレーム；４５，４６バネ；
４７押圧ロッド；４８駆動手段；
５１溶接機のヘッド（電極）；
５２粉塵除去機構；５３噴射手段；５４粉塵吸引管[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a capacitor element member manufacturing apparatus used for manufacturing a single plate capacitor element. More specifically, an apparatus for manufacturing a comb-shaped capacitor element member obtained by joining a rectangular metal foil of a certain length serving as a valve metal to a metal guide (guide member), and metal used in the apparatus The present invention relates to an automatic foil feeding device, a metal foil cutting device, and a metal foil obtained by the cutting device.
[0002]
[Background]
In recent years, along with improvement in performance of electronic devices, miniaturization and portability have progressed, and miniaturization and high performance of electronic components used therefor have progressed. In particular, as a capacitor used in an output smoothing circuit section of a power supply, a capacitor having a low impedance and a low equivalent series resistance value (ESR value) in a high frequency region is required.
[0003]
A solid electrolytic capacitor using a conductive polymer as an electrolyte can be made into a small-capacity capacitor having a low impedance and a low ESR by stacking single plate capacitor elements, and many solid electrolytic capacitors have been proposed. Yes.
[0004]
Conventionally, as a method of manufacturing a single plate capacitor element used for a solid electrolytic capacitor, a wide metal foil is used, and a plurality of protruding portions that become a capacitor element by punching it and a supporting portion are integrated into a comb-like shape, There has been proposed a method in which a capacitor element portion is processed after fixing a support portion to a pedestal plate or the like, and this portion is separated from the support portion and laminated (Japanese Patent Laid-Open No. 5-166681). In addition, a method has been proposed in which a metal foil is processed into a predetermined shape by photoetching or the like and then processed as a capacitor element single plate and laminated (Japanese Patent Laid-Open No. 9-36003). However, all of these methods have problems in that they are not economical and the production efficiency is low.
[0005]
Compared to the conventional manufacturing method described above, a long tape-shaped metal foil is connected to a side edge of a metal plate or metal wire (guide member) at a right angle to the length direction and cut into a predetermined length. Is repeated to form a comb-like shape in which a large number of metal foils are joined in parallel to the guide member, and after sequentially forming a dielectric oxide film layer, a semiconductor layer and a conductor layer on the surface of these metal foils, A method of separating the guide member and using it as a solid electrolytic capacitor element has been proposed by the present inventors [Japanese Patent Laid-Open No. 4-17318 (Patent No. 2828317)]. This method has an advantage that the production efficiency is good and the solid electrolytic capacitor element can be produced at a low cost.
[0006]
DISCLOSURE OF THE INVENTION
The present invention relates to a manufacturing apparatus for carrying out the above-described manufacturing method with good productivity, and a comb-like capacitor formed by joining a rectangular metal foil serving as a valve metal to a metal guide (guide member). An apparatus for manufacturing element members with high productivity is provided. Further, in this manufacturing process, if the metal foil is simply shear cut, burrs and cracks are likely to occur on the cut surface, and the metal foil is damaged. Such foil damage leads to a deterioration of the characteristics of the single-plate capacitor element, which causes a problem that the manufacturing efficiency of the solid electrolytic capacitor, particularly the multilayer solid electrolytic capacitor, is reduced. Is provided, and a mechanism for avoiding the occurrence of burrs and cracks is provided. In addition, if the electrodes of the welding machine become dirty when welding the metal foil, it will be difficult to continuously weld. Therefore, an automatic electrode polishing mechanism is provided to enable continuous and accurate joining of the metal foil. To do.
[0007]
Furthermore, the present invention provides an automatic feeding device having a constant-size feeding mechanism that automatically feeds a long tape-shaped metal foil for a certain length in order to implement the capacitor element member manufacturing apparatus with high productivity. In addition, since the long tape-shaped metal foil is thin, it is susceptible to foil cutting and foil surface damage. Therefore, it is preferable to provide a means for preventing the foil cutting and foil surface damage, and a plurality of metals on the metal guide. Provided is a metal foil automatic feeding device capable of feeding a fixed length with high positional accuracy without damaging a long tape-shaped metal foil wound on a reel and without deforming the metal foil in the step of joining the foils.
[0008]
