JPH04168622A - Lubrication surface, forming method therefor and magnetic recording medium - Google Patents

Lubrication surface, forming method therefor and magnetic recording medium

Info

Publication number
JPH04168622A
JPH04168622A JP29779290A JP29779290A JPH04168622A JP H04168622 A JPH04168622 A JP H04168622A JP 29779290 A JP29779290 A JP 29779290A JP 29779290 A JP29779290 A JP 29779290A JP H04168622 A JPH04168622 A JP H04168622A
Authority
JP
Japan
Prior art keywords
lubricant
wettability
lubricated
areas
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29779290A
Other languages
Japanese (ja)
Inventor
Masao Hiyane
比屋根 正雄
Toshisuke Kitakoji
北小路 俊右
Naoyuki Yamamoto
山本 尚之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP29779290A priority Critical patent/JPH04168622A/en
Publication of JPH04168622A publication Critical patent/JPH04168622A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve quality stability and reliability of a magnetic disk device by mixing many regions each having high wettability and regions each having low wettability for lubricant on a surface, and adsorbing the lubricant in the regions each having the high wettability. CONSTITUTION:A lubrication surface 1 such as a magnetic disk surface in plane (100) is composed of regions 11 each having high wettability and regions 12 each having low wettability for lubricant 2. The lubricant 2 becomes a state such that many balls are formed on the surface 11 having high wettability on the surface 11 by means of its surface tension, and when a force is received, they alter their direction like fluctuations of seaweed. Further, when a solid surface such as a magnetic head 110 is brought into contact with the surface, the balls of the lubricant 2 hydraulically become, due to the intermediary of the regions 12 each having the low wettability, a positive pressure by means of surface tension, thereby preventing approach and contact of both surfaces such as the disk 100 and a magnetic head 110. Thus, performance, quality and reliability of a magnetic disk device are improved.

Description

【発明の詳細な説明】 〔概要〕 潤滑表面とその形成方法に関し、 潤滑表面、とくに、磁気ディスク表面の潤滑性を改善し
て、磁気ディスク装置の品質安定性と信頼性の向上を目
的として、 潤滑剤に対して多数の濡れ性のよい領域と濡れ性の悪い
領域とをそれぞれ混在させ、前記濡れ性のよい領域に潤
滑剤を吸着させて潤滑表面を構成する。具体的には、た
とえば、表面に強度分布のある光を照射することにより
前記濡れ性のよい領域と濡れ性の悪い領域とを生じさせ
ることにより潤滑表面の形成方法を構成する。
[Detailed Description of the Invention] [Summary] Regarding a lubricated surface and a method for forming the same, the present invention aims to improve the lubricity of a lubricated surface, particularly a magnetic disk surface, and improve quality stability and reliability of a magnetic disk drive. A lubricant surface is formed by having a large number of regions with good wettability and a number of regions with poor wettability with respect to the lubricant, and adsorbing the lubricant onto the regions with good wettability. Specifically, the method for forming a lubricated surface is configured, for example, by irradiating the surface with light having an intensity distribution to create the regions with good wettability and the regions with poor wettability.

〔産業上の利用分野〕[Industrial application field]

本発明は潤滑表面、とくに、磁気ディスク、磁気テープ
などの磁気記録媒体のための潤滑表面とその形成方法に
関する。
The present invention relates to lubricated surfaces, and in particular to lubricated surfaces for magnetic recording media such as magnetic disks and magnetic tapes, and methods of forming the same.

最近のコンピュータの外部記憶装置の記憶媒体とて用い
られる。たとえば、磁気ディスク装置はますます高密度
化・高速度化され、それにともない磁気ディスクのため
のより高性能で高安定な潤滑表面の開発が求められてい
る。
It is used as a storage medium for external storage devices in modern computers. For example, magnetic disk drives are becoming increasingly denser and faster, and as a result, there is a need to develop higher performance and more stable lubricating surfaces for magnetic disks.

C従来の技術〕 一般に2つの固体表面の接触とすべりを滑らかにするた
めに潤滑表面が必要とされている。そのような潤滑表面
として、とくに高性能で高安定を要するもの一つに磁気
ディスク面がある。
C. Prior Art Lubricated surfaces are generally required to smooth the contact and sliding of two solid surfaces. One such lubricated surface that particularly requires high performance and high stability is the magnetic disk surface.

第3図は磁気ディスク面の構成例を示す図である。図中
、100は磁気ディスクで中心を回転軸とする円盤であ
り、たとえば、Aノの表面を硬化するために厚さ10数
μmのNiP膜102を一面あるいは両面にめっきした
基板101に多層の薄膜か積層形成されたものである。
FIG. 3 is a diagram showing an example of the configuration of a magnetic disk surface. In the figure, 100 is a magnetic disk whose center is a rotational axis.For example, in order to harden the surface of A, a multilayer film is applied to a substrate 101 plated with a NiP film 102 with a thickness of 10-odd μm on one or both sides. It is made of thin films or laminated layers.

