JPH04164917A - Epoxy resin composition and semiconductor device - Google Patents

Epoxy resin composition and semiconductor device

Info

Publication number
JPH04164917A
JPH04164917A JP2292715A JP29271590A JPH04164917A JP H04164917 A JPH04164917 A JP H04164917A JP 2292715 A JP2292715 A JP 2292715A JP 29271590 A JP29271590 A JP 29271590A JP H04164917 A JPH04164917 A JP H04164917A
Authority
JP
Japan
Prior art keywords
epoxy resin
epoxy
molecule
resin composition
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2292715A
Other languages
Japanese (ja)
Other versions
JPH082940B2 (en
Inventor
Toshio Shiobara
利夫 塩原
Koji Futatsumori
二ッ森 浩二
Kazutoshi Tomiyoshi
富吉 和俊
Hisashi Shimizu
久司 清水
Takashi Tsuchiya
貴史 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2292715A priority Critical patent/JPH082940B2/en
Priority to DE4135533A priority patent/DE4135533A1/en
Priority to KR1019910019058A priority patent/KR920008136A/en
Publication of JPH04164917A publication Critical patent/JPH04164917A/en
Publication of JPH082940B2 publication Critical patent/JPH082940B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/226Mixtures of di-epoxy compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/24Di-epoxy compounds carbocyclic
    • C08G59/245Di-epoxy compounds carbocyclic aromatic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/40Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Engineering & Computer Science (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

PURPOSE:To obtain an epoxy resin composition which is improved in flow and can give a cured product having a high glass transition temperature, a low coefficient of expansion, low stress and excellent adhesiveness and hygroscopic resistance by mixing a specified epoxy resin with a phenolic resin. CONSTITUTION:0-95 pts.wt. epoxy resin optionally having at least one (un) substituted naphthalene ring in the molecule and at least two epoxy groups in the molecule is mixed with 100-5 pts.wt. epoxy resin of the formula (wherein R is H, halogen or a 1-5C monovalent hydrocarbon group; and n is 0-5) to obtain an epoxy resin(A). Component A is mixed with a phenolic resin (B) optionally having at least one (un)substituted naphthalene ring in the molecule in an amount to give a molar ratio of the epoxy groups of component A to the phenolic hydroxyl groups of component B of 0.5-1.5 to obtain the title composition wherein part or all of components A and/or B have naphthalene rings.

Description

【発明の詳細な説明】 皮呈上匹机里公団 本発明は、流動性が良好な上、膨張係数が小さく、高ガ
ラス転移温度を有しながら低応力性であり、しかも、接
着性、低吸湿性に優れた硬化物を与えるエポキシ樹脂組
成物及びこのエポキシ樹脂組成物の硬化物で封止された
半導体装置に関する。
[Detailed Description of the Invention] The present invention has good fluidity, a small coefficient of expansion, a high glass transition temperature, low stress, and has good adhesive properties and low stress. The present invention relates to an epoxy resin composition that provides a cured product with excellent hygroscopicity, and a semiconductor device sealed with the cured product of this epoxy resin composition.

。  ・   び     (°シ゛  と二tlll
l現在、半導体産業の中で樹脂封止型のダイオード、ト
ランジスタ、IC,LSI、超LSIが主流となってお
り、なかでも硬化性エポキシ樹脂、硬化剤及びこれに各
種添加剤を配合したエポキシ樹脂組成物は、一般に他の
熱硬化性樹脂に比べ成形性、接着性、電気特性、機械的
特性、耐湿性等に優れているため、エポキシ樹脂組成物
で半導体装置を封止することが多く行なわれている。
.・ Bi (°shi ゛ and two tllll
Currently, resin-encapsulated diodes, transistors, ICs, LSIs, and VLSIs are the mainstream in the semiconductor industry, and in particular, curable epoxy resins, curing agents, and epoxy resins containing various additives are used. Semiconductor devices are often encapsulated with epoxy resin compositions because the compositions generally have better moldability, adhesiveness, electrical properties, mechanical properties, moisture resistance, etc. than other thermosetting resins. It is.

これら半導体装置は最近ではその集積度が益々大きくな
り、それに応じてチップ寸法も大きくなりつつあるが、
一方、これに対してパッケージ外形寸法は、電子機器の
小型化、軽量化の要求に伴い小型化、薄型化が進んでい
る。更に、半導体部品を回路基板へ取付ける方法におい
ても基板上の部品の高密度化や基板の薄型化のため、半
導体部品の表面実装がよく行なわれるようになってきた
Recently, the degree of integration of these semiconductor devices has been increasing, and the chip size has also been increasing accordingly.
On the other hand, package external dimensions are becoming smaller and thinner due to the demand for smaller and lighter electronic devices. Furthermore, in the method of attaching semiconductor components to a circuit board, surface mounting of semiconductor components has become common due to the higher density of components on the board and the thinner board.