Furthermore, the present invention provides a long tape-shaped metal foil cutting device and a metal foil cutting method used in the capacitor element member manufacturing apparatus. In a conventional cutting apparatus, a capacitor element sheet is cut using a cutter or a dicing saw (Japanese Patent Laid-Open No. 9-260218) or cut with a laser beam (Japanese Patent Laid-Open No. 5-299309) to produce a capacitor element. However, cutting with a cutter or a dicing saw tends to cause deformation such as sagging or cracks on the cut surface, and damage to the cut surface is large, such as causing the metal foil etching layer (dielectric layer) to peel off. Such damage to the foil causes a deterioration in the characteristics of the single-plate capacitor element, resulting in a problem that the manufacturing efficiency of the multilayer solid electrolytic capacitor is lowered. Laser cutting causes relatively little damage to the cut surface, but there is a problem that the equipment is expensive, the manufacturing cost is increased, and the equipment is enlarged.
[0009]
The present invention provides a cutting apparatus and a cutting method that do not cause such damage to the metal foil and hardly cause burrs, cracks, or deformation of the cut surface.
[0010]
That is, this invention relates to the manufacturing apparatus of the capacitor | condenser element member which consists of the following structures, the metal foil automatic feed apparatus and metal foil cutting device which are used with the apparatus, the metal cutting method, and the metal foil obtained by the method.
[0011]
1. An apparatus for manufacturing a capacitor element member used for manufacturing a single plate capacitor element, an automatic feed mechanism for feeding a metal foil at a fixed length toward a guide member, a mechanism for bonding a metal foil to a guide member, and a bonded metal foil An apparatus for manufacturing a capacitor element member, comprising a mechanism for cutting the capacitor.
2. 2. The capacitor according to item 1 above, wherein the automatic feeding mechanism has a fixed length feeding mechanism for feeding the metal foil at a fixed length, a slack mechanism for adjusting the slack of the metal foil drawn from the reel, and a positioning mechanism for adjusting the sending position of the metal foil. Device member manufacturing apparatus.
3. The automatic feed mechanism is a fixed-size feed mechanism that feeds the metal foil at a fixed length, a slack mechanism that adjusts the slack of the metal foil drawn from the reel, a positioning mechanism that adjusts the feed position of the metal foil, and dust on the metal foil surface. 2. The apparatus for producing a capacitor element member according to item 1, which has a mechanism for removing.
4). 4. The apparatus for manufacturing a capacitor element member according to any one of items 1 to 3, wherein the joining mechanism includes welding means.
5. 5. The apparatus for manufacturing a capacitor element member as described in 4 above, wherein the welding means of the joining mechanism is spot welding.
6). 5. The apparatus for manufacturing a capacitor element member according to item 4, wherein the joining mechanism is continuous spot welding and further has an electrode polishing mechanism.
7). 7. The apparatus for manufacturing a capacitor element member according to any one of 1 to 6 above, wherein the cutting mechanism is shear cutting in which a metal foil is sandwiched and cut.
8). 7. The apparatus for manufacturing a capacitor element member according to any one of the preceding items 1 to 6, wherein the cutting mechanism is a shear cutting in which a metal foil is sandwiched and cut, and has a mechanism that creates a gap between the cutting blades after the cutting and retracts.
9. 9. The apparatus for manufacturing a capacitor element member according to any one of the preceding items 1 to 8, wherein an automatic feeding mechanism, a cutting mechanism, and a joining mechanism are sequentially arranged along a feeding direction of the metal foil.
10. 9. The apparatus for manufacturing a capacitor element member according to any one of the preceding items 1 to 8, wherein an automatic feeding mechanism, a joining mechanism, and a cutting mechanism are sequentially arranged along a feeding direction of the metal foil.
11. The metal foil is fed out for a fixed length by the automatic feed mechanism until the tip reaches the guide member, then welded by pressing the metal foil tip against the guide member by the joining mechanism, and after welding, the metal foil is fixed by the cutting mechanism. Any one of the preceding items 1 to 10 in which a plurality of rectangular metal foils are joined to a guide member by manufacturing a comb-like capacitor element member by repeating a series of operations from feeding to cutting of the metal foil. The manufacturing apparatus of the capacitor | condenser element member as described in one.
12 A metal foil automatic feeding device used in a single plate capacitor element member manufacturing apparatus, comprising at least a pair of pinch rollers for sandwiching and feeding a tape-like metal foil, means for rotating the pinch rollers at a constant rate, and driving means thereof A metal foil automatic feeding device characterized in that it has a constant-size feeding mechanism comprising:
13. 13. The metal foil automatic feeding device according to the preceding item 12, wherein the fixed-size feeding mechanism is formed by a pinch roller, a pinion gear provided at an end of the shaft, a rack gear meshing with the pinion roller, and driving means connected to the rack gear.
14 13. The metal foil automatic feeding device according to item 12 above, wherein the fixed-size feeding mechanism is formed by a pinch roller, a pulley provided at the shaft end thereof, a power transmission belt attached to the pinch roller, and a stepping motor connected to the belt. .
15. Any of the preceding items 12 to 14 having an automatic slack mechanism comprising a reel for winding and holding a long tape-shaped metal foil, a rotating means thereof, and a position sensor disposed between the reel and the pinch roller. The metal foil automatic feeding device described.