その上に密着性をよくするための下地層103.たとえ
ば、厚さ250nmのCr層を形成し、その上に記録層
104として、たとえば、厚さ5Qnm程度のCoNi
Crなとの磁性膜を形成し、さらにその上に保護膜10
5として、たとえば、厚さ20〜35nmのカーボン膜
をスパッタ形成しである。110は磁気ヘッドである。
On top of that is a base layer 103 to improve adhesion. For example, a Cr layer with a thickness of 250 nm is formed, and a CoNi layer with a thickness of about 5 Q nm is formed thereon as the recording layer 104.
A magnetic film of Cr is formed, and a protective film 10 is further formed thereon.
5, for example, a carbon film having a thickness of 20 to 35 nm is formed by sputtering. 110 is a magnetic head.

情報の記録・再生にあたっては、磁気ディスク100を
回転させ磁気ヘッド110をその表面に近接もしくは接
触させて電磁誘導により行っている。
Information is recorded and reproduced by electromagnetic induction by rotating the magnetic disk 100 and bringing the magnetic head 110 close to or in contact with its surface.

したがって、両接蝕表面の保護と摩擦の減少のために、
通常保護膜105の上には図示してない潤滑剤、たとえ
ば、液体潤滑剤を塗布して使用している。しかし、上記
のごとき、いわゆる、境界潤滑と呼ばれる極く薄い潤滑
剤の膜によって潤滑させる面では、摩擦によって潤滑剤
が離脱することがあり、結果として潤滑剤が介在しない
直接接触が生じて表面、たとえば、磁気ディスク100
面の磨耗が始まり障害を発生することになる。
Therefore, for protection of both corroded surfaces and reduction of friction,
Usually, a lubricant (not shown), such as a liquid lubricant, is applied on the protective film 105. However, on surfaces that are lubricated by an extremely thin film of lubricant, known as boundary lubrication, as described above, the lubricant may separate due to friction, resulting in direct contact without any intervening lubricant, and the surface For example, magnetic disk 100
The surface will begin to wear out and cause failure.

また、実際上は潤滑剤を適度な薄さに維持するのか難し
く、潤滑剤2か多過ぎると磁気ディスク100と磁気ヘ
ッド110の間の隙間が潤滑剤2で埋まってしまう。充
分な潤滑剤2の量を許容できる場合はよいが、最近の高
密度の磁気ディスクでは隙間を余り広げることかできな
い。隙間を所定の小さい値に保つことは磁気−電気変換
特性を一定に維持する上で極めて重要である。一方、隙
間が小さくなるにしたがい、とくに、高速回転時にはす
べり速度が大きいので接触部の発熱も高く、前記のごと
く潤滑剤2の離脱が生じ易い。また、磁気ディスク10
0は回転停止時には磁気ヘッド110と磁気ディスク1
00が接触し、長時間放置されると隙間は潤滑剤2で満
たされ、潤滑剤2の表面張力による負圧により磁気ヘッ
ド110は約1気圧の力で磁気ディスク100に押し付
けられる。したがって、回転起動時に強いトルクを必要
とし、また、回転時の摩擦も大きくなるのである。
Furthermore, in practice, it is difficult to maintain the lubricant at an appropriate thickness, and if there is too much lubricant 2, the gap between the magnetic disk 100 and the magnetic head 110 will be filled with the lubricant 2. It is good if a sufficient amount of lubricant 2 can be tolerated, but with recent high-density magnetic disks, it is not possible to widen the gap much. Maintaining the gap at a predetermined small value is extremely important in maintaining constant magneto-electrical conversion characteristics. On the other hand, as the gap becomes smaller, especially during high-speed rotation, the sliding speed is high, so the heat generation at the contact portion is also high, and as described above, the lubricant 2 is likely to separate. In addition, the magnetic disk 10
0 indicates the magnetic head 110 and magnetic disk 1 when rotation is stopped.
00 and left for a long time, the gap is filled with lubricant 2, and the magnetic head 110 is pressed against the magnetic disk 100 with a force of about 1 atmosphere due to negative pressure due to the surface tension of the lubricant 2. Therefore, a strong torque is required when starting the rotation, and friction during rotation also increases.

一般に潤滑表面の特性は潤滑剤の表面吸着の結合力の大
きさと潤滑剤分子の運動の自由度の大きさによって支配
されていることはよく知られている。
It is well known that the characteristics of lubricated surfaces are generally controlled by the magnitude of the bonding force of surface adsorption of lubricant and the degree of freedom of movement of lubricant molecules.

この潤滑剤の固定強化と運動の自由度を両立させる方法
として、微小な潤滑剤集落を散在させることが有効であ
り、潤滑すべき表面、たとえば、磁気ディスク100の
表面に凹凸を設ける方法が一般に行われている。
As a method for both strengthening the fixation of the lubricant and increasing the freedom of movement, it is effective to scatter minute lubricant colonies, and generally a method of providing irregularities on the surface to be lubricated, for example, the surface of the magnetic disk 100, is effective. It is being done.

第4図は従来の磁気ディスクの潤滑表面の構造例を示す
模式図である。
FIG. 4 is a schematic diagram showing an example of the structure of a lubricated surface of a conventional magnetic disk.