しかしながら、半導体装置を回路基板へ表面実装する場
合、半導体装置全体を半田槽に浸漬するか、又は半田が
溶融する高温ゾーンを通過させる方法が一般的であるが
、その際の熱衝撃により封止樹脂層にクラックが発生し
たり、リードフレームやチップと封止樹脂との界面に剥
離が生じたりするという問題があった。このようなりラ
ックや剥離は、表面実装時の熱衝撃以前に半導体装置の
封止樹脂層が吸湿していると更に顕著なものとなるが、
実際の作業工程S:おいては、封止樹脂層の吸湿は避け
られず、このため実装後のエポキシ樹脂で封止した半導
体装置の信顛性が大きく損なわれる場合があった。
However, when surface mounting a semiconductor device onto a circuit board, it is common to immerse the entire semiconductor device in a solder bath or pass it through a high-temperature zone where the solder melts, but the thermal shock caused by this process results in sealing. There were problems such as cracks occurring in the resin layer and peeling occurring at the interface between the lead frame or chip and the sealing resin. Such racking and peeling become more noticeable if the encapsulation resin layer of the semiconductor device absorbs moisture before the thermal shock during surface mounting.
In the actual work step S:, moisture absorption in the sealing resin layer is unavoidable, and as a result, the reliability of the semiconductor device sealed with the epoxy resin after mounting may be greatly impaired.

従って、回路基板へ表面実装後に高い信転性の半導体装
置を与え得る高品質の半導体装置封止用エポキシ樹脂組
成物の開発が望まれていた。
Therefore, it has been desired to develop a high-quality epoxy resin composition for encapsulating a semiconductor device that can provide a semiconductor device with high reliability after surface mounting on a circuit board.

本発明は上記事情に鑑みなされたもので、流動性が良好
である上、高いガラス転移温度を有し、膨張係数が小さ
く、低応力性で接着性、低吸湿性に優れた硬化物を与え
るエポキシ樹脂組成物、及び、このエポキシ樹脂組成物
の硬化物で封止された表面実装時の熱衝撃後においても
高い信転性を有する半導体装置を提供することを目的と
する。
The present invention was developed in view of the above circumstances, and provides a cured product that has good fluidity, a high glass transition temperature, a small coefficient of expansion, low stress, and excellent adhesiveness and low moisture absorption. An object of the present invention is to provide an epoxy resin composition and a semiconductor device sealed with a cured product of the epoxy resin composition that has high reliability even after thermal shock during surface mounting.

t   ”° るための   び 本発明者は上記目的を達成するため鋭意検討を重ねた結
果、(a)一分子中にエポキシ基を少なくとも2個有す
るエポキシ樹脂と、(b)下記一般式(I) (但し、式中Rは水素原子、ハロゲン原子又は炭素数1
〜5の1価炭化水素基であり、nは0〜5の整数である
。) で示されるエポキシ樹脂とを重量比で(a)/(b)=
0〜95/1oo〜5の割合で混合シタエポキシ樹脂と
、硬化触媒としてのフェノール樹脂とを含有し、かつ、
上記ユポキシ樹D (a )及び/又はフェノール樹脂
の一部又は全部が置換又は非置換のナフタレン環を一分
子中に少なくとも1個有するものであるエポキシ樹脂組
成物が、流動性が良好であると共に、膨張係数が小さく
接着性に優れ、ガラス転移温度以上の温度領域で弾性率
が低下するなどの特徴を有する低応力性に優れた硬化物
を与えること、しがも、従来の低弾性率化の手法で得ら
れるエポキシ樹脂組成物はガラス転移温度の低下や樹脂
強度不足などの欠点を合わせ持っているものであったが
、上記エポキシ樹脂組成物は低弾性率でありながらガラ
ス転移温度の低下がない上、低吸湿性であるなど、従来
のエポキシ樹脂組成物では得られなかった優れた特性を
有する硬化物を与えることを知見した。また、がかる硬
化物で封止された半導体装置は表面実装時の熱衝撃後に
おいても高い信顧性を有し、このため上記エポキシ樹脂
組成物はSOP型、SOJ型。
In order to achieve the above object, the inventors of the present invention have made extensive studies to achieve the above object, and have found that (a) an epoxy resin having at least two epoxy groups in one molecule, and (b) a compound of the following general formula (I ) (However, in the formula, R is a hydrogen atom, a halogen atom, or a carbon number 1
-5 monovalent hydrocarbon group, n is an integer of 0-5. ) and the epoxy resin shown in the weight ratio (a)/(b)=
Contains a mixed epoxy resin and a phenol resin as a curing catalyst in a ratio of 0 to 95/1oo to 5, and
An epoxy resin composition in which part or all of the above yupoxy tree D (a) and/or phenol resin has at least one substituted or unsubstituted naphthalene ring in one molecule has good fluidity and To provide a cured product with excellent low stress properties, which has characteristics such as a small expansion coefficient, excellent adhesiveness, and a decrease in elastic modulus in the temperature range above the glass transition temperature. The epoxy resin composition obtained by this method had drawbacks such as a lower glass transition temperature and insufficient resin strength, but the above epoxy resin composition has a lower glass transition temperature while having a low elastic modulus. The inventors have discovered that this method provides a cured product that has excellent properties that are not available with conventional epoxy resin compositions, such as no moisture absorption and low hygroscopicity. In addition, a semiconductor device sealed with such a cured product has high reliability even after thermal shock during surface mounting, and for this reason, the above-mentioned epoxy resin composition is used for SOP type and SOJ type.