16. A slide table arranged along the feeding direction of the metal foil, a means for pressing the table laterally with respect to the feeding direction of the metal foil, and an upper surface of the table so as to control the feeding width of the metal foil. 16. The metal foil automatic feeding device according to any one of 12 to 15 above, which has a horizontal positioning mechanism comprising a roll-shaped bearing provided.
17. 17. The metal foil automatic feeding device according to any one of 12 to 16 above, which has a vertical positioning mechanism for preventing the metal foil from being lifted with respect to the slide table.
18. 18. The metal foil automatic feeding device according to any one of items 12 to 17, further comprising: a spraying unit that blows gas on the surface of the metal foil to blow off dust on the surface; and a dust removing mechanism that includes a suction pipe that sucks in the dust that has been blown off.
19. A metal foil cutting device used in a single plate capacitor element manufacturing apparatus, having a pair of vertically movable blades sandwiching the metal foil, and one blade is pressed against the other blade by an elastic force and is pivotally supported. Further, there is provided means for pushing away one of the blades against this elastic force, thereby forming a mechanism for releasing the cutting blade after cutting and retreating the metal foil. Cutting device.
20. 20. The metal foil cutting device according to 19 above, wherein the means for generating the elastic force is a metal spring, an air spring, or a rubber elastic body.
21. 20. The metal foil cutting device according to 19 above, wherein the elastic force is a spring force.
22. It has upper and lower blades that sandwich metal foil, a frame that supports the upper and lower blades, and a vertical movement means for the frame. The bottom edge of the lower blade is attached to the root of the upper blade via a spring via a spring. At the same time, its tip is pivotally attached to the lower blade frame via a spring, so that the lower blade is in close contact with the upper blade and is formed so as to be rotatable around its base end. 22. The metal foil cutting device according to any one of the preceding items 19 to 21, wherein a pressing rod is provided to push the base end of the lower blade away from the upper blade.
23. A shear cutting method in which a metal foil used for manufacturing a single-plate capacitor element is sandwiched and cut, wherein a gap is formed between the cutting blades after cutting, and the cutting blade is separated and retracted.
24. 24. The method for cutting a metal foil according to item 23, wherein the metal foil is a valve metal foil of a single plate capacitor element.
25. 25. The method for cutting a metal foil according to 24 above, wherein the valve metal foil is a thin foil of aluminum, tantalum, titanium, niobium or an alloy thereof.
26. 26. The method for cutting a metal foil according to any one of items 23 to 25, wherein a gap between the cutting blades is in a range of 0.1 to 1.0 mm.
27. 27. A metal foil obtained by the cutting method according to any one of items 23 to 26.
28. 28. The metal foil according to item 27 above, wherein the crack width of the cut surface of the metal foil is 0.1 mm or less.
29. 28. The metal foil according to item 27 above, wherein the crack width of the cut surface of the metal foil is 0.05 mm or less.
30. 28. A capacitor element having a derivative oxide film layer, a semiconductor layer, and a conductor layer on the surface of the metal foil according to item 27.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be specifically described with reference to embodiments shown in the drawings.
FIG. 1 is a schematic perspective view showing the overall configuration of a capacitor element member manufacturing apparatus according to the present invention, FIGS. 2 and 3 are schematic side views of an automatic feed mechanism (apparatus), and FIG. 4 is a positioning means provided in the automatic feed mechanism. FIG. 5 is a schematic perspective view of a cutting mechanism (apparatus), and FIGS. 6A to 6H are explanatory views of a series of operations from joining to cutting of a metal foil. In FIGS. 1 and 5, the frame of the cutting mechanism is partially cut away.
[0013]
An apparatus for manufacturing a capacitor element member according to the present invention shown in the figure is an automatic feed mechanism 10 that feeds a long tape-shaped metal foil 1 toward a guide member 3 at a fixed length, and joins the tip of the metal foil 1 to the guide member 3. The mechanism 50 has a mechanism 40 that cuts the joined metal foils 1 to a certain length, and a plurality of the cut rectangular metal foils 2 are joined to the side end of the guide member 3 in parallel. An apparatus for producing a capacitor element member. Using this member, a dielectric oxide film layer, a semiconductor layer, and a conductor layer are sequentially formed on a rectangular metal foil 2, and this metal foil 2 is finally cut and separated from the guide member to obtain a single plate solid electrolytic capacitor. Used as an element. The capacitor element member manufacturing apparatus of the present invention is an apparatus used in such a solid electrolytic capacitor element manufacturing line.
[0014]