図中、2は潤滑剤、たとえば、液体潤滑剤の膜で、ベー
ス層102の表面に形成された凸部106および凹部1
07からなる凹凸の上を覆っている。なお、ベース層1
02の上に形成されている下地層103、記録層重04
.保護膜105などの図示は省略しである。このような
凹凸は、たとえば、# 3000程度の研磨布で研磨し
て形成されている。
In the figure, reference numeral 2 denotes a film of lubricant, for example, a liquid lubricant, and convex portions 106 and concave portions 1 formed on the surface of the base layer 102.
It covers the unevenness made of 07. In addition, base layer 1
Base layer 103 formed on 02, recording layer weight 04
.. The illustration of the protective film 105 and the like is omitted. Such irregularities are formed by polishing with a polishing cloth of about #3000, for example.

すなわち、これにより一様な表面活性度であっても凹凸
の存在によって潤滑剤層は部分的に接触しその部分で負
荷圧力を受け、その部分の潤滑剤かあたかも海草がたな
びくように方向を変えることかできる。さらに、凹凸を
設けることにより磁気ディスク100と磁気ヘッド11
0との隙間は凹部107によってその大半か外部空間と
連結し潤滑剤2による負圧の発生する面積か小さくなる
ので、回転時の摩擦や回転起動時のトルクも小さい比較
的安定な潤滑表面を与へ、性能の比較的安定した磁気デ
ィスク装置が実用化されている。
In other words, even if the surface activity is uniform, the presence of irregularities causes the lubricant layer to partially contact each other and receive load pressure at those areas, causing the lubricant in those areas to change direction, just like waving seaweed. I can do it. Furthermore, by providing unevenness, the magnetic disk 100 and the magnetic head 11
Most of the gap between the lubricant 2 and the lubricant 2 is connected to the external space by the recess 107, and the area where negative pressure is generated by the lubricant 2 is reduced, so a relatively stable lubricating surface is created with low friction during rotation and low torque when starting rotation. Furthermore, magnetic disk drives with relatively stable performance have been put into practical use.

〔発明か解決しようとする課題〕[Invention or problem to be solved]

しかし、上記従来の凹凸による潤滑表面は、磁気ディス
ク100の表面に意図的な凹凸を設けているので、それ
によって記録層104と磁気ヘッド110との間の隙間
の大きさが場所によって変動し、その結果電磁変換特性
、とくに、雑音の発生による書き込み読み出しエラーを
生じるという重大な問題があり、その解決が求められて
いる。
However, since the above-mentioned conventional lubricating surface with unevenness intentionally provides unevenness on the surface of the magnetic disk 100, the size of the gap between the recording layer 104 and the magnetic head 110 varies depending on the location. As a result, there is a serious problem in electromagnetic conversion characteristics, particularly in the occurrence of write/read errors due to the generation of noise, and a solution to this problem is required.

〔課題を解決するための手段〕[Means to solve the problem]

上記の課題は、潤滑剤2に対して多数の濡れ性のよい領
域11と濡れ性の悪い領域12とを表面にそれぞれ混在
させ、前記濡れ性のよい領域11に潤滑剤2を吸着させ
た潤滑表面によって解決することかできる。具体的には
、前記濡れ性のよい領域11か潤滑剤2の結合基と反応
する活性表面を有し、該活性表面部分に前記潤滑剤2の
分子を固定した潤滑表面によって解決することかできる
。また、記録ヘッドと接する記録面の表面を前記潤滑表
面とすれば高性能の磁気記録媒体を形成することかでき
る。
The above problem is solved by creating a lubricant 2 in which a large number of areas 11 with good wettability and areas 12 with poor wettability are mixed on the surface of the lubricant 2, and the lubricant 2 is adsorbed in the areas 11 with good wettability. Can be solved by surface. Specifically, the problem can be solved by a lubricating surface having an active surface that reacts with the bonding group of the lubricant 2 in the region 11 with good wettability, and having molecules of the lubricant 2 fixed to the active surface portion. . Furthermore, if the surface of the recording surface that contacts the recording head is made of the aforementioned lubricating surface, a high-performance magnetic recording medium can be formed.

そして、このような潤滑表面の形成は表面に強度分布の
ある光を照射するか、あるいは、部分的にプラズマを照
射することにより前記濡れ性のよ0領域11と濡れ性の
悪い領域12とを生じさせる方法により解決することが
できる。さらに、具体的には分子内に複数の感光基を有
する化合物を表面に塗布したあと強度分布のある光を照
射したり。
The formation of such a lubricated surface is achieved by irradiating the surface with light having an intensity distribution or by partially irradiating plasma to separate the areas 11 with good wettability and the areas 12 with poor wettability. This can be solved by a method that causes this problem to occur. Furthermore, specifically, a compound having multiple photosensitive groups within the molecule is applied to the surface and then light with an intensity distribution is irradiated.