PLCC型、フラットパンク型等のいずれの型の半導体
装置の封止にも使用でき、特に表面実装用半導体装置の
封止材として非常に優れた特性を有していることを知見
し、本発明をなすに至った。
It was discovered that it can be used for encapsulating any type of semiconductor device such as PLCC type or flat punk type, and has very excellent properties as a encapsulating material for surface-mounted semiconductor devices in particular, and the present invention I came to do this.

従って、本発明は、 (1)(a)一分子中にエポキシ基を少なくとも2個有
するエポキシ樹脂と、(b)上記一般式(1)で示され
るエポキシ樹脂とを重量比で(a)/ (b)=O〜9
5/100〜5の割合で混合したエポキシ樹脂、及び (2)フェノール樹脂 を含有し、かつ、前記エポキシ樹脂(a)及び/又はフ
ェノール樹脂の一部又は全部が置換又は非置換のナフタ
レン環を一分子中に少なくとも1個有するものであるエ
ポキシ樹脂組成物、及び、このエポキシ樹脂組成物の硬
化物で封止された半導体装置を提供する。− 以下、本発明につき更に詳述する。
Therefore, the present invention provides (1) (a) an epoxy resin having at least two epoxy groups in one molecule, and (b) an epoxy resin represented by the above general formula (1) in a weight ratio of (a)/ (b)=O~9
An epoxy resin mixed in a ratio of 5/100 to 5, and (2) a phenol resin, and a part or all of the epoxy resin (a) and/or the phenol resin has a substituted or unsubstituted naphthalene ring. Provided are an epoxy resin composition having at least one epoxy resin in one molecule, and a semiconductor device sealed with a cured product of the epoxy resin composition. - The present invention will be explained in more detail below.

本発明のエポキシ樹脂組成物は、第一必須成分のエポキ
シ樹脂として(a)一分子中にエポキシ基を少なくとも
2個有するエポキシ樹脂と、(b)上記(1)式で示さ
れるエポキシ樹脂とを特定割合で配合する。
The epoxy resin composition of the present invention comprises (a) an epoxy resin having at least two epoxy groups in one molecule, and (b) an epoxy resin represented by the above formula (1) as the first essential epoxy resin. Mix in specific proportions.

ここで、(a)成分のエポキシ樹脂としては、一分子中
にエポキシ基を少なくとも2個有するものなら現在市販
されているいかなるものも使用可能であるが、特に一分
子中に置換又は非置換のナフタレン環を少なくとも1個
有するエポキシ樹脂を使用することか好ましい。このよ
うなナフタレン環を有するエポキシ樹脂を用いることに
より、膨張係数が小さく、高ガラス転移温度で、ガラス
転移温度以上の温度領域で低弾性であり、かつ、低吸湿
性の硬化物を得ることができる。
Here, as the epoxy resin of component (a), any currently commercially available epoxy resin having at least two epoxy groups in one molecule can be used, but in particular, substituted or unsubstituted epoxy resins in one molecule can be used. It is preferable to use an epoxy resin having at least one naphthalene ring. By using such an epoxy resin having a naphthalene ring, it is possible to obtain a cured product that has a small expansion coefficient, a high glass transition temperature, low elasticity in a temperature range above the glass transition temperature, and low hygroscopicity. can.

このようなエポキシ樹脂として具体的には、下記構造の
化合物を挙げることができる。
Specific examples of such epoxy resins include compounds having the following structures.

G (上記式中、R1は水素原子又は炭素数1〜5のを示し
、mはl又は2であり、k、I、nはそれぞれ2以上の
整数である。) 更に、上述したナフタレン環を有するエボキシ樹脂と共
に、必要に応じて例えば、ビスフェノールA型エボキン
樹脂、フェノールノボラック型エポキシ樹脂、アリルフ
ェノールノボラック型エポキシ樹脂等のグリシジルエー
テル型エポキシ樹脂、トリフエノールアルカン型エポキ
シ樹脂及びその重合物、ビフェニル型エポキシ樹脂、ジ
シクロペンタジェン型エポキシ樹脂、フェノールアラル
キル型エポキシ樹脂、グリシジルエステル型エポキシ樹
脂、脂環式エポキシ樹脂、複素環型エポキシ樹脂、ハロ
ゲン化エポキシ樹脂等のエポキシ樹脂などを併用するこ
とができる。
G (In the above formula, R1 represents a hydrogen atom or a carbon number of 1 to 5, m is l or 2, and k, I, and n are each an integer of 2 or more.) Furthermore, the above-mentioned naphthalene ring In addition to the epoxy resin, if necessary, for example, glycidyl ether type epoxy resin such as bisphenol A type evoquine resin, phenol novolac type epoxy resin, allylphenol novolac type epoxy resin, triphenolalkane type epoxy resin and its polymer, biphenyl type. Epoxy resins such as epoxy resin, dicyclopentadiene type epoxy resin, phenol aralkyl type epoxy resin, glycidyl ester type epoxy resin, alicyclic epoxy resin, heterocyclic type epoxy resin, halogenated epoxy resin, etc. can be used together. .