In the apparatus configuration shown in FIG. 1, the metal foil 1 is disposed so as to be sent out sideways with respect to the moving direction of the guide member 3, and the automatic feeding mechanism 10 and the positioning mechanism are arranged along the sending direction. 30, the cutting mechanism 40, and the joining mechanism 50 are disposed in this order. The guide member 3 is positioned in front of the cutting mechanism 40, and a joining mechanism 50 is provided above the guide member 3. Hereinafter, each mechanism or an example of an apparatus having the mechanism will be specifically described.
[0015]
(A) Automatic feeder
FIG. 7 is a partial external perspective view showing a metal foil automatic feeding device used in the capacitor element member manufacturing apparatus according to the present invention, FIG. 8 is a schematic diagram of an automatic slack mechanism, and FIGS. 9 and 3 are schematic diagrams of a fixed-size feeding mechanism. FIGS. 10 to 12 are schematic views of a horizontal and vertical positioning mechanism for metal foil, and FIG. 13 is a schematic view of a dust removing mechanism.
[0016]
The metal foil automatic feeding device 10 of the present invention shown in the figure includes a means for winding and holding a long tape-shaped metal foil 1, an automatic slack mechanism 15 for pulling out the metal foil 1 without damaging or deforming the metal foil 1. The fixed-size feed mechanism 20 for feeding at a constant length and the positioning mechanism 30 for determining the horizontal and vertical positions of the metal foil fed by the fixed length are configured. The positioned metal foil 1 is guided to the joining / cutting device 40, and after the tip of the metal foil 1 is joined to the side end of the metal guide 3, the metal foil 1 is cut to a certain length. A comb-like member having a large number of metal foils 2 joined in parallel is formed at the side end of the guide 3. Using this member, a dielectric oxide film layer, a semiconductor layer, and a conductor layer are sequentially formed on the metal foil portion. This metal foil is finally cut and separated from the guide member and used as a single plate solid electrolytic capacitor element. It is done. In such a production line, the metal foil automatic feeding device is a device for feeding a long tape-shaped metal foil to a joining and cutting device.
[0017]
The long tape-shaped metal foil 1 wound around the reel 11 is guided to the sizing feed mechanism 20, but the automatic feeding device 10 of the present invention pulls the metal foil between the reel 11 and the sizing feed mechanism 20. An automatic slack mechanism 15 is provided so that no force is generated. An automatic slack mechanism 15 shown in FIG. 8 includes a reel 11 for winding and holding a long tape-shaped metal foil 1, its rotating means 12, and a pinch roller that rotates while sandwiching the metal foil 1 drawn from the reel 11. 13 and a position sensor 14 disposed between the reel 11 and the pinch roller 13. The position sensor 14 detects the vertical position of the drawn tape-shaped metal foil 1, and the upper limit sensor 14 a disposed on the upper side of the metal foil 1 and the lower limit sensor 14 b disposed on the lower side of the metal foil 1. have. These sensors are generally non-contact type sensors such as photo sensors.
[0018]
When a tensile force is applied to the metal foil, problems such as breakage and expansion of the foil to change the foil capacity arise. For this reason, the reel 11 is rotated in the feeding direction by the rotating means 12 so that no pulling force is generated on the metal foil 1 between the reel 11 and the fixed-size feeding mechanism 20, and the drawn metal foil 1 is always loosened. Keep it in a state. When the amount of slack is small and the metal foil 1 is pulled upward, the upper limit sensor 14a detects this state, sends a command to the rotating means 12, and rotates the reel 11 in the delivery direction to Increase the slack. On the other hand, if the amount of slack of the metal foil 1 is too large, there is a problem that the foil contacts the table and gets dirty or scratched. Therefore, the lower limit sensor 14b detects the metal foil 1 and sends a command to the rotating means 12. The rotation of the reel 11 is limited to reduce the slack of the metal foil 1.
[0019]
The fixed-size feeding mechanism 20 is a means for feeding out the tape-shaped metal foil 1 with a fixed length. At least a pair of pinch rollers 21 and 22 that sandwich and feed the tape-shaped metal foil 1 and the pinch rollers 21 and 22 are fixed. It is formed by means for rotating and its driving means. In the example shown in FIG. 9, a one-way clutch is built in the drive roller 21 located below the metal foil 1 among the pinch rollers 21 and 22, and a pinion gear 23 is mounted on the end of the roller shaft. A rack gear 24 that meshes with the rack gear 24 is provided. Driving means 25 such as an actuator is connected to the rack gear 24. It should be noted that the material of the surface of the pinch rollers 21 and 22 that contacts the metal foil is preferably made of a synthetic resin with little wear so as not to damage the metal foil and to maintain the feed length accuracy.
[0020]