表面活性化剤を含む気体にさらされた表面に前記表面活
性化剤を過飽和により微小な液滴状に結露させたり、低
真空中の微量汚染ガスにさらされた表面に電子線を照射
して、前記濡れ性のよい領域11と濡れ性の悪い領域1
2とを生じさせる潤滑表面の形成方法や、前記潤滑剤2
または潤滑剤2を含む気体にさらされた表面に前記潤滑
剤2を過飽和により付着させ強度分布のある光を照射す
ることにより光強度の大きい部分に前記潤滑剤2を固定
させる潤滑表面の形成方法などによって効果的に解決す
ることができる。
By supersaturating the surface activator on a surface exposed to a gas containing the surface activator and condensing it in the form of minute droplets, or by irradiating an electron beam on a surface exposed to a trace amount of contaminant gas in a low vacuum. , the region 11 with good wettability and the region 1 with poor wettability
2 and a method for forming a lubricating surface that causes the lubricant 2.
Alternatively, a method for forming a lubricated surface in which the lubricant 2 is attached to a surface exposed to a gas containing the lubricant 2 by supersaturation, and the lubricant 2 is fixed in a portion where the light intensity is high by irradiating the lubricant 2 with light having an intensity distribution. This can be effectively solved by

〔作用〕[Effect]

第1図は本発明の原理を示す図である。図中、1は潤滑
表面、たとえば、磁気ディスク100面、11は潤滑剤
2に対して濡れ性のよい領域、12は濡れ性の悪い領域
である。
FIG. 1 is a diagram showing the principle of the present invention. In the figure, 1 is a lubricated surface, for example, the magnetic disk 100 surface, 11 is a region with good wettability to the lubricant 2, and 12 is a region with poor wettability.

図から容易にわかるように、潤滑剤2はその表面張力に
より潤滑表面1の上の濡れ性のよい面11にあたかもボ
ールが多数形成された状態となり、そして力を受けると
海草がたなびくように方向を変えるのである。しかも、
この上に固体表面、たとえば、磁気ヘッド110が接触
すると潤滑剤2のボールはその間に濡れ性の悪い領域1
2が介在しているので、その液圧は表面張力によって正
圧となり両表面、たとえば、磁気ディスク100と磁気
ヘッド110とが接近して接触するのを防止できる。
As can be easily seen from the figure, the surface tension of the lubricant 2 causes the lubricant 2 to form a state in which many balls are formed on the surface 11 with good wettability on the lubricant surface 1, and when a force is applied, the lubricant 2 is shaped like a waving seaweed. It changes. Moreover,
When a solid surface, for example the magnetic head 110, comes into contact with this, the balls of lubricant 2 will move between the areas 1 with poor wettability.
2, the liquid pressure becomes positive due to surface tension, and it is possible to prevent the two surfaces, for example, the magnetic disk 100 and the magnetic head 110, from coming into close contact with each other.

すなわち、回転時には摩擦が小さく、かつ、従来のよう
に潤滑剤2層による負圧が作用しないので回転起動時の
トルクも小さくできるのである。
That is, during rotation, the friction is small, and since the negative pressure caused by two layers of lubricant does not act as in the conventional case, the torque at the time of starting rotation can also be reduced.

なお、上記第1図では潤滑剤2は全て同一種類のものを
使用した場合を示したか、濡れ性のよい領域11の濡れ
性か複数の異なる値を有し、それら濡れ性の値に対応し
て複数の異なる潤滑剤2を前記濡れ性のよい領域11に
それぞれ吸着させ、潤滑剤2のボールの独立性を高め、
より安定した潤滑表面を得るようにしてもよい。
In addition, in FIG. 1 above, the lubricant 2 shows the case where the same type of lubricant is used, or the lubricant 2 has a plurality of different wettability values in the region 11 with good wettability, and the lubricant 2 corresponds to the wettability value. a plurality of different lubricants 2 are respectively adsorbed to the regions 11 with good wettability to increase the independence of the balls of the lubricant 2,
A more stable lubricated surface may be obtained.

〔実施例〕〔Example〕

試料としては何れも前記した磁気ディスク100を使用
して各実施例とその具体的な形成方法を以下に工程順に
要点を説明する。
The above-mentioned magnetic disk 100 is used as a sample, and the main points of each embodiment and a specific method of forming the same will be explained below in the order of steps.

第1の実施例 工程(1):磁気ディスク100の保護膜105の上に
ポジ型レジストを約1μmの厚さになるようにスピンコ
ードし、130°C115分間窒素気流中てベーキング
する。
First Example Step (1): A positive resist is spin-coated to a thickness of about 1 μm on the protective film 105 of the magnetic disk 100, and baked at 130° C. for 115 minutes in a nitrogen stream.

工程(2):上記処理基板に、たとえば、0.5〜1゜
0μm程度の大きさの縞模様か一様に形成された露光マ
スク、たとえば、クロムマスクを載置して露光したあと
、適当な現像液で処理してレジストパターンを形成する
Step (2): An exposure mask, such as a chrome mask, uniformly formed with a striped pattern of, for example, a size of about 0.5 to 1.0 μm is placed on the above-mentioned treated substrate, and after exposure, an appropriate A resist pattern is formed by processing with a suitable developer.