また、(b)成分のエポキシ樹脂は、下記一般式(1) %式% この場合、(1)式中の置換基Rは水素原子、ハロゲン
原子(例えば塩素原子、臭素原子、フッ素原子等)又は
炭素数1〜5の1価炭化水素基(例えばメチル基、エチ
ル基、プロピル基、ブチル基2ペンチル基等)であり、
nは0〜5の整数である。
In addition, the epoxy resin of component (b) has the following general formula (1)% formula% In this case, the substituent R in formula (1) is a hydrogen atom, a halogen atom (for example, a chlorine atom, a bromine atom, a fluorine atom, etc.) or a monovalent hydrocarbon group having 1 to 5 carbon atoms (for example, methyl group, ethyl group, propyl group, butyl group, dipentyl group, etc.),
n is an integer from 0 to 5.

このような(1)式のエポキシ樹脂として具体的には、
下記構造の化合物を挙げることができる。
Specifically, as such an epoxy resin of formula (1),
Compounds having the following structures can be mentioned.

(上記式中、nl−0〜5.nz =O〜5゜n、+n
、=O〜5である。) 本発明では、第一必須成分として上述した(a)成分の
エポキシ樹脂と(b)成分の(I)式で示されるエポキ
シ樹脂とを重量比で(a)/(b)が0〜95/100
〜5、好ましくは1〜95/99〜5、特に30〜90
/70〜1oの割合となるように配合する。従って、こ
のようにエポキシ樹脂として(b)成分の(1)式のエ
ポキシ樹脂のみを使用することもできるが、(a)成分
と(b)成分とを混合して使用することにより、接着性
に優れ、ガラス転移温度が高く、かつ、ガラス転移温度
以下でも可とう性を持った硬化物を与えるエポキシ樹脂
組成物を得ることができるものである。なお、上記割合
より(b)成分が少なくなると硬化物の接着性、表面実
装時の耐クラツク性また実装後の耐湿性など、半導体装
置としての信軌性に期待される効果が得られない場合が
ある。
(In the above formula, nl-0~5.nz =O~5゜n, +n
, =O~5. ) In the present invention, the epoxy resin of the component (a) described above as the first essential component and the epoxy resin represented by the formula (I) of the component (b) are used in a weight ratio of (a)/(b) of 0 to 95. /100
~5, preferably 1-95/99-5, especially 30-90
/70 to 1o. Therefore, although it is possible to use only the epoxy resin of the formula (1) of the component (b) as the epoxy resin, it is possible to use a mixture of the components (a) and (b) to improve the adhesive properties. It is possible to obtain an epoxy resin composition that has excellent properties, a high glass transition temperature, and provides a cured product that has flexibility even below the glass transition temperature. Note that if the content of component (b) is less than the above ratio, the expected effects on the reliability of the semiconductor device, such as the adhesiveness of the cured product, crack resistance during surface mounting, and moisture resistance after mounting, may not be obtained. There is.

次に、第二必須成分のフェノール樹脂は、エポキシ樹脂
の硬化剤として作用するもので、例えばノボラック型フ
ェノール樹脂、レゾール型フェノール樹脂、フェノール
アラルキル樹脂、トリフエノールアルカン型樹脂や、こ
れらの重合物などが挙げられるが、本発明では特に第二
必須成分として、一分子中に置換又は非置換のナフタレ
ン環を少なくとも1個有するフェノール樹脂を使用する
ことが好ましい。
Next, the second essential component, phenolic resin, acts as a curing agent for epoxy resins, such as novolac type phenolic resin, resol type phenolic resin, phenol aralkyl resin, triphenol alkane type resin, and polymers thereof. However, in the present invention, it is particularly preferable to use a phenol resin having at least one substituted or unsubstituted naphthalene ring in one molecule as the second essential component.

ここで、ナフタレン環を有するフェノール樹脂としては
、具体的ムこ下記構造の化合物を例示することができる
Here, specific examples of the phenol resin having a naphthalene ring include compounds having the following structures.

i・、    R・、 ′ j+8 H (但し、R’ 、に、1.mはそれぞれ前記と同じ意味
を示し、pは1以上の整数である。)なお、上記ナフタ
レン環を有するフェノール樹脂は、第二必須成分のフェ
ノール樹脂の一部分として配合しても、あるいは全部と
してもよい。
i・, R・, ′ j+8 H (However, R′, 1, m each have the same meaning as above, and p is an integer of 1 or more.) The above phenol resin having a naphthalene ring is It may be blended as a part of the phenolic resin, which is the second essential component, or may be blended in its entirety.

なおまた、本発明の組成物には、上記フェノール樹脂に
加え、その他の硬化剤としてジアミノジフェニルメタン
、ジアミノジフェニルスルホン。
Furthermore, in addition to the above-mentioned phenol resin, the composition of the present invention contains diaminodiphenylmethane and diaminodiphenylsulfone as other curing agents.