In the fixed dimension feeding mechanism 20, the metal foil 1 is sandwiched up and down by the drive pinch roller 21 and the driven pinch roller 22, and the pinion gear 23 rotates in response to the rack 24 reciprocating for a certain length by the actuator 25 or the like. The rotation of the pinion gear 23 is transmitted to the driving roller 21 through the built-in one-way clutch, and the metal foil 1 is fed out by a certain length together with the driven roller 22. In the example shown in FIG. 9, only when the rack 24 is raised, the one-way clutch is engaged, the roller 21 rotates, and the metal foil 1 is sent. When the rack 24 descends, the clutch is disengaged and the metal foil is not sent. The feed length of the metal foil 1 is determined by the moving distance of the rack 24. The actuator 25 is not limited by a driving system such as an air cylinder or cam driving, and any may be used. Further, the driving / driven relationship between the driving roller 21 and the driven roller 22 may be reversed, and both may be driving rollers.
[0021]
3 is an example in which a stepping motor 29 is used as an actuator and a timing belt 27 is used instead of a rack gear. A power transmission belt 27 is mounted between a pulley 26 provided at the shaft end of the pinch roller 22 and a pulley 28 connected to a stepping motor 29. A toothed belt may be used as the belt. The number of rotations of the motor 29 is controlled by a pulse or the like, and an accurate uniform rotation angular motion is transmitted to the pinch roller 21 in small increments, the pinch rollers 21 and 22 are rotated at a constant speed, and the metal foil 1 is sent out for a certain length.
[0022]
The metal foil 1 supplied from the reel 11 is in an unconstrained state by the aforementioned slack mechanism 15. For this reason, in order to weld the metal foil 1 to the predetermined position of the metal guide 3, it is preferable to have the following positioning mechanism. A positioning mechanism 30 shown in FIGS. 10 to 12 includes a slide table 31 disposed along the feeding direction of the metal foil 1 and a means for pressing the table 31 laterally with respect to the feeding direction of the metal foil 1 ( A horizontal positioning mechanism including a pressing rod) 36 and a roll-shaped bearing (miniature bearing) 32 erected on the upper surface of the table 31 so as to control the feed width of the metal foil 1, and the metal foil 1 on the upper surface of the table 31. It has a vertical positioning mechanism that prevents it from being lifted by pressing.
[0023]
Rolled bearings 32 are erected on both sides of the metal foil 1 on the upper surface of the table 31 (two pairs in the illustrated example), and the horizontal position of the metal foil 1 is regulated by the bearings 32. The slide table 31 is installed on a stand 37 so as to be slidable laterally with respect to the feeding direction of the metal foil 1, and a pressing rod 36 is provided in this sliding direction. The pressing rod 36 is supported by a frame 35 positioned on the side of the table 31 via a spring 38 and presses the table 31 to the side by this spring force. The pressing force is controlled by adjusting the screwing amount of the pressing rod 36, and the horizontal position of the table 31 is adjusted. The spring 38 is not limited to a metal spring, and may be an elastic body having an elastic force.
[0024]
In the illustrated apparatus example, four guide rollers 34 that form a vertical positioning mechanism are arranged on the upper side of the table 31. This guide roller 34 is pivotally supported by a stand 37 so as to rotate along the feeding direction of the metal foil 1, and keeps a gap of several tens of microns from the surface of the metal foil on the upper surface of the table so as to prevent the metal foil from rising. Installed. The vertical positioning mechanism is not limited to the guide roller 34, and may be formed by a plate-like or belt-like member. In the example of the apparatus shown in the figure, the positioning mechanism 30 is provided next to the fixed dimension feeding mechanism 20 from the reel 11 side toward the feeding direction. A dimension feed mechanism 20 may be provided.
[0025]
In addition, the slitted metal foil 1 may have chips or the like generated at the time of slitting on its surface. The metal foil automatic feeding device of the present invention preferably has a mechanism 52 for removing the dust. The dust removing mechanism 52 shown in FIG. 13 is formed by an injection unit 53 that blows gas onto the surface of the metal foil 1 and blows off the dust, and a suction pipe 54 that sucks the blown-off dust. The injection means 53 may be formed by an injection nozzle installed toward the surface of the metal foil and a supply means for compressed gas (air or the like). The mechanism 52 is covered with a cover (not shown) so as to prevent dust from being scattered by compressed gas. The dust removed from the surface of the metal foil may be sucked by a vacuum cleaner or the like through the suction pipe 54 and removed from the system. The dust removal mechanism 52 can be provided as appropriate between the automatic slack mechanism 15, the constant-size feed mechanism 20, and the positioning mechanism 30, but is preferably provided between the automatic slack mechanism 15 and other mechanisms.
[0026]
(B) Cutting device
FIG. 14 is a schematic perspective view showing a configuration of a cutting device for a long tape-shaped metal foil used in the capacitor element member manufacturing apparatus according to the present invention, and FIG. 15 is an explanatory view showing an operating state thereof. 14 and 15A to 15D, the frame of the cutting mechanism is partially cut away.
[0027]
The cutting device of FIG. 14 is a device that performs shear cutting by sandwiching a metal foil, and is characterized in that after cutting, a gap is formed between the cutting blades, and the cutting blades are separated and retracted. Further, the cutting device has a pair of vertically movable blades that sandwich the metal foil, and one blade is pivotally supported by pressing against the other blade by an elastic force. A means for pushing and releasing the blade is provided, thereby forming a mechanism for separating and retracting the cutting blade after cutting.