工程(3):上記処理基板にプラズマ、たとえば、酸素
プラズマを一面に照射してレジストパターンに露出して
いる保護膜105.たとえば、カーボン膜の部分を活性
化する。なお、プラズマ処理はレジストパターンのレジ
スト部分がプラズマで分解除去されるまで継続すれば一
工程で活性化とレジストパターン除去ができる。プラズ
マ照射された部分はその帯電粒子のエネルギーにより吸
着分子の離脱と活性化された部分表面、たとえば、C=
0基の配列した部分表面、すなわち、活性表面を有する
濡れ性のよい領域11が形成される。
Step (3): The protective film 105 exposed on the resist pattern is exposed to the resist pattern by irradiating the entire surface of the treated substrate with plasma, for example, oxygen plasma. For example, a portion of the carbon film is activated. Note that if the plasma treatment is continued until the resist portion of the resist pattern is decomposed and removed by the plasma, activation and removal of the resist pattern can be accomplished in one step. The area irradiated with plasma causes detachment of adsorbed molecules and activation of the activated partial surface due to the energy of the charged particles, for example, C=
A region 11 with good wettability is formed which has zero aligned partial surfaces, ie, active surfaces.

工程(4):上記処理基板に分子内に極性基、たとえば
、−〇H基を持った潤滑剤2.たとえば、8O−CH2
−CF2 (−0−C2F、)、 −(0−CFり、 
−0CF2−CH20Hをスピンコードしたあと、たと
えば、70°C,15分間加熱して活性表面部分、すな
わち、濡れ性のよい領域11に潤滑剤2の分子を固定す
れば本発明の潤滑表面か得られる。
Step (4): A lubricant having a polar group, for example, -0H group in the molecule, is applied to the treated substrate 2. For example, 8O-CH2
-CF2 (-0-C2F,), -(0-CFri,
The lubricant surface of the present invention can be obtained by spin-coding -0CF2-CH20H and then heating it at 70°C for 15 minutes to fix the molecules of lubricant 2 on the active surface portion, that is, the region 11 with good wettability. It will be done.

なお、上記実施例では一様に縞模様か形成された露光マ
スクを用いてレジストパターンを形成しプラズマ照射を
行ったか、直接表面に強度分布のある光、たとえば、レ
ーザ光を照射することにより、部分的な発熱あるいは光
量子エネルギーの直接作用によって吸着分子の離脱と活
性化を行い、その部分に適当な潤滑剤2を固定するよう
にしてもよい。この場合には潤滑表面の形成工程が大巾
に削減され経済的である。このように表面に強度分布の
ある光を照射する方法としてはレーザ光のスペックルパ
ターンか利用できる。
In the above embodiments, a resist pattern was formed using an exposure mask having a uniform striped pattern, and plasma irradiation was performed, or by directly irradiating the surface with light with an intensity distribution, for example, laser light. The adsorbed molecules may be detached and activated by partial heat generation or direct action of photon energy, and an appropriate lubricant 2 may be fixed to that portion. In this case, the process of forming the lubricating surface is greatly reduced, which is economical. As a method of irradiating the surface with light having an intensity distribution, a speckle pattern of laser light can be used.

第2図は縞模様を形成するための例を示す図で、同図(
イ)は装置概念図を、同図(ロ)はスペックルパターン
例の拡大図である。すなわち、レーザ光源200.たと
えば、波長351nmのAr紫外線し一ザからの光をミ
ラー201を経由してレンズ系202に入射させ拡大ビ
ームとして拡散板203.たとえば、片面を粗面化した
石英ガラス板を透過させ対象表面204に照射すると、
その間にレーザ光は干渉を生じて同図(ロ)に拡大図示
したごとき最小直径数μmのスペックルパターンを形成
する。このようなスペックルパターンは直接対象表面に
濡れ性のよい面11を形成するのに用いてもよいし。
Figure 2 is a diagram showing an example of forming a striped pattern.
(a) is a conceptual diagram of the device, and (b) is an enlarged view of an example of a speckle pattern. That is, the laser light source 200. For example, Ar ultraviolet light with a wavelength of 351 nm is incident on the lens system 202 via the mirror 201 and converted into an expanded beam by the diffuser plate 203. For example, when the target surface 204 is irradiated through a quartz glass plate with one side roughened,
During this time, the laser beams cause interference and form a speckle pattern with a minimum diameter of several μm as shown in an enlarged view in FIG. Such a speckle pattern may be used to directly form a surface 11 with good wettability on the target surface.

また、前記実施例のレジストパターンを形成するための
露光用として用いてもよいことは言うまでもない。
It goes without saying that it may also be used for exposure to form the resist pattern of the above embodiment.

第2の実施例 工程(1):磁気ディスクlOOの保護膜105の上に
分子内に複数の感光基、たとえば、2つの感光基を有す
る化合物、たとえば、ビスアジド系化合物を均一に塗布
する。
Second Example Step (1): A compound having a plurality of photosensitive groups, for example, two photosensitive groups in its molecule, such as a bisazide compound, is uniformly applied onto the protective film 105 of the magnetic disk lOO.

工程(2):上記処理基板に強度分布のある光、たとえ
ば、前記の紫外線レーザ光によるスペックルパターンを
形成させる。これにより感光基は干渉光の明部分のみが
活性化され、一方の感光基は下地と反応しもう一方の感
光基は表面にてきて濡れ性のよい領域11を形成する。
Step (2): A speckle pattern is formed on the treated substrate using light with an intensity distribution, for example, the ultraviolet laser light. As a result, only the bright portion of the interference light is activated in the photosensitive groups, and one photosensitive group reacts with the substrate, and the other photosensitive group comes to the surface to form a region 11 with good wettability.