メタフェニレンジアミン等に代表されるアミン系硬化剤
、無水フタル酸、無水ピロメリア)酸、無水ベンゾフェ
ノンテトラカルボン酸等の酸無水物硬化剤などを本発明
の効果を妨げない範囲で併用することもできる。
Amine curing agents typified by metaphenylene diamine, acid anhydride curing agents such as phthalic anhydride, pyromeria anhydride, benzophenone tetracarboxylic anhydride, etc. can also be used in combination within the range that does not impede the effects of the present invention. .

而して、本発明のエポキシ樹脂組成物は、必須成分とし
て上述したエポキシ樹脂とフェノール樹脂とを含有する
ものであるが、上記(a)成分のエポキシ樹脂及び/又
はフェノール樹脂の一部又は全部が置換又は非置換のナ
フタレン環を一分子中に少なくとも1個有するものであ
ることが必要である。
Therefore, the epoxy resin composition of the present invention contains the above-mentioned epoxy resin and phenol resin as essential components, but part or all of the epoxy resin and/or phenol resin as component (a) above. must have at least one substituted or unsubstituted naphthalene ring in one molecule.

この場合、(a)成分のエポキシ樹脂及び硬化剤として
のフェノール樹脂中におけるナフタレン環の含有量は5
〜80重量%、特に10〜60重量%の範囲とすること
が好ましい。ナフタレン環の含有量が10重量%未満で
あると硬化物の低吸湿化、また、ガラス転移温度以上の
温度領域での低弾性率効果が顕著でないため、吸湿後の
熱衝撃時の耐クラツク性が十分改善されないことがある
In this case, the content of naphthalene rings in the epoxy resin as component (a) and the phenol resin as a curing agent is 5
The range is preferably from 10 to 60% by weight, particularly from 10 to 60% by weight. If the naphthalene ring content is less than 10% by weight, the cured product will have low moisture absorption, and the effect of lowering the elastic modulus in the temperature range above the glass transition temperature will not be noticeable, resulting in poor crack resistance during thermal shock after moisture absorption. may not be improved sufficiently.

またナフタレン環の含有量が80重量%を超えると、製
造時の分散性あるいは成形性などにおいて不利になる場
合がある。
Furthermore, if the naphthalene ring content exceeds 80% by weight, it may be disadvantageous in terms of dispersibility or moldability during production.

また、本発明では、組成物中に含まれるエポキノ基の量
(Aモル)とフェノール性水酸基の量(Bモル)との割
合(A/B)が0,5〜1.5、特に0.8〜1.2の
範囲にあるようにエポキシ樹脂とフェノール樹脂とを配
合することが好ましく、A/Bが上記範囲外となると硬
化性、低応力性において不利になる場合がある。
Further, in the present invention, the ratio (A/B) between the amount of epochino groups (A mol) and the amount of phenolic hydroxyl groups (B mol) contained in the composition is 0.5 to 1.5, particularly 0.5 to 1.5. It is preferable to mix the epoxy resin and phenol resin so that the ratio is in the range of 8 to 1.2, and if A/B is outside the above range, it may be disadvantageous in terms of curability and low stress properties.

本発明のエポキシ樹脂組成物には、無機質充填剤を配合
することが好ましい。
It is preferable to mix an inorganic filler into the epoxy resin composition of the present invention.

ここで、無機質充填剤としては、通常エポキシ樹脂組成
物に配合されるものを使用し得、例えば溶融シリカ、結
晶シリカ等のシリカ類、アルミナ、カーボンブラ、り、
マイカ、クレー、カオリン、ガラスピーズ、ガラス繊維
、AffiN、5iC1亜鉛華、三酸化アンチモン、炭
化力ルノウム、水酸化アルミニウム、Bed、ポロンナ
イトライド、酸化チタン、炭化ケイ素、酸化鉄等を挙げ
ることができる。これら無機質充填剤はその1種を単独
で使用でき、また2種以上を併用するようにしてもよく
、その配合量は特に制限されないが、第一成分のエポキ
シ樹脂と第二成分のフェノール樹脂との合計量100部
(重量部、以下間し)に対して100〜1000部、特
に200〜700部の範囲とすることが好ましい。
Here, as the inorganic filler, those usually blended into epoxy resin compositions can be used, such as silicas such as fused silica and crystalline silica, alumina, carbon bra, silica, etc.
Examples include mica, clay, kaolin, glass peas, glass fiber, AffiN, 5iC1 zinc white, antimony trioxide, lunoium carbide, aluminum hydroxide, Bed, poron nitride, titanium oxide, silicon carbide, iron oxide, etc. . One type of these inorganic fillers can be used alone, or two or more types can be used in combination.The blending amount is not particularly limited, but the epoxy resin as the first component and the phenol resin as the second component can be used in combination. It is preferably in the range of 100 to 1000 parts, particularly 200 to 700 parts, based on 100 parts (parts by weight, hereinafter) of the total amount.

更に、本発明の組成物には、硬化触媒を配合することが
できる。
Furthermore, a curing catalyst can be added to the composition of the present invention.