[0028]
In this cutting apparatus, one blade is pivotally supported by being pressed against the other blade by an elastic force. In general, the elastic force is a force that an elastic body that has undergone elastic deformation by an external force tries to restore the original deformation. Rubber elastic bodies such as natural rubber, vulcanized rubber, and silicone rubber, coil springs, leaf springs, and spiral springs A metal spring such as the above, or an air spring using the elasticity of air can be used. In particular, metal springs can be used as mechanical elements. The apparatus shown in FIG. 14 uses a metal spring.
[0029]
In the illustrated apparatus example, the cutting device 40 has an upper blade 41 and a lower blade 42 disposed so as to sandwich the tape-shaped metal foil 1 up and down, and the upper blade 41 is integrated with the upper blade frame 43. Is formed. On the other hand, one end (base end portion) 42 a of the lower blade 42 is pivotally attached to the upper blade frame 43 via a spring 45, and the other end (tip portion) 42 b is pivotally attached to the holding frame 44 via a spring 46. Has been. Each of the frames 43 and 44 is connected to driving means (not shown) such as an actuator and is formed to be movable up and down. The lower blade 42 is pressed against the upper blade 41 by springs 45 and 46 provided at both ends thereof, and is formed so that no gap (clearance) is generated between the upper blade 41 and the lower blade 42 during cutting. Yes.
[0030]
The cutting device 40 is provided with a mechanism in which the cutting blade retreats with a clearance after cutting. This retracting mechanism is formed by a pressing rod 47 that pushes back the lower blade 42 against the spring force. The pressing rod 47 is installed so as to protrude toward the base end portion of the lower blade 42, and is connected to driving means 48 such as an actuator so as to be able to reciprocate. Further, the tip of the pressing rod 47 is formed to extend downward so that the tip of the rod 47 does not come off the lower blade 42 by the vertical movement of the upper blade 41 and the lower blade 42. The pressing rod 47 may be installed on the tip end side of the lower blade 42 or on both ends thereof.
[0031]
As shown in FIG. 15A, when the pressing frame 44 rises with the metal foil 1 sandwiched between the upper blade 41 and the lower blade 42, the tip of the lower blade 42 that is pivotally attached to the frame 44 42b is pushed up together, and the lower blade 42 rotates around the base end portion 42a that is pivotally attached near the root of the upper blade 41. The metal foil 1 sandwiched between the upper blade 41 and the lower blade 42 is cut by the rotation of the lower blade 42 (FIG. 15B).
[0032]
After cutting the metal foil 1, the pressing rod 47 protrudes forward by the driving means 48, pushes the lower blade 42 back to the holding frame against the spring force (FIG. 15C), and the clearance between the upper blade 41. (L) is generated (FIG. 15C). The lower blade 42 is lowered to the standby position while maintaining this clearance (L) (FIG. 15D). For this reason, damage to the cut surface of the metal foil can be suppressed as much as possible, and deformation of the cut surface and generation of burrs or cracks can be prevented. The clearance (L) may be in the range of 0.1 to 1.0 mm, preferably 0.2 to 0.8 mm, more preferably 0.3 to 0.7 mm. The width of the crack generated on the cut surface of the metal foil by this retracting mechanism is preferably 0.1 to 1.0 times the thickness of the metal foil, more preferably 0.1 to 0.8 times, and still more preferably 0.5. It can be suppressed to a range of 1 to 0.5 times.
[0033]
The blade material is suitably higher in hardness than the metal foil, such as stainless steel, ceramics, diamond, high speed steel, cemented carbide, etc., and high speed steel, stainless steel or ceramics is preferred. The tape-shaped metal foil is made of aluminum, tantalum, titanium, niobium or an alloy thereof used as a valve metal of a single plate capacitor element. The thickness of the metal foil is 10 to 300 μm, preferably 10 to 200 μm, more preferably 10 A thin foil of ~ 120 μm is suitable. Moreover, the width | variety of metal foil is 0.5-100 mm, Preferably the range of 1-50 mm is good.
[0034]
Each aluminum foil (width 3 mm, thickness 100 μm) was cut using a cutting device (cutting unit) of the present invention shown in FIG. 14, a commercially available dressmaking scissors, an autopsy scissors, and a paper cutter. The micrograph of each cut surface is shown in FIG. 16, FIG. 17, FIG. 18, FIG. 19 (A), and FIG. 19 (B). The width of the cut surface using the cutting unit of the present invention was 0.045 mm (FIG. 16), and almost no cracks were generated. On the other hand, the crack width of the cut surface using commercially available dressing scissors was 0.116 mm (FIG. 17), the crack width of the cut surface using dissecting scissors was 0.150 mm (FIG. 18), and a paper cutter was used. The crack widths of the cut surfaces were both 0.113 mm (FIGS. 19A and 19B), and the crack width was about three times larger than that using the cutting unit of the present invention.
[0035]
(C) Joining mechanism