工程(3):上記処理基板に潤滑剤2.たとえば、フッ
ソ化炭素系潤滑剤を窒素気流中で塗布したあと、たとえ
ば、アルコール系の溶剤で処理して非露光部分、すなわ
ち、暗部分のビスアジド系化合物を溶解除去すれば本発
明の潤滑表面が形成される。
Step (3): Apply lubricant 2 to the treated substrate. For example, the lubricating surface of the present invention can be obtained by applying a fluorinated carbon lubricant in a nitrogen stream and then treating it with an alcohol-based solvent to dissolve and remove the bisazide compound in the non-exposed areas, that is, the dark areas. It is formed.

第3の実施例 工程(1):保護膜105を設けた磁気ディスク100
を低温、たとえば、−10°Cに冷却する。
Third embodiment process (1): magnetic disk 100 provided with protective film 105
is cooled to a low temperature, for example -10°C.

工程(2):上記冷却基板を表面活性化剤、たとえば、
約10%のメチルイソブチルケトンをガス化して混合し
た気体、たとえば、混合窒素中に曝して表面にメチルイ
ソブチルケトンを微小な液滴状に結露させる。
Step (2): Treat the cooling substrate with a surface activator, for example,
Approximately 10% of methyl isobutyl ketone is gasified and exposed to a mixed gas, for example, mixed nitrogen, to cause methyl isobutyl ketone to condense on the surface in the form of minute droplets.

工程(3)二上記処理基板を空気中で80°C930分
間加熱処理して前記結露した液滴を酸化蒸発させると、
液滴が存在していた微小部分には活性基、たとえば、C
=0基が配列された濡れ性のよい領域11か形成される
Step (3) The above treated substrate is heated in air at 80°C for 930 minutes to oxidize and evaporate the dew condensed droplets.
The minute portion where the droplet was located contains an active group, for example, C
A region 11 with good wettability in which =0 groups are arranged is formed.

工程(4):上記処理基板に分子内に極性基、たとえば
、−〇H基を持った潤滑剤2.たとえば、HO−CH2
−CF2 (−0C2F4)−−(0−CF2)、−0
CF2−CH20Hをスピンコードしたあと、たとえば
、70°C915分間加熱して活性表面部分、すなわち
、濡れ性のよい領域11に潤滑剤2の分子を固定すれば
本発明になる潤滑表面か得られる。
Step (4): A lubricant having a polar group, for example, -0H group in the molecule, is applied to the treated substrate 2. For example, HO-CH2
-CF2 (-0C2F4)--(0-CF2), -0
After spin-coding CF2-CH20H, the lubricant 2 molecules are fixed in the active surface portion, ie, the region 11 with good wettability, by heating for 915 minutes at 70° C. to obtain the lubricant surface of the present invention.

なお、上記実施例では表面活性化剤を過飽和により微小
な液滴状に結露させて、先ず、濡れ性のよい領域11を
形成し、次にその部分に潤滑剤2の分子を固定するよう
にしたか、潤滑剤2または潤滑剤2を含む気体にさらさ
れた表面に潤滑剤2を過飽和により液滴状に付着させ、
たとえば、加熱処理などにより液滴部分の潤滑剤2の分
子を直接固定することによって本発明の潤滑表面を形成
してもよい。また、表面に潤滑剤2の層を過飽和により
一様に付着させ強度分布のある光を照射することにより
光強度の大きい部分に潤滑剤2を固定させても同様に本
発明の潤滑表面が形成できる。
In the above embodiment, the surface activating agent is supersaturated to condense in the form of minute droplets to first form a region 11 with good wettability, and then the molecules of the lubricant 2 are fixed to that region. Alternatively, the lubricant 2 is deposited in the form of droplets by supersaturation on the surface exposed to the lubricant 2 or a gas containing the lubricant 2,
For example, the lubricant surface of the present invention may be formed by directly fixing the molecules of the lubricant 2 in the droplet portion by heat treatment or the like. Alternatively, the lubricant surface of the present invention can be formed in the same way by uniformly depositing a layer of lubricant 2 on the surface by supersaturation and irradiating it with light with an intensity distribution, thereby fixing the lubricant 2 in areas where the light intensity is high. can.

第4の実施例 上記に説明した実施例は何れも濡れ性のよい領域11を
先ず形成することを主体に考えた実施例を示したか、潤
滑剤2の特性によっては濡れ性の悪い領域12を形成し
、その部分だけに潤滑剤2か固定されないようにしても
同様に本発明の潤滑表面が得られることは言うまでもな
い。このような濡れ性の悪い領域12を形成する具体的
方法として。
Fourth Embodiment The above-described embodiments are all based on forming a region 11 with good wettability first, or depending on the characteristics of the lubricant 2, a region 12 with poor wettability may be formed. It goes without saying that the lubricated surface of the present invention can be obtained in the same way even if the lubricant 2 is not fixed only to that portion. As a specific method for forming such a region 12 with poor wettability.

