JPH0366920U

JPH0366920U -

Info

Publication number: JPH0366920U
Application number: JP12853589U
Authority: JP
Priority date: 1989-11-02
Filing date: 1989-11-02
Publication date: 1991-06-28

Description

[Brief explanation of drawings]

第１図はこの考案に係る真空室内搬送装置の真
空室内への装着状態を示す斜視図、第２図は第１
図で示した真空室内搬送装置の分解斜視図、第３
図はこの考案で使用する吸引・浮上手段、牽引手
段と搬送手段との関係を示す部分拡大断面図、第
４図は第３図のＢ−Ｂ線に沿う断面図、第５図は
従来の真空室内搬送装置の一部透視斜視図である
。１……真空室内搬送装置、４，４′，４′……
真空室、５……搬送用パイプ、６……リニアウエ
イ、７，７……ガイドレール、８……搬送手段、
９……吸引・浮上手段、９ａ……電磁石、９ｂ…
…センサー、１０……牽引手段、Ｗ……ワーク。 Figure 1 is a perspective view showing how the vacuum chamber transfer device according to this invention is installed in the vacuum chamber, and Figure 2 is a perspective view of the vacuum chamber transfer device according to this invention.
An exploded perspective view of the vacuum chamber transfer device shown in Figure 3.
The figure is a partially enlarged cross-sectional view showing the relationship between the suction/levitation means, traction means and conveyance means used in this invention, Figure 4 is a cross-sectional view taken along line B-B in Figure 3, and Figure 5 is a conventional FIG. 2 is a partially transparent perspective view of the vacuum chamber transfer device. 1... Vacuum chamber transfer device, 4, 4', 4'...
Vacuum chamber, 5... Conveying pipe, 6... Linear way, 7,7... Guide rail, 8... Conveying means,
9... Suction/levitation means, 9a... Electromagnet, 9b...
...Sensor, 10...Traction means, W...Work.

Claims

[Claims for Utility Model Registration] 1. Formed from a thin-walled cylindrical body made of non-magnetic material, the outer periphery of the cylindrical body is exposed in a vacuum chamber,
and a transport pipe disposed so that the inside of the cylindrical body communicates with the atmosphere; and a support member installed inside the transport pipe so as to extend in the longitudinal direction of the pipe. , a guide rail attached to the outer periphery of the transport pipe along the longitudinal direction of the pipe; and a base made of a magnetic material on the guide rail so as to be movable in the axial direction of the transport pipe. a conveyance means whose sides are loosely fitted and a loading platform for conveying the workpiece is formed on the free end side extending from the base side; and the conveyance means is attached to the support member so as to be movable along the longitudinal direction of the support member. a suction/levitation means having a sensor for positioning the conveyance means in a floating state on the guide rail, as well as an electromagnet that suctions the conveyance means toward the axis of the conveyance pipe; A vacuum chamber conveying device comprising: a traction means for moving the conveying means floating from the pipe forward and backward in the longitudinal direction of the conveying pipe; 2. The vacuum chamber conveying device according to claim 1, further comprising a reinforcing member interposed along the longitudinal direction of the conveying pipe.