In FIG. 1, reference numeral 50 denotes a joining mechanism for joining the tip of the metal foil 1 to the guide member 3, and includes mechanical joining such as caulking, solder welding, resistance welding, laser welding means, and the like. In order to continuously join the metal foil, a spot welder, a laser welder, or the like is preferable. Furthermore, a spot welder is preferable from the viewpoint of economy. As shown in FIG. 1, the head (electrode) 51 of the welding machine is provided above the guide member 3 so as to be movable up and down. Preferably, automatic polishing means (not shown) of the electrode 51 is provided so that welding can be performed continuously. The welding head 51 moves up and down in response to the feeding state of the metal foil 1 and the operation of the cutting mechanism, and welds the tip of the metal foil 1 to the guide member 3.
[0036]
Next, the operation of joining and cutting by the joining mechanism 50 will be described. As shown in FIG. 6, when the tape-shaped metal foil 1 is fed out from the original position (FIG. 6 a) by the automatic feeding mechanism 10 for a certain length and the tip of the metal foil 1 reaches the side edge of the guide member (FIG. 6 b), The welding head 51 descends and presses the tip of the metal foil 1 against the guide member for welding (FIG. 6c). After welding, the welding head 51 rises and leaves the welding location, while the upper blade 41 descends to the cutting position (FIG. 6d). Next, the lower blade 42 is raised, and the metal foil 1 is cut in a state where the lower blade 42 is in close contact with the upper blade 41 (FIG. 6e). After cutting, the lower blade 42 is pushed back by the pressing rod 47, and a gap is formed between the lower blade 42 and the upper blade 41 (FIG. 6f). With this gap maintained, the lower blade 42 is retracted downward (FIG. 6g), the upper blade 41 returns upward (FIG. 6h), returns to the original position, and waits for the next cutting operation. While the welding head 51 returned to the original position is lowered again, the electrode is polished by the automatic polishing apparatus.
[0037]
When the metal foil 1 is cut and the upper blade 41 and the lower blade 42 are retracted to their original positions, the guide member 3 is sent forward by a predetermined length, and the next metal foil is placed next to the joined rectangular metal foil 2. Wait to join. Next, the apparatus of the present invention repeats a series of the above-described welding operations, and the comb-like capacitor element member 4 is manufactured by sequentially joining the rectangular metal foil 2 to the side end of the guide member 3 sequentially.
[0038]
As mentioned above, although the suitable Example of this invention was described, this invention is not limited to the said Example. The apparatus configuration can be variously changed without departing from the technical idea of the present invention.
[0039]
【The invention's effect】
According to the manufacturing apparatus of the present invention, the metal foil is fed out for a certain length without damaging the metal foil, the tip of the metal foil is continuously joined to the metal guide member, and the occurrence of burrs and cracks is minimized as much as possible. Therefore, the single plate capacitor element can be manufactured with high productivity.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing the overall configuration of a manufacturing apparatus according to the present invention.
FIG. 2 is a schematic side view of the automatic metal foil feeding device according to the present invention.
FIG. 3 is a schematic side view of a metal foil automatic feeder using a stepping motor.
FIG. 4 is a schematic plan view of positioning means provided in the metal foil automatic feeding device.
FIG. 5 is a schematic perspective view of a cutting device for a long tape-shaped metal foil according to the present invention.
FIG. 6 is an explanatory diagram of an operation from joining to cutting of a metal foil.
FIG. 7 is a partial external perspective view showing the metal foil automatic feeding device according to the present invention.
FIG. 8 is a schematic view of an automatic slack mechanism.
FIG. 9 is a schematic view of a constant-size feed mechanism using a gear mechanism.
FIG. 10 is a schematic plan view of a positioning mechanism.
FIG. 11 is a schematic front view of a positioning mechanism.
FIG. 12 is a schematic side view of a positioning mechanism.
FIG. 13 is a conceptual diagram of a dust removal mechanism.
FIG. 14 is a schematic perspective view showing a configuration of a cutting device according to the present invention.
15 (A), (B), (C) and (D) are process diagrams showing a cutting action process.
FIG. 16 is a photomicrograph showing a cut surface of a metal foil by the cutting apparatus of the present invention.
FIG. 17 is a photomicrograph showing a cut surface of a metal foil using dress scissors.
FIG. 18 is a photomicrograph showing a cut surface of a metal foil using dissection scissors.
FIGS. 19A and 19B are photomicrographs showing a cut surface of a metal foil using a paper cutter.
[Explanation of symbols]
1, 2 metal foils; 3 metal guides;
10 metal foil automatic feeding device; 11 reel;
12 reel rotating means; 13 pinch roller;
14 position sensor; 15 automatic slack mechanism;
20 Fixed dimension feed mechanism; 21, 22 Pinch roller;
23 pinion gear; 24 rack gear;
25 actuator; 26, 28 pulley;
27 belts; 29 stepping motors;
30 positioning mechanism; 31 slide table;
32 bearings; 34 guide rollers;
35 frames; 36 pressing rods;
37 stands; 38 springs;
40 Joining and cutting device; 41 Upper blade; 42 Lower blade;
43,44 frame; 45,46 spring;
47 pressure rod; 48 drive means;
51 Welding machine head (electrode);
52 dust removing mechanism; 53 spraying means; 54 dust suction pipe