たとえば、1O−5Torr程度の低真空中に保護膜1
05を設けた磁気ディスク100をさらし、そこに電子
線を照射して残留微量ガス、たとえば、ハイド口々−ポ
ンから生成される有機系分子膜を形成する。
For example, a protective film 1 is placed in a low vacuum of about 1O-5 Torr.
The magnetic disk 100 provided with 05 is exposed and irradiated with an electron beam to form an organic molecular film generated from residual trace gas, for example, Hyde mouth-to-mouth.

いわゆる、コンタミネーション法を適用することによっ
て濡れ性のよい領域11と濡れ性の悪い領域12とを縞
状に混在させ、適当な潤滑剤2を濡れ性のよい領域11
に固着させれば同様に本発明の潤滑表面が得られる。
By applying a so-called contamination method, areas 11 with good wettability and areas 12 with poor wettability are mixed in a striped pattern, and an appropriate lubricant 2 is applied to the areas 11 with good wettability.
Similarly, the lubricating surface of the present invention can be obtained by adhering to the lubricating surface of the present invention.

以上述べた実施例は例を示したもので、本発明の趣旨に
添うものである限り、使用する素材や構成など適宜好ま
しいもの、あるいはその組み合わせを用いてもよいこと
は言うまでもない。
The embodiments described above are merely examples, and it goes without saying that preferred materials and configurations, or combinations thereof, may be used as long as they comply with the spirit of the present invention.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば潤滑剤2はその表
面張力により潤滑表面1の上の濡れ性のよい面11にあ
たかもボールが多数形成された状態となり、そして力を
受けると海草かたなびくように方向を変えるのである。
As explained above, according to the present invention, the lubricant 2 forms a state in which a large number of balls are formed on the surface 11 with good wettability on the lubricating surface 1 due to its surface tension, and when subjected to force, it becomes like a seaweed. So change the direction.

しかも、この上に固体表面、たとえば、磁気ヘッド11
0か接触すると潤滑剤2のポールはその間に濡れ性の悪
い領域12が介在しているので、その液圧は表面張力に
よって正圧となり両表面、たとえば、磁気ディスク10
0と磁気へラド110とが接近して接触するのを防止で
きる。すなわち、回転時には摩擦か小さく、かつ、従来
のように潤滑剤2層による負圧が作用しないので回転起
動時のトルクも小さくでき、製品。
Moreover, there is a solid surface on top of this, for example, the magnetic head 11.
When the poles of the lubricant 2 come in contact with each other, a region 12 with poor wettability exists between them, so the liquid pressure becomes positive pressure due to surface tension, and is applied to both surfaces, for example, the magnetic disk 10.
0 and the magnetic helad 110 can be prevented from coming into close contact with each other. In other words, when the product rotates, the friction is small, and since the negative pressure caused by the two layers of lubricant does not act as in conventional products, the torque at the start of rotation can also be reduced.

たとえば、磁気ディスク装置の性能・品質・信頼性の向
上に寄与すると゛ころが極めて大きい。
For example, it will greatly contribute to improving the performance, quality, and reliability of magnetic disk drives.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理を示す図、 第2図は縞模様を形成するための例を示す図、第3図は
磁気ディスク面の構成例を示す図、第4図は従来の磁気
ディスクの潤滑表面の構造例を示す模式図である。 図において、 1は潤滑表面、 2は潤滑剤、 11は濡れ性のよい領域、 12は濡れ性の悪い領域、 100は磁気ディスク、 110は磁気ヘッドである。
Fig. 1 is a diagram showing the principle of the present invention, Fig. 2 is a diagram showing an example of forming a striped pattern, Fig. 3 is a diagram showing an example of the configuration of a magnetic disk surface, and Fig. 4 is a diagram showing a conventional magnetic disk. FIG. 3 is a schematic diagram showing an example of the structure of a lubricated surface of the lubrication surface. In the figure, 1 is a lubricated surface, 2 is a lubricant, 11 is a region with good wettability, 12 is a region with poor wettability, 100 is a magnetic disk, and 110 is a magnetic head.

Claims (9)

