JPH04172U

JPH04172U -

Info

Publication number: JPH04172U
Application number: JP4103890U
Authority: JP
Priority date: 1990-04-17
Filing date: 1990-04-17
Publication date: 1992-01-06

Description

[Brief explanation of drawings]

第１図は、本考案の実施例を示す正面図、第２
図は従来の方式を示す図である。１……搬送用真空チヤンバ、２……ベローズ、
３……真空フランジ、４……真空容器、５……固
定台、６……ベースプレート、７……直線ガイド
、８……永久磁石、９……めねじ、１０……ブロ
ツク、１１……ベアリング、１２……ベアリング
ブロツク、１３……カツプリング、１４……軸、
１５……ギヤＡ、１６……ギヤＢ、１７……モー
タ、１８……エンコーダ、１９……おねじ、２０
……ホルダ、２１……ブロツク、２２……永久磁
石、２３……ストツパ、２４……ストツパブロツ
ク、２５……フランジＡ、２６……フランジＢ、
２７……真空シール。 Figure 1 is a front view showing an embodiment of the present invention, Figure 2 is a front view showing an embodiment of the present invention;
The figure shows a conventional system. 1... Vacuum chamber for transportation, 2... Bellows,
3...Vacuum flange, 4...Vacuum container, 5...Fixing base, 6...Base plate, 7...Linear guide, 8...Permanent magnet, 9...Female thread, 10...Block, 11...Bearing , 12...Bearing block, 13...Coupling, 14...Shaft,
15...Gear A, 16...Gear B, 17...Motor, 18...Encoder, 19...Male thread, 20
... holder, 21 ... block, 22 ... permanent magnet, 23 ... stopper, 24 ... stopper block, 25 ... flange A, 26 ... flange B,
27...Vacuum seal.

Claims

[Scope of utility model registration request]

In a vacuum apparatus consisting of at least one or more vacuum containers, there is provided a vacuum chamber for transporting an internal atmospheric atmosphere passing through each of the vacuum containers, the outside of the vacuum chamber for transport serving as a guide surface, a permanent magnet attached to the bottom surface, and an article to be transported on the top surface. A vacuum transport vehicle equipped with a retainer,
An intra-vacuum transfer device comprising a transfer system that moves a permanent magnet magnetically coupled to a permanent magnet on the bottom surface of the vacuum transfer vehicle inside the transfer vacuum chamber, wherein a vacuum flange welded to an end of the transfer vacuum chamber; An intra-vacuum conveyance device comprising a vacuum flange to which a vacuum bellows is attached to pair with the flange, and a vacuum seal located between the flanges.