硬化触媒としては、例えば1.8−ジアザビシクロ(5
,4,O)ウンデセン−7、N、N−ジメチルヘンシル
アミン等の第三アミン化合物、2−フエニルイミダヅー
ル、2−エチル−4−メチルイミダゾール等のイミダゾ
ール化合物、トリフェニルホスフィン等のリン系化合物
などが例示されるが、特に1.8−ジアザビシクロ(5
,4゜0)ウンデセン−7とトリフェニルホスフィンと
を重量比で0:1〜1:l、特に0.01:1〜o、s
:iの割合で混合した併用触媒を使用することが好まし
い。1.8−ジアザビシクロ(5,4゜0)ウンデセン
−7の混合割合が上記範囲外になると、得られる硬化物
のガラス転移温度が低くなる場合がある。
As a curing catalyst, for example, 1,8-diazabicyclo(5
,4,O) Tertiary amine compounds such as undecene-7,N,N-dimethylhensylamine, imidazole compounds such as 2-phenylimidazole and 2-ethyl-4-methylimidazole, and phosphorus such as triphenylphosphine. Examples include 1,8-diazabicyclo(5
, 4゜0) Undecene-7 and triphenylphosphine in a weight ratio of 0:1 to 1:l, especially 0.01:1 to o,s
It is preferable to use a combined catalyst mixed in a ratio of :i. If the mixing ratio of 1,8-diazabicyclo(5,4°0)undecene-7 is outside the above range, the glass transition temperature of the resulting cured product may become low.

また、硬化触媒の添加量は特に制限されないが、上記併
用触媒を使用する場合は、第一成分のエポキシ樹脂と第
二成分のフェノール樹脂の合計量100部に対して0.
2〜2部、特に0.4〜1.2部とすることが望ましい
Further, the amount of the curing catalyst added is not particularly limited, but when using the above-mentioned combined catalyst, 0.00 parts per 100 parts of the total amount of the epoxy resin as the first component and the phenol resin as the second component.
It is desirable to use 2 to 2 parts, particularly 0.4 to 1.2 parts.

本発明の組成物には、上述の必須成分に加え、更に必要
によりその他の任意成分として各種の添加剤を配合する
ことができる。任意成分としては、例えば熱可塑性樹脂
、熱可塑性エラストマー、有機合成ゴム、シリコーン系
等の低応力剤、カルナバワックス等のワンラス類、ステ
アリン酸などの脂肪酸及びその金属塩等の離型剤、カー
ボンブラック、コバルトブルー、ヘンガラ等の顔料、酸
化アンチモン、ハロゲン化合物等の難燃化剤、表面処理
剤(T−グリシドキシプロビルトリメトキンシラン等)
、エボキンンラン、ビニルシラン、はう素化合物、アル
キルチタネート等のカップリング剤、老化防止剤、その
他の添加剤の1種又は2種以上を配合することができる
In addition to the above-mentioned essential components, the composition of the present invention may further contain various additives as other optional components, if necessary. Optional ingredients include, for example, thermoplastic resins, thermoplastic elastomers, organic synthetic rubbers, low stress agents such as silicone, one laths such as carnauba wax, mold release agents such as fatty acids such as stearic acid and their metal salts, and carbon black. , cobalt blue, pigments such as Hengara, antimony oxide, flame retardants such as halogen compounds, surface treatment agents (T-glycidoxypropyltrimethquinsilane, etc.)
, Evokinran, vinyl silane, boronate compounds, coupling agents such as alkyl titanates, anti-aging agents, and other additives.One or more types of additives may be blended.

なお、これら添加剤の配合量は、本発明の効果を妨げな
い範囲で通常量とすることができる。
Incidentally, the amount of these additives to be blended can be a normal amount within a range that does not impede the effects of the present invention.

本発明のエポキシ樹脂組成物は、その製造に際し上述し
た成分の所定量を均一に攪拌、混合し、予め70〜95
°Cに加熱しであるニーダ、ロール、エクストルーダー
などにより混練、冷却し、粉砕するなどの方法で得るこ
とができる。ここで、成分の配合順序に特に制限はない
The epoxy resin composition of the present invention is manufactured by uniformly stirring and mixing the above-mentioned components in predetermined amounts, and preliminarily preparing the epoxy resin composition with a 70 to 90%
It can be obtained by heating to °C, kneading with a kneader, roll, extruder, etc., cooling, and pulverizing. Here, there is no particular restriction on the order of blending the components.

このようにして得られる本発明のエポキシ樹脂組成物は
SOP型、SOJ型、PLCC型、フラットパック型等
の半導体装置の封止用に有効に使用でき、この場合、成
形は従来より採用されている成形法、例えばトランスフ
ァ成形、インジェクション成形、注型法などを採用して
行なうことができる。なお、本発明のエポキシ樹脂組成
物の成形温度は150〜180°C、ポストキュアーは
150〜180°Cで2〜16時間行なうことが望まし
い。
The epoxy resin composition of the present invention thus obtained can be effectively used for sealing semiconductor devices such as SOP type, SOJ type, PLCC type, flat pack type, etc. In this case, molding is conventionally employed. This can be carried out by employing various molding methods such as transfer molding, injection molding, and casting. The epoxy resin composition of the present invention is desirably molded at a temperature of 150 to 180°C, and post-cured at 150 to 180°C for 2 to 16 hours.