Claims

An apparatus for manufacturing a capacitor element member used for manufacturing a single plate capacitor element, an automatic feed mechanism for feeding a metal foil at a fixed length toward a guide member, a mechanism for bonding a metal foil to a guide member, and a bonded metal foil has a mechanism for cutting, said cutting mechanism is a share cut for cutting sandwich the metal foil, the capacitor element member characterized by have a mechanism for saving occurs a gap between the cutting blade after cutting Manufacturing equipment.

The automatic feed mechanism has a fixed-size feed mechanism that feeds the metal foil at a constant length, a slack mechanism that adjusts slackness of the metal foil drawn from the reel, and a positioning mechanism that adjusts the feed position of the metal foil. Capacitor element member manufacturing apparatus.

The automatic feed mechanism is a fixed-size feed mechanism that feeds metal foil at a fixed length, a slack mechanism that adjusts slackness of the metal foil pulled out from the reel, a positioning mechanism that adjusts the delivery position of the metal foil, and dust on the surface of the metal foil. The apparatus for manufacturing a capacitor element member according to claim 1, further comprising a mechanism for removing the capacitor element member.

The apparatus for manufacturing a capacitor element member according to any one of claims 1 to 3, wherein the joining mechanism includes welding means.

The apparatus for manufacturing a capacitor element member according to claim 4, wherein the welding means of the joining mechanism is spot welding.

The apparatus for producing a capacitor element member according to claim 4, wherein the joining mechanism is continuous spot welding and further has an electrode polishing mechanism.

The apparatus for manufacturing a capacitor element member according to any one of claims 1 to 6 , wherein an automatic feeding mechanism, a cutting mechanism, and a joining mechanism are arranged in this order along a feeding direction of the metal foil.

The metal foil is fed out for a fixed length by the automatic feed mechanism until the tip reaches the guide member, then welded by pressing the metal foil tip against the guide member by the joining mechanism, and after welding, the metal foil is fixed by the cutting mechanism. sheared to any this by the delivery of the metal foil to repeat the series of operations leading to the cleavage of claims 1 to 7 to produce a comb-like capacitor element member by a plurality joining rectangular metal foil to the guide member The manufacturing apparatus of the capacitor | condenser element member as described in any one.

A metal foil automatic feeding device used in a single plate capacitor element member manufacturing apparatus, comprising at least a pair of pinch rollers for sandwiching and feeding a tape-like metal foil, means for rotating the pinch rollers at a constant rate, and driving means thereof A fixed-size feed mechanism for feeding metal foil at a fixed length, a slide table disposed along the feed direction of the metal foil, and pressing the table laterally with respect to the feed direction of the metal foil And a horizontal positioning mechanism comprising a roll-shaped bearing standing on the upper surface of the table so as to control the feeding width of the metal foil.

10. The metal foil automatic feeding device according to claim 9 , wherein the fixed dimension feeding mechanism is formed by a pinch roller, a pinion gear provided at an end of the shaft, a rack gear meshing with the pinion roller, and a driving means connected to the rack gear. .

10. The metal foil automatic feed according to claim 9 , wherein the fixed-size feed mechanism is formed by a pinch roller, a pulley provided at a shaft end thereof, a power transmission belt attached to the pinch roller, and a stepping motor connected to the belt. apparatus.

A reel for winding holding a long tape-like metal foil, the rotation means, and any one of claims 9 to 11 having an automatic slack mechanism comprising a position sensor disposed between the pinch roller from the reel Metal foil automatic feeder as described in 1.

The metal foil automatic feeding device according to any one of claims 9 to 12 , further comprising a vertical positioning mechanism that prevents the metal foil from being lifted with respect to the slide table.

The metal foil automatic feeding device according to any one of claims 9 to 13, further comprising: a spray unit that blows gas onto the surface of the metal foil to blow off dust on the surface; and a dust removal mechanism that includes a suction pipe that sucks the dust blown off.

A metal foil cutting device used in a single plate capacitor element manufacturing apparatus, having a pair of vertically movable blades sandwiching the metal foil, and one blade is pressed against the other blade by an elastic force and is pivotally supported. Further, there is provided means for pushing away one of the blades against this elastic force, thereby forming a mechanism for separating and retracting the cutting blade after cutting. Cutting device.

The metal foil cutting device according to claim 15 , wherein the means for generating an elastic force is a metal spring, an air spring, or a rubber elastic body.

The metal foil cutting device according to claim 15 , wherein the elastic force is a spring force.

The upper and lower blades sandwich the metal foil, the frame that supports the upper and lower blades, and the vertical movement means of the frame. The bottom edge of the lower blade is attached to the base of the upper blade via a spring. At the same time, its tip is pivotally attached to the lower blade frame via a spring, so that the lower blade is in close contact with the upper blade and is formed so as to be rotatable around its base end. The metal foil cutting device according to any one of claims 15 to 17, further comprising a pressing rod that pushes and separates the base end portion of the lower blade from the upper blade.

A shear cutting method in which a metal foil used for manufacturing a single-plate capacitor element is sandwiched and cut, wherein a gap is formed between the cutting blades after cutting, and the cutting blades are separated and retracted.

The metal foil cutting method according to claim 19 , wherein the metal foil is a valve metal foil of a single plate capacitor element.

The method for cutting a metal foil according to claim 20 , wherein the valve metal foil is a thin foil of aluminum, tantalum, titanium, niobium or an alloy thereof.

The metal foil cutting method according to any one of claims 19 to 21 , wherein a gap between the cutting blades is in a range of 0.1 to 1.0 mm.

Metal foil obtained by the cutting method according to any one of claims 19 to 22.

The metal foil according to claim 23 , wherein the crack width of the cut surface of the metal foil is 0.1 mm or less.

The metal foil according to claim 23 , wherein the crack width of the cut surface of the metal foil is 0.05 mm or less.

The capacitor | condenser element which has a derivative oxide film layer, a semiconductor layer, and a conductor layer on the surface of the metal foil of Claim 23 .