【特許請求の範囲】[Claims] (1)潤滑剤(2)に対して多数の濡れ性のよい領域(
11)と濡れ性の悪い領域(12)とを表面にそれぞれ
混在させ、前記濡れ性のよい領域(11)に潤滑剤(2
)を吸着させたことを特徴とする潤滑表面。
(1) Numerous areas with good wettability for the lubricant (2) (
11) and a region (12) with poor wettability are mixed on the surface, and the region (11) with good wettability is coated with a lubricant (2).
) is adsorbed on the lubricated surface.
(2)前記濡れ性のよい領域(11)が潤滑剤(2)の
結合基と反応する活性表面を有し、該活性表面部分に前
記潤滑剤(2)の分子を固定したことを特徴とする請求
項(1)記載の潤滑表面。
(2) The region (11) with good wettability has an active surface that reacts with the bonding group of the lubricant (2), and molecules of the lubricant (2) are fixed to the active surface portion. The lubricated surface according to claim (1).
(3)記録ヘッドと接する記録面の表面が請求項(1)
記載の潤滑表面であることを特徴とする磁気記録媒体。
(3) The surface of the recording surface in contact with the recording head is claimed in claim (1).
A magnetic recording medium having a lubricated surface as described above.
(4)表面に強度分布のある光を照射することにより前
記濡れ性のよい領域(11)と濡れ性の悪い領域(12
)とを生じさせることを特徴とした請求項(1)記載の
潤滑表面の形成方法。
(4) By irradiating the surface with light with an intensity distribution, the areas with good wettability (11) and the areas with poor wettability (12) are
) The method for forming a lubricated surface according to claim 1, characterized in that:
(5)表面に部分的にプラズマを照射することにより前
記濡れ性のよい領域(11)と濡れ性の悪い領域(12
)とを生じさせることを特徴とした請求項(1)記載の
潤滑表面の形成方法。
(5) By partially irradiating the surface with plasma, the areas with good wettability (11) and the areas with poor wettability (12) are
) The method for forming a lubricated surface according to claim 1, characterized in that:
(6)分子内に複数の感光基を有する化合物を表面に塗
布したあと強度分布のある光を照射することにより前記
濡れ性のよい領域(11)と濡れ性の悪い領域(12)
とを生じさせることを特徴とした請求項(1)記載の潤
滑表面の形成方法。
(6) After applying a compound having multiple photosensitive groups in the molecule to the surface and irradiating it with light with an intensity distribution, the above-mentioned areas with good wettability (11) and areas with poor wettability (12) are formed.
2. The method of forming a lubricated surface according to claim 1, wherein:
(7)表面活性化剤を含む気体にさらされた表面に前記
表面活性化剤を過飽和により微小な液滴状に結露させる
ことを少なくとも含む処理を行うことにより前記濡れ性
のよい領域(11)と濡れ性の悪い領域(12)とを生
じさせることを特徴とした請求項(1)記載の潤滑表面
の形成方法。
(7) The region (11) with good wettability is obtained by performing a process that at least includes condensing the surface activator in the form of minute droplets by supersaturating the surface activator on the surface exposed to the gas containing the surface activator. 2. A method for forming a lubricated surface according to claim 1, characterized in that a region (12) with poor wettability is formed.
(8)潤滑剤(2)または潤滑剤(2)を含む気体にさ
らされた表面に前記潤滑剤(2)を過飽和により付着さ
せ強度分布のある光を照射することにより光強度の大き
い部分に前記潤滑剤(2)を固定させることを特徴とし
た潤滑表面の形成方法。
(8) The lubricant (2) is attached to the surface exposed to the lubricant (2) or a gas containing the lubricant (2) by supersaturation, and the light with an intensity distribution is irradiated to the area where the light intensity is high. A method for forming a lubricated surface, characterized by fixing the lubricant (2).
(9)低真空中の微量汚染ガスにさらされた表面に電子
線を照射することにより前記濡れ性のよい領域(11)
と濡れ性の悪い領域(12)とを生じさせることを特徴
とした請求項(1)記載の潤滑表面の形成方法。
(9) The area with good wettability (11) is obtained by irradiating the surface exposed to trace amounts of contaminant gas in a low vacuum with an electron beam.
2. A method for forming a lubricated surface according to claim 1, characterized in that a region (12) with poor wettability is formed.
JP29779290A 1990-11-01 1990-11-01 Lubrication surface, forming method therefor and magnetic recording medium Pending JPH04168622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29779290A JPH04168622A (en) 1990-11-01 1990-11-01 Lubrication surface, forming method therefor and magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29779290A JPH04168622A (en) 1990-11-01 1990-11-01 Lubrication surface, forming method therefor and magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH04168622A true JPH04168622A (en) 1992-06-16

Family

ID=17851232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29779290A Pending JPH04168622A (en) 1990-11-01 1990-11-01 Lubrication surface, forming method therefor and magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH04168622A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919560A (en) * 1993-12-28 1999-07-06 Hoya Corporation Magnetic recording medium having a lubricant film
US6099981A (en) * 1993-12-28 2000-08-08 Hoya Corporation Magnetic recording medium having a lubricant film coated on optimum conditions and method of evaluating the lubricant film
JP2008052875A (en) * 2006-08-28 2008-03-06 Tdk Corp Lubricant film forming method, slide body with lubricant film, magnetic recording medium, magnetic head slider and hard disk
US7740961B2 (en) 2005-05-16 2010-06-22 Kabushiki Kaisha Toshiba Magnetic recording medium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919560A (en) * 1993-12-28 1999-07-06 Hoya Corporation Magnetic recording medium having a lubricant film
US6099981A (en) * 1993-12-28 2000-08-08 Hoya Corporation Magnetic recording medium having a lubricant film coated on optimum conditions and method of evaluating the lubricant film
US7740961B2 (en) 2005-05-16 2010-06-22 Kabushiki Kaisha Toshiba Magnetic recording medium
JP2008052875A (en) * 2006-08-28 2008-03-06 Tdk Corp Lubricant film forming method, slide body with lubricant film, magnetic recording medium, magnetic head slider and hard disk

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