発悪R壽伽果 以上説明したように、本発明のエポキシ樹脂組成物は、
上述した成分の組合せとしたことにより、流動性が良好
であると共に、低弾性率で膨張係数が小さく、低応力で
ありながらガラス転移温度が高く、しかも低吸湿性で接
着性に優れた硬化物を与えるものであり、このため本発
明のエポキシ樹脂組成物の硬化物で封止された半導体装
置は表面実装時の熱衝撃後においても高い信転性を有す
るものである。
As explained above, the epoxy resin composition of the present invention
By combining the above-mentioned components, a cured product with good fluidity, low elastic modulus, small expansion coefficient, low stress, high glass transition temperature, low hygroscopicity, and excellent adhesiveness. Therefore, a semiconductor device sealed with a cured product of the epoxy resin composition of the present invention has high reliability even after thermal shock during surface mounting.

以下、実施例及び比較例を挙げて本発明を具体的に説明
するが、本発明は下記実施列に制限されるものではない
EXAMPLES Hereinafter, the present invention will be specifically explained with reference to Examples and Comparative Examples, but the present invention is not limited to the following examples.

なお、以下の例において部はいずれも重量部である。In addition, in the following examples, all parts are parts by weight.

〔実施例1〜8、比較例1.2〕 第1表に示す組成に加え、二酸化アンチモン10部、T
−グリシトキノプロビルトリメトキノノラン1.5部、
カーボンブランク10部、トリフェニルホス74706
8部、溶融−・リカ500部を添加し、得られた配合物
を熱二木ロールで均一に溶融混合して10種のエポキシ
樹脂組成物を得た。
[Examples 1 to 8, Comparative Example 1.2] In addition to the composition shown in Table 1, 10 parts of antimony dioxide, T
- 1.5 parts of glycytoquinoprobil trimethoquinonolane,
10 parts carbon blank, triphenylphos 74706
8 parts and 500 parts of molten liquor were added thereto, and the resulting mixture was uniformly melt-mixed using a thermonikki roll to obtain 10 types of epoxy resin compositions.

これらのエポキシ樹脂組成物ムこついて、以下の(イ)
〜(ホ)の諸特性を測定した。結果を第1表に示す。
When these epoxy resin compositions become sticky, the following (a)
The various characteristics of ~(e) were measured. The results are shown in Table 1.

(イ)スf/」Qし乙二二 EMM I規格に準した金型を使用して175 ’C2
70kg/cnの条件で測定した。
(A) 175'C2 using a mold that complies with the EMM I standard.
Measurement was performed under the condition of 70 kg/cn.

(ロ)機械的強度(曲げ強度、曲げ弾性率)JISK6
911に準じて175°C170kg/all、成形時
間2分の条件で10X100X4++oの抗析棒を成形
し、180°Cで4時間ポストキュアーしたものについ
て測定した。
(b) Mechanical strength (bending strength, bending modulus) JISK6
911, a 10×100×4++o anti-deflection rod was molded under the conditions of 175° C., 170 kg/all, and molding time of 2 minutes, and was post-cured at 180° C. for 4 hours.

(ハ)ガラス転移温度、膨張係数 175°C110kg/ci、成形時間2分の条件で4
X4X15闘の試験片を成形し、180°Cで4時間ポ
ストキュアーしたものを用い、デイラドメーターにより
毎分5°Cで昇温させることにより測定した。
(c) Glass transition temperature, expansion coefficient 175°C, 110kg/ci, molding time 2 minutes 4
A test piece of X4X15 size was molded and post-cured at 180°C for 4 hours, and the temperature was raised at 5°C per minute using a deiradometer.

(ニ)「゛島″の′ クー・り  び ご175°C1
70kg/CTA、成形時間2分の条件でアルミニウム
配線腐食測定用の耐湿性試験用半導体装置を厚さ21!
ll11のフラットパッケージに封止し、180 ’C
で4時間ポストキュアーした。このバ。
(d) “Island”’s Ku Libigo 175°C1
Semiconductor device for moisture resistance test for aluminum wiring corrosion measurement under the conditions of 70 kg/CTA and 2 minutes of molding time with a thickness of 21!
Sealed in a ll11 flat package and heated at 180'C.
I post cured it for 4 hours. This bar.

ケージを85°C/85%RHの雰囲気中72時間放置
して吸湿処理を行ったのち、これを260°Cの半田浴
に10秒浸せきした。この時に発生するパンケージのク
ランク発生数を確認したのち、良品のみを120″Cの
飽和水蒸気雰囲気中に500時間放置し、不良発生率を
調べた。
After the cage was left in an atmosphere of 85°C/85% RH for 72 hours to absorb moisture, it was immersed in a solder bath at 260°C for 10 seconds. After confirming the number of pan cage cranks that occurred at this time, only non-defective products were left in a saturated steam atmosphere at 120''C for 500 hours, and the failure rate was investigated.

