JPH027229U - - Google Patents

Info

Publication number
JPH027229U
JPH027229U JP8540288U JP8540288U JPH027229U JP H027229 U JPH027229 U JP H027229U JP 8540288 U JP8540288 U JP 8540288U JP 8540288 U JP8540288 U JP 8540288U JP H027229 U JPH027229 U JP H027229U
Authority
JP
Japan
Prior art keywords
vacuum
atmosphere
rail
vacuum container
side truck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8540288U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8540288U priority Critical patent/JPH027229U/ja
Publication of JPH027229U publication Critical patent/JPH027229U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Transmission Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係る装置の断面図、第2図は
第1図のAから見た断面図、第3図はラツク、ピ
ニオン方式の従来例の断面図、第4図はマグネツ
トカツプリング方式の従来例の断面図、第5図は
ロータリー方式の従来例の平面図、第6図はベル
ト、ロープ、チエーン方式の従来例の断面図であ
る。 1……真空容器、2……レール、4……真空内
台車、5……永久磁石、10……大気側台車、1
1……永久磁石。
Fig. 1 is a sectional view of the device according to the present invention, Fig. 2 is a sectional view taken from A in Fig. 1, Fig. 3 is a sectional view of a conventional rack and pinion type device, and Fig. 4 is a sectional view of a conventional example of a rack and pinion system. FIG. 5 is a sectional view of a conventional example of a ring system, FIG. 5 is a plan view of a conventional example of a rotary system, and FIG. 6 is a sectional view of a conventional example of a belt, rope, and chain system. 1...Vacuum container, 2...Rail, 4...Vacuum inner trolley, 5...Permanent magnet, 10...Atmospheric side trolley, 1
1...Permanent magnet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器内に装着されたレールと、前記レール
にガイドされスライドし、搬送部材を塔載する部
材を装着し、かつ、磁性体を真空容器内壁側に固
着した真空内台車と、真空容器壁を介して、前記
磁性体と対向した永久磁石をを固着した大気側台
車と、前記大気側台車の駆動機構を有する真空装
置の搬送機構。
A rail installed inside the vacuum container, a vacuum inner carriage that slides guided by the rail, is equipped with a member for mounting a conveyance member, and has a magnetic material fixed to the inner wall of the vacuum container, and A conveyance mechanism for a vacuum device, comprising: an atmosphere-side truck having a permanent magnet fixed thereto facing the magnetic body; and a drive mechanism for the atmosphere-side truck.
JP8540288U 1988-06-27 1988-06-27 Pending JPH027229U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8540288U JPH027229U (en) 1988-06-27 1988-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8540288U JPH027229U (en) 1988-06-27 1988-06-27

Publications (1)

Publication Number Publication Date
JPH027229U true JPH027229U (en) 1990-01-18

Family

ID=31310069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8540288U Pending JPH027229U (en) 1988-06-27 1988-06-27

Country Status (1)

Country Link
JP (1) JPH027229U (en)

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