(ホ)IL性 4270イ板に15圓φ、高さ5mmの円筒成形品を1
75°C175kg/c++1、成形時間2分の条件で
成形し、180°Cで4時間ポストキュアーした後、ブ
ツシュプリゲージで成形物と4270イ板の剥離力を測
定した。
(E) One cylindrical molded product with a diameter of 15 mm and a height of 5 mm is placed on an IL-resistant 4270 plate.
It was molded under the conditions of 75°C, 175kg/c++1, and molding time of 2 minutes, and after post-curing at 180°C for 4 hours, the peel force between the molded product and the 4270 plate was measured using a bush pre-gauge.

洪 遜 ・\ 皆 モ    H MI     PI 第1表の結果より、本発明のエポキシ樹脂組成物(実施
例1〜8)は、流動性が良好である上、膨張係数が小さ
く、低応力でありながらガラス転移温度が高く、しかも
、低吸湿性かつ優れた接着性を有する硬化物を与えるこ
とが確認された。これらに対し、ナフタレン環を有する
エポキシ樹脂又はフェノール樹脂を含有しないエポキシ
樹脂組成物(比較例1,2)は、膨張係数が大きく、ガ
ラス転移温度より高温下での低応力化が不十分で、吸湿
性及び接着性にも劣るものであった。
From the results in Table 1, the epoxy resin compositions of the present invention (Examples 1 to 8) have good fluidity, a small expansion coefficient, and low stress. It was confirmed that the cured product had a high glass transition temperature, low hygroscopicity, and excellent adhesiveness. On the other hand, epoxy resin compositions that do not contain naphthalene ring-containing epoxy resins or phenol resins (Comparative Examples 1 and 2) have large expansion coefficients, and are insufficient to reduce stress at temperatures higher than the glass transition temperature. It was also inferior in hygroscopicity and adhesiveness.

出 願 人 信越化学工業株式会社Applicant: Shin-Etsu Chemical Co., Ltd.

Claims (1)

【特許請求の範囲】 1、(1)(a)一分子中にエポキシ基を少なくとも2
個有するエポキシ樹脂と、(b)下記一般式( I ) ▲数式、化学式、表等があります▼・・・・・・( I
) (但し、式中Rは水素原子、ハロゲン原子又は炭素数1
〜5の1価炭化水素基であり、nは0〜5の整数である
。) で示されるエポキシ樹脂とを重量比で(a)/(b)=
0〜95/100〜5の割合で混合したエポキシ樹脂、
及び (2)フェノール樹脂 を含有し、かつ、前記エポキシ樹脂(a)及び/又はフ
ェノール樹脂の一部又は全部が置換又は非置換のナフタ
レン環を一分子中に少なくとも1個有するものであるこ
とを特徴とするエポキシ樹脂組成物。 2、請求項1記載のエポキシ樹脂組成物の硬化物で封止
された半導体装置。
[Claims] 1. (1) (a) At least two epoxy groups in one molecule
(b) The following general formula (I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼・・・・・・(I
) (However, in the formula, R is a hydrogen atom, a halogen atom, or a carbon number 1
-5 monovalent hydrocarbon group, n is an integer of 0-5. ) and the epoxy resin shown in the weight ratio (a)/(b)=
Epoxy resin mixed in a ratio of 0 to 95/100 to 5,
and (2) contains a phenol resin, and part or all of the epoxy resin (a) and/or the phenol resin has at least one substituted or unsubstituted naphthalene ring in one molecule. Characteristic epoxy resin composition. 2. A semiconductor device sealed with a cured product of the epoxy resin composition according to claim 1.
JP2292715A 1990-10-30 1990-10-30 Epoxy resin composition and semiconductor device Expired - Fee Related JPH082940B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2292715A JPH082940B2 (en) 1990-10-30 1990-10-30 Epoxy resin composition and semiconductor device
DE4135533A DE4135533A1 (en) 1990-10-30 1991-10-28 Epoxide] and phenolic resin mixt. contg. naphthalene rings - to reduce expansion coefft. and water absorption, useful for encapsulating semiconductor
KR1019910019058A KR920008136A (en) 1990-10-30 1991-10-29 Epoxy Resin Compositions and Semiconductor Devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2292715A JPH082940B2 (en) 1990-10-30 1990-10-30 Epoxy resin composition and semiconductor device

Publications (2)

Publication Number Publication Date
JPH04164917A true JPH04164917A (en) 1992-06-10
JPH082940B2 JPH082940B2 (en) 1996-01-17

Family

ID=17785377

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Country Status (3)

Country Link
JP (1) JPH082940B2 (en)
KR (1) KR920008136A (en)
DE (1) DE4135533A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3428699B2 (en) * 1993-09-24 2003-07-22 ジャパンエポキシレジン株式会社 Epoxy resin composition

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04153213A (en) * 1990-10-16 1992-05-26 Sumitomo Bakelite Co Ltd Resin composition

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04153213A (en) * 1990-10-16 1992-05-26 Sumitomo Bakelite Co Ltd Resin composition

Also Published As

Publication number Publication date
KR920008136A (en) 1992-05-27
JPH082940B2 (en) 1996-01-17
DE4135533A1 (en) 1992-05-07

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